Angular deflection

Industry

CPC
B81B3/004

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B3/00Devices comprising flexible or deformable elements

Current Industry

B81B3/004Angular deflection

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Light deflector, deflecting device, distance measurement device, im...
- Patent number 12,140,698
- Issue date Nov 12, 2024
- Ricoh Company, Ltd.
- Goichi Akanuma
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS image forming element with built-in voltage generator
- Patent number 12,030,772
- Issue date Jul 9, 2024
- ASML Netherlands B.V.
- Yongxin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Two degree-of-freedom actuator and MEMS device
- Patent number 12,013,527
- Issue date Jun 18, 2024
- Huawei Technologies Co., Ltd.
- Shanshan Gu-Stoppel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with a dual hinge structure
- Patent number 12,007,555
- Issue date Jun 11, 2024
- Lumentum Operations LLC
- Wenlin Jin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Light deflection device
- Patent number 12,007,556
- Issue date Jun 11, 2024
- Stanley Electric Co., Ltd.
- Atsuhiko Chikaoka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Temperature-tuned ultrafast X-ray shutter using optics-on-a-chip
- Patent number 11,996,210
- Issue date May 28, 2024
- UChicago Argonne, LLC
- Jin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator device and method for manufacturing actuator device
- Patent number 11,970,389
- Issue date Apr 30, 2024
- Hamamatsu Photonics K.K.
- Daiki Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device production method
- Patent number 11,953,675
- Issue date Apr 9, 2024
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS chip
- Patent number 11,950,053
- Issue date Apr 2, 2024
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Zhengyu Shi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vibrating mirror element and optical scanner
- Patent number 11,919,768
- Issue date Mar 5, 2024
- Funai Electric Co., Ltd.
- Kenji Tanehashi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vibrating element
- Patent number 11,921,283
- Issue date Mar 5, 2024
- Funai Electric Co., Ltd.
- Kenichi Fujita
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bipolar staggered comb drive for bidirectional MEMS actuation
- Patent number 11,909,332
- Issue date Feb 20, 2024
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Qin Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System and method of continuous, vibration-less, and bi-directional...
- Patent number 11,905,165
- Issue date Feb 20, 2024
- O-NET TECHNOLOGIES (GROUP) LTD.
- Kevin Boyd
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device
- Patent number 11,899,199
- Issue date Feb 13, 2024
- Hamamatsu Photonics K.K.
- Daiki Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-mirror MEMS system
- Patent number 11,874,457
- Issue date Jan 16, 2024
- MARADIN LTD.
- Matan Naftali
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromachined mirror assembly with asymmetric structure
- Patent number 11,822,069
- Issue date Nov 21, 2023
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Youmin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mirror assembly for light steering with reduced finger thickness
- Patent number 11,815,627
- Issue date Nov 14, 2023
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Youmin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mirror assembly for light steering with flexible support structure
- Patent number 11,796,638
- Issue date Oct 24, 2023
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Youmin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Structures for piezoelectric actuator to increase displacement and...
- Patent number 11,768,367
- Issue date Sep 26, 2023
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Sae Won Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mirror device
- Patent number 11,762,191
- Issue date Sep 19, 2023
- Mitsubishi Electric Corporation
- Shingo Moriue
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical transducer
- Patent number 11,760,624
- Issue date Sep 19, 2023
- Sonion Nederland B.V.
- Raymond Mögelin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device
- Patent number 11,740,452
- Issue date Aug 29, 2023
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device
- Patent number 11,703,680
- Issue date Jul 18, 2023
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device having a tiltable suspended structure controlled by ele...
- Patent number 11,681,141
- Issue date Jun 20, 2023
- STMicroelectronics S.r.l.
- Roberto Carminati
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mems scanner suspension system enabling high frequency and high mec...
- Patent number 11,662,570
- Issue date May 30, 2023
- Infineon Technologies AG
- Malika Bella
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device
- Patent number 11,635,613
- Issue date Apr 25, 2023
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Force-balanced micromirror with electromagnetic actuation
- Patent number 11,604,347
- Issue date Mar 14, 2023
- Apple Inc.
- Noel Axelrod
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromachined mirror assembly with asymmetric structure
- Patent number 11,543,651
- Issue date Jan 3, 2023
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Youmin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Post-processing techniques on mems foundry fabricated devices for l...
- Patent number 11,535,511
- Issue date Dec 27, 2022
- United States of America as represented by the Secretary of the Air Force
- LaVern A Starman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor and electronic device
- Patent number 11,531,042
- Issue date Dec 20, 2022
- Kabushiki Kaisha Toshiba
- Kei Masunishi
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS OPTICAL DEFLECTOR AND OPTICAL SCANNING DEVICE
- Publication number 20240288681
- Publication date Aug 29, 2024
- STANLEY ELECTRIC CO., LTD
- Susumu NAKAMURA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROSCANNER HAVING MEANDER SPRING-BASED MIRROR SUSPENSION
