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G03F1/42
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PHYSICS
G03
Photography
G03F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
G03F1/00
Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles Mask blanks or pellicles therefor Containers specially adapted therefor Preparation thereof
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G03F1/42
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Patents Grants
last 30 patents
Information
Patent Grant
Exposure mask and display device manufactured by using the same
Patent number
11,947,223
Issue date
Apr 2, 2024
Samsung Display Co., Ltd.
Dong Hee Shin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Extreme ultraviolet (EUV) photomask and method of manufacturing sem...
Patent number
11,927,879
Issue date
Mar 12, 2024
Samsung Electronics Co., Ltd.
Moosong Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photomask, display device, and manufacturing method thereof
Patent number
11,923,383
Issue date
Mar 5, 2024
Samsung Display Co., Ltd.
Dong Hee Shin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Measurement system, substrate processing system, and device manufac...
Patent number
11,915,961
Issue date
Feb 27, 2024
Nikon Corporation
Go Ichinose
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Photolithography alignment process for bonded wafers
Patent number
11,916,022
Issue date
Feb 27, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Yeong-Jyh Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Diagonal via pattern and method
Patent number
11,901,286
Issue date
Feb 13, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Shih-Wei Peng
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Photomask including fiducial mark and method of making a semiconduc...
Patent number
11,860,532
Issue date
Jan 2, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Hsin-Chang Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing reflective mask blank, reflective mask bla...
Patent number
11,852,964
Issue date
Dec 26, 2023
Hoya Corporation
Tsutomu Shoki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Learning-based analyzer for mitigating latch-up in integrated circuits
Patent number
11,853,683
Issue date
Dec 26, 2023
Silicon Space Technology Corporation
Patrice M. Parris
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Multi-function overlay marks for reducing noise and extracting focu...
Patent number
11,835,864
Issue date
Dec 5, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Yu-Ching Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Sub-resolution assist features
Patent number
11,829,066
Issue date
Nov 28, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Kenji Yamazoe
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Template, workpiece, and alignment method
Patent number
11,815,348
Issue date
Nov 14, 2023
Kioxia Corporation
Takashi Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Image-based overlay targets incorporating features for pattern reco...
Patent number
11,748,869
Issue date
Sep 5, 2023
Intel Corporation
Martin Weiss
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Processing system, processing method, measurement apparatus, substr...
Patent number
11,726,412
Issue date
Aug 15, 2023
Canon Kabushiki Kaisha
Shinichi Egashira
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Multiple-mask multiple-exposure lithography and masks
Patent number
11,726,408
Issue date
Aug 15, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Peter Yu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Stitched integrated circuit dies
Patent number
11,721,710
Issue date
Aug 8, 2023
SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Nicholas Paul Cowley
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Compound, photoresist composition comprising same, photoresist patt...
Patent number
11,680,040
Issue date
Jun 20, 2023
LG Chem, Ltd.
Hyunmin Park
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Substrate with a multilayer reflective film, reflective mask blank,...
Patent number
11,681,214
Issue date
Jun 20, 2023
Hoya Corporation
Kazuhiro Hamamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Particle image velocimetry of extreme ultraviolet lithography systems
Patent number
11,680,958
Issue date
Jun 20, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
En Hao Lai
G01 - MEASURING TESTING
Information
Patent Grant
System and method for aligned stitching
Patent number
11,676,908
Issue date
Jun 13, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chih-Chia Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fabricating method of photomask, photomask structure thereof, and s...
Patent number
11,662,660
Issue date
May 30, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Cheng-Ming Lin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photolithography method
Patent number
11,644,745
Issue date
May 9, 2023
Samsung Electronics Co., Ltd.
Yongwook Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Mask assembly and associated methods
Patent number
11,635,681
Issue date
Apr 25, 2023
ASML Netherlands B.V.
Derk Servatius Gertruda Brouns
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask orientation
Patent number
11,630,251
Issue date
Apr 18, 2023
Applied Materials, Inc.
Yongan Xu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Fabricating method of photomask, photomask structure thereof, and s...
Patent number
11,624,978
Issue date
Apr 11, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Cheng-Ming Lin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Multi-channel device and method for measuring distortion and magnif...
Patent number
11,604,418
Issue date
Mar 14, 2023
Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
Yisha Cao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure mask and display device manufactured by using the same
Patent number
11,579,493
Issue date
Feb 14, 2023
Samsung Display Co., Ltd.
Dong Hee Shin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of fabricating a photomask and method of inspecting a photomask
Patent number
11,567,400
Issue date
Jan 31, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Tsun-Cheng Tang
G01 - MEASURING TESTING
Information
Patent Grant
Method of manufacturing semiconductor device
Patent number
11,537,041
Issue date
Dec 27, 2022
Samsung Electronics Co., Ltd.
Chulho Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fast fabrication of polymer out-of-plane optical coupler by gray-sc...
Patent number
11,531,270
Issue date
Dec 20, 2022
Arizona Board of Regents on behalf of the University of Arizona
Yuzuru Takashima
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
PATTERN FORMATION METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD...
Publication number
20240094624
Publication date
Mar 21, 2024
KIOXIA Corporation
Masaki MITSUYASU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHOTOMASK INCLUDING FIDUCIAL MARK AND METHOD OF MAKING A PHOTOMASK
Publication number
20240094625
Publication date
Mar 21, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Hsin-Chang LEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTOLITHOGRAPHY MASK AND PHOTOLITHOGRAPHY SYSTEM COMPRISING SAID P...
