Ying-Hsueh CHANGCHIEN

Person

Hsinchu City, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor devices employing a barrier layer
- Patent number 11,264,321
- Issue date Mar 1, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ying-Hsueh Chang Chien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor devices employing a barrier layer
- Patent number 10,510,655
- Issue date Dec 17, 2019
- Taiwan Semiconductor Manufacturing Company
- Ying-Hsueh Chang Chien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for particle cleaning
- Patent number 10,507,498
- Issue date Dec 17, 2019
- Taiwan Semiconductor Manufacturing Company Ltd.
- Ying-Hsueh Chang Chien
- B24 - GRINDING POLISHING
Information Patent Grant
Method of selectively removing silicon nitride and single wafer etc...
- Patent number 10,269,591
- Issue date Apr 23, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ying-Hsueh Changchien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and process of electro-chemical plating
- Patent number 10,011,918
- Issue date Jul 3, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ying-Hsueh Changchien
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Method of selectively removing silicon nitride and etching apparatu...
- Patent number 9,799,530
- Issue date Oct 24, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ying-Hsueh Changchien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for movable megasonic wafer probe
- Patent number 9,764,364
- Issue date Sep 19, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ying-Hsueh Chang Chien
- B08 - CLEANING
Information Patent Grant
Hard mask removal scheme
- Patent number 9,754,796
- Issue date Sep 5, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ying-Hsueh Changchien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating an integrated circuit device
- Patent number 9,564,509
- Issue date Feb 7, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ming-Hsi Yeh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hard mask removal scheme
- Patent number 9,287,133
- Issue date Mar 15, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ying-Hsueh Changchien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating an integrated circuit device
- Patent number 8,921,177
- Issue date Dec 30, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ming-Hsi Yeh
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
Semiconductor Devices Employing a Barrier Layer
- Publication number 20200066633
- Publication date Feb 27, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ying-Hsueh Chang Chien
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
APPARATUS FOR PARTICLE CLEANING
- Publication number 20170361361
- Publication date Dec 21, 2017
- Taiwan Semiconductor Manufacturing company Ltd.
- YING-HSUEH CHANG CHIEN
- B08 - CLEANING
Information Patent Application
APPARATUS AND PROCESS OF ELECTRO-CHEMICAL PLATING
- Publication number 20160177467
- Publication date Jun 23, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ying-Hsueh CHANGCHIEN
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
HARD MASK REMOVAL SCHEME
- Publication number 20160155646
- Publication date Jun 2, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ying-Hsueh CHANGCHIEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HARD MASK REMOVAL SCHEME
- Publication number 20150255303
- Publication date Sep 10, 2015
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ying-Hsueh CHANGCHIEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FABRICATING AN INTEGRATED CIRCUIT DEVICE
- Publication number 20150118807
- Publication date Apr 30, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ming-Hsi YEH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and Methods for Movable Megasonic Wafer Probe
- Publication number 20150107634
- Publication date Apr 23, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ying-Hsueh Chang Chien
- B08 - CLEANING
Information Patent Application
METHOD OF SELECTIVELY REMOVING SILICON NITRIDE AND ETCHING APPARATU...
- Publication number 20150111311
- Publication date Apr 23, 2015
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ying-Hsueh CHANGCHIEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF SELECTIVELY REMOVING SILICON NITRIDE AND SINGLE WAFER ETC...
- Publication number 20150111390
- Publication date Apr 23, 2015
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ying-Hsueh CHANGCHIEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FABRICATING AN INTEGRATED CIRCUIT DEVICE
- Publication number 20130023094
- Publication date Jan 24, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ming-Hsi YEH
- H01 - BASIC ELECTRIC ELEMENTS

Ying-Hsueh CHANGCHIEN

Person

Patents Grantslast 30 patents

Semiconductor devices employing a barrier layer

Semiconductor devices employing a barrier layer

Apparatus for particle cleaning

Method of selectively removing silicon nitride and single wafer etc...

Apparatus and process of electro-chemical plating

Method of selectively removing silicon nitride and etching apparatu...

Apparatus and methods for movable megasonic wafer probe

Hard mask removal scheme

Method of fabricating an integrated circuit device

Hard mask removal scheme

Method of fabricating an integrated circuit device

Patents Applicationslast 30 patents

Semiconductor Devices Employing a Barrier Layer

APPARATUS FOR PARTICLE CLEANING

APPARATUS AND PROCESS OF ELECTRO-CHEMICAL PLATING

HARD MASK REMOVAL SCHEME

HARD MASK REMOVAL SCHEME

METHOD OF FABRICATING AN INTEGRATED CIRCUIT DEVICE

Apparatus and Methods for Movable Megasonic Wafer Probe

METHOD OF SELECTIVELY REMOVING SILICON NITRIDE AND ETCHING APPARATU...

METHOD OF SELECTIVELY REMOVING SILICON NITRIDE AND SINGLE WAFER ETC...

METHOD OF FABRICATING AN INTEGRATED CIRCUIT DEVICE