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Aberration measurement
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Patents Grants
last 30 patents
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Patent Grant
Semiconductor structure and method for manufacturing same
Patent number
11,984,406
Issue date
May 14, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Yunsheng Xia
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology targets
Patent number
11,982,946
Issue date
May 14, 2024
ASML Netherlands B.V.
Nikhil Mehta
G01 - MEASURING TESTING
Information
Patent Grant
Mask inspection of a semiconductor specimen
Patent number
11,983,867
Issue date
May 14, 2024
Applied Materials Israel Ltd.
Ariel Shkalim
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Methods and apparatus for measuring a property of a substrate
Patent number
11,977,034
Issue date
May 7, 2024
ASML Netherlands B.V.
Wouter Lodewijk Elings
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Method for detecting stochastic weak points of layout pattern of se...
Patent number
11,977,828
Issue date
May 7, 2024
Samsung Electronics Co., Ltd.
Seungjin Lee
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Lithographic patterning method
Patent number
11,977,337
Issue date
May 7, 2024
Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
Diederik Jan Maas
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Defocus measurement method, correction method, and method of manufa...
Patent number
11,977,338
Issue date
May 7, 2024
Samsung Electronics Co., Ltd.
Jieun Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for improving a process for a patterning process
Patent number
11,977,336
Issue date
May 7, 2024
ASML Netherlands B.V.
Jen-Shiang Wang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for determining patterning device pattern based on manufactu...
Patent number
11,972,194
Issue date
Apr 30, 2024
ASML Netherlands B.V.
Roshni Biswas
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Light sources and methods of controlling; devices and methods for u...
Patent number
11,971,663
Issue date
Apr 30, 2024
ASML Netherlands B.V.
Marinus Petrus Reijnders
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Reducing device overlay errors
Patent number
11,971,664
Issue date
Apr 30, 2024
KLA-Tencor Corporation
Liran Yerushalmi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Endpoint detection system for enhanced spectral data collection
Patent number
11,965,798
Issue date
Apr 23, 2024
Applied Materials, Inc.
Pengyu Han
G01 - MEASURING TESTING
Information
Patent Grant
Method of measuring variation, inspection system, computer program,...
Patent number
11,966,168
Issue date
Apr 23, 2024
ASML Netherlands B.V.
Antoine Gaston Marie Kiers
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Lithographic overlay correction and lithographic process
Patent number
11,966,170
Issue date
Apr 23, 2024
Taiwan Semiconductor Manufacturing Company Ltd.
Ai-Jen Hung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Measurement apparatus and a method for determining a substrate grid
Patent number
11,966,166
Issue date
Apr 23, 2024
ASML Netherlands B.V.
Franciscus Godefridus Casper Bijnen
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for producing overlay results with absolute reference for se...
Patent number
11,966,171
Issue date
Apr 23, 2024
Tokyo Electron Limited
Anton J. deVilliers
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Systems and methods for reducing resist model prediction errors
Patent number
11,966,167
Issue date
Apr 23, 2024
ASML Netherlands B.V.
Marleen Kooiman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, metrology systems, phased array illuminatio...
Patent number
11,966,169
Issue date
Apr 23, 2024
ASML Holding N.V.
Mohamed Swillam
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
On-product overlay targets
Patent number
11,967,535
Issue date
Apr 23, 2024
KLA Corporation
Amnon Manassen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Computer-readable storage medium recording data structure for stori...
Patent number
11,960,214
Issue date
Apr 16, 2024
AUROS TECHNOLOGY, INC.
Sol-Lee Hwang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
EUV mask defect tool apparatus
Patent number
11,960,202
Issue date
Apr 16, 2024
EUV TECH, INC.
Chami N Perera
G01 - MEASURING TESTING
Information
Patent Grant
Diffraction based overlay metrology tool and method of diffraction...
Patent number
11,953,450
Issue date
Apr 9, 2024
ASML Netherlands B.V.
