Alignment for lithographic apparatus using patterning methods other than those involving the exposure to radiation

Industry

CPC
G03F9/7042

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Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F9/00Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces

Current Industry

G03F9/7042Alignment for lithographic apparatus using patterning methods other than those involving the exposure to radiation

Industries

Patents Grantslast 30 patents

Information Patent Grant
Imprint lithography
- Patent number 12,147,162
- Issue date Nov 19, 2024
- ASML Netherlands B.V.
- Catharinus De Schiffart
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus with movable stages
- Patent number 12,147,167
- Issue date Nov 19, 2024
- ASML Netherlands B.V.
- Junichi Kanehara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for optimizing actuator forces
- Patent number 12,124,165
- Issue date Oct 22, 2024
- Canon Kabushiki Kaisha
- Nilabh K. Roy
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Template, manufacturing method of template, and manufacturing metho...
- Patent number 12,087,604
- Issue date Sep 10, 2024
- Kioxia Corporation
- Kazuhiro Takahata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Imprint method, imprint apparatus, and article manufacturing method
- Patent number 12,078,927
- Issue date Sep 3, 2024
- Canon Kabushiki Kaisha
- Kazuhiro Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Template, workpiece, and alignment method
- Patent number 12,078,922
- Issue date Sep 3, 2024
- Kioxia Corporation
- Takashi Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus and method of manufacturing article
- Patent number 12,032,283
- Issue date Jul 9, 2024
- Canon Kabushiki Kaisha
- Naosuke Nishimura
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint apparatus, imprint method, and article manufacturing method
- Patent number 11,966,157
- Issue date Apr 23, 2024
- Canon Kabushiki Kaisha
- Kengo Kamei
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus, imprint method, and article manufacturing method
- Patent number 11,899,362
- Issue date Feb 13, 2024
- Canon Kabushiki Kaisha
- Yosuke Murakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint method, imprint apparatus, and film formation apparatus
- Patent number 11,852,985
- Issue date Dec 26, 2023
- Kioxia Corporation
- Takeshi Higuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning substrates in imprint lithography processes
- Patent number 11,846,890
- Issue date Dec 19, 2023
- Molecular Imprints, Inc.
- Roy Matthew Patterson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus, imprint method, and article manufacturing method
- Patent number 11,835,871
- Issue date Dec 5, 2023
- Canon Kabushiki Kaisha
- Satoshi Iino
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus, method of imprinting, and method of manufacturin...
- Patent number 11,833,737
- Issue date Dec 5, 2023
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint method, imprint apparatus, and article manufacturing method
- Patent number 11,833,720
- Issue date Dec 5, 2023
- Canon Kabushiki Kaisha
- Hiroyuki Sekiguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning apparatus, lithography apparatus, and article manufactu...
- Patent number 11,835,872
- Issue date Dec 5, 2023
- Canon Kabushiki Kaisha
- Toru Kobori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for disposing substrate and method for manufacturing article
- Patent number 11,774,850
- Issue date Oct 3, 2023
- Canon Kabushiki Kaisha
- Naoki Funabashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Imprint method, imprint apparatus, and article manufacturing method
- Patent number 11,768,433
- Issue date Sep 26, 2023
- Canon Kabushiki Kaisha
- Kazuhiro Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus to register template with spatial light modulator
- Patent number 11,768,445
- Issue date Sep 26, 2023
- Canon Kabushiki Kaisha
- James W. Irving
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Template, patterning method, and method for manufacturing semicondu...
- Patent number 11,762,285
- Issue date Sep 19, 2023
- Kioxia Corporation
- Anupam Mitra
