Yu Ishii

Person

Kanagawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing control system, substrate processing control m...
- Patent number 12,036,634
- Issue date Jul 16, 2024
- Ebara Corporation
- Koichi Takeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Top ring for holding a substrate and substrate processing apparatus
- Patent number 11,701,750
- Issue date Jul 18, 2023
- Ebara Corporation
- Yu Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing method and polishing apparatus
- Patent number 11,618,123
- Issue date Apr 4, 2023
- EBARA CORPORATION
- Yu Ishii
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing head and polishing apparatus
- Patent number 11,511,389
- Issue date Nov 29, 2022
- Ebara Corporation
- Kenichi Akazawa
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical mechanical polishing apparatus for polishing workpiece
- Patent number 11,446,784
- Issue date Sep 20, 2022
- Ebara Corporation
- Yu Ishii
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus and storage medium having program st...
- Patent number 11,436,392
- Issue date Sep 6, 2022
- Ebara Corporation
- Yu Ishii
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,192,147
- Issue date Dec 7, 2021
- Ebara Corporation
- Yu Ishii
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,180,853
- Issue date Nov 23, 2021
- Ebara Corporation
- Yu Ishii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for processing a surface of a substrate
- Patent number 11,139,160
- Issue date Oct 5, 2021
- Ebara Corporation
- Yu Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for polishing a substrate, and method for proc...
- Patent number 10,926,376
- Issue date Feb 23, 2021
- Ebara Corporation
- Masayuki Nakanishi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method, polishing apparatus, and substrate processing system
- Patent number 10,854,473
- Issue date Dec 1, 2020
- Ebara Corporation
- Yu Ishii
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,799,917
- Issue date Oct 13, 2020
- Ebara Corporation
- Yu Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for cleaning a back surface of a substrate
- Patent number 10,651,057
- Issue date May 12, 2020
- Ebara Corporation
- Kenichi Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,458,020
- Issue date Oct 29, 2019
- Ebara Corporation
- Yu Ishii
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus and method for polishing a surface of a substrate
- Patent number 10,376,929
- Issue date Aug 13, 2019
- Ebara Corporation
- Yu Ishii
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,328,465
- Issue date Jun 25, 2019
- Ebara Corporation
- Yu Ishii
- B08 - CLEANING
Information Patent Grant
Pad holder for polishing apparatus
- Patent number D845568
- Issue date Apr 9, 2019
- Ebara Corporation
- Yu Ishii
- D32 - Washing, cleaning, or drying machine
Information Patent Grant
Abrasive film fabrication method and abrasive film
- Patent number 10,016,875
- Issue date Jul 10, 2018
- Ebara Corporation
- Yu Ishii
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing pad and chemical mechanical polishing apparatus for polis...
- Patent number 9,821,429
- Issue date Nov 21, 2017
- Ebara Corporation
- Yu Ishii
- B24 - GRINDING POLISHING
Information Patent Grant
Method of polishing back surface of substrate and substrate process...
- Patent number 9,808,903
- Issue date Nov 7, 2017
- Ebara Corporation
- Yu Ishii
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus
- Patent number 9,808,836
- Issue date Nov 7, 2017
- Ebara Corporation
- Tetsuji Togawa
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus
- Patent number 9,566,616
- Issue date Feb 14, 2017
- Ebara Corporation
- Tetsuji Togawa
- B08 - CLEANING
Information Patent Grant
Work holder for polishing apparatus
- Patent number D777546
- Issue date Jan 31, 2017
- Ebara Corporation
- Yu Ishii
- D08 - Tools and hardware
Information Patent Grant
Polishing method
- Patent number 9,492,910
- Issue date Nov 15, 2016
- Ebara Corporation
- Yu Ishii
- B24 - GRINDING POLISHING
Information Patent Grant
Abrasive film fabrication method and abrasive film
- Patent number 9,393,595
- Issue date Jul 19, 2016
- Ebara Corporation
- Yu Ishii
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing method
- Patent number 9,067,296
- Issue date Jun 30, 2015
- Ebara Corporation
- Katsutoshi Ono
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 8,360,817
- Issue date Jan 29, 2013
- Ebara Corporation
- Yu Ishii
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for heating or cooling a polishing surface of a polishing...
- Patent number 7,837,534
- Issue date Nov 23, 2010
- Ebara Corporation
- Shunichi Aiyoshizawa
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for polishing a substrate
- Patent number 7,291,057
- Issue date Nov 6, 2007
- Ebara Corporation
- Norio Kimura
- B24 - GRINDING POLISHING
Information Patent Grant
Method for polishing a substrate
- Patent number 6,609,950
- Issue date Aug 26, 2003
- Ebara Corporation
- Norio Kimura
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING CONTROL SYSTEM, SUBSTRATE PROCESSING CONTROL M...
- Publication number 20240316720
- Publication date Sep 26, 2024
- EBARA CORPORATION
