Atomic layer deposition [ALD]

Industry

CPC
C23C16/45525

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/45525Atomic layer deposition [ALD]

Industries

Patents Grantslast 30 patents

Information Patent Grant
Atomic layer deposition of metal films
- Patent number 11,970,776
- Issue date Apr 30, 2024
- Lam Research Corporation
- Joshua Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrochemical catalysts with enhanced catalytic activity
- Patent number 11,973,233
- Issue date Apr 30, 2024
- The Board of Trustees of the Leland Stanford Junior University
- Friedrich B. Prinz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective deposition of metal oxides on metal surfaces
- Patent number 11,965,238
- Issue date Apr 23, 2024
- ASM IP Holding B.V.
- Andrea Illiberi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate supporting plate, thin film deposition apparatus includin...
- Patent number 11,965,262
- Issue date Apr 23, 2024
- ASM IP Holding B.V.
- Yong Min Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Solid source precursor vessel
- Patent number 11,959,168
- Issue date Apr 16, 2024
- ASM IP Holding B.V.
- Jianqiu Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Techniques and device structure based upon directional seeding and...
- Patent number 11,956,978
- Issue date Apr 9, 2024
- Applied Materials, Inc.
- M. Arif Zeeshan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing single-crystal semiconductor layer, struct...
- Patent number 11,948,795
- Issue date Apr 2, 2024
- IUCF-HYU (Industry-University Cooperation Foundation Hanyang University)
- Myung Mo Sung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum valve and apparatus for fabricating semiconductor having the...
- Patent number 11,946,138
- Issue date Apr 2, 2024
- Samsung Electronics Co., Ltd.
- Jaeheung Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ultralight robust plate materials
- Patent number 11,939,672
- Issue date Mar 26, 2024
- The Trustees of the University of Pennsylvania
- Igor Bargatin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrochemical catalysts with enhanced catalytic activity
- Patent number 11,936,051
- Issue date Mar 19, 2024
- The Board of Trustees of the Leland Stanford Junior University
- Friedrich B. Prinz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Structures including metal carbide material, devices including the...
- Patent number 11,926,895
- Issue date Mar 12, 2024
- ASM IP Holding B.V.
- Petri Raisanen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Minimizing radical recombination using ALD silicon oxide surface co...
- Patent number 11,920,239
- Issue date Mar 5, 2024
- Lam Research Corporation
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacture of a ceramic component
- Patent number 11,919,817
- Issue date Mar 5, 2024
- Rolex S.A.
- Cyriaque Boccard
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Process for treating a surface of a timepiece component, and timepi...
- Patent number 11,914,328
- Issue date Feb 27, 2024
- Rolex S.A.
- Susana del Carmen Tobenas Borron
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Percolation doping of inorganic-organic frameworks for multiple dev...
- Patent number 11,915,926
- Issue date Feb 27, 2024
- International Business Machines Corporation
- Leonidas Ernesto Ocola
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacture of a ceramic component
- Patent number 11,905,220
- Issue date Feb 20, 2024
- Rolex S.A.
- Cyriaque Boccard
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Methods for depositing a molybdenum metal film over a dielectric su...
- Patent number 11,908,736
- Issue date Feb 20, 2024
- ASM IP Holding B.V.
- Bhushan Zope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Single wafer processing environments with spatial separation
- Patent number 11,894,257
- Issue date Feb 6, 2024
- Applied Materials, Inc.
- Michael Rice
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Printed circuit board substrate comprising a coated boron nitride
- Patent number 11,895,768
- Issue date Feb 6, 2024
- ROGERS CORPORATION
- Eui Kyoon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Energy storage devices having coated passive particles
- Patent number 11,887,781
