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Kumage-cho, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Vacuum processing apparatus and semiconductor manufacturing line us...
Patent number
7,347,656
Issue date
Mar 25, 2008
Hitachi, Ltd.
Minoru Soraoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing apparatus and semiconductor manufacturing line us...
Patent number
7,201,551
Issue date
Apr 10, 2007
Hitachi, Ltd.
Minoru Soraoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for processing samples
Patent number
7,132,293
Issue date
Nov 7, 2006
Hitachi, Ltd.
Yoshimi Torii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for processing samples
Patent number
6,989,228
Issue date
Jan 24, 2006
Hitachi, Ltd.
Masayuki Kojima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing apparatus and semiconductor manufacturing line us...
Patent number
6,962,472
Issue date
Nov 8, 2005
Hitachi, Ltd.
Minoru Soraoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing apparatus and semiconductor manufacturing line us...
Patent number
6,895,685
Issue date
May 24, 2005
Hitachi, Ltd.
Minoru Soraoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor integrated circuit device, process for fabricating th...
Patent number
6,894,334
Issue date
May 17, 2005
Hitachi, Ltd.
Jun Sugiura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing apparatus and semiconductor manufacturing line us...
Patent number
6,752,580
Issue date
Jun 22, 2004
Hitachi, Ltd.
Minoru Soraoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing apparatus and semiconductor manufacturing line us...
Patent number
6,752,579
Issue date
Jun 22, 2004
Hitachi, Ltd.
Minoru Soraoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing apparatus and semiconductor manufacturing line us...
Patent number
6,705,828
Issue date
Mar 16, 2004
Hitachi, Ltd.
Minoru Soraoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing apparatus and semiconductor manufacturing line us...
Patent number
6,672,819
Issue date
Jan 6, 2004
Hitachi, Ltd.
Minoru Soraoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE HAVING A FIRST WIRING STRIP...
Patent number
6,548,847
Issue date
Apr 15, 2003
Hitachi, Ltd.
Jun Sugiura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for processing samples
Patent number
6,537,415
Issue date
Mar 25, 2003
Hitachi, Ltd.
Masayuki Kojima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus for processing samples
Patent number
6,537,417
Issue date
Mar 25, 2003
Hitachi, Ltd.
Masayuki Kojima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vacuum processing apparatus and semiconductor manufacturing line us...
Patent number
6,526,330
Issue date
Feb 25, 2003
Hitachi, Ltd.
Minoru Soraoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing apparatus and semiconductor manufacturing line us...
Patent number
6,519,504
Issue date
Feb 11, 2003
Hitachi, Ltd.
Minoru Soraoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing apparatus and semiconductor manufacturing line us...
Patent number
6,430,469
Issue date
Aug 6, 2002
Hitachi, Ltd.
Minoru Soraoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor integrated circuit device, process for fabricating th...
Patent number
6,342,412
Issue date
Jan 29, 2002
Hitachi, Ltd.
Jun Sugiura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for processing samples
Patent number
6,254,721
Issue date
Jul 3, 2001
Hitachi, Ltd.
Masayuki Kojima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vacuum processing apparatus and semiconductor manufacturing line us...
Patent number
6,253,117
Issue date
Jun 26, 2001
Hitachi, Ltd.
Minoru Soraoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing apparatus and semiconductor manufacturing line us...
Patent number
6,188,935
Issue date
Feb 13, 2001
Hitachi, Ltd.
Minoru Soraoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor integrated circuit device, process for fabricating th...
Patent number
6,169,324
Issue date
Jan 2, 2001
Hitachi, Ltd.
Jun Sugiura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Plasma etching method and apparatus
Patent number
6,165,377
Issue date
Dec 26, 2000
Hitachi, Ltd.
Hironobu Kawahara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor integrated circuit device, process for fabricating th...
Patent number
6,127,255
Issue date
Oct 3, 2000
Hitachi, Ltd.