- Koichi TAKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RETAINER, TOP RING, AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240001506
- Publication date Jan 4, 2024
- EBARA CORPORATION
- Yu ISHII
- B24 - GRINDING POLISHING
Information Patent Application
TOP RING FOR HOLDING A SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230249313
- Publication date Aug 10, 2023
- EBARA CORPORATION
- Yu Ishii
- B24 - GRINDING POLISHING
Information Patent Application
FILM THICKNESS MEASUREMENT APPARATUS, POLISHING APPARATUS, AND FILM...
- Publication number 20210354262
- Publication date Nov 18, 2021
- EBARA CORPORATION
- Hirotaka Satori
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING METHOD AND POLISHING APPARATUS
- Publication number 20210170541
- Publication date Jun 10, 2021
- EBARA CORPORATION
- Yu Ishii
- B24 - GRINDING POLISHING
Information Patent Application
TOP RING FOR HOLDING A SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210170543
- Publication date Jun 10, 2021
- EBARA CORPORATION
- Yu Ishii
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING HEAD AND POLISHING APPARATUS
- Publication number 20200094371
- Publication date Mar 26, 2020
- EBARA CORPORATION
- Kenichi Akazawa
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190390335
- Publication date Dec 26, 2019
- EBARA CORPORATION
- Yu ISHII
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190262870
- Publication date Aug 29, 2019
- EBARA CORPORATION
- Yu Ishii
- B08 - CLEANING
Information Patent Application
CHEMICAL MECHANICAL POLISHING APPARATUS FOR POLISHING WORKPIECE
- Publication number 20190262968
- Publication date Aug 29, 2019
- EBARA CORPORATION
- Yu ISHII
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190262869
- Publication date Aug 29, 2019
- EBARA CORPORATION
- Yu Ishii
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING CONTROL SYSTEM, SUBSTRATE PROCESSING CONTROL M...
- Publication number 20190240799
- Publication date Aug 8, 2019
- EBARA CORPORATION
- Koichi TAKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20190184517
- Publication date Jun 20, 2019
- EBARA CORPORATION
- Yu ISHII
- B24 - GRINDING POLISHING
Information Patent Application
APPARATUS AND METHOD FOR PROCESSING A SURFACE OF A SUBSTRATE
- Publication number 20190148125
- Publication date May 16, 2019
- EBARA CORPORATION
- Yu ISHII
- B24 - GRINDING POLISHING
Information Patent Application
METHOD AND APPARATUS FOR POLISHING A SUBSTRATE, AND METHOD FOR PROC...
- Publication number 20190054594
- Publication date Feb 21, 2019
- EBARA CORPORATION
- Masayuki NAKANISHI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND STORAGE MEDIUM HAVING PROGRAM ST...
- Publication number 20180336301
- Publication date Nov 22, 2018
- EBARA CORPORATION
- Yu ISHII
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
APPARATUS AND METHOD FOR CLEANING A BACK SURFACE OF A SUBSTRATE
- Publication number 20180315622
- Publication date Nov 1, 2018
- EBARA CORPORATION
- Kenichi KOBAYASHI
- B08 - CLEANING
Information Patent Application
POLISHING METHOD, POLISHING APPARATUS, AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20180254196
- Publication date Sep 6, 2018
- EBARA CORPORATION
- Yu ISHII
- B24 - GRINDING POLISHING
Information Patent Application
APPARATUS AND METHOD FOR POLISHING A SURFACE OF A SUBSTRATE
- Publication number 20180015508
- Publication date Jan 18, 2018
- EBARA CORPORATION
- Yu ISHII
- B08 - CLEANING
Information Patent Application
CHEMICAL MECHANICAL POLISHING APPARATUS FOR POLISHING WORKPIECE
- Publication number 20170312880
- Publication date Nov 2, 2017
- EBARA CORPORATION
- Yu ISHII
- B24 - GRINDING POLISHING
Information Patent Application
ABRASIVE FILM FABRICATION METHOD AND ABRASIVE FILM
- Publication number 20160318155
- Publication date Nov 3, 2016
- EBARA CORPORATION
- Yu ISHII
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20160305022
- Publication date Oct 20, 2016
- EBARA CORPORATION
- Yu ISHII
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POLISHING METHOD
- Publication number 20160052107
- Publication date Feb 25, 2016
- EBARA CORPORATION
- Yu ISHII
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150000055
- Publication date Jan 1, 2015
- EBARA CORPORATION
- Tetsuji TOGAWA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150000056
- Publication date Jan 1, 2015
- EBARA CORPORATION
- Tetsuji TOGAWA
- B08 - CLEANING
Information Patent Application
METHOD OF POLISHING BACK SURFACE OF SUBSTRATE AND SUBSTRATE PROCESS...
- Publication number 20140220866
- Publication date Aug 7, 2014
- Yu ISHII
- B24 - GRINDING POLISHING
Information Patent Application
ABRASIVE FILM FABRICATION METHOD AND ABRASIVE FILM
- Publication number 20140030962
- Publication date Jan 30, 2014
- EBARA CORPORATION
- Yu ISHII
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
POLISHING PAD AND CHEMICAL MECHANICAL POLISHING APPARATUS FOR POLIS...
- Publication number 20140004772
- Publication date Jan 2, 2014
- EBARA CORPORATION
- Yu ISHII
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20130213437
- Publication date Aug 22, 2013
- Kabushiki Kaisha Toshiba
- Yu Ishii
- B08 - CLEANING
Information Patent Application
POLISHING METHOD
- Publication number 20120276816
- Publication date Nov 1, 2012
- Katsutoshi Ono
- B24 - GRINDING POLISHING

