Yasuhiko Ueda

Person

Minato-ku, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing device
- Patent number 9,209,193
- Issue date Dec 8, 2015
- PS4 Luxco S.A.R.L.
- Yasuhiko Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for manufacturing a semiconductor device
- Patent number 8,877,079
- Issue date Nov 4, 2014
- PS4 Luxco S.A.R.L.
- Yasuhiko Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device with vertical transistor
- Patent number 8,729,626
- Issue date May 20, 2014
- Yu Kosuge
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of manufacturing the same
- Patent number 8,637,364
- Issue date Jan 28, 2014
- Yasuhiko Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device
- Patent number 8,513,809
- Issue date Aug 20, 2013
- Elpida Memory, Inc.
- Yasuhiko Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of manufacturing the same
- Patent number 7,858,508
- Issue date Dec 28, 2010
- Elpida Memory, Inc.
- Hiroyuki Fujimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor apparatus and method for fabricating the same
- Patent number 7,829,418
- Issue date Nov 9, 2010
- Elpida Memory, Inc.
- Yasuhiko Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device including a trench with a curved surface porti...
- Patent number 7,696,569
- Issue date Apr 13, 2010
- Elpida Memory, Inc.
- Hiroyuki Fujimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hard mask technique in forming a plug
- Patent number 7,615,460
- Issue date Nov 10, 2009
- Elpida Memory, Inc.
- Yasuhiko Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for producing semiconductor integrated circuit device
- Patent number 7,589,024
- Issue date Sep 15, 2009
- Elpida Memory, Inc.
- Yasuhiko Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of fabricating the same
- Patent number 6,849,539
- Issue date Feb 1, 2005
- NEC Corporation
- Yasuhiko Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching mask, process for forming contact holes using same, and sem...
- Patent number 6,617,245
- Issue date Sep 9, 2003
- NEC Electronics Corporation
- Yasuhiko Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of removing silicon nitride film formed on a surface of a ma...
- Patent number 6,569,776
- Issue date May 27, 2003
- NEC Electronics Corporation
- Yasuhiko Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry etching method and method of manufacturing semiconductor device
- Patent number 6,562,721
- Issue date May 13, 2003
- NEC Electronics Corporation
- Yasuhiko Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching mask, process for forming contact holes using same, and sem...
- Patent number 6,559,486
- Issue date May 6, 2003
- NEC Electronics Corporation
- Yasuhiko Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process of fabricating semiconductor device having ashing step for...
- Patent number 6,124,213
- Issue date Sep 26, 2000
- NEC Corporation
- Tatsuya Usami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma generating apparatus used for fabrication of semiconductor d...
- Patent number 5,810,932
- Issue date Sep 22, 1998
- NEC Corporation
- Yasuhiko Ueda
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MANUFACTURING DEVICE
- Publication number 20120329236
- Publication date Dec 27, 2012
- Elpida Memory, Inc.
- Yasuhiko Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20120273922
- Publication date Nov 1, 2012
- Elpida Memory, Inc.
- Yasuhiko Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE
- Publication number 20110278654
- Publication date Nov 17, 2011
- Elpida Memory, Inc.
- Yasuhiko Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE
- Publication number 20110108910
- Publication date May 12, 2011
- Elpida Memory, Inc.
- Yu KOSUGE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20100207202
- Publication date Aug 19, 2010
- Elpida Memory, Inc.
- Yasuhiko Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20090258469
- Publication date Oct 15, 2009
- Elpida Memory, Inc.
- Yasuhiko Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20090163007
- Publication date Jun 25, 2009
- Elpida Memory, Inc.
- Yasuhiko UEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor apparatus and method for fabricating the same
- Publication number 20080303086
- Publication date Dec 11, 2008
- Elpida Memory, Inc.
- Yasuhiko Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for manufacturing a semiconductor device
- Publication number 20080227225
- Publication date Sep 18, 2008
- Elpida Memory, Inc.
- Yasuhiko Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PRODUCING A SEMICONDUCTOR DEVICE
- Publication number 20080153304
- Publication date Jun 26, 2008
- Elpida Memory, Inc.
- Yasuhiko Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor device manufacturing method
- Publication number 20080087950
- Publication date Apr 17, 2008
- ELPIDA MEMORY INC.
- Yasuhiko Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor device and method of manufacturing the same
- Publication number 20080073709
- Publication date Mar 27, 2008
- Elpida Memory, Inc.
- Hiroyuki Fujimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor device and method of manufacturing the same
- Publication number 20070224763
- Publication date Sep 27, 2007
- Elpida Memory, Inc.
- Hiroyuki Fujimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Process for producing semiconductor integrated circuit device
- Publication number 20070111373
- Publication date May 17, 2007
- Elpida Memory, Inc.
- Yasuhiko Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor device having high-density contact holes with oval pl...
- Publication number 20070075433
- Publication date Apr 5, 2007
- Elpida Memory, Inc.
- Yasuhiko Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for manufacturing a semiconductor device having a hard mask...
- Publication number 20060255386
- Publication date Nov 16, 2006
- Elpida Memory, Inc.
- Yasuhiko Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of removing silicon nitride film
- Publication number 20020155726
- Publication date Oct 24, 2002
- NEC CORPORATION, HITACHI LTD.
- Yasuhiko Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor device and method of fabricating the same
- Publication number 20020155699
- Publication date Oct 24, 2002
- NEC CORPORATION, HITACHI, LTD.
- Yasuhiko Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Etching mask, process for forming contact holes using same, and sem...
- Publication number 20020115310
- Publication date Aug 22, 2002
- Yasuhiko Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dry etching method and method of manufacturing semiconductor device
- Publication number 20010016422
- Publication date Aug 23, 2001
- NEC Corporation
- Yasuhiko Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Etching mask, process for forming contact holes using same, and sem...
- Publication number 20010002731
- Publication date Jun 7, 2001
- Yasuhiko Ueda
- H01 - BASIC ELECTRIC ELEMENTS

Yasuhiko Ueda

Person

Patents Grantslast 30 patents

Method of manufacturing device

Method and apparatus for manufacturing a semiconductor device

Semiconductor device with vertical transistor

Semiconductor device and method of manufacturing the same

Semiconductor device

Semiconductor device and method of manufacturing the same

Semiconductor apparatus and method for fabricating the same

Semiconductor device including a trench with a curved surface porti...

Hard mask technique in forming a plug

Process for producing semiconductor integrated circuit device

Semiconductor device and method of fabricating the same

Etching mask, process for forming contact holes using same, and sem...

Method of removing silicon nitride film formed on a surface of a ma...

Dry etching method and method of manufacturing semiconductor device

Etching mask, process for forming contact holes using same, and sem...

Process of fabricating semiconductor device having ashing step for...

Plasma generating apparatus used for fabrication of semiconductor d...

Patents Applicationslast 30 patents

METHOD OF MANUFACTURING DEVICE

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

Semiconductor apparatus and method for fabricating the same

Method and apparatus for manufacturing a semiconductor device

METHOD OF PRODUCING A SEMICONDUCTOR DEVICE

Semiconductor device manufacturing method

Semiconductor device and method of manufacturing the same

Semiconductor device and method of manufacturing the same

Process for producing semiconductor integrated circuit device

Semiconductor device having high-density contact holes with oval pl...

Method for manufacturing a semiconductor device having a hard mask...

Method of removing silicon nitride film

Semiconductor device and method of fabricating the same

Etching mask, process for forming contact holes using same, and sem...

Dry etching method and method of manufacturing semiconductor device

Etching mask, process for forming contact holes using same, and sem...