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Imprint method, imprint apparatus, and method of manufacturing article
- Patent number 11,752,670
- Issue date Sep 12, 2023
- Canon Kabushiki Kaisha
- Yuji Sakata
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint apparatus
- Patent number 11,709,421
- Issue date Jul 25, 2023
- Canon Kabushiki Kaisha
- Ken-ichiro Shinoda
- G02 - OPTICS
Information Patent Grant
Fiducial design
- Patent number 11,703,755
- Issue date Jul 18, 2023
- Magic Leap, Inc.
- Huihang Dong
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Lithography apparatus and method of manufacturing article
- Patent number 11,681,237
- Issue date Jun 20, 2023
- Canon Kabushiki Kaisha
- Naosuke Nishimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus and article manufacturing method
- Patent number 11,673,313
- Issue date Jun 13, 2023
- Canon Kabushiki Kaisha
- Kenji Yaegashi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Template, template manufacturing method, and semiconductor device m...
- Patent number 11,669,011
- Issue date Jun 6, 2023
- Kioxia Corporation
- Jun Watanabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint lithography
- Patent number 11,635,696
- Issue date Apr 25, 2023
- ASML Netherlands B.V.
- Catharinus De Schiffart
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning substrates in imprint lithography processes
- Patent number 11,567,418
- Issue date Jan 31, 2023
- Molecular Imprints, Inc.
- Roy Matthew Patterson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Devices, systems, and methods for the hybrid generation of drop pat...
- Patent number 11,567,414
- Issue date Jan 31, 2023
- Canon Kabushiki Kaisha
- Ahmed M. Hussein
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus and method of manufacturing article
- Patent number 11,526,090
- Issue date Dec 13, 2022
- Canon Kabushiki Kaisha
- Ryosuke Tsutsumi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Systems and methods for generating drop patterns
- Patent number 11,474,441
- Issue date Oct 18, 2022
- Canon Kabushiki Kaisha
- Ahmed M. Hussein
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD
- Publication number 20240377767
- Publication date Nov 14, 2024
- Canon Kabushiki Kaisha
- MIZUKI ISHIMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SCALABLE NANOIMPRINT MANUFACTURING OF FUNCTIONAL MULTI-LAYER METASU...
- Publication number 20240369738
- Publication date Nov 7, 2024
- Arizona Board of Regents on behalf of Arizona State University
- Chao WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INFORMATION PROCESSING METHOD FOR DECIDING ARRANGEMENT OF DROPLETS...
- Publication number 20240264529
- Publication date Aug 8, 2024
- Canon Kabushiki Kaisha
- NAOKI KIYOHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING...
- Publication number 20240210843
- Publication date Jun 27, 2024
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS, PATTERN FORMING METHOD, AND METHOD OF MANUFACTUR...
- Publication number 20240201606
- Publication date Jun 20, 2024
- KIOXIA Corporation
- Masaki MITSUYASU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR IDENTIFYING POSITIONS OF A SPATIAL LIGHT M...
- Publication number 20240192612
- Publication date Jun 13, 2024
- Canon Kabushiki Kaisha
- Mehul N. Patel
- G02 - OPTICS
Information Patent Application
ALIGNMENT METHOD AND ASSOCIATED ALIGNMENT AND LITHOGRAPHIC APPARATUSES
- Publication number 20240184221
- Publication date Jun 6, 2024
- ASML NETHERLANDS B.V.
- Samee Ur REHMAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS, ARTICLE MANUFACTURING METHOD, DETERMINATION METH...
- Publication number 20240176231
- Publication date May 30, 2024
- Canon Kabushiki Kaisha
- KEIJI YAMASHITA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINTING METHOD, IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20240045347
- Publication date Feb 8, 2024
- Canon Kabushiki Kaisha
- YUJI SAKATA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METROLOGY METHOD AND APPARATUS AND COMPUTER PROGRAM
- Publication number 20240027918
- Publication date Jan 25, 2024
- ASML NETHERLANDS B.V.
- Simon Gijsbert Josephus MATHIJSSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERN FORMING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD,...
