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H01L21/67098
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ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/67098
Apparatus for thermal treatment
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Patents Grants
last 30 patents
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Patent Grant
Vaporizer, substrate processing apparatus and method for manufactur...
Patent number
11,970,771
Issue date
Apr 30, 2024
Kokusai Electric Corporation
Atsushi Morikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Chip, heating circuit and heating control method for chip
Patent number
11,967,510
Issue date
Apr 23, 2024
Nuvoton Technology Corporation
Wei-Hang Chiu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate support for reduced damage substrate backside
Patent number
11,955,362
Issue date
Apr 9, 2024
Applied Materials, Inc.
Joel M Huston
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle beam inspection apparatus
Patent number
11,942,340
Issue date
Mar 26, 2024
ASML Netherlands B.V.
Jeroen Gerard Gosen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film for component manufacture and component manufacturing method
Patent number
11,942,349
Issue date
Mar 26, 2024
Mitsui Chemicals Tohcello, Inc.
Eiji Hayashishita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
Patent number
11,935,762
Issue date
Mar 19, 2024
Kokusai Electric Corporation
Daigi Kamimura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,921,428
Issue date
Mar 5, 2024
Kioxia Corporation
Yoshihiro Uozumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,915,930
Issue date
Feb 27, 2024
SCREEN Holdings Co., Ltd.
Naoko Arima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method
Patent number
11,915,951
Issue date
Feb 27, 2024
HITACHI HIGH-TECH CORPORATION
Hiroyuki Kobayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for cleaning substrates
Patent number
11,911,807
Issue date
Feb 27, 2024
ACM RESEARCH (SHANGHAI), INC.
Hui Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Contaminant control in thermocompression bonding of semiconductors...
Patent number
11,908,828
Issue date
Feb 20, 2024
Micron Technology, Inc.
Brandon P. Wirz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods, systems, and apparatus for conducting a radical treatment...
Patent number
11,901,195
Issue date
Feb 13, 2024
Applied Materials, Inc.
Pradeep Sampath Kumar
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Toxic outgas control post process
Patent number
11,901,198
Issue date
Feb 13, 2024
Axcelis Technologies, Inc.
John F. Baggett
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck device
Patent number
11,887,877
Issue date
Jan 30, 2024
Sumitomo Osaka Cement Co., Ltd.
Mamoru Kosakai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer boat
Patent number
11,869,786
Issue date
Jan 9, 2024
ASM IP Holding B.V.
Theodorus G. M. Oosterlaken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor processing system with in-situ electrical bias and me...
Patent number
11,837,652
Issue date
Dec 5, 2023
Tokyo Electron Limited
David Hurley
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
UHV in-situ cryo-cool chamber
Patent number
11,802,340
Issue date
Oct 31, 2023
Applied Materials, Inc.
Bharath Swaminathan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
High temperature micro-zone electrostatic chuck
Patent number
11,784,080
Issue date
Oct 10, 2023
Applied Materials, Inc.
Vijay D. Parkhe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Solid source sublimator
Patent number
11,773,486
Issue date
Oct 3, 2023
ASM IP Holding B.V.
Eric James Shero
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multi-point thermocouples and assemblies for ceramic heating struct...
Patent number
11,774,298
Issue date
Oct 3, 2023
Tokyo Electron Limited
Melvin Verbaas
G01 - MEASURING TESTING
Information
Patent Grant
Method for processing a workpiece using a multi-cycle thermal treat...
Patent number
11,764,072
Issue date
Sep 19, 2023
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Michael X. Yang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Movable wafer holder for film deposition chamber having six degrees...
Patent number
11,742,231
Issue date
Aug 29, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Hsuan-Chih Chu
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Method for decreasing cool down time with heated system for semicon...
Patent number
11,728,187
Issue date
Aug 15, 2023
Axcelis Technologies, Inc.
John Baggett
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas introduction structure, thermal processing apparatus and gas su...
Patent number
11,725,281
Issue date
Aug 15, 2023
Tokyo Electron Limited
Shingo Hishiya
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Developing treatment method, computer storage medium and developing...
Patent number
11,720,026
Issue date
Aug 8, 2023
Tokyo Electron Limited
Akiko Kai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Member for semiconductor manufacturing apparatus
Patent number
11,715,652
Issue date
Aug 1, 2023
NGK Insulators, Ltd.
Masaki Ishikawa
C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information
Patent Grant
Thermal regulator, substrate processing apparatus, and method of co...
Patent number
11,705,347
Issue date
Jul 18, 2023
Tokyo Electron Limited
Katsuyuki Koizumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,676,834
Issue date
Jun 13, 2023
SCREEN Holdings Co., Ltd.
Manabu Okutani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate delivery method
Patent number
11,664,266
Issue date
May 30, 2023
Tokyo Electron Limited
Yuichiro Wagatsuma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer cleaning apparatus and wafer cleaning method using the same
Patent number
11,648,594
Issue date
May 16, 2023
Samsung Electronics Co., Ltd.
Seung Min Shin
B08 - CLEANING
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING SUBSTRATE B...
Publication number
20240105425
Publication date
Mar 28, 2024
Samsung Electronics Co., Ltd.
Seungwan Yoo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE HEATING DEVICE CONFIGURED TO SUPPRESS CRACK GENERATION
Publication number
20240063033
Publication date
Feb 22, 2024
MICO CERAMICS LTD.
Hyosung PARK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System for Processing Semiconductor Wafer Storage Cassettes, Combin...
Publication number
20240047252
Publication date
Feb 8, 2024
ASM IP HOLDING B.V.
Erik ter Vrugt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240038533
Publication date
Feb 1, 2024
TOKYO ELECTRON LIMITED
Hiroki TADATOMO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BATCH PROCESSING APPARATUS, SYSTEMS, AND RELATED METHODS AND STRUCT...
Publication number
20240018688
Publication date
Jan 18, 2024
Applied Materials, Inc.
Errol Antonio C. SANCHEZ
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SINTERING DEVICES AND PRESSURE SINTERING MECHANISMS WITH CONTROLLAB...
Publication number
20230417487
Publication date
Dec 28, 2023
QUICK INTELLIGENT EQUIPMENT CO., LTD.
Guoqiang QI
F27 - FURNACES KILNS OVENS RETORTS
Information
Patent Application
SOLID SOURCE SUBLIMATOR
Publication number
20230383402
Publication date
Nov 30, 2023
ASM IP HOLDING B.V.
Eric James Shero
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Warm Wafer After Ion Cryo-Implantation
Publication number
20230377913
Publication date
Nov 23, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Yu-Chang Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE HOLDER, METHOD OF MANUFAC...
Publication number
20230343614
Publication date
Oct 26, 2023
Kokusai Electric Corporation
Shinya MORITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LOAD LOCK FAST PUMP VENT
Publication number
20230335414
Publication date
Oct 19, 2023
BROOKS AUTOMATION US, LLC
Christopher HOFMEISTER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HYBRID PATTERNING-BONDING SEMICONDUCTOR TOOL
Publication number
20230326814
Publication date
Oct 12, 2023
TOKYO ELECTRON LIMITED
Anthony R. SCHEPIS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SOLID SOURCE SUBLIMATOR
Publication number
20230313370
Publication date
Oct 5, 2023
ASM IP HOLDING B.V.
Eric James Shero
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS, CARRIER JIG, AND MANUFACTURI...
Publication number
20230290666
Publication date
Sep 14, 2023
Fasford Technology Co., Ltd.
Keita YAMAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND SUBSTRATE TREATMENT METHO...
Publication number
20230272532
Publication date
Aug 31, 2023
Samsung Electronics Co., LTD
Jae Hyun YANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
WAFER CLEANING APPARATUS AND WAFER CLEANING METHOD USING THE SAME
Publication number
20230249230
Publication date
Aug 10, 2023
Samsung Electronics Co., Ltd.
Seung Min SHIN
B08 - CLEANING
Information
Patent Application
DEPOSITION METHOD AND DEPOSITION APPARATUS
Publication number
20230245882
Publication date
Aug 3, 2023
TOKYO ELECTRON LIMITED
Yosuke WATANABE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR LASERS AND PROCESSES FOR THE PLANARIZATION OF SEMICON...
Publication number
20230246421
Publication date
Aug 3, 2023
MACOM Technology Solutions Holdings, Inc.
Ali Badar Alamin DOW
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TEMPERATURE CONTROL METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR D...
Publication number
20230221700
Publication date
Jul 13, 2023
Kokusai Electric Corporation
Hideto YAMAGUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD, SEMICONDUCTOR STRUCTURE, AND VACUUM PROCESSING SYSTEM
Publication number
20230223252
Publication date
Jul 13, 2023
TURUN YLIOPISTO
Pekka Laukkanen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SOLID SOURCE SUBLIMATOR
Publication number
20230183861
Publication date
Jun 15, 2023
ASM IP HOLDING B.V.
Eric James Shero
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
COMPONENT MOUNTING SYSTEM, RESIN SHAPING DEVICE, RESIN PLACING DEVI...
Publication number
20230154770
Publication date
May 18, 2023
BONDTECH CO., LTD.
Akira YAMAUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus for the Temperature Control of a Substrate and Correspond...
Publication number
20230148124
Publication date
May 11, 2023
ERS electronic GmbH
Klaus Reitinger
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS, SYSTEMS, AND APPARATUS FOR CONDUCTING A RADICAL TREATMENT...
Publication number
20230128128
Publication date
Apr 27, 2023
Applied Materials, Inc.
Pradeep SAMPATH KUMAR
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD OF MANUFACTURING SOLDER BUMP
Publication number
20230104577
Publication date
Apr 6, 2023
Samsung Electronics Co., Ltd.
Sungyong YUN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
Publication number
20230104882
Publication date
Apr 6, 2023
Kokusai Electric Corporation
Yukinori ABURATANI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FURNACE OPENING STRUCTURE, SUBSTRATE PROCESSING APPARATUS AND METHO...
Publication number
20230089509
Publication date
Mar 23, 2023
Kokusai Electric Corporation
Shinya MORITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR MANUFACTURING A SEMICONDUCTOR DEVICE AND METHOD OF MA...
Publication number
20230020305
Publication date
Jan 19, 2023
Samsung Electronics Co., Ltd.
Hwanyeol PARK
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PART HAVING CORROSION-RESISTANT LAYER, MANUFACTURING PROCESS APPARA...
Publication number
20220411340
Publication date
Dec 29, 2022
POINT ENGINEERING CO., LTD.
Bum Mo AHN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PARTICLE BEAM INSPECTION APPARATUS
Publication number
20220415678
Publication date
Dec 29, 2022
ASML NETHERLANDS B.V.
Jeroen Gerard GOSEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
Publication number
20220392783
Publication date
Dec 8, 2022
Kokusai Electric Corporation
Daigi KAMIMURA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...