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Micro-structural technology
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PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
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Forming micro-structural systems
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B81C2203/05
Aligning components to be assembled
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Patents Grants
last 30 patents
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Patent Grant
Sound producing cell
Patent number
12,192,722
Issue date
Jan 7, 2025
xMEMS Labs, Inc.
Chiung C. Lo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Laser-assisted material phase-change and expulsion micro-machining...
Patent number
12,077,432
Issue date
Sep 3, 2024
Massachusetts Institute of Technology
Prashant Patil
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Sound producing cell and manufacturing method thereof
Patent number
11,943,595
Issue date
Mar 26, 2024
xMEMS Labs, Inc.
Chiung C. Lo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Capping plate for panel scale packaging of MEMS products
Patent number
11,685,649
Issue date
Jun 27, 2023
OBSIDIAN SENSORS, INC.
John Hong
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electromechanical (MEM) power relay
Patent number
11,584,643
Issue date
Feb 21, 2023
Massachusetts Institute of Technology
Prashant Patil
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Modular 3-D printed devices for sample delivery and method
Patent number
11,485,632
Issue date
Nov 1, 2022
Arizona Board of Regents on behalf of Arizona State University
Alexandra Ros
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing MEMS transducer, MEMS transducer, ultrasound p...
Patent number
11,369,345
Issue date
Jun 28, 2022
Konica Minolta, Inc.
Yuta Nakayama
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
System and methods for microfabrication
Patent number
11,305,987
Issue date
Apr 19, 2022
BEIJING VOYAGER TECHNOLOGY CO., LTD.
Sae Won Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-transfer-printed compound sensor device
Patent number
11,230,471
Issue date
Jan 25, 2022
X-CELEPRINT LIMITED
Ronald S. Cok
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS package with roughend interface
Patent number
11,192,778
Issue date
Dec 7, 2021
Taiwan Semiconductor Manufacturing Co., Ltd.
Yu-Jui Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Integrated package structure for MEMS element and ASIC chip and met...
Patent number
11,130,674
Issue date
Sep 28, 2021
J-METRICS TECHNOLOGY CO., LTD.
Sheng-Lin Ma
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Alignment mark and semiconductor device, and fabrication methods th...
Patent number
11,049,816
Issue date
Jun 29, 2021
NINGBO SEMICONDUCTOR INTERNATIONAL CORPORATION
Mengbin Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Coupling a magnet with a MEMS device
Patent number
11,022,792
Issue date
Jun 1, 2021
Intel Corporation
Kyle Yazzie
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for bonding wafers eutectically, and a wafer composite
Patent number
10,927,004
Issue date
Feb 23, 2021
Robert Bosch GmbH
Axel Grosse
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods of achieving universal interfacing using suspended and/or f...
Patent number
10,807,864
Issue date
Oct 20, 2020
The Regents of the University of Colorado, a Body Corporate
Joseph J. Brown
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS package with roughend interface
Patent number
10,710,872
Issue date
Jul 14, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Yu-Jui Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for self-aligning solder-attached mems die to a mounting sur...
Patent number
10,662,057
Issue date
May 26, 2020
DunAn Microstaq, Inc.
Wayne C. Long
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method of manufacturing a semiconductor device, and a semiconductor...
Patent number
10,607,843
Issue date
Mar 31, 2020
TOSHIBA MEMORY CORPORATION
Shinya Watanabe
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Transfer head and method for transferring micro devices
Patent number
10,593,582
Issue date
Mar 17, 2020
MIKRO MESA TECHNOLOGY CO., LTD.
Li-Yi Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Self-cleaning liquid level sensor
Patent number
10,551,240
Issue date
Feb 4, 2020
International Business Machines Corporation
Jonathan Fry
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microscale fluidic devices and components having a fluid retention...
Patent number
10,525,464
Issue date
Jan 7, 2020
Bio-Rad Laboratories, Inc.
Alwin Wan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro devices formed by flex circuit substrates
Patent number
10,512,164
Issue date
Dec 17, 2019
Encite LLC
Stephen A. Marsh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Assembly and packaging of MEMS device
Patent number
10,472,231
Issue date
Nov 12, 2019
Invensense, Inc.
Brian H. Kim
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Fully wafer-level-packaged MEMS microphone and method for manufactu...
Patent number
10,306,372
Issue date
May 28, 2019
Goertek Inc.
Quanbo Zou
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and device for producing a microfluidic analysis cartridge
Patent number
10,295,441
Issue date
May 21, 2019
Robert Bosch GmbH
Franz Laermer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for self-aligning solder-attached MEMS die to a mounting sur...
Patent number
10,189,706
Issue date
Jan 29, 2019
DunAn Microstaq, Inc.
Wayne C. Long
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microfluidic device
Patent number
10,160,145
Issue date
Dec 25, 2018
STRATEC Consumables GmbH
Gottfried Reiter
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Externally induced charge patterning using rectifying devices
Patent number
10,141,285
Issue date
Nov 27, 2018
Palo Alto Research Center Incorporated
JengPing Lu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Die bond design for medium pressure sensor
Patent number
10,035,703
Issue date
Jul 31, 2018
Continental Automotive Systems, Inc.
Joe Pin Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing an electromechanical device and correspond...
Patent number
9,944,512
Issue date
Apr 17, 2018
TRONICS MICROSYSTEMS
Joël Collet
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
WAFER LEVEL PROXIMITY SENSOR AND METHOD OF MAKING SAME
Publication number
20250002333
Publication date
Jan 2, 2025
STMicroelectronics International N.V.
Eric SAUGIER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DIE STACKING WITH CONTROLLED ANGULAR ALIGNMENT
Publication number
20240425367
Publication date
Dec 26, 2024
NXP USA, Inc.
Chayathorn Saklang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DIE STACKING WITH CONTROLLED TILT AND ANGULAR ALIGNMENT
Publication number
20240425364
Publication date
Dec 26, 2024
NXP USA, Inc.
Chayathorn Saklang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
HIGH-PRECISION ALIGNMENT METHOD FOR PRODUCING A DEVICE, AND DEVICE
Publication number
20240262683
Publication date
Aug 8, 2024
ams-OSRAM International GmbH
Nicole Berner
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SOUND PRODUCING CELL
Publication number
20240031740
Publication date
Jan 25, 2024
xMEMS Labs, Inc.
Chiung C. Lo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Anchor Structure
Publication number
20240017987
Publication date
Jan 18, 2024
SensorTek technology Corp.
Shih-Wei Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PACKAGE STRUCTURE, APPARATUS AND FORMING METHODS THEREOF
Publication number
20240022859
Publication date
Jan 18, 2024
xMEMS Labs, Inc.
Chiung C. Lo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PACKAGING FOR A SENSOR AND METHODS OF MANUFACTURING THEREOF
Publication number
20230314197
Publication date
Oct 5, 2023
Applied Materials, Inc.
Arvinder Manmohan Singh Chadha
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
A PROCESS AND APPARATUS FOR THE PREPARATION OF A BONDED SUBSTRATE
Publication number
20220340416
Publication date
Oct 27, 2022
TOP TECHNOLOGY LTD
Youngho LEE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD AND ARRANGEMENT FOR ASSEMBLY OF MICROCHIPS INTO A SEPARATE S...
Publication number
20220324703
Publication date
Oct 13, 2022
Federico RIBET
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DEVICE AND METHOD FOR MONITORING SURFACE CONDITION OF CONTACT SURFA...
Publication number
20220002148
Publication date
Jan 6, 2022
National Taiwan University
Wei-Chang Li
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE
Publication number
20210280527
Publication date
Sep 9, 2021
NINGBO SEMICONDUCTOR INTERNATIONAL CORPORATION
Mengbin LIU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Micro-electromechanical (MEM) Power Relay
Publication number
20210139322
Publication date
May 13, 2021
Massachusetts Institute of Technology
Prashant Patil
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Laser-Assisted Material Phase-Change and Expulsion Micro-Machining...
Publication number
20210139321
Publication date
May 13, 2021
Massachusetts Institute of Technology
Prashant Patil
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
MEMS PACKAGE WITH ROUGHEND INTERFACE
Publication number
20200339413
Publication date
Oct 29, 2020
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Yu-Jui Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INTEGRATED PACKAGE STRUCTURE FOR MEMS ELEMENT AND ASIC CHIP AND MET...
Publication number
20200262700
Publication date
Aug 20, 2020
J-METRICS TECHNOLOGY Co., Ltd.
Sheng-Lin Ma
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ALIGNMENT MARK AND SEMICONDUCTOR DEVICE, AND FABRICATION METHODS TH...
Publication number
20200161251
Publication date
May 21, 2020
NINGBO SEMICONDUCTOR INTERNATIONAL CORPORATION
Mengbin LIU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Micro Devices Formed by Flex Circuit Substrates
Publication number
20200084892
Publication date
Mar 12, 2020
ENCITE LLC
Stephen A. Marsh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
COUPLING A MAGNET WITH A MEMS DEVICE
Publication number
20190391386
Publication date
Dec 26, 2019
Intel Corporation
Kyle Yazzie
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ASSEMBLY AND PACKAGING OF MEMS DEVICE
Publication number
20190308874
Publication date
Oct 10, 2019
InvenSense, Inc.
Brian H. Kim
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
TRANSFER HEAD AND METHOD FOR TRANSFERRING MICRO DEVICES
Publication number
20190267272
Publication date
Aug 29, 2019
MIKRO MESA TECHNOLOGY CO., LTD.
Li-Yi CHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SELF-CLEANING LIQUID LEVEL SENSOR
Publication number
20190162578
Publication date
May 30, 2019
International Business Machines Corporation
Jonathan Fry
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR BONDING WAFERS EUTECTICALLY, AND A WAFER COMPOSITE
Publication number
20190135617
Publication date
May 9, 2019
ROBERT BOSCH GmbH
Axel GROSSE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method For Self-Aligning Solder-Attached Mems Die To A Mounting Sur...
Publication number
20190092629
Publication date
Mar 28, 2019
DunAn Microstaq, Inc.
Wayne C. Long
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method For Self-Aligning Solder-Attached Mems Die To A Mounting Sur...
Publication number
20190092630
Publication date
Mar 28, 2019
DunAn Microstaq, Inc.
Wayne C. Long
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE, AND A SEMICONDUCTOR...
Publication number
20190088493
Publication date
Mar 21, 2019
Toshiba Memory Corporation
Shinya WATANABE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for Producing Mems Transducer, Mems Transducer, Ultrasound P...
Publication number
20190008479
Publication date
Jan 10, 2019
Konica Minolta Inc.
Yuta Nakayama
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF ASSEMBLING NANOSCALE AND MICROSCALE OBJECTS INTO THREE-DI...
Publication number
20180244518
Publication date
Aug 30, 2018
The Charles Stark Draper Laboratory, Inc.
Peter Miraglia
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method For Self-Aligning Solder-Attached Mems Die To A Mounting Sur...
Publication number
20180127269
Publication date
May 10, 2018
DunAn Microstaq, Inc.
Wayne C. Long
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING AN ELECTROMECHANICAL DEVICE AND CORRESPOND...
Publication number
20170305739
Publication date
Oct 26, 2017
TRONIC'S MICROSYSTEMS
Joël COLLET
B81 - MICRO-STRUCTURAL TECHNOLOGY