Yuh-Da Fan

Person

Shin Chu City, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Trench isolation with conductive structures
- Patent number 12,033,900
- Issue date Jul 9, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chandrashekhar Prakash Savant
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor devices and semiconductor dev...
- Patent number 12,020,947
- Issue date Jun 25, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hui-An Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device having a multi-layer diffusion barrier and met...
- Patent number 11,742,393
- Issue date Aug 29, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jyh-nan Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Trench isolation with conductive structures
- Patent number 11,430,700
- Issue date Aug 30, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chandrashekhar Prakash Savant
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method thereof
- Patent number 11,411,108
- Issue date Aug 9, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-Fen Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device having multi-layer diffusion barrier and metho...
- Patent number 11,264,467
- Issue date Mar 1, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jyh-nan Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor devices and semiconductor dev...
- Patent number 11,069,534
- Issue date Jul 20, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hui-An Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device
- Patent number 10,818,790
- Issue date Oct 27, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-Fen Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device having a multi-layer diffusion barrier
- Patent number 10,749,004
- Issue date Aug 18, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jyh-nan Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method thereof
- Patent number 10,319,857
- Issue date Jun 11, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-Fen Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma enhanced atomic layer deposition
- Patent number 10,153,156
- Issue date Dec 11, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun Hsiung Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method thereof
- Patent number 9,812,570
- Issue date Nov 7, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-Fen Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure with interfacial layer and method for manuf...
- Patent number 9,595,593
- Issue date Mar 14, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wei-Fan Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cyclic epitaxial deposition and etch processes
- Patent number 9,564,321
- Issue date Feb 7, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun Hsiung Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for conductive film quality evaluation
- Patent number 7,262,067
- Issue date Aug 28, 2007
- Taiwan Semiconductor Manufacturing Company
- Hsien-Ping Feng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of removing metal etching residues following a metal etchbac...
- Patent number 6,936,544
- Issue date Aug 30, 2005
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yai-Yei Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to calibrate the wafer transfer for oxide etcher (with clamp)
- Patent number 6,531,326
- Issue date Mar 11, 2003
- Taiwan Semiconductor Manufacturing Company
- Ching-Ming Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to calibrate the wafer transfer for oxide etcher (with clamp)
- Patent number 6,303,509
- Issue date Oct 16, 2001
- Taiwan Semiconductor Manufacturing Company
- Ching-Ming Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High selectivity mask oxide etching to suppress silicon pits
- Patent number 6,221,745
- Issue date Apr 24, 2001
- Taiwan Semiconductor Manufacturing Company
- Yuh-Da Fan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High density plasma (HDP) etch method for suppressing micro-loading...
- Patent number 6,124,212
- Issue date Sep 26, 2000
- Taiwan Semiconductor Manufacturing Co.
- Yuh-Da Fan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Composite shadow ring for an etch chamber and method of using
- Patent number 6,022,809
- Issue date Feb 8, 2000
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yuh-Da Fan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Three-step nitride etching process for better critical dimension an...
- Patent number 5,854,136
- Issue date Dec 29, 1998
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shih Chang Huang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
TRENCH ISOLATION WITH CONDUCTIVE STRUCTURES
- Publication number 20240395629
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chandrashekhar Prakash Savant
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES
- Publication number 20240312792
- Publication date Sep 19, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hui-An HAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRENCH ISOLATION WITH CONDUCTIVE STRUCTURES
- Publication number 20230005796
- Publication date Jan 5, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chandrashekhar Prakash SAVANT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-LAYER DIFFUSION BARRIER AND METHOD OF MAKING THE SAME
- Publication number 20220190122
- Publication date Jun 16, 2022
- Taiwan Semiconductor Manufacturing Co., LTD
- Jyh-nan Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRENCH ISOLATION WITH INTERMEDIATE STRUCTURES
- Publication number 20210407861
- Publication date Dec 30, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chandrashekhar Prakash SAVANT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES AND SEMICONDUCTOR DEV...
- Publication number 20210351041
- Publication date Nov 11, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hui-An HAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20210043771
- Publication date Feb 11, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Fen CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-LAYER DIFFUSION BARRIER AND METHOD OF MAKING THE SAME
- Publication number 20200365695
- Publication date Nov 19, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Jyh-nan Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES AND SEMICONDUCTOR DEV...
- Publication number 20200135868
- Publication date Apr 30, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hui-An HAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20190312144
- Publication date Oct 10, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Fen CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-LAYER DIFFUSION BARRIER AND METHOD OF MAKING THE SAME
- Publication number 20190006474
- Publication date Jan 3, 2019
- Taiwan Semiconductor Manufacturing Co., LTD
- Jyh-nan Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Enhanced Atomic Layer Deposition
- Publication number 20180174820
- Publication date Jun 21, 2018
- Taiwan Semiconductor Manufacturing Co., LTD
- Chun Hsiung Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20180069120
- Publication date Mar 8, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Fen CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20170005196
- Publication date Jan 5, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Fen CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE WITH INTERFACIAL LAYER AND METHOD FOR MANUF...
- Publication number 20160380069
- Publication date Dec 29, 2016
- Taiwan Semiconductor Manufacturing Co., LTD
- Wei-Fan LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CYCLIC EPITAXIAL DEPOSITION AND ETCH PROCESSES
- Publication number 20140256119
- Publication date Sep 11, 2014
- Taiwan Semiconductor Manufacturing Co., LTD
- Chun Hsiung TSAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods to completely eliminate or significantly reduce defects in...
- Publication number 20100099252
- Publication date Apr 22, 2010
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Hung Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods to completely eliminate or significantly reduce defects in...
- Publication number 20080176397
- Publication date Jul 24, 2008
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Hung Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods to completely eliminate or significantly reduce defects in...
- Publication number 20060094237
- Publication date May 4, 2006
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Hung Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for conductive film quality evaluation
- Publication number 20050239221
- Publication date Oct 27, 2005
- Hsien-Ping Feng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Interconnect structure and method for its fabricating
- Publication number 20050173799
- Publication date Aug 11, 2005
- Taiwan Semiconductor Manufacturing Co., LTD
- Juan-Jann Jou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of removing metal etching residues following a metal etchbac...
- Publication number 20040178172
- Publication date Sep 16, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yai-Yei Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method to calibrate the wafer transfer for oxide etcher (with clamp)
- Publication number 20020013056
- Publication date Jan 31, 2002
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
- Ching-Ming Chen
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Trench isolation with conductive structures

