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ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
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H01J2237/0473
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Patents Grants
last 30 patents
Information
Patent Grant
Ion implanter and ion implantation method
Patent number
11,923,167
Issue date
Mar 5, 2024
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Hiroshi Matsushita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for operating a particle beam microscope
Patent number
11,915,907
Issue date
Feb 27, 2024
Carl Zeiss Microscopy GmbH
Dirk Preikszas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High throughput multi-electron beam system
Patent number
11,869,743
Issue date
Jan 9, 2024
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
11,823,861
Issue date
Nov 21, 2023
HITACHI HIGH-TECH CORPORATION
Yuta Imai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
RF quadrupole particle accelerator
Patent number
11,818,830
Issue date
Nov 14, 2023
Applied Materials, Inc.
Frank Sinclair
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device and power supply device
Patent number
11,810,752
Issue date
Nov 7, 2023
HITACHI HIGH-TECH CORPORATION
Wen Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus
Patent number
11,791,124
Issue date
Oct 17, 2023
Hitachi High-Technologies Corporation
Yuta Kawamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam apparatus
Patent number
11,784,022
Issue date
Oct 10, 2023
HITACHI HIGH-TECH CORPORATION
Takashi Ohshima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus
Patent number
11,784,023
Issue date
Oct 10, 2023
Hitachi High-Technologies Corporation
Yuta Kawamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing apparatus and processing method, and gas cluster generat...
Patent number
11,772,138
Issue date
Oct 3, 2023
Tokyo Electron Limited
Kazuya Dobashi
B08 - CLEANING
Information
Patent Grant
Resonator, linear accelerator, and ion implanter having adjustable...
Patent number
11,728,133
Issue date
Aug 15, 2023
Applied Materials, Inc.
Keith E. Kowal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device and analysis method
Patent number
11,710,615
Issue date
Jul 25, 2023
Jeol Ltd.
Kenichi Tsutsumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implanter and electrostatic quadrupole lens device
Patent number
11,710,618
Issue date
Jul 25, 2023
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Haruka Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Resonator coil having an asymmetrical profile
Patent number
11,710,617
Issue date
Jul 25, 2023
Applied Materials, Inc.
Costel Biloiu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle beam apparatus and composite beam apparatus
Patent number
11,682,536
Issue date
Jun 20, 2023
Hitachi High-Tech Science Corporation
Koji Nagahara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for controlling electrostatic clamping of multipl...
Patent number
11,670,532
Issue date
Jun 6, 2023
Applied Materials, Inc.
Scott E. Peitzsch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus of electron beam comprising pinnacle limiting plate and m...
Patent number
11,664,186
Issue date
May 30, 2023
BORRIES PTE. LTD.
Zhongwei Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implanter and ion implantation method
Patent number
11,569,058
Issue date
Jan 31, 2023
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Hiroshi Matsushita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and techniques for ion energy measurement in pulsed ion b...
Patent number
11,476,084
Issue date
Oct 18, 2022
Applied Materials, Inc.
W. Davis Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Robust and precise synchronization of microwave oscillators to a la...
Patent number
11,387,070
Issue date
Jul 12, 2022
The Royal Institution for the Advancement of Learning/McGill University
Martin Otto
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Electron beam 3D printing machine
Patent number
11,370,055
Issue date
Jun 28, 2022
Consorzio Di Ricerca Hypatia
Gildo Di Domenico
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Charged particle beam device
Patent number
11,348,757
Issue date
May 31, 2022
HITACHI HIGH-TECH CORPORATION
Shuhei Yabu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron source, method for manufacturing the same, and electron be...
Patent number
11,322,329
Issue date
May 3, 2022
HITACHI HIGH-TECH CORPORATION
Toshiaki Kusunoki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device and analysis method
Patent number
11,315,753
Issue date
Apr 26, 2022
Jeol Ltd.
Kenichi Tsutsumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion milling apparatus
Patent number
11,257,654
Issue date
Feb 22, 2022
HITACHI HIGH-TECH CORPORATION
Kengo Asai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device and electrostatic lens
Patent number
11,201,033
Issue date
Dec 14, 2021
HITACHI HIGH-TECH CORPORATION
Yuta Kawamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam generator, plasma processing apparatus having the sam...
Patent number
11,195,696
Issue date
Dec 7, 2021
Samsung Electronics Co., Ltd.
Dongkyu Shin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
11,107,656
Issue date
Aug 31, 2021
HITACHI HIGH-TECH CORPORATION
Tsunenori Nomaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus to eliminate contaminant particles from an acc...
Patent number
11,101,134
Issue date
Aug 24, 2021
Exogenesis Corporation
Allen R. Kirkpatrick
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Resonator coil having an asymmetrical profile
Patent number
11,094,504
Issue date
Aug 17, 2021
Applied Materials, Inc.
Costel Biloiu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
APPARATUS FOR PROCESSING PLASMA AND METHOD OF PROCESSING PLASMA AND...
Publication number
20240128055
Publication date
Apr 18, 2024
Samsung Electronics Co., Ltd.
Hyunbae Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM OF IMAGE-FORMING MULTI-ELECTRON BEAMS
Publication number
20240096586
Publication date
Mar 21, 2024
KLA Corporation
Xinrong JIANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON-BEAM IRRADIATION APPARATUS AND MAINTENANCE METHOD FOR ELEC...
Publication number
20240087836
Publication date
Mar 14, 2024
NHV CORPORATION
Masahiro NAGAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR ELECTRON BEAM-INDUCED PROCESSING OF A DEFECT OF A MICROL...
Publication number
20240036456
Publication date
Feb 1, 2024
Carl Zeiss SMT GMBH
Gilles Tabbone
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20230386801
Publication date
Nov 30, 2023
TOKYO ELECTRON LIMITED
Tsuyoshi Moriya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PARTICLE BEAM IRRADIATION APPARATUS
Publication number
20230317403
Publication date
Oct 5, 2023
Sumitomo Heavy Industries, Ltd.
Takuya FUKUURA
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
PARTICLE BEAM IRRADIATION SYSTEM, CONTROL METHOD FOR PARTICLE BEAM...
Publication number
20230253175
Publication date
Aug 10, 2023
Hitachi, Ltd
Kenta TAKAHASHI
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Application
System and Method for Controlling Electrostatic Clamping of Multipl...
Publication number
20230178405
Publication date
Jun 8, 2023
Applied Materials, Inc.
Scott E. Peitzsch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RESONATOR, LINEAR ACCELERATOR, AND ION IMPLANTER HAVING ADJUSTABLE...
Publication number
20230134262
Publication date
May 4, 2023
Applied Materials, Inc.
Keith E. Kowal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION IMPLANTER AND ION IMPLANTATION METHOD
Publication number
20230139482
Publication date
May 4, 2023
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Hiroshi Matsushita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LINEAR ACCELERATOR COIL INCLUDING MULTIPLE FLUID CHANNELS
Publication number
20230119010
Publication date
Apr 20, 2023
Applied Materials, Inc.
Robert B. Vopat
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH FREQUENCY RF GENERATOR AND DC PULSING
Publication number
20230073797
Publication date
Mar 9, 2023
Eagle Harbor Technologies, Inc.
Christopher Bowman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor Analysis System
Publication number
20230063192
Publication date
Mar 2, 2023
Hitachi High-Tech Corporation
Yudai KUBO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR CONTINUOUS CHAINED ENERGY ION IMPLANTATION
Publication number
20230038565
Publication date
Feb 9, 2023
Axcelis Technologies, Inc.
Causon Jen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Voltage Control for Etching Systems
Publication number
20230031722
Publication date
Feb 2, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Chansyun David YANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING APPARATUS AND PROCESSING METHOD, AND GAS CLUSTER GENERAT...
Publication number
20220384152
Publication date
Dec 1, 2022
TOKYO ELECTRON LIMITED
Kazuya Dobashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH THROUGHPUT MULTI-ELECTRON BEAM SYSTEM
Publication number
20220367140
Publication date
Nov 17, 2022
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION IMPLANTER AND ELECTROSTATIC QUADRUPOLE LENS DEVICE
Publication number
20220285127
Publication date
Sep 8, 2022
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Haruka Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE
Publication number
20220254597
Publication date
Aug 11, 2022
HITACHI HIGH-TECH CORPORATION
Yuta IMAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR OPERATING A PARTICLE BEAM MICROSCOPE
Publication number
20220246389
Publication date
Aug 4, 2022
CARL ZEISS MICROSCOPY GMBH
Dirk Preikszas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RF QUADRUPOLE PARTICLE ACCELERATOR
Publication number
20220248523
Publication date
Aug 4, 2022
Applied Materials, Inc.
Frank Sinclair
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE AND METHOD FOR IMPLANTING PARTICLES INTO A SUBSTRATE
Publication number
20220199362
Publication date
Jun 23, 2022
mi2-factory GmbH
Constantin CSATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCH TOOL FOR HIGH ASPECT RATIO ETCHING
Publication number
20220165546
Publication date
May 26, 2022
LAM RESEARCH CORPORATION
Thorsten Lill
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON BEAM APPARATUS
Publication number
20220165536
Publication date
May 26, 2022
Hitachi High-Tech Corporation
Takashi Ohshima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam Device and Analysis Method
Publication number
20220157558
Publication date
May 19, 2022
JEOL Ltd.
Kenichi Tsutsumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS TO ELIMINATE CONTAMINANT PARTICLES FROM AN ACC...
Publication number
20220115236
Publication date
Apr 14, 2022
Exogenesis Corporation
Allen R. Kirkpatrick
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE AND POWER SUPPLY DEVICE
Publication number
20220068595
Publication date
Mar 3, 2022
HITACHI HIGH-TECH CORPORATION
Wen Li
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
Charged Particle Beam Apparatus
Publication number
20210398770
Publication date
Dec 23, 2021
Hitachi High-Technologies Corporation
Yuta KAWAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DETECTION SYSTEMS IN SEMICONDUCTOR METROLOGY TOOLS
Publication number
20210366687
Publication date
Nov 25, 2021
Taiwan Semiconductor Manufacturing Co., Ltd.
Shih-Wei Hung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RESONATOR COIL HAVING AN ASYMMETRICAL PROFILE
Publication number
20210343500
Publication date
Nov 4, 2021
Applied Materials, Inc.
Costel Biloiu
H01 - BASIC ELECTRIC ELEMENTS