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Yoshio Fukasawa
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Kofu, JP
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last 30 patents
Information
Patent Grant
Plasma processing apparatus
Patent number
6,074,518
Issue date
Jun 13, 2000
Tokyo Electron Limited
Kosuke Imafuku
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method and plasma etching method
Patent number
5,716,534
Issue date
Feb 10, 1998
Tokyo Electron Limited
Hiroshi Tsuchiya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum process apparatus and vacuum processing method
Patent number
5,611,655
Issue date
Mar 18, 1997
Tokyo Electron Limited
Yoshio Fukasawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Etching method for silicon containing layer
Patent number
5,560,804
Issue date
Oct 1, 1996
Tokyo Electron Limited
Fumihiko Higuchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dry etching polysilicon using a bromine-containing gas
Patent number
5,314,573
Issue date
May 24, 1994
Tokyo Electron Limited
Fumihiko Higuchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method
Patent number
5,246,529
Issue date
Sep 21, 1993
Tokyo Electron Limited
Yoshio Fukasawa
H01 - BASIC ELECTRIC ELEMENTS