Anti-stiction coatings

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CPC
B81B3/0005

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B3/00Devices comprising flexible or deformable elements

Current Industry

B81B3/0005Anti-stiction coatings

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Anti-stiction process for MEMS device
- Patent number 12,157,667
- Issue date Dec 3, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Selective self-assembled monolayer patterning with sacrificial laye...
- Patent number 12,139,397
- Issue date Nov 12, 2024
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Roughness selectivity for MEMS movement stiction reduction
- Patent number 12,054,382
- Issue date Aug 6, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsi-Cheng Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microparticle sensor
- Patent number 11,906,416
- Issue date Feb 20, 2024
- STMicroelectronics S.r.l.
- Francesco Foncellino
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device and method for making the same
- Patent number 11,851,318
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Chuan Teng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor MEMS structure
- Patent number 11,767,216
- Issue date Sep 26, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yuan-Chih Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS structure and method of forming same
- Patent number 11,736,037
- Issue date Aug 22, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi Heng Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Roughness selectivity for MEMS movement stiction reduction
- Patent number 11,655,138
- Issue date May 23, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsi-Cheng Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for closing openings in a flexible diaphragm of a MEMS element
- Patent number 11,554,952
- Issue date Jan 17, 2023
- Robert Bosch GmbH
- Bernhard Gehl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS apparatus with anti-stiction layer
- Patent number 11,542,151
- Issue date Jan 3, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual back-plate and diaphragm microphone
- Patent number 11,533,565
- Issue date Dec 20, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor structure and method for fabricating the same
- Patent number 11,434,129
- Issue date Sep 6, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for uniform target erosion magnetic assemblies
- Patent number 11,390,520
- Issue date Jul 19, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chen-Fang Chung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction process for MEMS device
- Patent number 11,305,980
- Issue date Apr 19, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for preparing silicon wafer with rough surface and silicon w...
- Patent number 11,305,988
- Issue date Apr 19, 2022
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Wooicheang Goh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fence structure to prevent stiction in a MEMS motion sensor
- Patent number 11,261,083
- Issue date Mar 1, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Rough layer for better anti-stiction deposition
- Patent number 11,192,775
- Issue date Dec 7, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Hang Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a micromechanical sensor
- Patent number 11,111,137
- Issue date Sep 7, 2021
- Robert Bosch GmbH
- Johannes Classen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating semiconductor structure
- Patent number 11,097,941
- Issue date Aug 24, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yi-Hsien Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual back-plate and diaphragm microphone
- Patent number 11,051,109
- Issue date Jun 29, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Membrane components and method for forming a membrane component
- Patent number 10,927,002
- Issue date Feb 23, 2021
- Infineon Technologies AG
- Alfons Dehe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor MEMS structure
- Patent number 10,787,360
- Issue date Sep 29, 2020
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yuan-Chih Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Rough anti-stiction layer for MEMS device
- Patent number 10,759,654
- Issue date Sep 1, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Jui Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of stiction prevention by patterned anti-stiction layer
- Patent number 10,745,268
- Issue date Aug 18, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a micromechanical inertial sensor
- Patent number 10,730,746
- Issue date Aug 4, 2020
- Robert Bosch GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electromechanical relay device
- Patent number 10,727,016
- Issue date Jul 28, 2020
- The University of Bristol
- Sunil Rana
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of stiction prevention by patterned anti-stiction layer
- Patent number 10,654,707
- Issue date May 19, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device and manufacture thereof
- Patent number 10,633,247
- Issue date Apr 28, 2020
- Semiconductor Manufacturing International (Shanghai) Corporation
- GuangCai Fu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fence structure to prevent stiction in a MEMS motion sensor
- Patent number 10,562,763
- Issue date Feb 18, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS structure and method of forming same
- Patent number 10,541,627
- Issue date Jan 21, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi Heng Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
COMPUTATIONAL METHODS FOR PREDICTING ADHESION CHARACTERISTICS OF MO...