- Issue date Jan 30, 2024
- Forge Nano, Inc.
- David M. King
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Enhanced spatial ALD of metals through controlled precursor mixing
- Patent number 11,887,856
- Issue date Jan 30, 2024
- Applied Materials, Inc.
- Kelvin Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing fluorine/carbon-free conformal tungsten
- Patent number 11,887,855
- Issue date Jan 30, 2024
- Applied Materials, Inc.
- Xinyu Fu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reflective coating and coating process therefor
- Patent number 11,852,078
- Issue date Dec 26, 2023
- RTX Corporation
- Brian T. Hazel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device, method and machine of manufacture
- Patent number 11,851,749
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Jen-Chun Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fabrication of a high temperature showerhead
- Patent number 11,851,758
- Issue date Dec 26, 2023
- Applied Materials, Inc.
- Sumit Agarwal
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Creating and protecting magnetic nanomaterials
- Patent number 11,851,757
- Issue date Dec 26, 2023
- UChicago Argonne, LLC
- Anil U. Mane
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Broadband absorbers via nanostructures
- Patent number 11,846,753
- Issue date Dec 19, 2023
- The Regents of the University of California
- Donald J. Sirbuly
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of cutting a fine pattern, methods of forming active patter...
- Patent number 11,842,899
- Issue date Dec 12, 2023
- Samsung Electronics Co., Ltd.
- Sanggyo Chung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Segmented showerhead for uniform delivery of multiple precursors
- Patent number 11,834,743
- Issue date Dec 5, 2023
- Applied Materials, Inc.
- Alexander Lerner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition process for fabricating dielectric metasurf...
- Patent number 11,815,668
- Issue date Nov 14, 2023
- President and Fellows of Harvard College
- Robert C. Devlin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
BENZYL COMPOUND PASSIVATION FOR SELECTIVE DEPOSITION AND SELECTIVE...
- Publication number 20240145232
- Publication date May 2, 2024
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEALING MATERIAL FOR COMPOUNDS HAVING NON-STOICHIOMETRIC COMPOSITIO...
- Publication number 20240128144
- Publication date Apr 18, 2024
- THE UNIVERSITY OF TOKYO
- Junichi TAKEYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS DIFFUSER PLATE COATED WITH EMISSIVITY-CONTROLLING THIN FILM AND...
- Publication number 20240124978
- Publication date Apr 18, 2024
- EUGENUS, INC.
- Behzad Mahmoudi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INNOVATIVE NANOPORE SEQUENCING TECHNOLOGY
- Publication number 20240118260
- Publication date Apr 11, 2024
- UNM Rainforest Innovations
- Steven R.J. BRUECK
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
COATINGS FOR GLASS SHAPING MOLDS AND MOLDS COMPRISING THE SAME
- Publication number 20240101462
- Publication date Mar 28, 2024
- Entegris, Inc.
- Troy Scoggins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SINGLE WAFER PROCESSING ENVIRONMENTS WITH SPATIAL SEPARATION
- Publication number 20240096688
- Publication date Mar 21, 2024
- Applied Materials, Inc.
- Michael Robert Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Device, Method and Machine of Manufacture
- Publication number 20240093357
- Publication date Mar 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jen-Chun Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TANTALUM DOPED RUTHENIUM LAYERS FOR INTERCONNECTS
- Publication number 20240071927
- Publication date Feb 29, 2024
- Applied Materials, Inc.
- Shinjae Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INDIUM COMPOUND, THIN-FILM FORMING RAW MATERIAL, THIN FILM, AND MET...
- Publication number 20240060177
- Publication date Feb 22, 2024
- ADEKA CORPORATION
- Keisuke TAKEDA
- C01 - INORGANIC CHEMISTRY
Information Patent Application
METHODS OF CUTTING A FINE PATTERN, METHODS OF FORMING ACTIVE PATTER...
- Publication number 20240063024
- Publication date Feb 22, 2024
- Samsung Electronics Co., Ltd.
