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Yoshitaka Mukaiyama
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Paddle, processing apparatus having the paddle, and method of produ...
Patent number
11,891,715
Issue date
Feb 6, 2024
Ebara Corporation
Yasuyuki Masuda
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Plating apparatus and plating method
Patent number
11,047,063
Issue date
Jun 29, 2021
Ebara Corporation
Jumpei Fujikata
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Substrate holder and plating apparatus
Patent number
11,015,261
Issue date
May 25, 2021
Ebara Corporation
Yoshitaka Mukaiyama
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Substrate attachment/detachment device, plating device, control dev...
Patent number
10,665,495
Issue date
May 26, 2020
Ebara Corporation
Toshio Yokoyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plating apparatus and plating method
Patent number
10,577,714
Issue date
Mar 3, 2020
Ebara Corporation
Yoshitaka Mukaiyama
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Plating apparatus and plating method
Patent number
10,294,578
Issue date
May 21, 2019
Ebara Corporation
Jumpei Fujikata
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Semiconductor wafer holder and electroplating system for plating a...
Patent number
9,714,476
Issue date
Jul 25, 2017
Ebara Corporation
Junichiro Yoshioka
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Semiconductor wafer holder and electroplating system for plating a...
Patent number
8,961,755
Issue date
Feb 24, 2015
Ebara Corporation
Junichiro Yoshioka
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Semiconductor wafer holder and electroplating system for plating a...
Patent number
8,075,756
Issue date
Dec 13, 2011
Ebara Corporation
Junichiro Yoshioka
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Plating apparatus and method
Patent number
8,012,332
Issue date
Sep 6, 2011
Ebara Corporation
Junichiro Yoshioka
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Semiconductor wafer holder and electroplating system for plating a...
Patent number
7,833,393
Issue date
Nov 16, 2010
Ebara Corporation
Junichiro Yoshioka
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Plating apparatus and method
Patent number
7,402,227
Issue date
Jul 22, 2008
Ebara Corporation
Junichiro Yoshioka
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Semiconductor wafer holder and electroplating system for plating a...
Patent number
7,022,211
Issue date
Apr 4, 2006
Ebara Corporation
Junichiro Yoshioka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plating apparatus for detecting the conductivity between plating co...
Patent number
6,500,317
Issue date
Dec 31, 2002
Ebara Corporation
Junichiro Yoshioka
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
BUFFER CHAMBER AND AM SYSTEM INCLUDING A BUFFER CHAMBER
Publication number
20240001448
Publication date
Jan 4, 2024
EBARA CORPORATION
Hiroyuki SHINOZAKI
B22 - CASTING POWDER METALLURGY
Information
Patent Application
PADDLE, PROCESSING APPARATUS HAVING THE PADDLE, AND METHOD OF PRODU...
Publication number
20210262111
Publication date
Aug 26, 2021
EBARA CORPORATION
Yasuyuki Masuda
B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information
Patent Application
SUBSTRATE-HOLDER INSPECTION APPARATUS, PLATING APPARATUS INCLUDING...
Publication number
20200255968
Publication date
Aug 13, 2020
EBARA CORPORATION
Yoshitaka MUKAIYAMA
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
PLATING APPARATUS AND PLATING METHOD
Publication number
20190226114
Publication date
Jul 25, 2019
EBARA CORPORATION
Jumpei FUJIKATA
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
SUBSTRATE HOLDER AND PLATING APPARATUS
Publication number
20190084777
Publication date
Mar 21, 2019
EBARA CORPORATION
Yoshitaka MUKAIYAMA
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Application
SUBSTRATE ATTACHMENT/DETACHMENT DEVICE, PLATING DEVICE, CONTROL DEV...
Publication number
20180182659
Publication date
Jun 28, 2018
EBARA CORPORATION
Toshio YOKOYAMA
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
PLATING APPARATUS AND PLATING METHOD
Publication number
20170298531
Publication date
Oct 19, 2017
EBARA CORPORATION
Yoshitaka MUKAIYAMA
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
APPARATUS AND METHOD FOR SUPPLYING PLATING SOLUTION TO PLATING TANK...
Publication number
20170226656
Publication date
Aug 10, 2017
EBARA CORPORATION
Chunhui DOU
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
PLATING APPARATUS AND PLATING METHOD
Publication number
20160145760
Publication date
May 26, 2016
EBARA CORPORATION
Jumpei FUJIKATA
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
METHOD OF OPERATING AN ELECTROLESS PLATING APPARATUS
Publication number
20160130702
Publication date
May 12, 2016
EBARA CORPORATION
Yoichi NAKAGAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR WAFER HOLDER AND ELECTROPLATING SYSTEM FOR PLATING A...
Publication number
20150122635
Publication date
May 7, 2015
EBARA CORPORATION
Junichiro YOSHIOKA
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
WET PROCESSING APPARATUS AND PLATING APPARATUS
Publication number
20150013905
Publication date
Jan 15, 2015
EBARA CORPORATION
Yoichi NAKAGAWA
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
SEMICONDUCTOR WAFER HOLDER AND ELECTROPLATING SYSTEM FOR PLATING A...
Publication number
20120048727
Publication date
Mar 1, 2012
Junichiro Yoshioka
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
SEMICONDUCTOR WAFER HOLDER AND ELECTROPLATING SYSTEM FOR PLATING A...
Publication number
20110036722
Publication date
Feb 17, 2011
Junichiro Yoshioka
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
PLATING APPARATUS AND METHOD
Publication number
20080245669
Publication date
Oct 9, 2008
Junichiro Yoshioka
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Semiconductor wafer holder and electroplating system for plating a...
Publication number
20060151317
Publication date
Jul 13, 2006
Junichiro Yoshioka
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Plating apparatus and method
Publication number
20050082163
Publication date
Apr 21, 2005
Junichiro Yoshioka
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Electrolytic solution supply and recovery facility and liquid compo...
Publication number
20040256221
Publication date
Dec 23, 2004
Koji Mishima
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Semiconductor wafer holder and electroplating system for plating a...
Publication number
20020029963
Publication date
Mar 14, 2002
Junichiro Yoshioka
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Plating apparatus and method
Publication number
20020027080
Publication date
Mar 7, 2002
Junichiro Yoshioka
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR