Zheng Zou

Person

Singapore, SG

People

Patents Grantslast 30 patents

Information Patent Grant
CD control
- Patent number 10,103,097
- Issue date Oct 16, 2018
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Zheng Zou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Small pitch and high density contact array
- Patent number 9,543,502
- Issue date Jan 10, 2017
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Zheng Zou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated circuits with memory cells and methods of manufacturing...
- Patent number 9,537,092
- Issue date Jan 3, 2017
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Zheng Zou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming through silicon via with wafer backside protection
- Patent number 9,230,886
- Issue date Jan 5, 2016
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Lup San Leong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated circuits with memory cells and methods of manufacturing...
- Patent number 9,209,275
- Issue date Dec 8, 2015
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Zheng Zou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Litho scanner alignment signal improvement
- Patent number 9,034,720
- Issue date May 19, 2015
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Hui Liu
- G02 - OPTICS
Information Patent Grant
Filament free silicide formation
- Patent number 9,023,725
- Issue date May 5, 2015
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Kwee Liang Yeo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming through silicon via with wafer backside protection
- Patent number 8,940,637
- Issue date Jan 27, 2015
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Lup San Leong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
STI CMP under polish monitoring
- Patent number 8,852,968
- Issue date Oct 7, 2014
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Liang Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
CD control
- Patent number 8,836,139
- Issue date Sep 16, 2014
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Zheng Zou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spacer profile engineering using films with continuously increased...
- Patent number 8,828,858
- Issue date Sep 9, 2014
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Xuesong Rao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Statistical optical proximity correction
- Patent number 8,572,524
- Issue date Oct 29, 2013
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Wenzhan Zhou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Integration of eNVM, RMG, and HKMG modules
- Patent number 8,518,775
- Issue date Aug 27, 2013
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Huang Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Step-like spacer profile
- Patent number 8,492,236
- Issue date Jul 23, 2013
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Xuesong Rao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-variable regression for metrology
- Patent number 7,966,142
- Issue date Jun 21, 2011
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Wen Zhan Zhou
- G01 - MEASURING TESTING
Information Patent Grant
Toxic residual gas removal by non-reactive ion sputtering
- Patent number 6,660,642
- Issue date Dec 9, 2003
- Chartered Semiconductor Manufacturing Ltd.
- Zou Zheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming almost L-shaped spacer for improved ILD gap fill
- Patent number 6,632,745
- Issue date Oct 14, 2003
- Chartered Semiconductor Manufacturing Ltd.
- Chiew Wah Yap
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to reduce trench cone formation in the fabrication of shallo...
- Patent number 6,281,093
- Issue date Aug 28, 2001
- Chartered Semiconductor Manufacturing Ltd.
- Yelehanka Ramachandramurthy Pradeep
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to protect chamber wall from etching by endpoint plasma clean
- Patent number 6,124,927
- Issue date Sep 26, 2000
- Chartered Semiconductor Manufacturing Ltd.
- Qinghua Zhong
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SMALL PITCH AND HIGH DENSITY CONTACT ARRAY
- Publication number 20160351791
- Publication date Dec 1, 2016
- GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Zheng ZOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED CIRCUITS WITH MEMORY CELLS AND METHODS OF MANUFACTURING...
- Publication number 20160284991
- Publication date Sep 29, 2016
- GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Zheng Zou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING THROUGH SILICON VIA WITH WAFER BACKSIDE PROTECTION
- Publication number 20150137359
- Publication date May 21, 2015
- GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Lup San Leong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CD CONTROL
- Publication number 20140374920
- Publication date Dec 25, 2014
- Zheng ZOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STI CMP UNDER POLISH MONITORING
- Publication number 20140234993
- Publication date Aug 21, 2014
- GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Liang LI
- G01 - MEASURING TESTING
Information Patent Application
FILAMENT FREE SILICIDE FORMATION
- Publication number 20140167121
- Publication date Jun 19, 2014
- GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Kwee Liang YEO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COPPER HILLOCK PREVENTION WITH HYDROGEN PLASMA TREATMENT IN A DEDIC...
- Publication number 20140117545
- Publication date May 1, 2014
- GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Huang LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CD CONTROL
- Publication number 20140110855
- Publication date Apr 24, 2014
- GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Zheng ZOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHO SCANNER ALIGNMENT SIGNAL IMPROVEMENT
- Publication number 20140050439
- Publication date Feb 20, 2014
- GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Hui LIU
- G02 - OPTICS
Information Patent Application
METHOD FOR FORMING THROUGH SILICON VIA WITH WAFER BACKSIDE PROTECTION
- Publication number 20140008810
- Publication date Jan 9, 2014
- GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Lup San Leong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CO-OPTIMIZATION OF SCATTEROMETRY MARK DESIGN AND PROCESS MONITOR MA...
- Publication number 20130325395
- Publication date Dec 5, 2013
- GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Wenzhan Zhou
- G01 - MEASURING TESTING
Information Patent Application
SPACER PROFILE ENGINEERING USING FILMS WITH CONTINUOUSLY INCREASED...
- Publication number 20130187202
- Publication date Jul 25, 2013
- GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Xuesong Rao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STEP-LIKE SPACER PROFILE
- Publication number 20130181259
- Publication date Jul 18, 2013
- Global Foundries Singapore PTE. Ltd.
- Xuesong Rao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATION OF eNVM, RMG, AND HKMG MODULES
- Publication number 20130082318
- Publication date Apr 4, 2013
- GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Huang Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-VARIABLE REGRESSION FOR METROLOGY
- Publication number 20090258445
- Publication date Oct 15, 2009
- CHARTERED SEMICONDUCTOR MANUFACTURING, LTD.
- Wen Zhan ZHOU
- G01 - MEASURING TESTING
Information Patent Application
STATISTICAL OPTICAL PROXIMITY CORRECTION
- Publication number 20090132992
- Publication date May 21, 2009
- CHARTERED SEMICONDUCTOR MANUFACTURING, LTD.
- Wenzhan ZHOU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MULTI-ZONE CARRIER HEAD FOR CHEMICAL MECHANICAL POLISHING AND CMP M...
- Publication number 20070167110
- Publication date Jul 19, 2007
- Yu-Hsiang Tseng
- B24 - GRINDING POLISHING
Information Patent Application
Toxic residual gas removal by non-reactive ion sputtering
- Publication number 20030022504
- Publication date Jan 30, 2003
- Chartered Semiconductor Manufacturing Ltd.
- Zou Zheng
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