- Sanggyo Chung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION PROCESS FOR FABRICATING DIELECTRIC METASURF...
- Publication number 20240061219
- Publication date Feb 22, 2024
- President and Fellows of Harvard College
- Robert C. DEVLIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE THERMAL ATOMIC LAYER DEPOSITION
- Publication number 20240047196
- Publication date Feb 8, 2024
- VERSUM MATERIALS US, LLC
- RONALD M. PEARLSTEIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TUNGSTEN GAP FILL WITH HYDROGEN PLASMA TREATMENT
- Publication number 20240047267
- Publication date Feb 8, 2024
- Tsung-Han YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TECHNIQUES AND DEVICE STRUCTURE BASED UPON DIRECTIONAL SEEDING AND...
- Publication number 20240040808
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- M. Arif Zeeshan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTIVE THERMAL BARRIER COATING
- Publication number 20240011402
- Publication date Jan 11, 2024
- RTX Corporation
- Brian T. Hazel
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
LOW RESISTANCE PULSED CVD TUNGSTEN
- Publication number 20240006180
- Publication date Jan 4, 2024
- LAM RESEARCH CORPORATION
- Yu PAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Tungsten Film-Forming Method, Film-Forming System and Storage Medium
- Publication number 20240003002
- Publication date Jan 4, 2024
- TOKYO ELECTRON LIMITED
- Takashi SAMESHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OPTICAL ASSEMBLY WITH COATING AND METHODS OF USE
- Publication number 20230408906
- Publication date Dec 21, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Pei-Cheng Hsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL SOURCE VESSEL WITH DIP TUBE
- Publication number 20230407480
- Publication date Dec 21, 2023
- ASM IP HOLDING B.V.
- Andrew Michael Yednak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WATER SPLITTING DEVICE PROTECTION
- Publication number 20230407498
- Publication date Dec 21, 2023
- The Regents of the University of Michigan
- Zetian Mi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM STRUCTURE INCLUDING DIELECTRIC MATERIAL LAYER, METHOD OF...
- Publication number 20230399749
- Publication date Dec 14, 2023
- Samsung Electronics Co., Ltd.
- Bo-Eun PARK
- C01 - INORGANIC CHEMISTRY
Information Patent Application
SUBSTRATE SUPPORTING PLATE, APPARATUS INCLUDING THE SUBSTRATE SUPPO...
- Publication number 20230392278
- Publication date Dec 7, 2023
- ASM IP HOLDING B.V.
- SungBae Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITION AND METHODS USING SAME FOR CARBON DOPED SILICON CONTAIN...
- Publication number 20230377874
- Publication date Nov 23, 2023
- VERSUM MATERIALS US, LLC
- Haripin Chandra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DELIVERY DEVICE
- Publication number 20230374657
- Publication date Nov 23, 2023
- LAM RESEARCH CORPORATION
- Thadeous BAMFORD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND MECHANISMS FOR ADJUSTING FILM DEPOSITION PARAMETERS DUR...
- Publication number 20230359179
- Publication date Nov 9, 2023
- Applied Materials, Inc.
- Mitesh Sanghvi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR FORMING A SEMICONDUCTOR DEVICE STRUCTURE AND RELATED SE...
- Publication number 20230352556
- Publication date Nov 2, 2023
- ASM IP HOLDING B.V.
- Chiyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Smoothing Surface Roughness Using Atomic Layer Deposition
- Publication number 20230349042
- Publication date Nov 2, 2023
- Eagle Technology, LLC
- James THROCKMORTON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING STRUCTURE INCLUDING A DOPED ADHESION FILM
- Publication number 20230349040
- Publication date Nov 2, 2023
- ASM IP HOLDING B.V.
- Moataz Bellah Mousa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND PROCESS FOR ATOMIC OR MOLECULAR LAYER DEPOSITION ONTO...
- Publication number 20230340665
- Publication date Oct 26, 2023
- DELFT UNIVERSITY OF TECHNOLOGY
- Jan Rudolf VAN OMMEN
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Semiconductor Device and Method for Forming the Same
- Publication number 20230343818
- Publication date Oct 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shin-Hung Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Atomic layer deposition [ALD]

