Apparatus for manufacturing or treating in a plurality of work-stations

Industry

CPC
H01L21/67155

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67155Apparatus for manufacturing or treating in a plurality of work-stations

Industries

Patents Grantslast 30 patents

Information Patent Grant
Film-forming device
- Patent number 11,891,692
- Issue date Feb 6, 2024
- Murata Manufacturing Co., Ltd.
- Yasuhiro Chikaishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor manufacturing system, behavior recognition device and...
- Patent number 11,860,607
- Issue date Jan 2, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Kai-Ting Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device maintenance in semiconductor manufacturing environment
- Patent number 11,850,692
- Issue date Dec 26, 2023
- TAIWAN SEMICONDUCTORMANUFACTURING COMPANY LIMITED
- Vincent Chien
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Device maintenance in semiconductor manufacturing environment
- Patent number 11,819,965
- Issue date Nov 21, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Vincent Chien
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing system and substrate transfer apparatus and me...
- Patent number 11,721,564
- Issue date Aug 8, 2023
- Tokyo Electron Limited
- Toshiaki Toyomaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,670,523
- Issue date Jun 6, 2023
- SCREEN Holdings Co., Ltd.
- Takashi Ota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuumizing device and vacuumizing method for bonding substrate
- Patent number 11,664,228
- Issue date May 30, 2023
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Yuangen Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor turbine reset
- Patent number 11,635,216
- Issue date Apr 25, 2023
- Texas Capitol Semiconductor, Inc.
- Roger L. Bottomfield
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Clustered reaction system
- Patent number 11,584,995
- Issue date Feb 21, 2023
- National Tsing Hua University
- Shih-Jung Ho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
To pumping line arrangements
- Patent number 11,437,248
- Issue date Sep 6, 2022
- Edwards Limited
- Andrew James Seeley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conformal manufacturing device and method for complex curved-surfac...
- Patent number 11,424,144
- Issue date Aug 23, 2022
- Huazhong University of Science & Technology
- Yongan Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System with dual-motion substrate carriers
- Patent number 11,414,748
- Issue date Aug 16, 2022
- Intevac, Inc.
- Terry Bluck
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for scheduling semiconductor fabrication
- Patent number 11,385,627
- Issue date Jul 12, 2022
- Yangtze Memory Technologies Co., Ltd.
- Weirong Zheng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Systems and methods to monitor particulate accumulation for bake ch...
- Patent number 11,339,733
- Issue date May 24, 2022
- Tokyo Electron Limited
- Michael Carcasi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processing system and processing method
- Patent number 11,302,521
- Issue date Apr 12, 2022
- Tokyo Electron Limited
- Kenji Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Radiation of substrates during processing and systems thereof
- Patent number 11,289,325
- Issue date Mar 29, 2022
- Tokyo Electron Limited
- Michael Edley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for manipulating power at an edge ring in a p...
- Patent number 11,276,601
- Issue date Mar 15, 2022
- Applied Materials, Inc.
- Linying Cui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective etch rate monitor
- Patent number 11,257,698
- Issue date Feb 22, 2022
- Applied Materials, Inc.
- Philip Allan Kraus
- G01 - MEASURING TESTING
Information Patent Grant
System for and method of manufacture using multimodal analysis
- Patent number 11,152,236
- Issue date Oct 19, 2021
- Semiconductor Components Industries, LLC
- Lieyi Sheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vapor phase growth apparatus comprising n reactors, a primary gas s...
- Patent number 11,149,358
- Issue date Oct 19, 2021
- NUFLARE TECHNOLOGY, INC.
- Hideki Ito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shutter monitoring system
- Patent number 11,131,541
- Issue date Sep 28, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shih-Yu Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vapor phase growth apparatus comprising n reactors, a primary gas s...
- Patent number 11,118,284
- Issue date Sep 14, 2021
- NUFLARE TECHNOLOGY, INC.
- Hideki Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus and method
- Patent number 11,028,481
- Issue date Jun 8, 2021
- JUSUNG ENGINEERING CO., LTD.
- Chui Joo Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Capped ALD films for doping fin-shaped channel regions of 3-D IC tr...
- Patent number 11,011,379
- Issue date May 18, 2021
- Lam Research Corporation
- Reza Arghavani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adaptive chamber matching in advanced semiconductor process control
- Patent number 10,955,832
- Issue date Mar 23, 2021
- Applied Materials, Inc.
- Samer Banna
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic memory device, method for manufacturing the same, and subs...
- Patent number 10,910,552
- Issue date Feb 2, 2021
- Samsung Electronics Co., Ltd.
- Joonmyoung Lee
- G11 - INFORMATION STORAGE
Information Patent Grant
Matching process controllers for improved matching of process
- Patent number 10,884,400
- Issue date Jan 5, 2021
- Applied Materials, Inc.
- James Robert Moyne
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer producing apparatus
- Patent number 10,840,116
- Issue date Nov 17, 2020
- Disco Corporation
- Kentaro Iizuka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Selective etch rate monitor
- Patent number 10,790,175
- Issue date Sep 29, 2020
- Applied Materials, Inc.
- Philip Allan Kraus
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image based substrate mapper
- Patent number 10,784,134
- Issue date Sep 22, 2020
- Applied Materials, Inc.
- Eng Sheng Peh
