Number | Date | Country | Kind |
---|---|---|---|
63-124006 | May 1988 | JPX | |
63-326063 | Dec 1988 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
2704728 | Pawlyk | Mar 1955 | |
2760261 | Pawlyk et al. | Aug 1956 | |
2833676 | Heibel et al. | May 1958 | |
3356527 | Moshier et al. | Dec 1967 | |
3697342 | Cuomo | Oct 1972 | |
3697343 | Cuomo et al. | Oct 1972 |
Number | Date | Country |
---|---|---|
135179 | Mar 1985 | EPX |
0260516 | Mar 1988 | EPX |
0297348 | Jan 1989 | EPX |
1330720 | Sep 1973 | GBX |
2156336 | Oct 1985 | GBX |
Entry |
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S. Wolf et al., Silicon Processing for the VLSI Era, Lattice Press, Sunset Beach, (1986), pp. 169, 187-191. |