Alignment for lithographic apparatus using patterning methods other than those involving the exposure to radiation

Industry

CPC
G03F9/7042

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Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F9/00Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces

Current Industry

G03F9/7042Alignment for lithographic apparatus using patterning methods other than those involving the exposure to radiation

Industries

Patents Grantslast 30 patents

Information Patent Grant
Imprint apparatus, imprint method, and article manufacturing method
- Patent number 11,966,157
- Issue date Apr 23, 2024
- Canon Kabushiki Kaisha
- Kengo Kamei
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus, imprint method, and article manufacturing method
- Patent number 11,899,362
- Issue date Feb 13, 2024
- Canon Kabushiki Kaisha
- Yosuke Murakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint method, imprint apparatus, and film formation apparatus
- Patent number 11,852,985
- Issue date Dec 26, 2023
- Kioxia Corporation
- Takeshi Higuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning substrates in imprint lithography processes
- Patent number 11,846,890
- Issue date Dec 19, 2023
- Molecular Imprints, Inc.
- Roy Matthew Patterson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus, imprint method, and article manufacturing method
- Patent number 11,835,871
- Issue date Dec 5, 2023
- Canon Kabushiki Kaisha
- Satoshi Iino
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus, method of imprinting, and method of manufacturin...
- Patent number 11,833,737
- Issue date Dec 5, 2023
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint method, imprint apparatus, and article manufacturing method
- Patent number 11,833,720
- Issue date Dec 5, 2023
- Canon Kabushiki Kaisha
- Hiroyuki Sekiguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning apparatus, lithography apparatus, and article manufactu...
- Patent number 11,835,872
- Issue date Dec 5, 2023
- Canon Kabushiki Kaisha
- Toru Kobori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for disposing substrate and method for manufacturing article
- Patent number 11,774,850
- Issue date Oct 3, 2023
- Canon Kabushiki Kaisha
- Naoki Funabashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Imprint method, imprint apparatus, and article manufacturing method
- Patent number 11,768,433
- Issue date Sep 26, 2023
- Canon Kabushiki Kaisha
- Kazuhiro Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus to register template with spatial light modulator
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- Issue date Sep 26, 2023
- Canon Kabushiki Kaisha
- James W. Irving
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Template, patterning method, and method for manufacturing semicondu...
- Patent number 11,762,285
- Issue date Sep 19, 2023
- Kioxia Corporation
- Anupam Mitra
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Imprint method, imprint apparatus, and method of manufacturing article
- Patent number 11,752,670
- Issue date Sep 12, 2023
- Canon Kabushiki Kaisha
- Yuji Sakata
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint apparatus
- Patent number 11,709,421
- Issue date Jul 25, 2023
- Canon Kabushiki Kaisha
- Ken-ichiro Shinoda
- G02 - OPTICS
Information Patent Grant
Fiducial design
- Patent number 11,703,755
- Issue date Jul 18, 2023
- Magic Leap, Inc.
- Huihang Dong
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Lithography apparatus and method of manufacturing article
- Patent number 11,681,237
- Issue date Jun 20, 2023
- Canon Kabushiki Kaisha
- Naosuke Nishimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus and article manufacturing method
- Patent number 11,673,313
- Issue date Jun 13, 2023
- Canon Kabushiki Kaisha
- Kenji Yaegashi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Template, template manufacturing method, and semiconductor device m...
- Patent number 11,669,011
- Issue date Jun 6, 2023
- Kioxia Corporation
- Jun Watanabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint lithography
- Patent number 11,635,696
- Issue date Apr 25, 2023
- ASML Netherlands B.V.
- Catharinus De Schiffart
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning substrates in imprint lithography processes
- Patent number 11,567,418
- Issue date Jan 31, 2023
- Molecular Imprints, Inc.
- Roy Matthew Patterson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Devices, systems, and methods for the hybrid generation of drop pat...
- Patent number 11,567,414
- Issue date Jan 31, 2023
- Canon Kabushiki Kaisha
- Ahmed M. Hussein
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus and method of manufacturing article
- Patent number 11,526,090
- Issue date Dec 13, 2022
- Canon Kabushiki Kaisha
- Ryosuke Tsutsumi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Systems and methods for generating drop patterns
- Patent number 11,474,441
- Issue date Oct 18, 2022
- Canon Kabushiki Kaisha
- Ahmed M. Hussein
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Pattern formation method, lithography apparatus, lithography system...
- Patent number 11,460,768
- Issue date Oct 4, 2022
- Canon Kabushiki Kaisha
- Hiroshi Sato
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Systems and methods for curing a shaped film
- Patent number 11,429,022
- Issue date Aug 30, 2022
- Canon Kabushiki Kaisha
- Amir Tavakkoli Kermani Ghariehali
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint apparatus, imprint method, and method for manufacturing pro...
- Patent number 11,413,793
- Issue date Aug 16, 2022
- Canon Kabushiki Kaisha
- Atsushi Kimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus, operation method of imprint apparatus, and artic...
- Patent number 11,413,651
- Issue date Aug 16, 2022
- Canon Kabushiki Kaisha
- Yoshihiro Shiode
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position measurement apparatus, overlay inspection apparatus, posit...
- Patent number 11,372,342
- Issue date Jun 28, 2022
- Canon Kabushiki Kaisha
- Toshiki Iwai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of determining drop recipe, imprint apparatus, and article m...
- Patent number 11,366,400
- Issue date Jun 21, 2022
- Canon Kabushiki Kaisha
- Shinichi Hirano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Overlay improvement in nanoimprint lithography
- Patent number 11,347,144
- Issue date May 31, 2022
- Anshuman Cherala
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

