Aligning micro-parts

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CPC
B81C3/002

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C3/00Assembling of devices or systems from individually processed components

Current Industry

B81C3/002Aligning micro-parts

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Packaging MEMS in fluidic environments
- Patent number 10,712,525
- Issue date Jul 14, 2020
- Albert Ting
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Assembly processes for three-dimensional microstructures
- Patent number 10,612,925
- Issue date Apr 7, 2020
- The Regents of the University of Michigan
- Khalil Najafi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Packaged microsystems
- Patent number 9,950,922
- Issue date Apr 24, 2018
- The Regents of the University of Michigan
- Yogesh Gianchandani
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Plasma assisted method of accurate alignment and pre-bonding for mi...
- Patent number 9,842,749
- Issue date Dec 12, 2017
- Beijing University of Technology
- Guangsheng Guo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of component assembly on a substrate
- Patent number 9,347,940
- Issue date May 24, 2016
- Tamiras Per Pte. Ltd., LLC
- Till Bocking
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Massively parallel assembly of composite structures using depletion...
- Patent number 9,051,176
- Issue date Jun 9, 2015
- The Regents of the University of California
- Thomas G. Mason
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of manufacture of bottom port multi-part surface mount MEMS...
- Patent number 9,040,360
- Issue date May 26, 2015
- Knowles Electronics, LLC
- Anthony D. Minervini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of producing optical MEMS
- Patent number 9,018,724
- Issue date Apr 28, 2015
- AdvancedMEMS LLP
- Albert Ting
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for integrating a functional component into a microfluidic...
- Patent number 8,808,588
- Issue date Aug 19, 2014
- Sandia Corporation
- Blake Simmons
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of component assembly on a substrate
- Patent number 8,722,437
- Issue date May 13, 2014
- Mogul Solutions LLC
- Till Böcking
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of manufacture of bottom port surface mount silicon condens...
- Patent number 8,629,005
- Issue date Jan 14, 2014
- Knowles Electronics, LLC
- Anthony D. Minervini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of manufacture of bottom port multi-part surface mount sili...
- Patent number 8,623,710
- Issue date Jan 7, 2014
- Knowles Electronics, LLC
- Anthony D. Minervini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of manufacture of top port surface mount silicon condenser...
- Patent number 8,623,709
- Issue date Jan 7, 2014
- Knowles Electronics, LLC
- Anthony D. Minervini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of manufacture of top port multi-part surface mount silicon...
- Patent number 8,617,934
- Issue date Dec 31, 2013
- Knowles Electronics, LLC
- Anthony D. Minervini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wafer arrangement and a method for manufacturing the wafer arrangement
- Patent number 8,319,302
- Issue date Nov 27, 2012
- Agency for Science, Technology and Research
- Qingxin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro electro-mechanical system packaging and interconnect
- Patent number 8,217,473
- Issue date Jul 10, 2012
- Hewlett-Packard Development Company, L.P.
- Chien-Hua Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and structure for magnetically-directed, self-assembly of th...
- Patent number 8,138,868
- Issue date Mar 20, 2012
- University of Florida Research Foundation, Inc.
- David Patrick Arnold
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Forming large planar structures from substrates using edge Coulomb...
- Patent number 8,018,009
- Issue date Sep 13, 2011
- Metamems Corp.
- Thaddeus John Gabara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Transferable micro spring structure
- Patent number 7,985,081
- Issue date Jul 26, 2011
- Palo Alto Research Center Incorporated
- Koenraad Van Schuylenbergh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for self-assembling microstructures
- Patent number 7,943,052
- Issue date May 17, 2011
- NATIONAL TAIWAN UNIVERSITY
- Enboa Wu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Precise hand-assembly of microfabricated components
- Patent number 7,900,336
- Issue date Mar 8, 2011
- Massachusetts Institute of Technology
- Akintunde Ibitayo Akinwande
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromirror manufacturing method
- Patent number 7,901,969
- Issue date Mar 8, 2011
- Silicon Quest Kabushiki-Kaisha
- Hirotoshi Ichikawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Re-assembly process for MEMS structures
- Patent number 7,897,435
- Issue date Mar 1, 2011
- FormFactor, Inc.
- Benjamin N. Eldridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for packaging semiconductor device and package structure the...
- Patent number 7,855,424
- Issue date Dec 21, 2010
- Advanced Semiconductor Engineering, Inc.
- Chain-Hau Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for aligning die to substrate
- Patent number 7,848,002
- Issue date Dec 7, 2010
- Silicon Quest Kabushiki-Kaisha
- Hirotoshi Ichikawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Placing a MEMS part on an application platform using a guide mask
- Patent number 7,811,849
- Issue date Oct 12, 2010
- WinMEMS Technologies Co., Ltd.
- Tseng-Yang Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Monolithic structures including alignment and/or retention fixtures...
- Patent number 7,811,427
- Issue date Oct 12, 2010
- Microfabrica Inc.
- Adam L. Cohen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of sealing or welding two elements to one another
- Patent number 7,772,041
- Issue date Aug 10, 2010
- Commissariat a l'Energie Atomique
- François Marion
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical sub-assembly having an on-chip transfer mec...
- Patent number 7,735,216
- Issue date Jun 15, 2010
- International Business Machines Corporation