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR MANUFACTURING SYSTEM, BEHAVIOR RECOGNITION DEVICE AND...
- Publication number 20240094705
- Publication date Mar 21, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- KAI-TING YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE MAINTENANCE IN SEMICONDUCTOR MANUFACTURING ENVIRONMENT
- Publication number 20240082964
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Vincent Chien
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
MULTI-FUNCTION DEVICE
- Publication number 20240071790
- Publication date Feb 29, 2024
- KULICKE AND SOFFA HI-TECH CO., LTD.
- Lu-Min Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230307264
- Publication date Sep 28, 2023
- SCREEN Holdings Co., Ltd.
- Takashi OTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING SYSTEM AND METHOD OF ASSEMBLY
- Publication number 20230307269
- Publication date Sep 28, 2023
- ASM IP HOLDING B.V.
- Adriaan Garssen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE TRANSFER APPARATUS AND ME...
- Publication number 20230282492
- Publication date Sep 7, 2023
- TOKYO ELECTRON LIMITED
- Toshiaki TOYOMAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING CHAMBER CALIBRATION
- Publication number 20230222264
- Publication date Jul 13, 2023
- Applied Materials, Inc.
- Rohit Mahakali
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CONTROL OF WAFER BOW DURING INTEGRATED CIRCUIT PROCESSING
- Publication number 20230136819
- Publication date May 4, 2023
- LAM RESEARCH CORPORATION
- David W. Porter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE MAINTENANCE IN SEMICONDUCTOR MANUFACTURING ENVIRONMENT
- Publication number 20220355425
- Publication date Nov 10, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Vincent Chien
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
INPUT/OUTPUT (IO) HANDLING DURING UPDATE PROCESS FOR MANUFACTURING...
- Publication number 20220277974
- Publication date Sep 1, 2022
- Applied Materials, Inc.
- Eugene Lobovski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Radiation of Substrates During Processing and Systems Thereof
- Publication number 20220189764
- Publication date Jun 16, 2022
- TOKYO ELECTRON LIMITED
- Michael Edley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RECIPE CREATION METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD,...
- Publication number 20220004172
- Publication date Jan 6, 2022
- Kokusai Electric Corporation
- Takatoshi SEKI
- G05 - CONTROLLING REGULATING
Information Patent Application
Radiation of Substrates During Processing and Systems Thereof
- Publication number 20210407790
- Publication date Dec 30, 2021
- TOKYO ELECTRON LIMITED
- Michael Edley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210407839
- Publication date Dec 30, 2021
- TOKYO ELECTRON LIMITED
- Tatsuhiko Tsujihashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLUSTERED REACTION SYSTEM
- Publication number 20210363641
- Publication date Nov 25, 2021
- National Tsing-Hua University
- Shih-Jung HO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MASS TRANSFER METHOD, MASS TRANSFER DEVICE AND BUFFER CARRIER
- Publication number 20210327731
- Publication date Oct 21, 2021
- Advanced Semiconductor Engineering, Inc.
- Chih-Wen CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHODS FOR MANIPULATING POWER AT AN EDGE RING IN A P...
- Publication number 20210320022
- Publication date Oct 14, 2021
- Applied Materials, Inc.
- Linying CUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR SCHEDULING SEMICONDUCTOR FABRICATION
- Publication number 20210263505
- Publication date Aug 26, 2021
- Yangtze Memory Technologies Co., Ltd.
- Weirong ZHENG
- G05 - CONTROLLING REGULATING
Information Patent Application
MATCHING PROCESS CONTROLLERS FOR IMPROVED MATCHING OF PROCESS
- Publication number 20210116898
- Publication date Apr 22, 2021
- Applied Materials, Inc.
- James Robert Moyne
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE ETCH RATE MONITOR
- Publication number 20200381280
- Publication date Dec 3, 2020
- Philip Allan Kraus
- G01 - MEASURING TESTING
Information Patent Application
PROCESSING CHAMBER FOR THERMAL PROCESSES
- Publication number 20200373195
- Publication date Nov 26, 2020
- Applied Materials, Inc.
- Shu-Kwan Lau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADAPTIVE CHAMBER MATCHING IN ADVANCED SEMICONDUCTOR PROCESS CONTROL
- Publication number 20200333774
- Publication date Oct 22, 2020
- Applied Materials, Inc.
- Samer BANNA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE TRANSFER APPARATUS AND ME...
- Publication number 20200321227
- Publication date Oct 8, 2020
- TOKYO ELECTRON LIMITED
- Toshiaki TOYOMAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUMIZING DEVICE AND VACUUMIZING METHOD
- Publication number 20200168459
- Publication date May 28, 2020
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Yuangen YU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADAPTIVE CHAMBER MATCHING IN ADVANCED SEMICONDUCTOR PROCESS CONTROL
- Publication number 20200110390
- Publication date Apr 9, 2020
- Applied Materials, Inc.
- Samer BANNA
- G05 - CONTROLLING REGULATING
Information Patent Application
MAGNETIC MEMORY DEVICE, METHOD FOR MANUFACTURING THE SAME, AND SUBS...
- Publication number 20200091412
- Publication date Mar 19, 2020
- Samsung Electronics Co., Ltd.
- Joonmyoung LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Turbine Reset
- Publication number 20200063993
- Publication date Feb 27, 2020
- Texas Capitol Semiconductor, Inc.
- Roger L. Bottomfield
- G05 - CONTROLLING REGULATING
Information Patent Application
Shutter Monitoring System
- Publication number 20200003550
- Publication date Jan 2, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shih-Yu LIAO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CAPPED ALD FILMS FOR DOPING FIN-SHAPED CHANNEL REGIONS OF 3-D IC TR...
- Publication number 20190385850
- Publication date Dec 19, 2019
- LAM RESEARCH CORPORATION
- Reza Arghavani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER FOR DEGASSING SUBSTRATES
- Publication number 20190348311
- Publication date Nov 14, 2019
- Evatec AG
- Jurgen Weichart
- H01 - BASIC ELECTRIC ELEMENTS

Apparatus for manufacturing or treating in a plurality of work-stations

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Film-forming device

Semiconductor manufacturing system, behavior recognition device and...

Device maintenance in semiconductor manufacturing environment

Device maintenance in semiconductor manufacturing environment

Substrate processing system and substrate transfer apparatus and me...

Substrate processing apparatus

Vacuumizing device and vacuumizing method for bonding substrate

Semiconductor turbine reset

Clustered reaction system

To pumping line arrangements

Conformal manufacturing device and method for complex curved-surfac...

System with dual-motion substrate carriers

Method and system for scheduling semiconductor fabrication

Systems and methods to monitor particulate accumulation for bake ch...

Processing system and processing method

Radiation of substrates during processing and systems thereof

Apparatus and methods for manipulating power at an edge ring in a p...

Selective etch rate monitor

System for and method of manufacture using multimodal analysis

Vapor phase growth apparatus comprising n reactors, a primary gas s...

Shutter monitoring system

Vapor phase growth apparatus comprising n reactors, a primary gas s...

Substrate treating apparatus and method

Capped ALD films for doping fin-shaped channel regions of 3-D IC tr...

Adaptive chamber matching in advanced semiconductor process control

Magnetic memory device, method for manufacturing the same, and subs...

Matching process controllers for improved matching of process

Wafer producing apparatus

Selective etch rate monitor

Image based substrate mapper

Patents Applicationslast 30 patents

SEMICONDUCTOR MANUFACTURING SYSTEM, BEHAVIOR RECOGNITION DEVICE AND...

DEVICE MAINTENANCE IN SEMICONDUCTOR MANUFACTURING ENVIRONMENT

MULTI-FUNCTION DEVICE

SUBSTRATE PROCESSING APPARATUS

SEMICONDUCTOR PROCESSING SYSTEM AND METHOD OF ASSEMBLY

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE TRANSFER APPARATUS AND ME...

PROCESSING CHAMBER CALIBRATION

CONTROL OF WAFER BOW DURING INTEGRATED CIRCUIT PROCESSING

DEVICE MAINTENANCE IN SEMICONDUCTOR MANUFACTURING ENVIRONMENT

INPUT/OUTPUT (IO) HANDLING DURING UPDATE PROCESS FOR MANUFACTURING...

Radiation of Substrates During Processing and Systems Thereof

RECIPE CREATION METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD,...

Radiation of Substrates During Processing and Systems Thereof

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

CLUSTERED REACTION SYSTEM

MASS TRANSFER METHOD, MASS TRANSFER DEVICE AND BUFFER CARRIER

APPARATUS AND METHODS FOR MANIPULATING POWER AT AN EDGE RING IN A P...

METHOD AND SYSTEM FOR SCHEDULING SEMICONDUCTOR FABRICATION

MATCHING PROCESS CONTROLLERS FOR IMPROVED MATCHING OF PROCESS

SELECTIVE ETCH RATE MONITOR

PROCESSING CHAMBER FOR THERMAL PROCESSES

ADAPTIVE CHAMBER MATCHING IN ADVANCED SEMICONDUCTOR PROCESS CONTROL

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE TRANSFER APPARATUS AND ME...

VACUUMIZING DEVICE AND VACUUMIZING METHOD

ADAPTIVE CHAMBER MATCHING IN ADVANCED SEMICONDUCTOR PROCESS CONTROL

MAGNETIC MEMORY DEVICE, METHOD FOR MANUFACTURING THE SAME, AND SUBS...

Semiconductor Turbine Reset

Shutter Monitoring System

CAPPED ALD FILMS FOR DOPING FIN-SHAPED CHANNEL REGIONS OF 3-D IC TR...

CHAMBER FOR DEGASSING SUBSTRATES