- Publication number 20240387002
- Publication date Nov 21, 2024
- ROBERT BOSCH GmbH
- Georgy SAMSONIDZE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ENCAPSULATED MEMS DEVICE AND METHOD FOR MANUFACTURING THE MEMS DEVICE
- Publication number 20240067520
- Publication date Feb 29, 2024
- INFINEON TECHNOLOGIES AG
- Fabian Streb
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR MEMS STRUCTURE
- Publication number 20230365395
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing company Ltd.
- YUAN-CHIH HSIEH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Structure and Method of Forming Same
- Publication number 20230353066
- Publication date Nov 2, 2023
- Taiwan Semiconductor Manufacturing Company Co., Ltd.
- Yi Heng Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ROUGHNESS SELECTIVITY FOR MEMS MOVEMENT STICTION REDUCTION
- Publication number 20230264945
- Publication date Aug 24, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsi-Cheng HSU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP
- Publication number 20230045563
- Publication date Feb 9, 2023
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND METHOD FOR MAKING THE SAME
- Publication number 20220340407
- Publication date Oct 27, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Chuan TENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
- Publication number 20220315414
- Publication date Oct 6, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- CHUN-WEN CHENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION ENHANCEMENT OF RUTHENIUM CONTACT
- Publication number 20220289566
- Publication date Sep 15, 2022
- Qorvo US, Inc.
- James D. HUFFMAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION PROCESS FOR MEMS DEVICE
- Publication number 20220242724
- Publication date Aug 4, 2022
- Taiwan Semiconductor Manufacturing Co.,Ltd
- Jui-Chun WENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPARTICLE SENSOR
- Publication number 20220205898
- Publication date Jun 30, 2022
- STMicroelectronics S.r.l.
- Francesco FONCELLINO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ROUGHNESS SELECTIVITY FOR MEMS MOVEMENT STICTION REDUCTION
- Publication number 20220135397
- Publication date May 5, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Hsi-Cheng HSU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FORMING A PASSIVATION COATING FOR MEMS DEVICES
- Publication number 20210371275
- Publication date Dec 2, 2021
- TEXAS INSTRUMENTS INCORPORATED
- Simon Joshua Jacobs
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DUAL BACK-PLATE AND DIAPHRAGM MICROPHONE
- Publication number 20210314707
- Publication date Oct 7, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR CLOSING OPENINGS IN A FLEXIBLE DIAPHRAGM OF A MEMS ELEMENT
- Publication number 20210229983
- Publication date Jul 29, 2021
- ROBERT BOSCH GmbH
- Bernhard Gehl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SELECTIVE SELF-ASSEMBLED MONOLAYER PATTERNING WITH SACRIFICIAL LAYE...
- Publication number 20210107785
- Publication date Apr 15, 2021
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR MEMS STRUCTURE
- Publication number 20210053816
- Publication date Feb 25, 2021
- Taiwan Semiconductor Manufacturing company Ltd.
- YUAN-CHIH HSIEH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS APPARATUS WITH ANTI-STICTION LAYER
- Publication number 20200346919
- Publication date Nov 5, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FENCE STRUCTURE TO PREVENT STICTION IN A MEMS MOTION SENSOR
- Publication number 20200140265
- Publication date May 7, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION PROCESS FOR MEMS DEVICE
- Publication number 20200123003
- Publication date Apr 23, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DUAL BACK-PLATE AND DIAPHRAGM MICROPHONE
- Publication number 20200107130
- Publication date Apr 2, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Structure and Method of Forming Same
- Publication number 20200067425
- Publication date Feb 27, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi Heng Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ROUGH LAYER FOR BETTER ANTI-STICTION DEPOSITION
- Publication number 20200024125
- Publication date Jan 23, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Chih-Hang Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF STICTION PREVENTION BY PATTERNED ANTI-STICTION LAYER
- Publication number 20200024124
- Publication date Jan 23, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
- Publication number 20190284044
- Publication date Sep 19, 2019
- Semiconductor Manufacturing International (Shanghai) Corporation
- GuangCai FU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FABRICATING SEMICONDUCTOR STRUCTURE
- Publication number 20190256347
- Publication date Aug 22, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yi-Hsien CHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Membrane Components and Method for Forming a Membrane Component
- Publication number 20190256351
- Publication date Aug 22, 2019
- INFINEON TECHNOLOGIES AG
- Alfons DEHE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR MEMS STRUCTURE
- Publication number 20190256346
- Publication date Aug 22, 2019
- Taiwan Semiconductor Manufacturing company Ltd.
- YUAN-CHIH HSIEH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Comb MEMS Device and Method of Making a Comb MEMS Device
- Publication number 20190185315
- Publication date Jun 20, 2019
- INFINEON TECHNOLOGIES AG
- Alfons Dehe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A MICROMECHANICAL SENSOR
- Publication number 20190161347
- Publication date May 30, 2019
- ROBERT BOSCH GmbH
- Johannes CLASSEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Anti-stiction coatings

