Yixing Lin

Person

Saratoga, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
High throughput and metal contamination control oven for chamber co...
- Patent number 11,898,245
- Issue date Feb 13, 2024
- Applied Materials, Inc.
- Chien-Min Liao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support cover for high-temperature corrosive environment
- Patent number 11,866,821
- Issue date Jan 9, 2024
- Applied Materials, Inc.
- Shuran Sheng
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Protective yttria coating for semiconductor equipment parts
- Patent number 11,047,035
- Issue date Jun 29, 2021
- Applied Materials, Inc.
- Ramesh Gopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
30 nm in-line LPC testing and cleaning of semiconductor processing...
- Patent number 10,583,465
- Issue date Mar 10, 2020
- Applied Materials, Inc.
- Jianqi Wang
- B08 - CLEANING
Information Patent Grant
Method for forming yttrium oxide on semiconductor processing equipment
- Patent number 10,253,406
- Issue date Apr 9, 2019
- Applied Materials, Inc.
- Laksheswar Kalita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Aluminum electroplating and oxide formation as barrier layer for al...
- Patent number 10,233,554
- Issue date Mar 19, 2019
- Applied Materials, Inc.
- Yogita Pareek
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Process chamber component with layered coating and method
- Patent number 8,021,743
- Issue date Sep 20, 2011
- Applied Materials, Inc.
- Yixing Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning and refurbishing chamber components having metal coatings
- Patent number 7,910,218
- Issue date Mar 22, 2011
- Applied Materials, Inc.
- Yixing Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process chamber component with layered coating and method
- Patent number 7,579,067
- Issue date Aug 25, 2009
- Applied Materials, Inc.
- Yixing Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing apparatus including plasma-resistant, weld...
- Patent number 7,055,732
- Issue date Jun 6, 2006
- Applied Materials, Inc.
- Senh Thach
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Halogen-resistant, anodized aluminum for use in semiconductor proce...
- Patent number 7,048,814
- Issue date May 23, 2006
- Applied Materials, Inc.
- Yixing Lin
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Halogen-resistant, anodized aluminum for use in semiconductor proce...
- Patent number 7,033,447
- Issue date Apr 25, 2006
- Applied Materials, Inc.
- Yixing Lin
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Yttrium oxide based surface coating for semiconductor IC processing...
- Patent number 6,776,873
- Issue date Aug 17, 2004
- Jennifer Y Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Clean aluminum alloy for semiconductor processing equipment
- Patent number 6,713,188
- Issue date Mar 30, 2004
- Applied Materials, Inc.
- Shun Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma-resistant, welded aluminum structures for use in semiconduct...
- Patent number 6,659,331
- Issue date Dec 9, 2003
- Applied Materials, Inc.
- Senh Thach
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Clean aluminum alloy for semiconductor processing equipment
- Patent number 6,565,984
- Issue date May 20, 2003
- Applied Materials Inc.
- Shun Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
HIGH THROUGHPUT AND METAL CONTAMINATION CONTROL OVEN FOR CHAMBER CO...
- Publication number 20220275505
- Publication date Sep 1, 2022
- Chien-Min LIAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT COVER FOR HIGH-TEMPERATURE CORROSIVE ENVIRONMENT
- Publication number 20200370174
- Publication date Nov 26, 2020
- Applied Materials, Inc.
- Shuran SHENG
- C01 - INORGANIC CHEMISTRY
Information Patent Application
PROTECTIVE YTTRIA COATING FOR SEMICONDUCTOR EQUIPMENT PARTS
- Publication number 20190264314
- Publication date Aug 29, 2019
- Ramesh Gopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
30 NM IN-LINE LPC TESTING AND CLEANING OF SEMICONDUCTOR PROCESSING...
- Publication number 20170299487
- Publication date Oct 19, 2017
- Applied Materials, Inc.
- Jianqi WANG
- B08 - CLEANING
Information Patent Application
ALUMINUM ELECTROPLATING AND OXIDE FORMATION AS BARRIER LAYER FOR AL...
- Publication number 20170260639
- Publication date Sep 14, 2017
- Applied Materials, Inc.
- Yogita PAREEK
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD FOR ELECTROCHEMICALLY GROWN YTTRIA OR YTTRIUM OXIDE ON SEMIC...
- Publication number 20170260618
- Publication date Sep 14, 2017
- Applied Materials, Inc.
- Laksheswar KALITA
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
PROCESS CHAMBER COMPONENT WITH LAYERED COATING AND METHOD
- Publication number 20100086805
- Publication date Apr 8, 2010
- Applied Materials, Inc.
- Yixing Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of coating semiconductor processing apparatus with protectiv...
- Publication number 20080213496
- Publication date Sep 4, 2008
- APPLIED MATERIALS, INC.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Process chamber component with layered coating and method
- Publication number 20060110620
- Publication date May 25, 2006
- APPLIED MATERIALS, INC.
- Yixing Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Refurbishment of a coated chamber component
- Publication number 20050238807
- Publication date Oct 27, 2005
- APPLIED MATERIALS, INC.
- Yixing Lin
- B08 - CLEANING
Information Patent Application
Cleaning and refurbishing chamber components having metal coatings
- Publication number 20050089699
- Publication date Apr 28, 2005
- APPLIED MATERIALS, INC.
- Yixing Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor processing apparatus including plasma-resistant, weld...
- Publication number 20040041004
- Publication date Mar 4, 2004
- Applied Materials, Inc.
- Senh Thach
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
CLEAN ALUMINUM ALLOY FOR SEMICONDUCTOR PROCESSING EQUIPMENT
- Publication number 20030224188
- Publication date Dec 4, 2003
- Shun Wu
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Halogen-resistant, anodized aluminium for use in semiconductor proc...
- Publication number 20030205479
- Publication date Nov 6, 2003
- Yixing Lin
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Laser drilled surfaces for substrate processing chambers
- Publication number 20030188685
- Publication date Oct 9, 2003
- APPLIED MATERIALS, INC.
- Hong Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Plasma-resistant, welded aluminum structures for use in semiconduct...
- Publication number 20030160085
- Publication date Aug 28, 2003
- APPLIED MATERIALS, INC.
- Senh Thach
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Halogen-resistant, anodized aluminum for use in semiconductor proce...
- Publication number 20030150530
- Publication date Aug 14, 2003
- APPLIED MATERIALS, INC.
- Yixing Lin
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Person

