Atomic layer deposition [ALD]

Industry

CPC
C23C16/45525

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/45525Atomic layer deposition [ALD]

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Pressure-induced temperature modification during atomic scale proce...
- Patent number 12,205,803
- Issue date Jan 21, 2025
- Kurt J. Lesker Company
- Gilbert Bruce Rayner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Innovative nanopore sequencing technology
- Patent number 12,203,921
- Issue date Jan 21, 2025
- Steven R. J. Brueck
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Deposition of organic films
- Patent number 12,205,820
- Issue date Jan 21, 2025
- ASM IP Holding B.V.
- Eva E. Tois
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactive thermal barrier coating
- Patent number 12,196,109
- Issue date Jan 14, 2025
- RTX Corporation
- Brian T. Hazel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multilayer coating for corrosion resistance
- Patent number 12,191,120
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- Amir H. Tavakoli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method for manufacturing semiconductor device
- Patent number 12,191,201
- Issue date Jan 7, 2025
- Mitsubishi Electric Corporation
- Masahiro Totsuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Soft-magnetic powder comprising coated particles
- Patent number 12,180,568
- Issue date Dec 31, 2024
- BASF SE
- Robert Prunchak
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Methods for improved biocompatibility for human implanted medical d...
- Patent number 12,171,995
- Issue date Dec 24, 2024
- Paradromics, Inc.
- Kimberly G. Reid
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrolyte structure for a high-temperature, high-pressure lithium...
- Patent number 12,166,168
- Issue date Dec 10, 2024
- Saudi Arabian Oil Company
- Guodong Zhan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming a semiconductor device structure and related se...
- Patent number 12,166,099
- Issue date Dec 10, 2024
- ASM IP Holding B.V.
- Chiyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing a semiconductor device and pattern formatio...
- Patent number 12,159,787
- Issue date Dec 3, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Cheng Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coated fuel pellets, methods of making and using same
- Patent number 12,154,698
- Issue date Nov 26, 2024
- UChicago Argonne, LLC
- Abdellatif M. Yacout
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Deposition of oxide thin films
- Patent number 12,154,785
- Issue date Nov 26, 2024
- ASM IP Holding B.V.
- Suvi P. Haukka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition of tungsten on molybdenum templates
- Patent number 12,148,623
- Issue date Nov 19, 2024
- Lam Research Corporation
- Patrick A. van Cleemput
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Symmetric plasma source to generate pie-shaped treatment
- Patent number 12,142,458
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Inorganic-infiltrated polymer hybrid thin film resists for advanced...
- Patent number 12,140,865
- Issue date Nov 12, 2024
- Brookhaven Science Associates, LLC
- Chang-Yong Nam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor phase deposition of organic films
- Patent number 12,138,654
- Issue date Nov 12, 2024
- ASM IP Holding B.V.
- Viljami J. Pore
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor phase deposition of organic films
- Patent number 12,134,108
- Issue date Nov 5, 2024
- ASM IP Holding B.V.
- Viljami J. Pore
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing blocking layers on metal surfaces
- Patent number 12,131,900
- Issue date Oct 29, 2024
- Applied Materials, Inc.
- Bhaskar Jyoti Bhuyan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing tool and methods of operation
- Patent number 12,131,962
- Issue date Oct 29, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuang-Wei Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Powder-atomic-layer-deposition device with knocker
- Patent number 12,123,092
- Issue date Oct 22, 2024
- SKY TECH INC.
- Jing-Cheng Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming high aspect ratio features
- Patent number 12,125,700
- Issue date Oct 22, 2024
- ASM IP Holding B.V.
- Mitsuya Utsuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming method, method for manufacturing semiconductor device,...
- Patent number 12,119,219
- Issue date Oct 15, 2024
- Tokyo Electron Limited
- Hiroaki Ashizawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mass flow controller and flow control method therefor
- Patent number 12,111,671
- Issue date Oct 8, 2024
- BEIJING SEVENSTAR FLOW CO., LTD
- Bowen Deng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pedestals for modulating film properties in atomic layer deposition...
- Patent number 12,110,586
- Issue date Oct 8, 2024
- Lam Research Corporation
- Adrien Lavoie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition process for forming semiconductor device and system
- Patent number 12,112,942
- Issue date Oct 8, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chung-Ting Ko
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Patterning of complex metal oxide structures
- Patent number 12,099,294
- Issue date Sep 24, 2024
- University of Massachusetts
- James J. Watkins
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Methods of making nanopowders, nanoceramic materials and nanocerami...
- Patent number 12,098,107
- Issue date Sep 24, 2024
- Applied Materials, Inc.
- Guodong Zhan
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Coatings for enhancement of properties and performance of substrate...
- Patent number 12,084,778
- Issue date Sep 10, 2024
- Entegris, Inc.
- Bryan C. Hendrix
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-depth film for optical devices
- Patent number 12,084,761
- Issue date Sep 10, 2024
- Applied Materials, Inc.
- Karl J. Armstrong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
