-
-
VOLTAGE CONTROL FOR ETCHING SYSTEMS
-
Publication number 20240387139
-
Publication date Nov 21, 2024
-
Taiwan Semiconductor Manufacturing Company, Ltd.
-
Chansyun David YANG
-
H01 - BASIC ELECTRIC ELEMENTS
-
CHARGED PARTICLE BEAM DEVICE
-
Publication number 20240379318
-
Publication date Nov 14, 2024
-
HITACHI HIGH-TECH CORPORATION
-
Keigo KASUYA
-
H01 - BASIC ELECTRIC ELEMENTS
-
-
Ion Milling Apparatus
-
Publication number 20240258062
-
Publication date Aug 1, 2024
-
HITACHI HIGH-TECH CORPORATION
-
Shota AIDA
-
H01 - BASIC ELECTRIC ELEMENTS
-
-
-
-
-
-
-
-
-
-
PLASMA PROCESSING APPARATUS
-
Publication number 20230386801
-
Publication date Nov 30, 2023
-
TOKYO ELECTRON LIMITED
-
Tsuyoshi Moriya
-
H01 - BASIC ELECTRIC ELEMENTS
-
PARTICLE BEAM IRRADIATION APPARATUS
-
Publication number 20230317403
-
Publication date Oct 5, 2023
-
Sumitomo Heavy Industries, Ltd.
-
Takuya FUKUURA
-
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
-
-
-
-
-
-
-
Semiconductor Analysis System
-
Publication number 20230063192
-
Publication date Mar 2, 2023
-
Hitachi High-Tech Corporation
-
Yudai KUBO
-
H01 - BASIC ELECTRIC ELEMENTS
-
-
Voltage Control for Etching Systems
-
Publication number 20230031722
-
Publication date Feb 2, 2023
-
Taiwan Semiconductor Manufacturing Co., Ltd.
-
Chansyun David YANG
-
H01 - BASIC ELECTRIC ELEMENTS
-
-
-
-
CHARGED PARTICLE BEAM DEVICE
-
Publication number 20220254597
-
Publication date Aug 11, 2022
-
HITACHI HIGH-TECH CORPORATION
-
Yuta IMAI
-
H01 - BASIC ELECTRIC ELEMENTS
-