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Devices comprising flexible or deformable elements
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B81B3/00
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Parent Industries
B
PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81B
MICRO-STRUCTURAL DEVICES OR SYSTEMS
Current Industry
B81B3/00
Devices comprising flexible or deformable elements
Sub Industries
B81B3/0002
Arrangements for avoiding sticking of the flexible or moving parts
B81B3/0005
Anti-stiction coatings
B81B3/0008
Structures for avoiding electrostatic attraction
B81B3/001
Structures having a reduced contact area
B81B3/0013
Structures dimensioned for mechanical prevention of stiction
B81B3/0016
Arrangements for avoiding sticking of the flexible or moving parts not provided for in groups B81B3/0005 - B81B3/0013
B81B3/0018
Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice-versa
B81B3/0021
Transducers for transforming electrical into mechanical energy or vice versa
B81B3/0024
Transducers for transforming thermal into mechanical energy or vice versa
B81B3/0027
Structures for transforming mechanical energy
B81B3/0029
Transducers for transforming light into mechanical energy or viceversa
B81B3/0032
Structures for transforming energy not provided for in groups B81B3/0021 - B81B3/0029
B81B3/0035
Constitution or structural means for controlling the movement of the flexible or deformable elements
B81B3/0037
For increasing stroke
B81B3/004
Angular deflection
B81B3/0043
Increasing angular deflection
B81B3/0045
Improve properties related to angular swinging
B81B3/0048
Constitution or structural means for controlling angular deflection not provided for in groups B81B3/0043 - B81B3/0045
B81B3/0051
For defining the movement
B81B3/0054
For holding or placing an element in a given position
B81B3/0056
Adjusting the distance between two elements, at least one of them being movable
B81B3/0059
Constitution or structural means for controlling the movement not provided for in groups B81B3/0037 - B81B3/0056
B81B3/0062
Devices moving in two or more dimensions
B81B3/0064
Constitution or structural means for improving or controlling the physical properties of a device
B81B3/0067
Mechanical properties
B81B3/007
For controlling stiffness
B81B3/0072
For controlling internal stress or strain in moving or flexible elements
B81B3/0075
For improving wear resistance
B81B3/0078
Constitution or structural means for improving mechanical properties not provided for in B81B3/007 - B81B3/0075
B81B3/0081
Thermal properties
B81B3/0083
Optical properties
B81B3/0086
Electrical characteristics
B81B3/0089
Chemical or biological characteristics
B81B3/0091
Magnetic properties
B81B3/0094
Constitution or structural means for improving or controlling physical properties not provided for in B81B3/0067 - B81B3/0091
B81B3/0097
Devices comprising flexible or deformable elements not provided for in groups B81B3/0002 - B81B3/0094
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Patents Grants
last 30 patents
Information
Patent Grant
Distributed MEMS switch array design with multiple input/output ports
Patent number
12,365,579
Issue date
Jul 22, 2025
Menlo Microsystems, Inc.
Xu Zhu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Acceleration sensor and method of making the same
Patent number
12,366,587
Issue date
Jul 22, 2025
Chongqing University
Xiaoping Zhou
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical system membrane
Patent number
12,368,997
Issue date
Jul 22, 2025
AAC Technologies Pte. Ltd.
Yannick Pierre Kervran
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor and sensor system
Patent number
12,366,488
Issue date
Jul 22, 2025
Kabushiki Kaisha Toshiba
Yoshihiko Kurui
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Fabrication of glass cells for hermetic gas enclosures
Patent number
12,366,831
Issue date
Jul 22, 2025
mb-microtec ag
Serge Lukas Zihlmann
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical component for a sensor or microphone device
Patent number
12,365,581
Issue date
Jul 22, 2025
Robert Bosch GmbH
Heribert Weber
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Compact enhanced sensitivity temperature sensor using an encapsulat...
Patent number
12,365,580
Issue date
Jul 22, 2025
King Fahd University of Petroleum & Minerals
Xuecui Zou
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electro-mechanical system (MEMS) micro-mirror array (MMA) ste...
Patent number
12,360,358
Issue date
Jul 15, 2025
Raytheon Company
Benn H. Gleason
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing an integrated circuit pointed element comprisi...
Patent number
12,360,135
Issue date
Jul 15, 2025
STMicroelectronics (Rousset) SAS
Abderrezak Marzaki
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Piezoelectric microelectromechanical system microphone sensitivity...
Patent number
12,358,782
Issue date
Jul 15, 2025
Skyworks Solutions, Inc.
Guofeng Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Fabrication of MEMS structures from fused silica for inertial sensors
Patent number
12,351,451
Issue date
Jul 8, 2025
Atlantic Inertial Systems Limited
Christopher Paul Fell
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Capacitive micromachined ultrasonic transducer and method of manufa...