- Publication number 20240288683
- Publication date Aug 29, 2024
- OQMENTED GMBH
- Ulrich HOFMANN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTUATOR DEVICE AND METHOD FOR MANUFACTURING ACTUATOR DEVICE
- Publication number 20240246810
- Publication date Jul 25, 2024
- HAMAMATSU PHOTONICS K. K.
- Daiki SUZUKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL DEVICE PRODUCTION METHOD
- Publication number 20240192483
- Publication date Jun 13, 2024
- HAMAMATSU PHOTONICS K. K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Low Voltage Electrostatic MEMS Actuators for Large Angle Tip, Tilt,...
- Publication number 20240158223
- Publication date May 16, 2024
- Government of the United States, as represented by the Secretary of the Air F...
- John PK Walton
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MIRROR DEVICE AND DISTANCE MEASURING APPARATUS
- Publication number 20240142770
- Publication date May 2, 2024
- Mitsubishi Electric Corporation
- Yoshiaki HIRATA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL DEVICE
- Publication number 20240126070
- Publication date Apr 18, 2024
- HAMAMATSU PHOTONICS K. K.
- Daiki SUZUKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ACTUATOR, IN PARTICULAR A MICROMIRROR, WITH INCREASED DEFLECTA...
- Publication number 20230373781
- Publication date Nov 23, 2023
- HAHN-SCHICKARD-GESELLSCHAFT FUR ANGEWANDTE FORSCHUNG E.V.
- Jan Rockstroh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TEMPERATURE-TUNED ULTRAFAST X-RAY SHUTTER USING OPTICS-ON-A-CHIP
- Publication number 20230343479
- Publication date Oct 26, 2023
- UChicago Argonne, LLC
- Jin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL SCANNING DEVICE, DRIVING METHOD OF OPTICAL SCANNING DEVICE,...
- Publication number 20230314793
- Publication date Oct 5, 2023
- FUJIFILM CORPORATION
- Shinichiro Sonoda
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
A SCANNING MEMS MIRROR DEVICE
- Publication number 20230257255
- Publication date Aug 17, 2023
- Hendrikus Wilhelmus Leonardus Antonius Maria VAN LIEROP
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD TO ESTIMATE PHASE AND AMPLITUDE FOR CONTROL OF A RESONANT ME...
- Publication number 20230234836
- Publication date Jul 27, 2023
- STMicroelectronics S.r.l
- Raffaele Enrico FURCERI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Chip
- Publication number 20230199408
- Publication date Jun 22, 2023
- AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
- Zhengyu Shi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMIRROR DEVICE AND OPTICAL SCANNING DEVICE
- Publication number 20230185081
- Publication date Jun 15, 2023
- FUJIFILM CORPORATION
- Keisuke AOSHIMA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMACHINED MIRROR ASSEMBLY WITH ASYMMETRIC STRUCTURE
- Publication number 20230106000
- Publication date Apr 6, 2023
- Beijing Voyager Technology Co., Ltd.
- Youmin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
REDUCTION OF RINGING AND INTERMODULATION DISTORTION IN A MEMS DEVICE
- Publication number 20230101598
- Publication date Mar 30, 2023
- TEXAS INSTRUMENTS INCORPORATED
- Adam Joseph Fruehling
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Driving circuits for a piezoelectric microelectromechanical system...
- Publication number 20220411255
- Publication date Dec 29, 2022
- Teknologian Tutkimuskeskus VTT Oy
- Tapio Pernu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) MICRO-MIRROR ARRAY (MMA) STE...
- Publication number 20220342201
- Publication date Oct 27, 2022
- Raytheon Company
- Benn H. Gleason
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MOVABLE APPARATUS
- Publication number 20220326512
- Publication date Oct 13, 2022
- Mizuki SHINKAWA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL OSCILLATION SYSTEM
- Publication number 20220283427
- Publication date Sep 8, 2022
- ROBERT BOSCH GmbH
- Eugene Moliere Tanguep Njiokep
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL TRANSDUCER
- Publication number 20220274826
- Publication date Sep 1, 2022
- Sonion Nederland BV
- Raymond Mögelin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ARRAY OF HEATING RESISTORS FOR MEMS MIRRORS
- Publication number 20220204339
- Publication date Jun 30, 2022
- Beijing Voyager Technology Co., Ltd.
- Sae Won Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROMECHANICAL MICROSYSTEM
- Publication number 20220197014
- Publication date Jun 23, 2022
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Laurent MOLLARD
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROMECHANICAL MICROSYSTEM
- Publication number 20220197013
- Publication date Jun 23, 2022
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Laurent MOLLARD
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMB-DRIVEN MEMS RESONANT SCANNER WITH FULL-CIRCUMFERENTIAL RANGE A...
- Publication number 20220155584
- Publication date May 19, 2022
- The Regents of the University of Michigan
- Haijun Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS TO CHARACTERIZE WELLBORE FLUID COMPOSITION AND PROVIDE OPTI...
- Publication number 20220127961
- Publication date Apr 28, 2022
- Halliburton Energy Services, Inc.
- Dale E. JAMISON
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device for Large Angle Beamsteering
- Publication number 20220119244
- Publication date Apr 21, 2022
- Government of the United States, as represented by the Secretary of the Air F...
- LaVern A. Starman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
System and method of continuous, vibration-less, and bi-directional...
- Publication number 20220098028
- Publication date Mar 31, 2022
- O-Net Technologies (Group) Ltd..
- Kevin Boyd
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STRUCTURES FOR PIEZOELECTRIC ACTUATOR TO INCREASE DISPLACEMENT AND...
- Publication number 20220057627
- Publication date Feb 24, 2022
- Beijing Voyager Technology Co., Ltd.
- Sae Won Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MIRROR ASSEMBLY FOR LIGHT STEERING WITH REDUCED FINGER THICKNESS
- Publication number 20210396850
- Publication date Dec 23, 2021
- Youmin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Angular deflection

