Arrangements for avoiding sticking of the flexible or moving parts

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B81B3/0002

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B3/00Devices comprising flexible or deformable elements

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B81B3/0002Arrangements for avoiding sticking of the flexible or moving parts

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Patents Grantslast 30 patents

Information Patent Grant
Method for preparing silicon wafer with rough surface and silicon w...
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- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Wooicheang Goh
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Physical quantity sensor
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- HITACHI AUTOMOTIVE SYSTEMS, LTD.
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- B81 - MICRO-STRUCTURAL TECHNOLOGY
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Capacitive transducer and acoustic sensor
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- Issue date Oct 8, 2019
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- Takashi Kasai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
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Resonant transducer, manufacturing method therefor, and multi-layer...
- Patent number 9,139,419
- Issue date Sep 22, 2015
- Yokogawa Electric Corporation
- Takashi Yoshida
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Digital flexure beam accelerometer
- Patent number 5,305,640
- Issue date Apr 26, 1994
- Texas Instruments Incorporated
- Robert M. Boysel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of making a digital flexure beam accelerometer
- Patent number 5,192,395
- Issue date Mar 9, 1993
- Texas Instruments Incorporated
- Robert M. Boysel
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents