Atomic layer deposition [ALD]

Industry

CPC
C23C16/45525

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/45525Atomic layer deposition [ALD]

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method, recording medium, and substrate proces...
- Patent number 12,351,908
- Issue date Jul 8, 2025
- Kokusai Electric Corporation
- Takeo Hanashima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for bonding substrate, transparent substrate laminate, and d...
- Patent number 12,351,511
- Issue date Jul 8, 2025
- iSABers Japan Co., Ltd.
- Tadatomo Suga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of films using molybdenum precursors
- Patent number 12,351,914
- Issue date Jul 8, 2025
- Lam Research Corporation
- Joshua Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ultrathin atomic layer deposition film accuracy thickness control
- Patent number 12,354,871
- Issue date Jul 8, 2025
- Lam Research Corporation
- Jun Qian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Optical assembly with coating and methods of use
- Patent number 12,346,023
- Issue date Jul 1, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Pei-Cheng Hsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for controlling contact resistance in cobalt-titanium struc...
- Patent number 12,347,695
- Issue date Jul 1, 2025
- Applied Materials, Inc.
- Takashi Kuratomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Optical assembly with coating and methods of use
- Patent number 12,346,020
- Issue date Jul 1, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Pei-Cheng Hsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method and film formation apparatus
- Patent number 12,341,004
- Issue date Jun 24, 2025
- Tokyo Electron Limited
- Yumiko Kawano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Piezoluminescence structure, piezoelectric structure, manufacturing...
- Patent number 12,336,435
- Issue date Jun 17, 2025
- Industry-Academic Cooperation Foundation, Yonsei University
- Hyung Ho Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liner for V-NAND word line stack
- Patent number 12,328,872
- Issue date Jun 10, 2025
- Applied Materials, Inc.
- Jacqueline S. Wrench
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deflector for chamber cleaning
- Patent number 12,325,913
- Issue date Jun 10, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuang-Wei Cheng
- B08 - CLEANING
Information Patent Grant
Liquid discharge head, liquid discharge device, liquid discharge ap...
- Patent number 12,319,059
- Issue date Jun 3, 2025
- Ricoh Company, Ltd.
- Satoshi Mizukami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic oxygen-resistant, low drag coatings and materials
- Patent number 12,311,634
- Issue date May 27, 2025
- Skeyeon, Inc.
- Timothy K. Minton
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Chemical source vessel with dip tube
- Patent number 12,297,540
- Issue date May 13, 2025
- ASM IP Holding B.V.
- Andrew Michael Yednak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of cutting a fine pattern, methods of forming active patter...
- Patent number 12,293,921
- Issue date May 6, 2025
- Samsung Electronics Co., Ltd.
- Sanggyo Chung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compound, thin-film forming raw material, and method of producing t...
- Patent number 12,291,541
- Issue date May 6, 2025
- Adeka Corporation
- Akio Saito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Modifying hydrophobicity of a wafer surface using an organosilicon...
- Patent number 12,288,685
- Issue date Apr 29, 2025
- Lam Research Corporation
- Jeremy D. Fields
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Indium precursor compound, method of preparing thin film using the...
- Patent number 12,281,383
- Issue date Apr 22, 2025
- Soulbrain Co., Ltd.
- Chang Bong Yeon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low refractive index surface layers and related methods
- Patent number 12,281,384
- Issue date Apr 22, 2025
- UChicago Argonne, LLC
- Elena Shevchenko
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film structure including dielectric material layer, method of...
- Patent number 12,276,026
