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Zhijian Lu
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Poughkeepsie, NY, US
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Patents Grants
last 30 patents
Information
Patent Grant
Producing low k inter-layer dielectric films using Si-containing re...
Patent number
6,989,230
Issue date
Jan 24, 2006
Infineon Technologies AG
Zhijian Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for removing carbon-containing polysilane from a semiconduct...
Patent number
6,740,594
Issue date
May 25, 2004
Infineon Technologies AG
Zhijian Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Mask and method for patterning a semiconductor wafer
Patent number
6,670,646
Issue date
Dec 30, 2003
Infineon Technologies AG
Zhijian Lu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of reducing post-development defects in and around openings...
Patent number
6,420,101
Issue date
Jul 16, 2002
Infineon Technologies A G
Zhijian Lu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Strongly water-soluble photoacid generator resist compositions
Patent number
6,383,715
Issue date
May 7, 2002
Infineon Technologies AG
Zhijian Lu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of reducing post-development defects in and around openings...
Patent number
6,372,408
Issue date
Apr 16, 2002
Infineon Technologies AG
Zhijian Lu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Self-aligned formation and method for semiconductors
Patent number
6,165,896
Issue date
Dec 26, 2000
Siemens Aktiengesellschaft
Rainer F. Schnabel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Silylation method for reducing critical dimension loss and resist loss
Patent number
6,107,177
Issue date
Aug 22, 2000
Siemens Aktienesellschaft
Zhijian Lu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Producing low k inter-layer dielectric films using Si-containing re...
Publication number
20030186172
Publication date
Oct 2, 2003
Zhijian Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Mask and method for patterning a semiconductor wafer
Publication number
20030153126
Publication date
Aug 14, 2003
Infineon Technologies North America Corp.
Zhijian Lu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for ending point detection during etching process
Publication number
20030064521
Publication date
Apr 3, 2003
Zhijian Lu
G01 - MEASURING TESTING
Information
Patent Application
Ultra-fine alignment system and method using acoustic-AFM interaction
Publication number
20030003676
Publication date
Jan 2, 2003
Brian Lee
B82 - NANO-TECHNOLOGY
Information
Patent Application
Method for removing polysilane from a semiconductor without stripping
Publication number
20020182871
Publication date
Dec 5, 2002
Zhijian Lu
H01 - BASIC ELECTRIC ELEMENTS