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Light deflector, deflecting device, distance measurement device, im...

MEMS image forming element with built-in voltage generator

Two degree-of-freedom actuator and MEMS device

MEMS device with a dual hinge structure

Light deflection device

Temperature-tuned ultrafast X-ray shutter using optics-on-a-chip

Actuator device and method for manufacturing actuator device

Optical device production method

MEMS chip

Vibrating mirror element and optical scanner

Vibrating element

Bipolar staggered comb drive for bidirectional MEMS actuation

System and method of continuous, vibration-less, and bi-directional...

Optical device

Micro-mirror MEMS system

Micromachined mirror assembly with asymmetric structure

Mirror assembly for light steering with reduced finger thickness

Mirror assembly for light steering with flexible support structure

Structures for piezoelectric actuator to increase displacement and...

Mirror device

Micro-electromechanical transducer

Optical device

Optical device

MEMS device having a tiltable suspended structure controlled by ele...

Mems scanner suspension system enabling high frequency and high mec...

Optical device

Force-balanced micromirror with electromagnetic actuation

Micromachined mirror assembly with asymmetric structure

Post-processing techniques on mems foundry fabricated devices for l...

Sensor and electronic device

Patents Applicationslast 30 patents

MEMS OPTICAL DEFLECTOR AND OPTICAL SCANNING DEVICE

MICROSCANNER HAVING MEANDER SPRING-BASED MIRROR SUSPENSION

ACTUATOR DEVICE AND METHOD FOR MANUFACTURING ACTUATOR DEVICE

OPTICAL DEVICE PRODUCTION METHOD

Low Voltage Electrostatic MEMS Actuators for Large Angle Tip, Tilt,...

MEMS MIRROR DEVICE AND DISTANCE MEASURING APPARATUS

OPTICAL DEVICE

MEMS ACTUATOR, IN PARTICULAR A MICROMIRROR, WITH INCREASED DEFLECTA...

TEMPERATURE-TUNED ULTRAFAST X-RAY SHUTTER USING OPTICS-ON-A-CHIP

OPTICAL SCANNING DEVICE, DRIVING METHOD OF OPTICAL SCANNING DEVICE,...

A SCANNING MEMS MIRROR DEVICE

METHOD TO ESTIMATE PHASE AND AMPLITUDE FOR CONTROL OF A RESONANT ME...

MEMS Chip

MICROMIRROR DEVICE AND OPTICAL SCANNING DEVICE

MICROMACHINED MIRROR ASSEMBLY WITH ASYMMETRIC STRUCTURE

REDUCTION OF RINGING AND INTERMODULATION DISTORTION IN A MEMS DEVICE

Driving circuits for a piezoelectric microelectromechanical system...

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) MICRO-MIRROR ARRAY (MMA) STE...

MOVABLE APPARATUS

MICROMECHANICAL OSCILLATION SYSTEM

MICRO-ELECTROMECHANICAL TRANSDUCER

ARRAY OF HEATING RESISTORS FOR MEMS MIRRORS

ELECTROMECHANICAL MICROSYSTEM

ELECTROMECHANICAL MICROSYSTEM

COMB-DRIVEN MEMS RESONANT SCANNER WITH FULL-CIRCUMFERENTIAL RANGE A...

METHODS TO CHARACTERIZE WELLBORE FLUID COMPOSITION AND PROVIDE OPTI...

MEMS Device for Large Angle Beamsteering

System and method of continuous, vibration-less, and bi-directional...

STRUCTURES FOR PIEZOELECTRIC ACTUATOR TO INCREASE DISPLACEMENT AND...

MIRROR ASSEMBLY FOR LIGHT STEERING WITH REDUCED FINGER THICKNESS