Jun Sugiura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for processing samples
Patent number
6,077,788
Issue date
Jun 20, 2000
Hitachi, Ltd.
Yoshinao Kawasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus having insulator disposed on inner surf...
Patent number
6,046,425
Issue date
Apr 4, 2000
Hitachi, Ltd.
Tetsunori Kaji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for processing a sample having a metal laminate
Patent number
6,036,816
Issue date
Mar 14, 2000
Hitachi, Ltd.
Masayuki Kojima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for processing samples
Patent number
5,952,245
Issue date
Sep 14, 1999
Hitachi, Ltd.
Yoshimi Torii
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Microwave plasma processing method and apparatus
Patent number
5,914,051
Issue date
Jun 22, 1999
Hitachi, Ltd.
Saburo Kanai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etching method and apparatus
Patent number
5,900,162
Issue date
May 4, 1999
Hitachi, Ltd.
Hironobu Kawahara
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Vacuum Processing Apparatus And Semiconductor Manufacturing Line Us...
Publication number
20090220322
Publication date
Sep 3, 2009
Minoru Soraoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for processing samples
Publication number
20070037292
Publication date
Feb 15, 2007
Masayuki Kojima
G01 - MEASURING TESTING
Information
Patent Application
Vacuum processing apparatus and semiconductor manufacturing line us...
Publication number
20050175435
Publication date
Aug 11, 2005
Minoru Soraoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for processing samples
Publication number
20040219687
Publication date
Nov 4, 2004
Yoshimi Torii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vacuum processing apparatus and semiconductor manufacturing line us...
Publication number
20040197169
Publication date
Oct 7, 2004
Minoru Soraoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vacuum processing apparatus and semiconductor manufacturing line us...
Publication number
20040118005
Publication date
Jun 24, 2004
Minoru Soraoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor integrated circuit device, process for fabricating th...
Publication number
20030189255
Publication date
Oct 9, 2003
Jun Sugiura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Vacuum processing apparatus and semiconductor manufacturing line us...
Publication number
20020099469
Publication date
Jul 25, 2002
Minoru Soraoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vacuum processing apparatus and semiconductor manufacturing line us...
Publication number
20020091465
Publication date
Jul 11, 2002
Minoru Soraoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vacuum processing apparatus and semiconductor manufacturing line us...
Publication number
20020082744
Publication date
Jun 27, 2002
Minoru Soraoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vacuum processing apparatus and semiconductor manafacturing line us...
Publication number
20020068982
Publication date
Jun 6, 2002
Minoru Soraoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vacuum processing apparatus and semiconductor manufacturing line us...
Publication number
20020062165
Publication date
May 23, 2002
Minoru Soraoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vacuum processing apparatus and semiconductor manufacturing line us...
Publication number
20020062166
Publication date
May 23, 2002
Minoru Soraoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vacuum processing apparatus and semiconductor manufacturing line us...
Publication number
20020061244
Publication date
May 23, 2002
Minoru Soraoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus for processing samples
Publication number
20020043339
Publication date
Apr 18, 2002
Masayuki Kojima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Apparatus for processing samples
Publication number
20020043340
Publication date
Apr 18, 2002
Masayuki Kojima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Vacuum processing apparatus and semiconductor manufacturing line us...
Publication number
20020028131
Publication date
Mar 7, 2002
Minoru Soraoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus for processing samples
Publication number
20020023720
Publication date
Feb 28, 2002
Masayuki Kojima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Semiconductor integrated circuit device, process for fabricating th...
Publication number
20020017669
Publication date
Feb 14, 2002
Jun Sugiura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for processing samples
Publication number
20020013063
Publication date
Jan 31, 2002
Masayuki Kojima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vaccum processing apparatus and semiconductor manufacturing line us...
Publication number
20010025207
Publication date
Sep 27, 2001
Minoru Soraoka
H01 - BASIC ELECTRIC ELEMENTS