GROWTH INHIBITOR FOR FORMING THIN FILM, METHOD FOR FORMING THIN FIL...
- Publication number 20250034705
- Publication date Jan 30, 2025
- Soulbrain Co., LTD
- Changbong Yeon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF OXIDE THIN FILMS
- Publication number 20250037995
- Publication date Jan 30, 2025
- ASM IP HOLDING B.V.
- Suvi P. Haukka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods for Fabricating Surface-enhanced Raman Spectroscopy Substrates
- Publication number 20250027194
- Publication date Jan 23, 2025
- Raytum Photonics LLC
- Yimin Hu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR CONTROLLING SPIN-ON SELF-ASSEMBLED MONOLAYER (SAM) SELE...
- Publication number 20250029833
- Publication date Jan 23, 2025
- TOKYO ELECTRON LIMITED
- Lior Huli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR PHASE DEPOSITION OF ORGANIC FILMS
- Publication number 20250025911
- Publication date Jan 23, 2025
- ASM IP HOLDING B.V.
- Viljami J. Pore
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MOLYBDENUM DEPOSITION
- Publication number 20250029840
- Publication date Jan 23, 2025
- LAM RESEARCH CORPORATION
- Patrick A. VAN CLEEMPUT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PEDESTALS FOR MODULATING FILM PROPERTIES IN ATOMIC LAYER DEPOSITION...
- Publication number 20250019825
- Publication date Jan 16, 2025
- LAM RESEARCH CORPORATION
- Adrien LAVOIE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FUNCTIONALIZING CARBON NANOSTRUCTURES
- Publication number 20250003106
- Publication date Jan 2, 2025
- Canatu Oy
- Ahmed Soliman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR AN IPC COATING
- Publication number 20240424791
- Publication date Dec 26, 2024
- FUJIFILM DIMATIX, INC.
- Shane Boyd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRODUCTION METHOD FOR SEMICONDUCTOR SUBSTRATES
- Publication number 20240411228
- Publication date Dec 12, 2024
- JSR Corporation
- Ken MARUYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PATTERNING OF COMPLEX METAL OXIDE STRUCTURES
- Publication number 20240411224
- Publication date Dec 12, 2024
- University of Massachusetts
- James J. Watkins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Integrated Pressure Sensor for Process Chamber Assemblies
- Publication number 20240410773
- Publication date Dec 12, 2024
- Chih-Yang CHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING A FILM ON A SURFACE OF A SUBSTRATE BY CYCLIC...
- Publication number 20240401190
- Publication date Dec 5, 2024
- ASM IP HOLDING B.V.
- Do Han Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF MAKING NANOPOWDERS, NANOCERAMIC MATERIALS AND NANOCERAMI...
- Publication number 20240400461
- Publication date Dec 5, 2024
- Applied Materials, Inc.
- Guodong Zhan
- C01 - INORGANIC CHEMISTRY
Information Patent Application
Conductive Features of Semiconductor Devices and Methods of Forming...
- Publication number 20240395554
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu Shan Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND PATTERN FORMATIO...
- Publication number 20240387173
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Cheng LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIAMOND COMPOSITE PARTICLE, RESIN COMPOSITION
- Publication number 20240384399
- Publication date Nov 21, 2024
- Sekisui Chemical Co., Ltd
- Kaoru Shibuta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING SURFACE TREATMENT FILM
- Publication number 20240384418
- Publication date Nov 21, 2024
- Tokyo Ohka Kogyo Co., Ltd.
- Koya Inomata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETIC BEAD AND MAGNETIC BEAD REAGENT
- Publication number 20240376575
- Publication date Nov 14, 2024
- SEIKO EPSON CORPORATION
- Fumio TAKAGI
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
- Publication number 20240379471
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuang-Wei CHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Deposition Process for Forming Semiconductor Device and System
- Publication number 20240379348
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chung-Ting Ko
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR DYNAMICALLY ADJUSTING THIN-FILM DEPOSITION PA...
- Publication number 20240376605
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chung-Liang CHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TREATMENTS TO ENHANCE MATERIAL STRUCTURES
- Publication number 20240379349
- Publication date Nov 14, 2024
- Applied Materials, Inc.
- Steven C. H. HUNG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PACKAGING DESIGN FOR A FLOW SENSOR AND METHODS OF MANUFACTURING THE...
- Publication number 20240369389
- Publication date Nov 7, 2024
- Applied Materials, Inc.
- Srikanth Krishnamurthy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL LIQUID, MANUFACTURING METHOD OF MODIFIED SUBSTRATE, AND MA...
- Publication number 20240368753
- Publication date Nov 7, 2024
- FUJIFILM CORPORATION
- Akihiro Hakamata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL ALKOXIDE COMPOUND, THIN FILM FORMING RAW MATERIAL, AND THIN F...
- Publication number 20240352044
- Publication date Oct 24, 2024
- ADEKA CORPORATION
- Nana OKADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR SELECTIVE DEPOSITION USING SELF-ASSEMBLED MONOLAYERS
- Publication number 20240352577
- Publication date Oct 24, 2024
- Applied Materials, Inc.
- CHANG KE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CAPACITATIVE SENSING DEVICE FOR IN-SITU MONITORING OF COATINGS
- Publication number 20240344818
- Publication date Oct 17, 2024
- Halliburton Energy Services, Inc.
- James Martin PRICE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ULTRALIGHT ROBUST PLATE MATERIALS
- Publication number 20240344196
- Publication date Oct 17, 2024
- The Trustees of the University of Pennsylvania
- Igor Bargatin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ARTICLES COATED WITH A FLUORO-ANNEALED FILM
- Publication number 20240337023
- Publication date Oct 10, 2024
- Entegris, Inc.
- I-Kuan Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Atomic layer deposition [ALD]