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CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING...
- Publication number 20240210843
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- Canon Kabushiki Kaisha
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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IMPRINT APPARATUS, PATTERN FORMING METHOD, AND METHOD OF MANUFACTUR...
- Publication number 20240201606
- Publication date Jun 20, 2024
- KIOXIA Corporation
- Masaki MITSUYASU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR IDENTIFYING POSITIONS OF A SPATIAL LIGHT M...
- Publication number 20240192612
- Publication date Jun 13, 2024
- Canon Kabushiki Kaisha
- Mehul N. Patel
- G02 - OPTICS
Information Patent Application
ALIGNMENT METHOD AND ASSOCIATED ALIGNMENT AND LITHOGRAPHIC APPARATUSES
- Publication number 20240184221
- Publication date Jun 6, 2024
- ASML NETHERLANDS B.V.
- Samee Ur REHMAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS, ARTICLE MANUFACTURING METHOD, DETERMINATION METH...
- Publication number 20240176231
- Publication date May 30, 2024
- Canon Kabushiki Kaisha
- KEIJI YAMASHITA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINTING METHOD, IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20240045347
- Publication date Feb 8, 2024
- Canon Kabushiki Kaisha
- YUJI SAKATA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METROLOGY METHOD AND APPARATUS AND COMPUTER PROGRAM
- Publication number 20240027918
- Publication date Jan 25, 2024
- ASML NETHERLANDS B.V.
- Simon Gijsbert Josephus MATHIJSSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERN FORMING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD,...
- Publication number 20230408935
- Publication date Dec 21, 2023
- KIOXIA Corporation
- Anupam MITRA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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SIMULATION-ASSISTED METROLOGY IMAGE ALIGNMENT
- Publication number 20230401727
- Publication date Dec 14, 2023
- ASML NETHERLANDS B.V.
- Te-Sheng WANG
- G06 - COMPUTING CALCULATING COUNTING
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IMPRINT METHOD, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD
- Publication number 20230384666
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- Canon Kabushiki Kaisha
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- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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MULTI-CHIP DIE ALIGNMENT
- Publication number 20230378081
- Publication date Nov 23, 2023
- International Business Machines Corporation
- Effendi Leobandung
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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LITHOGRAPHY DEVICE, LITHOGRAPHY METHOD, AND ARTICLE MANUFACTURING M...
- Publication number 20230350313
- Publication date Nov 2, 2023
- Canon Kabushiki Kaisha
- KAZUHIRO SATO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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MANAGING MULTI-OBJECTIVE ALIGNMENTS FOR IMPRINTING
- Publication number 20230296993
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- Magic Leap, Inc.
- Jeremy Lee SEVIER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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LITHOGRAPHIC PRE-ALIGNMENT IMAGING SENSOR WITH BUILD-IN COAXIAL ILL...
- Publication number 20230236519
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- ASML Holding N.V.
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IMPRINT LITHOGRAPHY
- Publication number 20230221651
- Publication date Jul 13, 2023
- ASML NETHERLANDS B.V.
- Catharinus DE SCHIFFART
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD
- Publication number 20230213854
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- Canon Kabushiki Kaisha
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- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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POSITIONING SUBSTRATES IN IMPRINT LITHOGRAPHY PROCESSES
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- Publication date Jun 8, 2023
- Molecular Imprints, Inc.
- Roy Matthew Patterson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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APPARATUS AND METHOD FOR OPTIMIZING ACTUATOR FORCES
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- Canon Kabushiki Kaisha
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- B82 - NANO-TECHNOLOGY
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MANAGEMENT APPARATUS, LITHOGRAPHY APPARATUS, MANAGEMENT METHOD, AND...
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MARK, TEMPLATE, AND SEMICONDCTOR DEVICE MANUFACTURING METHOD
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- KIOXIA Corporation
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POSITIONING APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTU...
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SEMICONDUCTOR DEVICE AND TEMPLATE
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SYSTEMS AND METHODS FOR GENERATING DROP PATTERNS
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- B82 - NANO-TECHNOLOGY

Alignment for lithographic apparatus using patterning methods other than those involving the exposure to radiation

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Imprint apparatus, imprint method, and article manufacturing method

Imprint apparatus, imprint method, and article manufacturing method

Imprint method, imprint apparatus, and film formation apparatus

Positioning substrates in imprint lithography processes

Imprint apparatus, imprint method, and article manufacturing method

Imprint apparatus, method of imprinting, and method of manufacturin...

Imprint method, imprint apparatus, and article manufacturing method

Positioning apparatus, lithography apparatus, and article manufactu...

Method for disposing substrate and method for manufacturing article

Imprint method, imprint apparatus, and article manufacturing method

Method and apparatus to register template with spatial light modulator

Template, patterning method, and method for manufacturing semicondu...

Imprint method, imprint apparatus, and method of manufacturing article

Imprint apparatus

Fiducial design

Lithography apparatus and method of manufacturing article

Imprint apparatus and article manufacturing method

Template, template manufacturing method, and semiconductor device m...

Imprint lithography

Positioning substrates in imprint lithography processes

Devices, systems, and methods for the hybrid generation of drop pat...

Imprint apparatus and method of manufacturing article

Systems and methods for generating drop patterns

Pattern formation method, lithography apparatus, lithography system...

Systems and methods for curing a shaped film

Imprint apparatus, imprint method, and method for manufacturing pro...

Imprint apparatus, operation method of imprint apparatus, and artic...

Position measurement apparatus, overlay inspection apparatus, posit...

Method of determining drop recipe, imprint apparatus, and article m...

Overlay improvement in nanoimprint lithography

Patents Applicationslast 30 patents

CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING...

IMPRINT APPARATUS, PATTERN FORMING METHOD, AND METHOD OF MANUFACTUR...

METHOD AND APPARATUS FOR IDENTIFYING POSITIONS OF A SPATIAL LIGHT M...

ALIGNMENT METHOD AND ASSOCIATED ALIGNMENT AND LITHOGRAPHIC APPARATUSES

IMPRINT APPARATUS, ARTICLE MANUFACTURING METHOD, DETERMINATION METH...

IMPRINTING METHOD, IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD

METROLOGY METHOD AND APPARATUS AND COMPUTER PROGRAM

PATTERN FORMING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD,...

SIMULATION-ASSISTED METROLOGY IMAGE ALIGNMENT

IMPRINT METHOD, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD

MULTI-CHIP DIE ALIGNMENT

LITHOGRAPHY DEVICE, LITHOGRAPHY METHOD, AND ARTICLE MANUFACTURING M...

MANAGING MULTI-OBJECTIVE ALIGNMENTS FOR IMPRINTING

LITHOGRAPHIC PRE-ALIGNMENT IMAGING SENSOR WITH BUILD-IN COAXIAL ILL...

IMPRINT LITHOGRAPHY

IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD

POSITIONING SUBSTRATES IN IMPRINT LITHOGRAPHY PROCESSES

APPARATUS AND METHOD FOR OPTIMIZING ACTUATOR FORCES

MANAGEMENT APPARATUS, LITHOGRAPHY APPARATUS, MANAGEMENT METHOD, AND...

MARK, TEMPLATE, AND SEMICONDCTOR DEVICE MANUFACTURING METHOD

POSITIONING APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTU...

METHOD AND APPARATUS TO REGISTER TEMPLATE WITH SPATIAL LIGHT MODULATOR

IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE

DEVICES, SYSTEMS, AND METHODS FOR THE HYBRID GENERATION OF DROP PAT...

EVALUATION APPARATUS, COMPUTER-READABLE STORAGE MEDIUM, EVALUATION...

IMPRINT METHOD, IMPRINT APPARATUS, AND FILM FORMATION APPARATUS

TEMPLATE, METHOD FOR FABRICATING TEMPLATE, AND METHOD FOR FABRICATI...

IMPRINT APPARATUS, IMPRINTING METHOD, AND METHOD OF MANUFACTURING P...

SEMICONDUCTOR DEVICE AND TEMPLATE

SYSTEMS AND METHODS FOR GENERATING DROP PATTERNS