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CERAMIC-METAL BONDED BODY
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Publication number 20130093146
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Publication date Apr 18, 2013
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NGK Insulators, Ltd.
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Yasufumi AIHARA
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B32 - LAYERED PRODUCTS
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HEATING APPARATUS
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Publication number 20090159588
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Publication date Jun 25, 2009
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NGK Insulators, Ltd.
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Ikuhisa Morioka
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H01 - BASIC ELECTRIC ELEMENTS
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HEATING DEVICE
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Publication number 20080142501
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Publication date Jun 19, 2008
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NGK Insulators, Ltd.
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Ikuhisa Morioka
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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SUBSTRATE SUPPORTING MEMBER
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Publication number 20080138645
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Publication date Jun 12, 2008
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NGK Insulators, Ltd.
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Tetsuya KAWAJIRI
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H01 - BASIC ELECTRIC ELEMENTS
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ELECTROSTATIC CHUCK
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Publication number 20080062612
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Publication date Mar 13, 2008
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NGK Insulators, Ltd.
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Ikuhisa MORIOKA
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H01 - BASIC ELECTRIC ELEMENTS
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ELECTROSTATIC CHUCK
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Publication number 20070223175
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Publication date Sep 27, 2007
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NGK Insulators, Ltd.
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Ikuhisa Morioka
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H01 - BASIC ELECTRIC ELEMENTS
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Electrostatic chuck
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Publication number 20060279899
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Publication date Dec 14, 2006
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NGK Insulators, Ltd.
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Yasufumi Aihara
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H01 - BASIC ELECTRIC ELEMENTS
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