Method of manufacturing semiconductor devices and semiconductor dev...

Semiconductor device having a multi-layer diffusion barrier and met...

Trench isolation with conductive structures

Semiconductor device and manufacturing method thereof

Semiconductor device having multi-layer diffusion barrier and metho...

Method of manufacturing semiconductor devices and semiconductor dev...

Semiconductor device

Semiconductor device having a multi-layer diffusion barrier

Semiconductor device and manufacturing method thereof

Plasma enhanced atomic layer deposition

Semiconductor device and manufacturing method thereof

Semiconductor structure with interfacial layer and method for manuf...

Cyclic epitaxial deposition and etch processes

Method for conductive film quality evaluation

Method of removing metal etching residues following a metal etchbac...

Method to calibrate the wafer transfer for oxide etcher (with clamp)

Method to calibrate the wafer transfer for oxide etcher (with clamp)

High selectivity mask oxide etching to suppress silicon pits

High density plasma (HDP) etch method for suppressing micro-loading...

Composite shadow ring for an etch chamber and method of using

Three-step nitride etching process for better critical dimension an...

Patents Applicationslast 30 patents

TRENCH ISOLATION WITH CONDUCTIVE STRUCTURES

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES

TRENCH ISOLATION WITH CONDUCTIVE STRUCTURES

MULTI-LAYER DIFFUSION BARRIER AND METHOD OF MAKING THE SAME

TRENCH ISOLATION WITH INTERMEDIATE STRUCTURES

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES AND SEMICONDUCTOR DEV...

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

MULTI-LAYER DIFFUSION BARRIER AND METHOD OF MAKING THE SAME

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES AND SEMICONDUCTOR DEV...

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

MULTI-LAYER DIFFUSION BARRIER AND METHOD OF MAKING THE SAME

Plasma Enhanced Atomic Layer Deposition

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

SEMICONDUCTOR STRUCTURE WITH INTERFACIAL LAYER AND METHOD FOR MANUF...

CYCLIC EPITAXIAL DEPOSITION AND ETCH PROCESSES

Methods to completely eliminate or significantly reduce defects in...

Methods to completely eliminate or significantly reduce defects in...

Methods to completely eliminate or significantly reduce defects in...

Method for conductive film quality evaluation

Interconnect structure and method for its fabricating

Method of removing metal etching residues following a metal etchbac...

Method to calibrate the wafer transfer for oxide etcher (with clamp)