Person

Patents Grantslast 30 patents

Substrate processing control system, substrate processing control m...

Top ring for holding a substrate and substrate processing apparatus

Polishing method and polishing apparatus

Polishing head and polishing apparatus

Chemical mechanical polishing apparatus for polishing workpiece

Substrate processing apparatus and storage medium having program st...

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Apparatus and method for processing a surface of a substrate

Method and apparatus for polishing a substrate, and method for proc...

Polishing method, polishing apparatus, and substrate processing system

Substrate processing apparatus and substrate processing method

Apparatus and method for cleaning a back surface of a substrate

Substrate processing apparatus and substrate processing method

Apparatus and method for polishing a surface of a substrate

Substrate processing apparatus and substrate processing method

Pad holder for polishing apparatus

Abrasive film fabrication method and abrasive film

Polishing pad and chemical mechanical polishing apparatus for polis...

Method of polishing back surface of substrate and substrate process...

Substrate processing apparatus

Substrate processing apparatus

Work holder for polishing apparatus

Polishing method

Abrasive film fabrication method and abrasive film

Polishing method

Polishing apparatus and polishing method

Apparatus for heating or cooling a polishing surface of a polishing...

Apparatus for polishing a substrate

Method for polishing a substrate

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING CONTROL SYSTEM, SUBSTRATE PROCESSING CONTROL M...

RETAINER, TOP RING, AND SUBSTRATE PROCESSING APPARATUS

TOP RING FOR HOLDING A SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS

FILM THICKNESS MEASUREMENT APPARATUS, POLISHING APPARATUS, AND FILM...

POLISHING METHOD AND POLISHING APPARATUS

TOP RING FOR HOLDING A SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS

POLISHING HEAD AND POLISHING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

CHEMICAL MECHANICAL POLISHING APPARATUS FOR POLISHING WORKPIECE

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING CONTROL SYSTEM, SUBSTRATE PROCESSING CONTROL M...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

APPARATUS AND METHOD FOR PROCESSING A SURFACE OF A SUBSTRATE

METHOD AND APPARATUS FOR POLISHING A SUBSTRATE, AND METHOD FOR PROC...

SUBSTRATE PROCESSING APPARATUS AND STORAGE MEDIUM HAVING PROGRAM ST...

APPARATUS AND METHOD FOR CLEANING A BACK SURFACE OF A SUBSTRATE

POLISHING METHOD, POLISHING APPARATUS, AND SUBSTRATE PROCESSING SYSTEM

APPARATUS AND METHOD FOR POLISHING A SURFACE OF A SUBSTRATE

CHEMICAL MECHANICAL POLISHING APPARATUS FOR POLISHING WORKPIECE

ABRASIVE FILM FABRICATION METHOD AND ABRASIVE FILM

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

POLISHING METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

METHOD OF POLISHING BACK SURFACE OF SUBSTRATE AND SUBSTRATE PROCESS...

ABRASIVE FILM FABRICATION METHOD AND ABRASIVE FILM

POLISHING PAD AND CHEMICAL MECHANICAL POLISHING APPARATUS FOR POLIS...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

POLISHING METHOD