CD control

Small pitch and high density contact array

Integrated circuits with memory cells and methods of manufacturing...

Method for forming through silicon via with wafer backside protection

Integrated circuits with memory cells and methods of manufacturing...

Litho scanner alignment signal improvement

Filament free silicide formation

Method for forming through silicon via with wafer backside protection

STI CMP under polish monitoring

CD control

Spacer profile engineering using films with continuously increased...

Statistical optical proximity correction

Integration of eNVM, RMG, and HKMG modules

Step-like spacer profile

Multi-variable regression for metrology

Toxic residual gas removal by non-reactive ion sputtering

Method of forming almost L-shaped spacer for improved ILD gap fill

Method to reduce trench cone formation in the fabrication of shallo...

Method to protect chamber wall from etching by endpoint plasma clean

Patents Applicationslast 30 patents

SMALL PITCH AND HIGH DENSITY CONTACT ARRAY

INTEGRATED CIRCUITS WITH MEMORY CELLS AND METHODS OF MANUFACTURING...

METHOD FOR FORMING THROUGH SILICON VIA WITH WAFER BACKSIDE PROTECTION

CD CONTROL

STI CMP UNDER POLISH MONITORING

FILAMENT FREE SILICIDE FORMATION

COPPER HILLOCK PREVENTION WITH HYDROGEN PLASMA TREATMENT IN A DEDIC...

CD CONTROL

LITHO SCANNER ALIGNMENT SIGNAL IMPROVEMENT

METHOD FOR FORMING THROUGH SILICON VIA WITH WAFER BACKSIDE PROTECTION

CO-OPTIMIZATION OF SCATTEROMETRY MARK DESIGN AND PROCESS MONITOR MA...

SPACER PROFILE ENGINEERING USING FILMS WITH CONTINUOUSLY INCREASED...

STEP-LIKE SPACER PROFILE

INTEGRATION OF eNVM, RMG, AND HKMG MODULES

MULTI-VARIABLE REGRESSION FOR METROLOGY

STATISTICAL OPTICAL PROXIMITY CORRECTION

MULTI-ZONE CARRIER HEAD FOR CHEMICAL MECHANICAL POLISHING AND CMP M...

Toxic residual gas removal by non-reactive ion sputtering