Patent number
12,350,710
Issue date
Jul 8, 2025
Vermon S.A.
Dominique Gross
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Dual membrane piezoelectric microelectromechanical system microphone
Patent number
12,351,450
Issue date
Jul 8, 2025
Skyworks Solutions, Inc.
Siarhei Dmitrievich Barsukou
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical infrared sensing device and fabrication meth...
Patent number
12,345,571
Issue date
Jul 1, 2025
Industrial Technology Research Institute
Chin-Jou Kuo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromirror device
Patent number
12,345,876
Issue date
Jul 1, 2025
FUJIFILM Corporation
Keisuke Aoshima
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor
Patent number
12,338,120
Issue date
Jun 24, 2025
Kabushiki Kaisha Toshiba
Hiroaki Yamazaki
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Pressure sensor including a pressure sensor chip to detect a differ...
Patent number
12,339,183
Issue date
Jun 24, 2025
Murata Manufacturing Co., Ltd.
Daiki Tsuji
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Dual-output microelectromechanical resonator and method of manufact...
Patent number
12,338,119
Issue date
Jun 24, 2025
STATHERA IP HOLDINGS INC.
George Xereas
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Cantilever structure with intermediate substrate connection having...
Patent number
12,330,933
Issue date
Jun 17, 2025
xMEMS Labs, Inc.
Jye Ren
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro electro mechanical system and manufacturing method thereof
Patent number
12,336,432
Issue date
Jun 17, 2025
STMicroelectronics S.r.l.
Gianluca Longoni
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Comb-driven MEMS resonant scanner with full-circumferential range a...
Patent number
12,332,428
Issue date
Jun 17, 2025
The Regents of the University of Michigan
Haijun Li
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS microphone
Patent number
12,330,931
Issue date
Jun 17, 2025
AAC Acoustic Technologies (Shenzhen) Co., Ltd.
Zhuanzhuan Zhao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS microphone
Patent number
12,330,932
Issue date
Jun 17, 2025
AAC Acoustic Technologies (Shenzhen) Co., Ltd.
Zhuanzhuan Zhao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Interconnection for monolithically integrated stacked devices and m...
Patent number
12,330,189
Issue date
Jun 17, 2025
GLOBALFOUNDRIES SINGAPOREPTE. LTD.
You Qian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sealed force sensor with etch stop layer
Patent number
12,332,127
Issue date
Jun 17, 2025
NEXTINPUT, INC.
Julius Minglin Tsai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Light deflector
Patent number
12,332,427
Issue date
Jun 17, 2025
Stanley Electric Co., Ltd.
Tomotaka Asari
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Vibrating-type gyroscope element and angular velocity sensor includ...
Patent number
12,332,056
Issue date
Jun 17, 2025
Sumitomo Precision Products Co., LTD
Ryohei Uchino
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Acoustic devices with improved sensitivity
Patent number
12,328,559
Issue date
Jun 10, 2025
Skyworks Solutions, Inc.
Guofeng Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Energy harvesting devices and sensors, and methods of making and us...
Patent number
12,328,081
Issue date
Jun 10, 2025
Board of Trustees of the University of Arkansas
Paul Thibado
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Piezoelectric sensor with increased sensitivity and devices having...
Patent number
12,329,033
Issue date
Jun 10, 2025
Skyworks Solutions, Inc.
You Qian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MEMS DEVICE BUILT USING THE BEOL METAL LAYERS OF A SOLID STATE SEMI...
Publication number
20250236506
Publication date
Jul 24, 2025
Nanusens SL
Josep Montanyà i Silvestre
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ALL-SILICON CARBIDE (SiC) ACCELERATION-PRESSURE INTEGRATED SENSOR C...
Publication number
20250236507
Publication date
Jul 24, 2025
XI'AN JIAOTONG UNIVERSITY
Xudong FANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
HIGH-Q MICROMECHANICAL TORSION RESONATOR BASED ON SUSPENDING A TEST...
Publication number
20250236508
Publication date
Jul 24, 2025
GOVERNMENT OF THE UNITED STATES OF AMERICA, as represented by THE SECRETARY O...
Jon Robert Pratt
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS MIRROR MODULE WITH STRESS-DECOUPLED VIBRATIONAL MODES
Publication number
20250236509
Publication date
Jul 24, 2025
Microsoft Technology Licensing, LLC
Di SUN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...
