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Dry etching method
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Patent number 5,785,877
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Issue date Jul 28, 1998
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Nippon Telegraph & Telephone Corporation
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Masaaki Sato
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Apparatus for growing a thin metallic film
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Patent number 5,462,014
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Issue date Oct 31, 1995
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Nippon Telegraph & Telephone Corporation
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Nobuyoshi Awaya
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Process for growing a thin metallic film
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Patent number 5,316,796
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Issue date May 31, 1994
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Nippon Telegraph & Telephone Corporation
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Nobuyoshi Awaya
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Tin thin film formation method
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Patent number 5,080,927
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Issue date Jan 14, 1992
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Nippon Telegraph and Telephone Corp.
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Koichi Ikeda
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Plasma etching apparatus
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Patent number 4,963,242
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Issue date Oct 16, 1990
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Nippon Telegraph & Telephone Corporation
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Masaaki Sato
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H01 - BASIC ELECTRIC ELEMENTS
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