Aligning features and geometries on both sides of a substrate

Industry

CPC
B81C1/00603

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00603Aligning features and geometries on both sides of a substrate

Industries

Patents Grantslast 30 patents

Information Patent Grant
Micro-electro-mechanical systems micromirrors and micromirror arrays
- Patent number 11,927,741
- Issue date Mar 12, 2024
- PRECISELEY MICROTECHNOLOGY CORP.
- Tiansheng Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical systems micromirrors and micromirror arrays
- Patent number 11,567,312
- Issue date Jan 31, 2023
- PRECISELEY MICROTECHNOLOGY CORP.
- Tiansheng Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing an opening structure and opening structure
- Patent number 11,223,904
- Issue date Jan 11, 2022
- Infineon Technologies AG
- Wolfgang Friza
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfabricated gas flow structure
- Patent number 10,794,374
- Issue date Oct 6, 2020
- The Regents of the University of Michigan
- Yogesh Gianchandani
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of etching microelectronic mechanical system features in a s...
- Patent number 10,784,115
- Issue date Sep 22, 2020
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Feng Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Flexible strip for horology and method for manufacturing the same
- Patent number 10,579,020
- Issue date Mar 3, 2020
- The Swatch Group Research and Development Ltd.
- Gianni Di Domenico
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device
- Patent number 10,513,430
- Issue date Dec 24, 2019
- Sumitomo Precision Products Co., LTD
- Ryohei Uchino
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing an opening structure and opening structure
- Patent number 10,469,948
- Issue date Nov 5, 2019
- Infineon Technologies AG
- Wolfgang Friza
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of etching microelectronic mechanical system features in a s...
- Patent number 10,395,940
- Issue date Aug 27, 2019
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Feng Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of a multi-level micromechanical structure on...
- Patent number 9,969,615
- Issue date May 15, 2018
- Murata Manufacturing Co., Ltd.
- Antti Iihola
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing electronic component
- Patent number 9,611,142
- Issue date Apr 4, 2017
- Sumitomo Precision Products Co., LTD
- Yasuyuki Hirata
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MOEMS apparatus and a method for manufacturing same
- Patent number 9,459,447
- Issue date Oct 4, 2016
- STMicroelectronics International N.V.
- Moshe Medina
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for fabricating a self-aligned vertical comb drive structure
- Patent number 9,382,113
- Issue date Jul 5, 2016
- Asia Pacific Microsystems, Inc.
- Jer-Wei Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
SOI wafer and method of manufacturing the same
- Patent number 8,952,454
- Issue date Feb 10, 2015
- Mitsubishi Electric Corporation
- Kazuhiro Shimizu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a structure comprising at least one active par...
- Patent number 8,785,330
- Issue date Jul 22, 2014
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Philippe Robert
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MOEMS apparatus and a method for manufacturing same
- Patent number 8,693,074
- Issue date Apr 8, 2014
- STMicroelectronics International N.V.
- Moshe Medina
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MOEMS apparatus and a method for manufacturing same
- Patent number 8,305,670
- Issue date Nov 6, 2012
- STMicroelectronics International N.V.
- Moshe Medina
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of forming microdevice substrates using double-sided alignm...
- Patent number 8,283,256
- Issue date Oct 9, 2012
- Integrated Device Technology Inc.
- Wanling Pan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and system for wafer backside alignment
- Patent number 7,611,960
- Issue date Nov 3, 2009
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sheng-Chieh Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of performing a double-sided process
- Patent number 7,566,574
- Issue date Jul 28, 2009
- Touch Micro-System Technology Inc.
- Chen-Hsiung Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and device for wafer backside alignment overlay accuracy
- Patent number 7,494,830
- Issue date Feb 24, 2009
- Taiwan Semiconductor Manufacturing Company
- Sheng-Chieh Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of performing a double-sided process
- Patent number 7,306,955
- Issue date Dec 11, 2007
- Touch Micro-System Technology Inc.
- Chen-Hsiung Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEMS MICROMIRRORS AND MICROMIRROR ARRAYS
- Publication number 20240111148
- Publication date Apr 4, 2024
- Preciseley Microtechnology Corp.
- Tiansheng ZHOU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEMS MICROMIRRORS AND MICROMIRROR ARRAYS
- Publication number 20230126293
- Publication date Apr 27, 2023
- Preciseley Microtechnology Corp.
- Tiansheng ZHOU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF ETCHING MICROELECTRONIC MECHANICAL SYSTEM FEATURES IN A S...
- Publication number 20190333773
- Publication date Oct 31, 2019
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Feng Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MOEMS APPARATUS AND A METHOD FOR MANUFACTURING SAME
- Publication number 20140153074
- Publication date Jun 5, 2014
- STMicroelectronics International N.V
- Moshe Medina
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Fabricating a Self-Aligned Vertical Comb Drive Structure
- Publication number 20140126031
- Publication date May 8, 2014
- ASIA PACIFIC MICROSYSTEMS, INC.
- Jer-Wei Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING A STRUCTURE COMPRISING AT LEAST ONE ACTIVE PAR...
- Publication number 20130267049
- Publication date Oct 10, 2013
- Commissariat a I'Energie Atomique et aux Energies Alternatives
- Philippe ROBERT
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SOI WAFER AND METHOD OF MANUFACTURING THE SAME
- Publication number 20130221439
- Publication date Aug 29, 2013
- Kazuhiro SHIMIZU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MOEMS APPARATUS AND A METHOD FOR MANUFACTURING SAME
- Publication number 20130050793
- Publication date Feb 28, 2013
- STMicroelectronics International N.V
- Moshe Medina
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MOEMS APPARATUS AND A METHOD FOR MANUFACTURING SAME
- Publication number 20120062973
- Publication date Mar 15, 2012
- Moshe Medina
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND DEVICE FOR WAFER BACKSIDE ALIGNMENT OVERLAY ACCURACY
- Publication number 20080248600
- Publication date Oct 9, 2008
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sheng-Chieh Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF PERFORMING A DOUBLE-SIDED PROCESS
- Publication number 20070298582
- Publication date Dec 27, 2007
- Chen-Hsiung Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and system for wafer backside alignment
- Publication number 20070249137
- Publication date Oct 25, 2007
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sheng-Chieh Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF PERFORMING A DOUBLE-SIDED PROCESS
- Publication number 20070111472
- Publication date May 17, 2007
- Chen-Hsiung Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF PERFORMING DOUBLE-SIDED PROCESSES UPON A WAFER
- Publication number 20060030120
- Publication date Feb 9, 2006
- Shih-Feng Shao
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Aligning features and geometries on both sides of a substrate