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Pressure-induced temperature modification during atomic scale proce...

Innovative nanopore sequencing technology

Deposition of organic films

Reactive thermal barrier coating

Multilayer coating for corrosion resistance

Semiconductor device and method for manufacturing semiconductor device

Soft-magnetic powder comprising coated particles

Methods for improved biocompatibility for human implanted medical d...

Electrolyte structure for a high-temperature, high-pressure lithium...

Methods for forming a semiconductor device structure and related se...

Method of manufacturing a semiconductor device and pattern formatio...

Coated fuel pellets, methods of making and using same

Deposition of oxide thin films

Deposition of tungsten on molybdenum templates

Symmetric plasma source to generate pie-shaped treatment

Inorganic-infiltrated polymer hybrid thin film resists for advanced...

Vapor phase deposition of organic films

Vapor phase deposition of organic films

Methods for depositing blocking layers on metal surfaces

Semiconductor processing tool and methods of operation

Powder-atomic-layer-deposition device with knocker

Method of forming high aspect ratio features

Film forming method, method for manufacturing semiconductor device,...

Mass flow controller and flow control method therefor

Pedestals for modulating film properties in atomic layer deposition...

Deposition process for forming semiconductor device and system

Patterning of complex metal oxide structures

Methods of making nanopowders, nanoceramic materials and nanocerami...

Coatings for enhancement of properties and performance of substrate...

Multi-depth film for optical devices

Patents Applicationslast 30 patents

GROWTH INHIBITOR FOR FORMING THIN FILM, METHOD FOR FORMING THIN FIL...

DEPOSITION OF OXIDE THIN FILMS

Methods for Fabricating Surface-enhanced Raman Spectroscopy Substrates

METHODS FOR CONTROLLING SPIN-ON SELF-ASSEMBLED MONOLAYER (SAM) SELE...

VAPOR PHASE DEPOSITION OF ORGANIC FILMS

MOLYBDENUM DEPOSITION

PEDESTALS FOR MODULATING FILM PROPERTIES IN ATOMIC LAYER DEPOSITION...

FUNCTIONALIZING CARBON NANOSTRUCTURES

PROCESS FOR AN IPC COATING

PRODUCTION METHOD FOR SEMICONDUCTOR SUBSTRATES

PATTERNING OF COMPLEX METAL OXIDE STRUCTURES

Integrated Pressure Sensor for Process Chamber Assemblies

METHODS FOR DEPOSITING A FILM ON A SURFACE OF A SUBSTRATE BY CYCLIC...

METHODS OF MAKING NANOPOWDERS, NANOCERAMIC MATERIALS AND NANOCERAMI...

Conductive Features of Semiconductor Devices and Methods of Forming...

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND PATTERN FORMATIO...

DIAMOND COMPOSITE PARTICLE, RESIN COMPOSITION

METHOD OF FORMING SURFACE TREATMENT FILM

MAGNETIC BEAD AND MAGNETIC BEAD REAGENT

SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION

Deposition Process for Forming Semiconductor Device and System

SYSTEM AND METHOD FOR DYNAMICALLY ADJUSTING THIN-FILM DEPOSITION PA...

TREATMENTS TO ENHANCE MATERIAL STRUCTURES

PACKAGING DESIGN FOR A FLOW SENSOR AND METHODS OF MANUFACTURING THE...

CHEMICAL LIQUID, MANUFACTURING METHOD OF MODIFIED SUBSTRATE, AND MA...

METAL ALKOXIDE COMPOUND, THIN FILM FORMING RAW MATERIAL, AND THIN F...

METHODS FOR SELECTIVE DEPOSITION USING SELF-ASSEMBLED MONOLAYERS

CAPACITATIVE SENSING DEVICE FOR IN-SITU MONITORING OF COATINGS

ULTRALIGHT ROBUST PLATE MATERIALS

ARTICLES COATED WITH A FLUORO-ANNEALED FILM