- Publication number 20230408935
- Publication date Dec 21, 2023
- KIOXIA Corporation
- Anupam MITRA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SIMULATION-ASSISTED METROLOGY IMAGE ALIGNMENT
- Publication number 20230401727
- Publication date Dec 14, 2023
- ASML NETHERLANDS B.V.
- Te-Sheng WANG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IMPRINT METHOD, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD
- Publication number 20230384666
- Publication date Nov 30, 2023
- Canon Kabushiki Kaisha
- Kazuhiro Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MULTI-CHIP DIE ALIGNMENT
- Publication number 20230378081
- Publication date Nov 23, 2023
- International Business Machines Corporation
- Effendi Leobandung
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY DEVICE, LITHOGRAPHY METHOD, AND ARTICLE MANUFACTURING M...
- Publication number 20230350313
- Publication date Nov 2, 2023
- Canon Kabushiki Kaisha
- KAZUHIRO SATO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MANAGING MULTI-OBJECTIVE ALIGNMENTS FOR IMPRINTING
- Publication number 20230296993
- Publication date Sep 21, 2023
- Magic Leap, Inc.
- Jeremy Lee SEVIER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC PRE-ALIGNMENT IMAGING SENSOR WITH BUILD-IN COAXIAL ILL...
- Publication number 20230236519
- Publication date Jul 27, 2023
- ASML Holding N.V.
- Yuli Vladimirsky
- G02 - OPTICS
Information Patent Application
IMPRINT LITHOGRAPHY
- Publication number 20230221651
- Publication date Jul 13, 2023
- ASML NETHERLANDS B.V.
- Catharinus DE SCHIFFART
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD
- Publication number 20230213854
- Publication date Jul 6, 2023
- Canon Kabushiki Kaisha
- Yosuke MURAKAMI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITIONING SUBSTRATES IN IMPRINT LITHOGRAPHY PROCESSES
- Publication number 20230176493
- Publication date Jun 8, 2023
- Molecular Imprints, Inc.
- Roy Matthew Patterson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR OPTIMIZING ACTUATOR FORCES
- Publication number 20230127984
- Publication date Apr 27, 2023
- Canon Kabushiki Kaisha
- Nilabh K. Roy
- B82 - NANO-TECHNOLOGY
Information Patent Application
MANAGEMENT APPARATUS, LITHOGRAPHY APPARATUS, MANAGEMENT METHOD, AND...
- Publication number 20230106601
- Publication date Apr 6, 2023
- Canon Kabushiki Kaisha
- Satoru ITOH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MARK, TEMPLATE, AND SEMICONDCTOR DEVICE MANUFACTURING METHOD
- Publication number 20230092256
- Publication date Mar 23, 2023
- KIOXIA Corporation
- Sachiko Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POSITIONING APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTU...
- Publication number 20230063228
- Publication date Mar 2, 2023
- Canon Kabushiki Kaisha
- Toru Kobori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS TO REGISTER TEMPLATE WITH SPATIAL LIGHT MODULATOR
- Publication number 20230053682
- Publication date Feb 23, 2023
- Canon Kabushiki Kaisha
- James W. Irving
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20230049521
- Publication date Feb 16, 2023
- Canon Kabushiki Kaisha
- Ryosuke Tsutsumi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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DEVICES, SYSTEMS, AND METHODS FOR THE HYBRID GENERATION OF DROP PAT...
- Publication number 20220382170
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- Canon Kabushiki Kaisha
- Ahmed M. Hussein
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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EVALUATION APPARATUS, COMPUTER-READABLE STORAGE MEDIUM, EVALUATION...
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- Canon Kabushiki Kaisha
- Fuma Kizu
- G06 - COMPUTING CALCULATING COUNTING
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IMPRINT METHOD, IMPRINT APPARATUS, AND FILM FORMATION APPARATUS
- Publication number 20220082954
- Publication date Mar 17, 2022
- KIOXIA Corporation
- Takeshi HIGUCHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TEMPLATE, METHOD FOR FABRICATING TEMPLATE, AND METHOD FOR FABRICATI...
- Publication number 20220050392
- Publication date Feb 17, 2022
- KIOXIA Corporation
- Toshiaki KOMUKAI
- H01 - BASIC ELECTRIC ELEMENTS