- Issue date Apr 15, 2025
- Samsung Electronics Co., Ltd.
- Bo-Eun Park
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Substrate supporting plate, thin film deposition apparatus includin...
- Patent number 12,270,118
- Issue date Apr 8, 2025
- ASM IP Holding B.V.
- Yong Min Yoo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Display element and method for manufacturing a display element
- Patent number 12,273,967
- Issue date Apr 8, 2025
- Lumineq Oy
- Jani Holopainen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and mechanisms for adjusting film deposition parameters dur...
- Patent number 12,265,379
- Issue date Apr 1, 2025
- Applied Materials, Inc.
- Mitesh Sanghvi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems for depositing a layer
- Patent number 12,255,053
- Issue date Mar 18, 2025
- ASM IP Holding B.V.
- Daniele Piumi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming structures including vanadium boride and vanadiu...
- Patent number 12,243,747
- Issue date Mar 4, 2025
- ASM IP Holding B.V.
- Petro Deminskyi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Combination CVD/ALD method, source and pulse profile modification
- Patent number 12,241,156
- Issue date Mar 4, 2025
- ASM IP Holding B.V.
- Hannu Huotari
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Titanium aluminum and tantalum aluminum thin films
- Patent number 12,237,392
- Issue date Feb 25, 2025
- ASM IP Holding B.V.
- Suvi Haukka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wireless communication system, wireless communication method, contr...
- Patent number 12,238,663
- Issue date Feb 25, 2025
- Tokyo Electron Limited
- Tomoya Bessho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nucleation-free tungsten deposition
- Patent number 12,237,221
- Issue date Feb 25, 2025
- Lam Research Corporation
- Sema Ermez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor device including air gap
- Patent number 12,230,498
- Issue date Feb 18, 2025
- Samsung Electronics Co., Ltd.
- Dain Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SELECTIVE FILM DEPOSITION
- Publication number 20250239484
- Publication date Jul 24, 2025
- ASM IP HOLDING B.V.
- Paul Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING MODIFIED SUBSTRATE AND METHOD FOR MANUFACT...
- Publication number 20250230539
- Publication date Jul 17, 2025
- FUJIFILM CORPORATION
- Akihiro Hakamata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIETHYL ZINC AND METAL HALIDE PRECURSORS FOR DEPOSITION OF METAL FI...
- Publication number 20250230544
- Publication date Jul 17, 2025
- Applied Materials, Inc.
- Srinivas Gandikota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE PROCESSING COMPOSITION, COMPOUND, METHOD FOR P...
- Publication number 20250230321
- Publication date Jul 17, 2025
- FUJIFILM CORPORATION
- Naoya Shimoju
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
GAS SUPPLY METHOD OF SUBSTRATE PROCESSING APPARATUS
- Publication number 20250223695
- Publication date Jul 10, 2025
- JUSUNG ENGINEERING CO., LTD.
- Chul Joo HWANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM MODIFICATION COMPOSITION, METHOD OF FORMING THIN FILM USI...
- Publication number 20250214919
- Publication date Jul 3, 2025
- Soulbrain Co., LTD
- Seung Hyun LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION METHOD AND FILM FORMATION DEVICE
- Publication number 20250207245
- Publication date Jun 26, 2025
- Tokyo Electron Limited
- Tomohiro NAKAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORTING PLATE, THIN FILM DEPOSITION APPARATUS INCLUDIN...
- Publication number 20250207287
- Publication date Jun 26, 2025
- ASM IP HOLDING B.V.
- Yong Min Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMATION METHOD AND FILM FORMATION DEVICE
- Publication number 20250207244
- Publication date Jun 26, 2025
- Tokyo Electron Limited
- Shuji AZUMO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AREA SELECTIVE DEPOSITION
- Publication number 20250197991
- Publication date Jun 19, 2025
- ASM IP HOLDING B.V.
- Sabrina Myriam Guillemot Wack
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR DEPOSITING A LAYER
- Publication number 20250201526
- Publication date Jun 19, 2025
- ASM IP HOLDING B.V.
- Daniele Piumi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Smoothing Surface Roughness Using Atomic Layer Deposition
- Publication number 20250179631
- Publication date Jun 5, 2025
- Eagle Technology, LLC
- James THROCKMORTON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW RESISTIVITY CONTACTS AND INTERCONNECTS
- Publication number 20250183097
- Publication date Jun 5, 2025
- LAM RESEARCH CORPORATION
- Chiukin Steven LAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TITANIUM ALUMINUM AND TANTALUM ALUMINUM THIN FILMS
- Publication number 20250176248
- Publication date May 29, 2025
- ASM IP HOLDING B.V.
- Suvi Haukka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR PRODUCING CONFORMAL THIN FILMS
- Publication number 20250163584
- Publication date May 22, 2025
- KALARK NANOSTRUCTRE SCIENCES INC.
- Alain E. KALOYEROS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF FORMING STRUCTURES INCLUDING VANADIUM BORIDE AND VANADIU...
- Publication number 20250166995
- Publication date May 22, 2025
- ASM IP HOLDING B.V.
- Petro Deminskyi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Area-Selective Hardmask Deposition: Methods and Tools for Advanced...
- Publication number 20250146128
- Publication date May 8, 2025
- Nederlandse Organisatie voor Toegepast-natuurwetenschappelijk onderzoek TNO
- Alfredo Mameli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WATER-REPELLING AGENT FOR ELECTROCONDUCTIVE ARTICLE SURFACE, WATER-...
- Publication number 20250145836
- Publication date May 8, 2025
- Tokyo Ohka Kogyo Co., Ltd.
- Daichi TANAKA
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
COATINGS FOR ENHANCEMENT OF PROPERTIES AND PERFORMANCE OF SUBSTRATE...
- Publication number 20250129485
- Publication date Apr 24, 2025
- Bryan C. Hendrix
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
FILM-FORMING METHOD AND FILM-FORMING APPARATUS
- Publication number 20250129482
- Publication date Apr 24, 2025
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NUCLEATION-FREE DEPOSITION
- Publication number 20250132201
- Publication date Apr 24, 2025
- LAM RESEARCH CORPORATION
- Sema ERMEZ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF ORGANIC FILMS
- Publication number 20250118562
- Publication date Apr 10, 2025
- ASM IP HOLDING B.V.
- Eva E. Tois
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
HIGH-PURITY ALKYNES FOR SELECTIVE DEPOSITION
- Publication number 20250115992
- Publication date Apr 10, 2025
- Merck Patent GmbH
- Christopher R. CLOUGH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING A PATTERN ON A SUBSTRATE
- Publication number 20250110411
- Publication date Apr 3, 2025
- ASM IP HOLDING B.V.
- Kishan Ashokbhai Patel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN-FILM FORMING RAW MATERIAL USED IN ATOMIC LAYER DEPOSITION METH...
- Publication number 20250109296
- Publication date Apr 3, 2025
- ADEKA CORPORATION
- Keisuke TAKEDA
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
SPONGE-LIKE POROUS BODY, POLISHING PAD, LIQUID ABSORBING PAD, CLEAN...
- Publication number 20250108478
- Publication date Apr 3, 2025
- Canon Kabushiki Kaisha
- SHINJI FUKUI
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
GROWTH INHIBITOR FOR FORMING THIN FILM, METHOD FOR FORMING THIN FIL...
- Publication number 20250075320
- Publication date Mar 6, 2025
- Soulbrain Co., LTD
- Changbong Yeon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR FORMING A SEMICONDUCTOR DEVICE STRUCTURE AND RELATED SE...
- Publication number 20250081588
- Publication date Mar 6, 2025
- ASM IP HOLDING B.V.
- Chiyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTILAYER COATING FOR CORROSION RESISTANCE
- Publication number 20250069857
- Publication date Feb 27, 2025
- Applied Materials, Inc.
- Amir H. Tavakoli
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
FUNCTIONALIZATION OF MICROSCALE 3D-PRINTED POLYMER STRUCTURES WITH...
- Publication number 20250058520
- Publication date Feb 20, 2025
- Trustees of Dartmouth College
- William SCHEIDELER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Atomic layer deposition [ALD]