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Micro-electro-mechanical systems micromirrors and micromirror arrays

Micro-electro-mechanical systems micromirrors and micromirror arrays

Method for manufacturing an opening structure and opening structure

Microfabricated gas flow structure

Method of etching microelectronic mechanical system features in a s...

Flexible strip for horology and method for manufacturing the same

Semiconductor device

Method for manufacturing an opening structure and opening structure

Method of etching microelectronic mechanical system features in a s...

Manufacturing method of a multi-level micromechanical structure on...

Method for manufacturing electronic component

MOEMS apparatus and a method for manufacturing same

Method for fabricating a self-aligned vertical comb drive structure

SOI wafer and method of manufacturing the same

Method for producing a structure comprising at least one active par...

MOEMS apparatus and a method for manufacturing same

MOEMS apparatus and a method for manufacturing same

Methods of forming microdevice substrates using double-sided alignm...

Method and system for wafer backside alignment

Method of performing a double-sided process

Method and device for wafer backside alignment overlay accuracy

Method of performing a double-sided process

Patents Applicationslast 30 patents

MICRO-ELECTRO-MECHANICAL SYSTEMS MICROMIRRORS AND MICROMIRROR ARRAYS

MICRO-ELECTRO-MECHANICAL SYSTEMS MICROMIRRORS AND MICROMIRROR ARRAYS

METHOD OF ETCHING MICROELECTRONIC MECHANICAL SYSTEM FEATURES IN A S...

MOEMS APPARATUS AND A METHOD FOR MANUFACTURING SAME

Method for Fabricating a Self-Aligned Vertical Comb Drive Structure

METHOD FOR PRODUCING A STRUCTURE COMPRISING AT LEAST ONE ACTIVE PAR...

SOI WAFER AND METHOD OF MANUFACTURING THE SAME

MOEMS APPARATUS AND A METHOD FOR MANUFACTURING SAME

MOEMS APPARATUS AND A METHOD FOR MANUFACTURING SAME

METHOD AND DEVICE FOR WAFER BACKSIDE ALIGNMENT OVERLAY ACCURACY

METHOD OF PERFORMING A DOUBLE-SIDED PROCESS

Method and system for wafer backside alignment

METHOD OF PERFORMING A DOUBLE-SIDED PROCESS

METHOD OF PERFORMING DOUBLE-SIDED PROCESSES UPON A WAFER