Patents Grantslast 30 patents

High throughput and metal contamination control oven for chamber co...

Substrate support cover for high-temperature corrosive environment

Protective yttria coating for semiconductor equipment parts

30 nm in-line LPC testing and cleaning of semiconductor processing...

Method for forming yttrium oxide on semiconductor processing equipment

Aluminum electroplating and oxide formation as barrier layer for al...

Process chamber component with layered coating and method

Cleaning and refurbishing chamber components having metal coatings

Process chamber component with layered coating and method

Semiconductor processing apparatus including plasma-resistant, weld...

Halogen-resistant, anodized aluminum for use in semiconductor proce...

Halogen-resistant, anodized aluminum for use in semiconductor proce...

Yttrium oxide based surface coating for semiconductor IC processing...

Clean aluminum alloy for semiconductor processing equipment

Plasma-resistant, welded aluminum structures for use in semiconduct...

Clean aluminum alloy for semiconductor processing equipment

Patents Applicationslast 30 patents

HIGH THROUGHPUT AND METAL CONTAMINATION CONTROL OVEN FOR CHAMBER CO...

SUBSTRATE SUPPORT COVER FOR HIGH-TEMPERATURE CORROSIVE ENVIRONMENT

PROTECTIVE YTTRIA COATING FOR SEMICONDUCTOR EQUIPMENT PARTS

30 NM IN-LINE LPC TESTING AND CLEANING OF SEMICONDUCTOR PROCESSING...

ALUMINUM ELECTROPLATING AND OXIDE FORMATION AS BARRIER LAYER FOR AL...

METHOD FOR ELECTROCHEMICALLY GROWN YTTRIA OR YTTRIUM OXIDE ON SEMIC...

PROCESS CHAMBER COMPONENT WITH LAYERED COATING AND METHOD

Method of coating semiconductor processing apparatus with protectiv...

Process chamber component with layered coating and method

Refurbishment of a coated chamber component

Cleaning and refurbishing chamber components having metal coatings

Semiconductor processing apparatus including plasma-resistant, weld...

CLEAN ALUMINUM ALLOY FOR SEMICONDUCTOR PROCESSING EQUIPMENT

Halogen-resistant, anodized aluminium for use in semiconductor proc...

Laser drilled surfaces for substrate processing chambers

Plasma-resistant, welded aluminum structures for use in semiconduct...

Halogen-resistant, anodized aluminum for use in semiconductor proce...