Arie Jeffrey Den Boef
G01 - MEASURING TESTING
Information
Patent Grant
Process monitoring of deep structures with X-ray scatterometry
Patent number
11,955,391
Issue date
Apr 9, 2024
KLA-Tencor Corporation
Antonio Arion Gellineau
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for controlling a manufacturing process and associated appar...
Patent number
11,947,266
Issue date
Apr 2, 2024
ASML Netherlands B.V.
Nicolaas Petrus Marcus Brantjes
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus to determine a patterning process parameter
Patent number
11,947,269
Issue date
Apr 2, 2024
ASML Netherlands B.V.
Anagnostis Tsiatmas
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Optical phase measurement system and method
Patent number
11,946,875
Issue date
Apr 2, 2024
Nova Ltd.
Gilad Barak
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology of semiconductor devices in electron micrographs using fa...
Patent number
11,947,270
Issue date
Apr 2, 2024
FEI Company
Umesh Adiga
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Metrology apparatus
Patent number
11,940,739
Issue date
Mar 26, 2024
ASML Netherlands B.V.
Nitesh Pandey
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods and apparatus for obtaining diagnostic information relating...
Patent number
11,940,740
Issue date
Mar 26, 2024
ASML Netherlands B.V.
Alexander Ypma
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Dark field microscope
Patent number
11,940,608
Issue date
Mar 26, 2024
ASML Netherlands B.V.
Sebastianus Adrianus Goorden
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF MANUFACTURING EXTREME ULTRAVIOLET (EUV) MASK FOR FORMING...
Publication number
20240152043
Publication date
May 9, 2024
Samsung Electronics Co., Ltd.
Minseung SONG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
A METHOD FOR MODELING MEASUREMENT DATA OVER A SUBSTRATE AREA AND AS...
Publication number
20240152059
Publication date
May 9, 2024
ASML NETHERLANDS B.V.
Dogacan KARA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND SYSTEM FOR PREDICTING PROCESS INFORMATION WITH A PARAMET...
Publication number
20240152060
Publication date
May 9, 2024
ASML NETHERLANDS B.V.
Patrick Philipp HELFENSTEIN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IMAGE BASED OVERLAY MARK AND IMAGE BASED OVERLAY MEASURING METHOD U...
Publication number
20240142884
Publication date
May 2, 2024
SK HYNIX INC.
Joon Seuk LEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ELECTRON BEAM LITHOGRAPHY APPARATUS, ELECTRON BEAM LITHOGRAPHY METH...
Publication number
20240145212
Publication date
May 2, 2024
NIPPON CONTROL SYSTEM CORPORATION
Masakazu HAMAJI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Overlay Estimation Based on Optical Inspection and Machine Learning
Publication number
20240142883
Publication date
May 2, 2024
KLA Corporation
Nireekshan K. Reddy
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPERATING A METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS T...
Publication number
20240134289
Publication date
Apr 25, 2024
ASML NETHERLANDS B.V.
Bram Paul Theodoor VAN GOCH
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MEASUREMENT DEVICE, LITHOGRAPHY SYSTEM AND EXPOSURE APPARATUS, AND...
Publication number
20240134294
Publication date
Apr 25, 2024
Nikon Corporation
Yuichi Shibazaki
G01 - MEASURING TESTING
Information
Patent Application
SEMICONDUCTOR WAFER, PROCESSING APPARATUS FOR OVERLAY SHIFT AND PRO...
Publication number
20240134291
Publication date
Apr 25, 2024
WINBOND ELECTRONICS CORP.
Meng-Hsien TSAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OVERLAY MARK FORMING MOIRE PATTERN, OVERLAY MEASUREMENT METHOD USIN...
Publication number
20240136300
Publication date
Apr 25, 2024
AUROS TECHNOLOGY, INC.
Hyun Chul LEE
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
EXPOSURE APPARATUS AND ARTICLE MANUFACTURING METHOD
Publication number
20240134286
Publication date
Apr 25, 2024
Canon Kabushiki Kaisha
SHOHEI IWATA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MULTI-WAVELENGTH SELECTION METHOD FOR OVERLAY MEASUREMENT, AND OVER...