Alignment for lithographic apparatus using patterning methods other than those involving the exposure to radiation

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Imprint lithography

Imprint apparatus with movable stages

Apparatus and method for optimizing actuator forces

Template, manufacturing method of template, and manufacturing metho...

Imprint method, imprint apparatus, and article manufacturing method

Template, workpiece, and alignment method

Imprint apparatus and method of manufacturing article

Imprint apparatus, imprint method, and article manufacturing method

Imprint apparatus, imprint method, and article manufacturing method

Imprint method, imprint apparatus, and film formation apparatus

Positioning substrates in imprint lithography processes

Imprint apparatus, imprint method, and article manufacturing method

Imprint apparatus, method of imprinting, and method of manufacturin...

Imprint method, imprint apparatus, and article manufacturing method

Positioning apparatus, lithography apparatus, and article manufactu...

Method for disposing substrate and method for manufacturing article

Imprint method, imprint apparatus, and article manufacturing method

Method and apparatus to register template with spatial light modulator

Template, patterning method, and method for manufacturing semicondu...

Imprint method, imprint apparatus, and method of manufacturing article

Imprint apparatus

Fiducial design

Lithography apparatus and method of manufacturing article

Imprint apparatus and article manufacturing method

Template, template manufacturing method, and semiconductor device m...

Imprint lithography

Positioning substrates in imprint lithography processes

Devices, systems, and methods for the hybrid generation of drop pat...

Imprint apparatus and method of manufacturing article

Systems and methods for generating drop patterns

Patents Applicationslast 30 patents

IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD

SCALABLE NANOIMPRINT MANUFACTURING OF FUNCTIONAL MULTI-LAYER METASU...

INFORMATION PROCESSING METHOD FOR DECIDING ARRANGEMENT OF DROPLETS...

CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING...

IMPRINT APPARATUS, PATTERN FORMING METHOD, AND METHOD OF MANUFACTUR...

METHOD AND APPARATUS FOR IDENTIFYING POSITIONS OF A SPATIAL LIGHT M...

ALIGNMENT METHOD AND ASSOCIATED ALIGNMENT AND LITHOGRAPHIC APPARATUSES

IMPRINT APPARATUS, ARTICLE MANUFACTURING METHOD, DETERMINATION METH...

IMPRINTING METHOD, IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD

METROLOGY METHOD AND APPARATUS AND COMPUTER PROGRAM

PATTERN FORMING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD,...

SIMULATION-ASSISTED METROLOGY IMAGE ALIGNMENT

IMPRINT METHOD, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD

MULTI-CHIP DIE ALIGNMENT

LITHOGRAPHY DEVICE, LITHOGRAPHY METHOD, AND ARTICLE MANUFACTURING M...

MANAGING MULTI-OBJECTIVE ALIGNMENTS FOR IMPRINTING

LITHOGRAPHIC PRE-ALIGNMENT IMAGING SENSOR WITH BUILD-IN COAXIAL ILL...

IMPRINT LITHOGRAPHY

IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD

POSITIONING SUBSTRATES IN IMPRINT LITHOGRAPHY PROCESSES

APPARATUS AND METHOD FOR OPTIMIZING ACTUATOR FORCES

MANAGEMENT APPARATUS, LITHOGRAPHY APPARATUS, MANAGEMENT METHOD, AND...

MARK, TEMPLATE, AND SEMICONDCTOR DEVICE MANUFACTURING METHOD

POSITIONING APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTU...

METHOD AND APPARATUS TO REGISTER TEMPLATE WITH SPATIAL LIGHT MODULATOR

IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE

DEVICES, SYSTEMS, AND METHODS FOR THE HYBRID GENERATION OF DROP PAT...

EVALUATION APPARATUS, COMPUTER-READABLE STORAGE MEDIUM, EVALUATION...

IMPRINT METHOD, IMPRINT APPARATUS, AND FILM FORMATION APPARATUS

TEMPLATE, METHOD FOR FABRICATING TEMPLATE, AND METHOD FOR FABRICATI...