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Atomic layer deposition of metal films

Electrochemical catalysts with enhanced catalytic activity

Selective deposition of metal oxides on metal surfaces

Substrate supporting plate, thin film deposition apparatus includin...

Solid source precursor vessel

Techniques and device structure based upon directional seeding and...

Method for manufacturing single-crystal semiconductor layer, struct...

Vacuum valve and apparatus for fabricating semiconductor having the...

Ultralight robust plate materials

Electrochemical catalysts with enhanced catalytic activity

Structures including metal carbide material, devices including the...

Minimizing radical recombination using ALD silicon oxide surface co...

Manufacture of a ceramic component

Process for treating a surface of a timepiece component, and timepi...

Percolation doping of inorganic-organic frameworks for multiple dev...

Manufacture of a ceramic component

Methods for depositing a molybdenum metal film over a dielectric su...

Single wafer processing environments with spatial separation

Printed circuit board substrate comprising a coated boron nitride

Energy storage devices having coated passive particles

Enhanced spatial ALD of metals through controlled precursor mixing

Methods for depositing fluorine/carbon-free conformal tungsten

Reflective coating and coating process therefor

Semiconductor device, method and machine of manufacture

Fabrication of a high temperature showerhead

Creating and protecting magnetic nanomaterials

Broadband absorbers via nanostructures

Methods of cutting a fine pattern, methods of forming active patter...

Segmented showerhead for uniform delivery of multiple precursors

Atomic layer deposition process for fabricating dielectric metasurf...

Patents Applicationslast 30 patents

BENZYL COMPOUND PASSIVATION FOR SELECTIVE DEPOSITION AND SELECTIVE...

SEALING MATERIAL FOR COMPOUNDS HAVING NON-STOICHIOMETRIC COMPOSITIO...

GAS DIFFUSER PLATE COATED WITH EMISSIVITY-CONTROLLING THIN FILM AND...

INNOVATIVE NANOPORE SEQUENCING TECHNOLOGY

COATINGS FOR GLASS SHAPING MOLDS AND MOLDS COMPRISING THE SAME

SINGLE WAFER PROCESSING ENVIRONMENTS WITH SPATIAL SEPARATION

Semiconductor Device, Method and Machine of Manufacture

TANTALUM DOPED RUTHENIUM LAYERS FOR INTERCONNECTS

INDIUM COMPOUND, THIN-FILM FORMING RAW MATERIAL, THIN FILM, AND MET...

METHODS OF CUTTING A FINE PATTERN, METHODS OF FORMING ACTIVE PATTER...

ATOMIC LAYER DEPOSITION PROCESS FOR FABRICATING DIELECTRIC METASURF...

SELECTIVE THERMAL ATOMIC LAYER DEPOSITION

TUNGSTEN GAP FILL WITH HYDROGEN PLASMA TREATMENT

TECHNIQUES AND DEVICE STRUCTURE BASED UPON DIRECTIONAL SEEDING AND...

REACTIVE THERMAL BARRIER COATING

LOW RESISTANCE PULSED CVD TUNGSTEN

Tungsten Film-Forming Method, Film-Forming System and Storage Medium

OPTICAL ASSEMBLY WITH COATING AND METHODS OF USE

CHEMICAL SOURCE VESSEL WITH DIP TUBE

WATER SPLITTING DEVICE PROTECTION

THIN FILM STRUCTURE INCLUDING DIELECTRIC MATERIAL LAYER, METHOD OF...

SUBSTRATE SUPPORTING PLATE, APPARATUS INCLUDING THE SUBSTRATE SUPPO...

COMPOSITION AND METHODS USING SAME FOR CARBON DOPED SILICON CONTAIN...

VAPOR DELIVERY DEVICE

METHODS AND MECHANISMS FOR ADJUSTING FILM DEPOSITION PARAMETERS DUR...

METHODS FOR FORMING A SEMICONDUCTOR DEVICE STRUCTURE AND RELATED SE...

Smoothing Surface Roughness Using Atomic Layer Deposition

METHOD OF FORMING STRUCTURE INCLUDING A DOPED ADHESION FILM

APPARATUS AND PROCESS FOR ATOMIC OR MOLECULAR LAYER DEPOSITION ONTO...

Semiconductor Device and Method for Forming the Same