Publication number
20240134290
Publication date
Apr 25, 2024
Samsung Electronics Co., Ltd.
Inbeom Yim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR THERMAL MANAGEMENT OF RETICLE IN SEMICONDUCTO...
Publication number
20240134293
Publication date
Apr 25, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yueh-Lin Yang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS, CONTROL METHOD OF EXPOSURE APPARATUS, INFORMATI...
Publication number
20240126182
Publication date
Apr 18, 2024
Canon Kabushiki Kaisha
JUN MOIZUMI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROCESS WINDOW BASED ON DEFECT PROBABILITY
Publication number
20240126181
Publication date
Apr 18, 2024
ASML NETHERLANDS B.V.
Abraham SLACHTER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR RULE-BASED RETARGETING OF TARGET PATTERN
Publication number
20240126183
Publication date
Apr 18, 2024
ASML NETHERLANDS B.V.
Ayman HAMOUDA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
State Transition Temperature of Resist Structures
Publication number
20240125721
Publication date
Apr 18, 2024
IMEC vzw
Joren Severi
G01 - MEASURING TESTING
Information
Patent Application
METHODS OF FITTING MEASUREMENT DATA TO A MODEL AND MODELING A PERFO...
Publication number
20240118629
Publication date
Apr 11, 2024
ASML NETHERLANDS B.V.
Aliasghar KEYVANI JANBAHAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20240120199
Publication date
Apr 11, 2024
Samsung Electronics Co., Ltd.
So Young LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PATTERN FOR A PATTERNING PROCESS, AND METHOD AND SYST...
Publication number
20240118628
Publication date
Apr 11, 2024
Prosemi Co., Ltd.
Chen-Kun WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OVERLAY MARK, MANUFACTURING METHOD USING THE SAME, AND SEMICONDUCTO...
Publication number
20240120287
Publication date
Apr 11, 2024
Samsung Electronics Co., Ltd.
Sang Won PARK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METROLOGY TARGET SIMULATION
Publication number
20240118625
Publication date
Apr 11, 2024
ASML NETHERLANDS B.V.
Markus Gerardus Martinus Maria VAN KRAAIJ
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF CORRECTING OVERLAY, METHOD OF CONTROLLING SEMICONDUCTOR P...
Publication number
20240118627
Publication date
Apr 11, 2024
Samsung Electronics Co., Ltd.
Jeongjin Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ALIGNMENT METHOD AND ASSOCIATED ALIGNMENT AND LITHOGRAPHIC APPARATUSES
Publication number
20240118631
Publication date
Apr 11, 2024
Nick Franciscus Wilhelmus THISSEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD USING T...
Publication number
20240112933
Publication date
Apr 4, 2024
Samsung Electronics Co., Ltd.
Jeonghee Choi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OVERLAY TARGET
Publication number
20240111220
Publication date
Apr 4, 2024
United Microelectronics Corp.
Yu-Wei Cheng
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
A METHOD FOR CHARACTERIZING A MANUFACTURING PROCESS OF SEMICONDUCTO...
Publication number
20240111218
Publication date
Apr 4, 2024
ASML NETHERLANDS B.V.
Wim Tjibbo TEL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS AND INSPECTION METHOD
Publication number
20240110844
Publication date
Apr 4, 2024
Nikon Corporation
Masaki KATO
G01 - MEASURING TESTING
Information
Patent Application
A METHOD OF DETERMINING A MEASUREMENT RECIPE AND ASSOCIATED METROLO...
Publication number
20240111221
Publication date
Apr 4, 2024
ASML NETHERLANDS B.V.
Hendrik Adriaan VAN LAARHOVEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR ANALYZING DEFECTS OF A STRUCTURED COMPONENT
Publication number
20240103384
Publication date
Mar 28, 2024
Carl Zeiss SMT GMBH
Jan Tusch
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY