Yuichi Wada

Person

Toyoma, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, heater and method of manufacturing...
- Patent number 11,359,285
- Issue date Jun 14, 2022
- Kokusai Electric Corporation
- Hitoshi Murata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, heater and method of manufacturing...
- Patent number 10,597,780
- Issue date Mar 24, 2020
- Kokusai Electric Corporation
- Hitoshi Murata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Storage device, vaporizer and substrate processing apparatus
- Patent number 10,480,069
- Issue date Nov 19, 2019
- Kokusai Electric Corporation
- Naoko Kitagawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and heating unit
- Patent number 9,957,616
- Issue date May 1, 2018
- Hitachi Kokusai Electric Inc.
- Hitoshi Murata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method for manufacturing semiconduc...
- Patent number 9,816,182
- Issue date Nov 14, 2017
- Hitachi Kokusai Electric Inc.
- Hideto Tateno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heater for semiconductor thermal process
- Patent number D795209
- Issue date Aug 22, 2017
- Hitachi Kokusai Electric Inc.
- Hitoshi Murata
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Heater for semiconductor thermal process
- Patent number D793975
- Issue date Aug 8, 2017
- Hitachi Kokusai Electric Inc.
- Hitoshi Murata
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 9,587,313
- Issue date Mar 7, 2017
- Hitachi Kokusai Electric Inc.
- Yuichi Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method for manufacturing semiconduc...
- Patent number 9,365,928
- Issue date Jun 14, 2016
- Hitachi Kokusai Electric Inc.
- Shuhei Saido
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for manufacturing semiconductor device, method of manufac...
- Patent number 9,190,299
- Issue date Nov 17, 2015
- Hitachi Kokusai Electric, Inc.
- Yuichi Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturing method of semiconductor device
- Patent number 7,955,948
- Issue date Jun 7, 2011
- Hitachi Kokusai Electric Inc.
- Naofumi Ohashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Substrate Processing Apparatus, Heater and Method of Manufacturing...
- Publication number 20200173024
- Publication date Jun 4, 2020
- Kokusai Electric Corporation
- Hitoshi MURATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Storage Device, Vaporizer and Substrate Processing Apparatus
- Publication number 20180291502
- Publication date Oct 11, 2018
- Hitachi Kokusai Electric Inc.
- Naoko KITAGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus, Heater and Method of Manufacturing...
- Publication number 20170335458
- Publication date Nov 23, 2017
- Hitachi Kokusai Electric Inc.
- Hitoshi MURATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND HEATING UNIT
- Publication number 20160244878
- Publication date Aug 25, 2016
- Hitachi Kokusai Electric Inc.
- Hitoshi MURATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING FINE PATTERN, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20160218012
- Publication date Jul 28, 2016
- Hitachi Kokusai Electric Inc.
- Satoshi SHIMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20160211151
- Publication date Jul 21, 2016
- Hitachi Kokusai Electric Inc.
- Yasutoshi TSUBOTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...
- Publication number 20160155630
- Publication date Jun 2, 2016
- Hitachi Kokusai Electric Inc.
- Yasutoshi TSUBOTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20160053373
- Publication date Feb 25, 2016
- Hitachi Kokusai Electric Inc.
- Tetsuaki INADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Manufacturing Semiconductor Device, Substrate Processing...
- Publication number 20160013053
- Publication date Jan 14, 2016
- Hitachi Kokusai Electric Inc.
- Hiroshi ASHIHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDU...
- Publication number 20150307988
- Publication date Oct 29, 2015
- Hitachi Kokusai Electric Inc.
- Shuhei SAIDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...
- Publication number 20150140835
- Publication date May 21, 2015
- Hitachi Kokusai Electric Inc.
- Hideto TATENO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20150132972
- Publication date May 14, 2015
- Hitachi Kokusai Electric Inc.
- Yuichi WADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Device, Method for Manufacturing Semiconductor...
- Publication number 20140302687
- Publication date Oct 9, 2014
- Hiroshi ASHIHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for Manufacturing Semiconductor Device, Method of Manufac...
- Publication number 20140256160
- Publication date Sep 11, 2014
- Hitachi Kokusai Electric Inc.
- Yuichi Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, APPARATUS FOR MANUFAC...
- Publication number 20140235068
- Publication date Aug 21, 2014
- Hitachi Kokusai Electric Inc.
- Hiroshi ASHIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Placement Stage, Substrate Processing Apparatus and Metho...
- Publication number 20120329290
- Publication date Dec 27, 2012
- Hitachi Kokusai Electric Inc.
- Toshiya Shimada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20110230061
- Publication date Sep 22, 2011
- Hitachi Koskusai Electric Inc.
- Naofumi Ohashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20100055926
- Publication date Mar 4, 2010
- Naofumi Ohashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Yuichi Wada

Person

Patents Grantslast 30 patents

Substrate processing apparatus, heater and method of manufacturing...

Substrate processing apparatus, heater and method of manufacturing...

Storage device, vaporizer and substrate processing apparatus

Substrate processing apparatus and heating unit

Substrate processing apparatus, method for manufacturing semiconduc...

Heater for semiconductor thermal process

Heater for semiconductor thermal process

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus, method for manufacturing semiconduc...

Apparatus for manufacturing semiconductor device, method of manufac...

Manufacturing method of semiconductor device

Patents Applicationslast 30 patents

Substrate Processing Apparatus, Heater and Method of Manufacturing...

Storage Device, Vaporizer and Substrate Processing Apparatus

Substrate Processing Apparatus, Heater and Method of Manufacturing...

SUBSTRATE PROCESSING APPARATUS AND HEATING UNIT

METHOD OF FORMING FINE PATTERN, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

Method of Manufacturing Semiconductor Device, Substrate Processing...

SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDU...

SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

Substrate Processing Device, Method for Manufacturing Semiconductor...

Apparatus for Manufacturing Semiconductor Device, Method of Manufac...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, APPARATUS FOR MANUFAC...

Substrate Placement Stage, Substrate Processing Apparatus and Metho...

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE