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B81C1/00857
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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C1/00
Manufacture or treatment of devices or systems in or on a substrate
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B81C1/00857
after manufacture
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Patents Grants
last 30 patents
Information
Patent Grant
Method of cleaning and drying semiconductor substrate
Patent number
10,811,247
Issue date
Oct 20, 2020
Shin-Etsu Chemical Co., Ltd.
Tsutomu Ogihara
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a structured surface
Patent number
9,233,843
Issue date
Jan 12, 2016
Robert Bosch GmbH
Andrea Urban
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Dry cleaning method
Patent number
6,500,268
Issue date
Dec 31, 2002
Silicon Genesis Corporation
Francois J. Henley
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of cleaning and treating a semiconductor device including a...
Patent number
6,024,801
Issue date
Feb 15, 2000
Texas Instruments Incorporated
Robert M. Wallace
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
CLEANING COMPOSITION WITH MOLYBDENUM ETCHING INHIBITOR
Publication number
20230399754
Publication date
Dec 14, 2023
Entegris, Inc.
Daniela White
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MIRROR DEVICE MANUFACTURING METHOD AND MIRROR UNIT MANUFACTURING ME...
Publication number
20220363535
Publication date
Nov 17, 2022
Hamamatsu Photonics K.K.
Daiki SUZUKI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR TRANSFERRING MICROSTRUCTURES, AND METHOD FOR MOUNTING MI...
Publication number
20220315418
Publication date
Oct 6, 2022
Shin-Etsu Chemical Co., Ltd.
Yoshinori OGAWA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ETCH RELEASE RESIDUE REMOVAL USING ANHYDROUS SOLUTION
Publication number
20150368099
Publication date
Dec 24, 2015
FREESCALE SEMICONDUCTOR, INC.
Srivatsa G. Kundalgurki
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF FORMING MEMS DEVICE
Publication number
20150191348
Publication date
Jul 9, 2015
Shanghai Huahong Grace Semiconductor Manufacturing Corporation
Zhenxing Zhang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING A STRUCTURED SURFACE
Publication number
20150140717
Publication date
May 21, 2015
ROBERT BOSCH GmbH
Andrea URBAN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method For Cleaning Fine Pattern Surface Of Mold, And Imprinting De...
Publication number
20130224322
Publication date
Aug 29, 2013
Hitachi High-Technologies Corporation
Noritake Shizawa
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Novel process method for post plasma etch treatment
Publication number
20110076853
Publication date
Mar 31, 2011
MagIC Technologies, Inc.
Guomin Mao
B81 - MICRO-STRUCTURAL TECHNOLOGY