- Christopher M. Schnabel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Calibration for automated microassembly
- Patent number 7,637,142
- Issue date Dec 29, 2009
- Zyvex Labs
- Kenneth Tsui
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
ASSEMBLY PROCESSES FOR THREE-DIMENSIONAL MICROSTRUCTURES
- Publication number 20190094024
- Publication date Mar 28, 2019
- The Regents of the University of Michigan
- Khalil NAJAFI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Plasma assisted method of accurate alignment and pre-bonding for mi...
- Publication number 20170301564
- Publication date Oct 19, 2017
- BEIJING UNIVERSITY OF TECHNOLOGY
- Guangsheng Guo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PACKAGED MICROSYSTEMS
- Publication number 20170174506
- Publication date Jun 22, 2017
- The Regents of the University of Michigan
- Yogesh GIANCHANDANI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF COMPONENT ASSEMBLY ON A SUBSTRATE
- Publication number 20140220670
- Publication date Aug 7, 2014
- NEWSOUTH INNOVATIONS PTY LIMITED
- Till Bocking
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF COMPONENT ASSEMBLY ON A SUBSTRATE
- Publication number 20100279394
- Publication date Nov 4, 2010
- NEWSOUTH INNOVATIONS PTY LIMITED
- Till Böcking
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
WAFER ARRANGEMENT AND A METHOD FOR MANUFACTURING THE WAFER ARRANGEMENT
- Publication number 20100219496
- Publication date Sep 2, 2010
- Agency for Science ,Technology and Research
- Qingxin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Massively Parallel Assembly of Composite Structures Using Depletion...
- Publication number 20090324904
- Publication date Dec 31, 2009
- The Regents of the University of California
- Thomas G. Mason
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLACING A MEMS PART ON AN APPLICATION PLATFORM USING A GUIDE MASK
- Publication number 20090191661
- Publication date Jul 30, 2009
- Tseng-Yang Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FORMING LARGE PLANAR STRUCTURES FROM SUBSTRATES USING EDGE COULOMB...
- Publication number 20090147432
- Publication date Jun 11, 2009
- MetaMEMS LLC
- Thaddeus Gabara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromirror manufacturing method
- Publication number 20090149004
- Publication date Jun 11, 2009
- Hirotoshi Ichikawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FABRICATING AN ARRAY OF MEMS PARTS ON A SUBSTRATE
- Publication number 20090144970
- Publication date Jun 11, 2009
- WinMEMS Technologies Holdings Co., Ltd.
- Tseng-Yang Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20090122432
- Publication date May 14, 2009
- HOYA CORPORATION
- Naoki KIKUCHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF COMPONENT ASSEMBLY ON A SUBSTRATE
- Publication number 20090117339
- Publication date May 7, 2009
- Till Bocking
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Precise hand-assembly of microfabricated components
- Publication number 20090113687
- Publication date May 7, 2009
- Akintunde Ibitayo Akinwande
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS BASED OPTICAL COHERENCE TOMOGRAPHY PROBE
- Publication number 20090043211
- Publication date Feb 12, 2009
- Albert Ting
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF PRODUCING OPTICAL MEMS
- Publication number 20090039489
- Publication date Feb 12, 2009
- Albert Ting
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SUB-ASSEMBLY HAVING AN ON-CHIP TRANSFER MEC...
- Publication number 20090019691
- Publication date Jan 22, 2009
- International Business Machines Corporation
- Christopher M. Schnabel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Transferable Micro Spring Structure
- Publication number 20080268669
- Publication date Oct 30, 2008
- Palo Alto Research Center Incorporated
- Koenraad F. Van Schuylenbergh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and Structure for Magnetically-Directed, Self-Assembly of Th...
- Publication number 20080218299
- Publication date Sep 11, 2008
- David Patrick Arnold
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for aligning die to substrate
- Publication number 20080212162
- Publication date Sep 4, 2008
- Hirotoshi Ichikawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TRIPLE ALIGNMENT SUBSTRATE METHOD AND STRUCTURE FOR PACKAGING DEVICES
- Publication number 20080138957
- Publication date Jun 12, 2008
- Miradia Inc.
- Xiao Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Alignment of a cap to a MEMS wafer
- Publication number 20080131662
- Publication date Jun 5, 2008
- Larry L. Jordan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF SEALING OR WELDING TWO ELEMENTS TO ONE ANOTHER
- Publication number 20080110013
- Publication date May 15, 2008
- COMMISSARIAT A L'ENERGIE ATOMIQUE
- Francois Marion
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Monolithic Structures Including Alignment and/or Retention Fixtures...
- Publication number 20080062638
- Publication date Mar 13, 2008
- Microfabrica Inc.
- Adam L. Cohen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Aligning or Assembling Nano-Structure on Solid Surface
- Publication number 20080044775
- Publication date Feb 21, 2008
- Seung-Hun Hong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR SELF-ASSEMBLING MICROSTRUCTURES
- Publication number 20080023435
- Publication date Jan 31, 2008
- Enboa WU
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method and apparatus for microstructure assembly
- Publication number 20080016682
- Publication date Jan 24, 2008
- INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Ming-Hung Chou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and System for Self-Aligning Parts in Mems
- Publication number 20080011814
- Publication date Jan 17, 2008
- International Business Machines Corporation
- Stefano Oggioni
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of aligning mask layers to buried features
- Publication number 20070269959
- Publication date Nov 22, 2007
- John E. Freeman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Oriented self-location of microstructures with alignment structures
- Publication number 20070252289
- Publication date Nov 1, 2007
- HRL Laboratories, LLC
- Peter D. Brewer
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Aligning micro-parts

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Packaging MEMS in fluidic environments

Assembly processes for three-dimensional microstructures

Packaged microsystems

Plasma assisted method of accurate alignment and pre-bonding for mi...

Method of component assembly on a substrate

Massively parallel assembly of composite structures using depletion...

Methods of manufacture of bottom port multi-part surface mount MEMS...

Method of producing optical MEMS

Methods for integrating a functional component into a microfluidic...

Method of component assembly on a substrate

Methods of manufacture of bottom port surface mount silicon condens...

Methods of manufacture of bottom port multi-part surface mount sili...

Methods of manufacture of top port surface mount silicon condenser...

Methods of manufacture of top port multi-part surface mount silicon...

Wafer arrangement and a method for manufacturing the wafer arrangement

Micro electro-mechanical system packaging and interconnect

Method and structure for magnetically-directed, self-assembly of th...

Forming large planar structures from substrates using edge Coulomb...

Transferable micro spring structure

Method for self-assembling microstructures

Precise hand-assembly of microfabricated components

Micromirror manufacturing method

Re-assembly process for MEMS structures

Method for packaging semiconductor device and package structure the...

Method for aligning die to substrate

Placing a MEMS part on an application platform using a guide mask

Monolithic structures including alignment and/or retention fixtures...

Method of sealing or welding two elements to one another

Micro-electromechanical sub-assembly having an on-chip transfer mec...

Calibration for automated microassembly

Patents Applicationslast 30 patents

ASSEMBLY PROCESSES FOR THREE-DIMENSIONAL MICROSTRUCTURES

Plasma assisted method of accurate alignment and pre-bonding for mi...

PACKAGED MICROSYSTEMS

METHOD OF COMPONENT ASSEMBLY ON A SUBSTRATE

METHOD OF COMPONENT ASSEMBLY ON A SUBSTRATE

WAFER ARRANGEMENT AND A METHOD FOR MANUFACTURING THE WAFER ARRANGEMENT

Massively Parallel Assembly of Composite Structures Using Depletion...

PLACING A MEMS PART ON AN APPLICATION PLATFORM USING A GUIDE MASK

FORMING LARGE PLANAR STRUCTURES FROM SUBSTRATES USING EDGE COULOMB...

Micromirror manufacturing method

FABRICATING AN ARRAY OF MEMS PARTS ON A SUBSTRATE

MICRO-DEVICE AND METHOD FOR MANUFACTURING THE SAME

METHOD OF COMPONENT ASSEMBLY ON A SUBSTRATE

Precise hand-assembly of microfabricated components

MEMS BASED OPTICAL COHERENCE TOMOGRAPHY PROBE

METHOD OF PRODUCING OPTICAL MEMS

MICRO-ELECTROMECHANICAL SUB-ASSEMBLY HAVING AN ON-CHIP TRANSFER MEC...

Transferable Micro Spring Structure

Method and Structure for Magnetically-Directed, Self-Assembly of Th...

Method for aligning die to substrate

TRIPLE ALIGNMENT SUBSTRATE METHOD AND STRUCTURE FOR PACKAGING DEVICES

Alignment of a cap to a MEMS wafer

METHOD OF SEALING OR WELDING TWO ELEMENTS TO ONE ANOTHER

Monolithic Structures Including Alignment and/or Retention Fixtures...

Method for Aligning or Assembling Nano-Structure on Solid Surface

METHOD FOR SELF-ASSEMBLING MICROSTRUCTURES

Method and apparatus for microstructure assembly

Method and System for Self-Aligning Parts in Mems

Method of aligning mask layers to buried features

Oriented self-location of microstructures with alignment structures