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate processing method, recording medium, and substrate proces...

Method for bonding substrate, transparent substrate laminate, and d...

Deposition of films using molybdenum precursors

Ultrathin atomic layer deposition film accuracy thickness control

Optical assembly with coating and methods of use

Methods for controlling contact resistance in cobalt-titanium struc...

Optical assembly with coating and methods of use

Film formation method and film formation apparatus

Piezoluminescence structure, piezoelectric structure, manufacturing...

Liner for V-NAND word line stack

Deflector for chamber cleaning

Liquid discharge head, liquid discharge device, liquid discharge ap...

Atomic oxygen-resistant, low drag coatings and materials

Chemical source vessel with dip tube

Methods of cutting a fine pattern, methods of forming active patter...

Compound, thin-film forming raw material, and method of producing t...

Modifying hydrophobicity of a wafer surface using an organosilicon...

Indium precursor compound, method of preparing thin film using the...

Low refractive index surface layers and related methods

Thin film structure including dielectric material layer, method of...

Substrate supporting plate, thin film deposition apparatus includin...

Display element and method for manufacturing a display element

Methods and mechanisms for adjusting film deposition parameters dur...

Methods and systems for depositing a layer

Methods of forming structures including vanadium boride and vanadiu...

Combination CVD/ALD method, source and pulse profile modification

Titanium aluminum and tantalum aluminum thin films

Wireless communication system, wireless communication method, contr...

Nucleation-free tungsten deposition

Method for manufacturing semiconductor device including air gap

Patents Applicationslast 30 patents

SELECTIVE FILM DEPOSITION

METHOD FOR MANUFACTURING MODIFIED SUBSTRATE AND METHOD FOR MANUFACT...

DIETHYL ZINC AND METAL HALIDE PRECURSORS FOR DEPOSITION OF METAL FI...

SEMICONDUCTOR DEVICE PROCESSING COMPOSITION, COMPOUND, METHOD FOR P...

GAS SUPPLY METHOD OF SUBSTRATE PROCESSING APPARATUS

THIN FILM MODIFICATION COMPOSITION, METHOD OF FORMING THIN FILM USI...

FILM FORMATION METHOD AND FILM FORMATION DEVICE

SUBSTRATE SUPPORTING PLATE, THIN FILM DEPOSITION APPARATUS INCLUDIN...

FILM FORMATION METHOD AND FILM FORMATION DEVICE

AREA SELECTIVE DEPOSITION

METHODS AND SYSTEMS FOR DEPOSITING A LAYER

Smoothing Surface Roughness Using Atomic Layer Deposition

LOW RESISTIVITY CONTACTS AND INTERCONNECTS

TITANIUM ALUMINUM AND TANTALUM ALUMINUM THIN FILMS

METHODS AND SYSTEMS FOR PRODUCING CONFORMAL THIN FILMS

METHODS OF FORMING STRUCTURES INCLUDING VANADIUM BORIDE AND VANADIU...

Area-Selective Hardmask Deposition: Methods and Tools for Advanced...

WATER-REPELLING AGENT FOR ELECTROCONDUCTIVE ARTICLE SURFACE, WATER-...

COATINGS FOR ENHANCEMENT OF PROPERTIES AND PERFORMANCE OF SUBSTRATE...

FILM-FORMING METHOD AND FILM-FORMING APPARATUS

NUCLEATION-FREE DEPOSITION

DEPOSITION OF ORGANIC FILMS

HIGH-PURITY ALKYNES FOR SELECTIVE DEPOSITION

METHOD FOR FORMING A PATTERN ON A SUBSTRATE

THIN-FILM FORMING RAW MATERIAL USED IN ATOMIC LAYER DEPOSITION METH...

SPONGE-LIKE POROUS BODY, POLISHING PAD, LIQUID ABSORBING PAD, CLEAN...

GROWTH INHIBITOR FOR FORMING THIN FILM, METHOD FOR FORMING THIN FIL...

METHODS FOR FORMING A SEMICONDUCTOR DEVICE STRUCTURE AND RELATED SE...

MULTILAYER COATING FOR CORROSION RESISTANCE

FUNCTIONALIZATION OF MICROSCALE 3D-PRINTED POLYMER STRUCTURES WITH...