Publication number
20240085776
Publication date
Mar 14, 2024
TECHNOLOGIES DIGITHO INC.
Richard BEAUDRY
G01 - MEASURING TESTING
Information
Patent Application
PHOTOMASK INCLUDING LINE PATTERN MONITORING MARK AND METHOD OF MANU...
Publication number
20240085778
Publication date
Mar 14, 2024
Samsung Electronics Co., Ltd.
Byungje Jung
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
Publication number
20240069446
Publication date
Feb 29, 2024
Samsung Electronics Co., Ltd.
SeungKyo LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STRUCTURE AND METHOD OF SIGNAL ENHANCEMENT FOR ALIGNMENT PATTERNS
Publication number
20240053673
Publication date
Feb 15, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Hsin-Chieh CHEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
REFLECTIVE MASK AND METHOD OF DESIGNING ANTI-REFLECTION PATTERN OF...
Publication number
20240027890
Publication date
Jan 25, 2024
Samsung Electronics Co., Ltd.
Hyungjong Bae
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DETECTION DEVICE, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING...
Publication number
20240027921
Publication date
Jan 25, 2024
Canon Kabushiki Kaisha
TOSHIKI IWAI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Multi-Function Overlay Marks for Reducing Noise and Extracting Focu...
Publication number
20240012340
Publication date
Jan 11, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Yu-Ching Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DIAGONAL VIA STRUCTURE
Publication number
20230387002
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Shih-Wei PENG
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SUB-RESOLUTION ASSIST FEATURES
Publication number
20230384665
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Kenji Yamazoe
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
OVERLAY MARK
Publication number
20230378082
Publication date
Nov 23, 2023
WINBOND ELECTRONICS CORP.
Kuang-Chung Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURI...
Publication number
20230375914
Publication date
Nov 23, 2023
WINBOND ELECTRONICS CORP.
Kazuhiro Segawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MULTIPLE-MASK MULTIPLE-EXPOSURE LITHOGRAPHY AND MASKS
Publication number
20230367229
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing Co., LTD
Peter Yu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROCESSING SYSTEM, PROCESSING METHOD, MEASUREMENT APPARATUS, SUBSTR...
Publication number
20230359134
Publication date
Nov 9, 2023
Canon Kabushiki Kaisha
Shinichi Egashira
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE STRUCTURE WITH OVERLA...
Publication number
20230326869
Publication date
Oct 12, 2023
NANYA TECHNOLOGY CORPORATION
CHUN-YEN WEI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EUV PHOTO MASKS AND MANUFACTURING METHOD THEREOF
Publication number
20230305381
Publication date
Sep 28, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Wei-Shuo SU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PARTICLE IMAGE VELOCIMETRY OF EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEMS
Publication number
20230296642
Publication date
Sep 21, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
En Hao LAI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PATTERN FORMING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD,...
Publication number
20230298888
Publication date
Sep 21, 2023
KIOXIA Corporation
Satoshi MITSUGI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OVERLAY MARK FORMING MOIRE PATTERN, OVERLAY MEASUREMENT METHOD USIN...
Publication number
20230282597
Publication date
Sep 7, 2023
AUROS TECHNOLOGY, INC.
Hyun Chul LEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR STRUCTURE
Publication number
20230266660
Publication date
Aug 24, 2023
NANYA TECHNOLOGY CORPORATION
Cheng-Wei WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FABRICATING METHOD OF PHOTOMASK, PHOTOMASK STRUCTURE THEREOF, AND S...
Publication number
20230266661
Publication date
Aug 24, 2023
Taiwan Semiconductor Manufacturing company Ltd.
CHENG-MING LIN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
System and Method for Aligned Stitching
Publication number
20230268285
Publication date
Aug 24, 2023
Taiwan Semiconductor Manufacturing, Ltd.
Chih-Chia Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REFLECTIVE STRUCTURE, REFLECTIVE MASK BLANK, REFLECTIVE MASK AND ME...
Publication number
20230266658
Publication date
Aug 24, 2023
HOYA CORPORATION
Kazuhiro Hamamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OVERLAY METROLOGY MARK
Publication number
20230260924
Publication date
Aug 17, 2023
NANYA TECHNOLOGY CORPORATION
Kai ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MASK AND METHOD FOR MANUFACTURING THE SAME
Publication number
20230259018
Publication date
Aug 17, 2023
SEIL KIM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Photomask, Optical-Waveguide, Optical Circuit and Method of Manufac...
Publication number
20230259017
Publication date
Aug 17, 2023
Nippon Telegraph and Telephone Corporation
Takashi Go
G02 - OPTICS
Information
Patent Application
EXPOSURE APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20230236495
Publication date
Jul 27, 2023
KIOXIA Corporation
Yoshio MIZUTA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING A SUBSTRATE
Publication number
20230211436
Publication date
Jul 6, 2023
SEMES CO., LTD.
Hyo Won YANG
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
MARKS FOR OVERLAY MEASUREMENT AND OVERLAY ERROR CORRECTION
Publication number
20230215809
Publication date
Jul 6, 2023
NANYA TECHNOLOGY CORPORATION
Shih-Yuan MA
H01 - BASIC ELECTRIC ELEMENTS