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Anti-stiction process for MEMS device

Selective self-assembled monolayer patterning with sacrificial laye...

Roughness selectivity for MEMS movement stiction reduction

MEMS microparticle sensor

MEMS device and method for making the same

Semiconductor MEMS structure

MEMS structure and method of forming same

Roughness selectivity for MEMS movement stiction reduction

Method for closing openings in a flexible diaphragm of a MEMS element

MEMS apparatus with anti-stiction layer

Dual back-plate and diaphragm microphone

Semiconductor structure and method for fabricating the same

Systems and methods for uniform target erosion magnetic assemblies

Anti-stiction process for MEMS device

Method for preparing silicon wafer with rough surface and silicon w...

Fence structure to prevent stiction in a MEMS motion sensor

Rough layer for better anti-stiction deposition

Method for manufacturing a micromechanical sensor

Method of fabricating semiconductor structure

Dual back-plate and diaphragm microphone

Membrane components and method for forming a membrane component

Semiconductor MEMS structure

Rough anti-stiction layer for MEMS device

Method of stiction prevention by patterned anti-stiction layer

Method for manufacturing a micromechanical inertial sensor

Electromechanical relay device

Method of stiction prevention by patterned anti-stiction layer

Semiconductor device and manufacture thereof

Fence structure to prevent stiction in a MEMS motion sensor

MEMS structure and method of forming same

Patents Applicationslast 30 patents

COMPUTATIONAL METHODS FOR PREDICTING ADHESION CHARACTERISTICS OF MO...

ENCAPSULATED MEMS DEVICE AND METHOD FOR MANUFACTURING THE MEMS DEVICE

SEMICONDUCTOR MEMS STRUCTURE

MEMS Structure and Method of Forming Same

ROUGHNESS SELECTIVITY FOR MEMS MOVEMENT STICTION REDUCTION

METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP

MEMS DEVICE AND METHOD FOR MAKING THE SAME

SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME

ANTI-STICTION ENHANCEMENT OF RUTHENIUM CONTACT

ANTI-STICTION PROCESS FOR MEMS DEVICE

MEMS MICROPARTICLE SENSOR

ROUGHNESS SELECTIVITY FOR MEMS MOVEMENT STICTION REDUCTION

FORMING A PASSIVATION COATING FOR MEMS DEVICES

DUAL BACK-PLATE AND DIAPHRAGM MICROPHONE

METHOD FOR CLOSING OPENINGS IN A FLEXIBLE DIAPHRAGM OF A MEMS ELEMENT

SELECTIVE SELF-ASSEMBLED MONOLAYER PATTERNING WITH SACRIFICIAL LAYE...

SEMICONDUCTOR MEMS STRUCTURE

MEMS APPARATUS WITH ANTI-STICTION LAYER

FENCE STRUCTURE TO PREVENT STICTION IN A MEMS MOTION SENSOR

ANTI-STICTION PROCESS FOR MEMS DEVICE

DUAL BACK-PLATE AND DIAPHRAGM MICROPHONE

MEMS Structure and Method of Forming Same

ROUGH LAYER FOR BETTER ANTI-STICTION DEPOSITION

METHOD OF STICTION PREVENTION BY PATTERNED ANTI-STICTION LAYER

SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF

METHOD OF FABRICATING SEMICONDUCTOR STRUCTURE

Membrane Components and Method for Forming a Membrane Component

SEMICONDUCTOR MEMS STRUCTURE

Comb MEMS Device and Method of Making a Comb MEMS Device

METHOD FOR MANUFACTURING A MICROMECHANICAL SENSOR