Publication number
20250229292
Publication date
Jul 17, 2025
BFLY OPERATIONS, INC.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CONTROL DEVICE FOR VIBRATION-TYPE ACTUATOR
Publication number
20250233532
Publication date
Jul 17, 2025
Canon Kabushiki Kaisha
KENICHI KATAOKA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ACCELERATION SENSOR
Publication number
20250230034
Publication date
Jul 17, 2025
AAC Kaitai Technologies (Wuhan) CO., LTD
Shitao Yan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PACKAGE STRUCTURE AND METHOD OF FORMING THE SAME
Publication number
20250230036
Publication date
Jul 17, 2025
Taiwan Semiconductor Manufacturing company Ltd.
WEN-TUAN LO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS ARM FOR MICROELECTROMECHANICAL SYSTEM
Publication number
20250230039
Publication date
Jul 17, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Shih-Yu Liao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE AND AIRFLOW GENERATING PACKAGE
Publication number
20250223151
Publication date
Jul 10, 2025
xMEMS Labs, Inc.
Jemm Yue Liang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS ACCELEROMETER HAVING A HIGH MECHANICAL ROBUSTNESS
Publication number
20250223152
Publication date
Jul 10, 2025
STMicroelectronics International N.V.
Francesco RIZZINI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DETECTION APPARATUS, TRAINING METHOD AND APPARATUS, AND COMPUTER-RE...
Publication number
20250224292
Publication date
Jul 10, 2025
BEIJING BOE SENSOR TECHNOLOGY CO., LTD.
Jie SUN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD OF MAKING
Publication number
20250223153
Publication date
Jul 10, 2025
Taiwan Semiconductor Manufacturing Company Limited
Yu-Hsun LI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS MICROPHONE AND ELECTRONIC DEVICE
Publication number
20250220353
Publication date
Jul 3, 2025
Goertek Microelectronics Inc.
Quanbo Zou
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL ACTUATOR ON INSULATING SUBSTRATE
Publication number
20250214829
Publication date
Jul 3, 2025
MICROGLASS LLC
John WASSERBAUER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE HAVING MICROELECTROMECHANICAL SYSTEMS DEVICES...
Publication number
20250214108
Publication date
Jul 3, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
I-Hsuan Chiu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
NANOGAP DIELECTRIC MATERIAL
Publication number
20250206597
Publication date
Jun 26, 2025
ROBERT BOSCH GmbH
Mordechai KORNBLUTH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMIRROR DEVICE AND OPTICAL SCANNING DEVICE
Publication number
20250208405
Publication date
Jun 26, 2025
FUJIFILM CORPORATION
Keisuke AOSHIMA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE
Publication number
20250206595
Publication date
Jun 26, 2025
Murata Manufacturing Co., Ltd.
Matti LIUKKU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
NANO ELECTROMECHANICAL DEVICE AND MANUFACTURING METHOD THEREOF
Publication number
20250206596
Publication date
Jun 26, 2025
Seoul National University R&DB Foundation
Woo Young CHOI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
THREE-DIMENSIONAL STRESS-SENSITIVE DEVICE
Publication number
20250197194
Publication date
Jun 19, 2025
Rosemount Aerospace Inc.
John C. Christenson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ANTI-STICTION ELECTRODES
Publication number
20250197193
Publication date
Jun 19, 2025
InvenSense, Inc.
Roberto Martini
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ANTI-STICTION PATTERNING WITHIN MEMS LAYER
Publication number
20250197192
Publication date
Jun 19, 2025
InvenSense, Inc.
Sarah Nitzan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Piezoelectric Motion Limiters for MEMS Autofocus Actuator
Publication number
20250187903
Publication date
Jun 12, 2025
MEMS DRIVE (NANJING) CO., LTD.
Matthew NG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Controllable Reflective Optical Unit With MEMS Tip-Tilt Actuator
Publication number
20250187904
Publication date
Jun 12, 2025
MEMS DRIVE (NANJING) CO., LTD.
Xiaolei LIU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MANUFACTURING METHOD FOR MICRO-ELECTRO-MECHANICAL MICROPHONE
Publication number
20250187908
Publication date
Jun 12, 2025
AAC MICROTECH (CHANGZHOU) CO., LTD.
Yuwei Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) HAVING VERTICAL STOPS AND A...
Publication number
20250187901
Publication date
Jun 12, 2025
Lawrence Semiconductor Research Laboratory, Inc.
Bishnu Prasanna Gogoi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Device
Publication number
20250187902
Publication date
Jun 12, 2025
SensorTek technology Corp.
Chao-Lin Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
VIBRATION SENSOR, ELECTRONIC DEVICE AND VIBRATION DETECTION METHOD
Publication number
20250194002
Publication date
Jun 12, 2025
GOERTEK MICROELECTRONICS INC.
Tangliu Yan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTROMECHANICAL SYSTEM (MEMS) MIRROR COMB DRIVE
Publication number
20250187905
Publication date
Jun 12, 2025
Lumentum Operations LLC
Wenlin JIN
B81 - MICRO-STRUCTURAL TECHNOLOGY