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H01S3/0384
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Patents Grants
last 30 patents
Information
Patent Grant
Capacitor cooling structure and laser apparatus
Patent number
11,050,210
Issue date
Jun 29, 2021
Gigaphoton Inc.
Hisakazu Katsuumi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Laser oscillator
Patent number
10,116,112
Issue date
Oct 30, 2018
VIA MECHANICS, LTD.
Nobuyoshi Ohtani
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Gas laser oscillator having auxiliary electrodes
Patent number
9,819,139
Issue date
Nov 14, 2017
FANUC CORPORATION
Masahiro Honda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Preliminary ionization discharge device and laser apparatus
Patent number
9,748,727
Issue date
Aug 29, 2017
Gigaphoton Inc.
Kouji Kakizaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser chamber
Patent number
9,742,141
Issue date
Aug 22, 2017
Gigaphoton Inc.
Hiroaki Tsushima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser chamber
Patent number
9,722,385
Issue date
Aug 1, 2017
Gigaphoton Inc.
Hiroyuki Ikeda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High pulse repetition rate gas discharge laser
Patent number
9,620,920
Issue date
Apr 11, 2017
Cymer, LLC
Walter D. Gillespie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Single cavity dual-electrode discharge cavity and excimer laser
Patent number
9,252,557
Issue date
Feb 2, 2016
Academy of Opto-Electronics, Chinese Academy of Sciences
Yu Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas laser oscillator capable of estimating sealability of gas conta...
Patent number
9,252,552
Issue date
Feb 2, 2016
FANUC CORPORATION
Masahiro Honda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas laser oscillator controlling adjusted level of laser power supply
Patent number
9,246,297
Issue date
Jan 26, 2016
FANUC CORPORATION
Masahiro Honda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Slab gas laser with pre-ionizing cell
Patent number
9,048,615
Issue date
Jun 2, 2015
Epilog Corporation
Roberto Julio Ramírez Zárate
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for operating a vacuum plasma process system
Patent number
8,653,405
Issue date
Feb 18, 2014
Huettinger Elektronik GmbH + Co. KG
Thomas Kirchmeier
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Electrodes for generating a stable discharge in gas laser systems
Patent number
8,192,790
Issue date
Jun 5, 2012
Coherent GmbH
Igor Bragin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas-discharge laser
Patent number
8,005,126
Issue date
Aug 23, 2011
Optosystems Ltd.
Vladimir Vasilyevich Atezhev
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electromagnetically pumped alkali metal vapor cell system
Patent number
7,929,586
Issue date
Apr 19, 2011
Alliant Techsystems Inc.
John S. Canham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrodes for generating a stable discharge in gas laser system
Patent number
7,756,184
Issue date
Jul 13, 2010
Coherent, Inc.
Igor Bragin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pre-ionizer for pulsed gas-discharge laser
Patent number
7,693,207
Issue date
Apr 6, 2010
Coherent, Inc.
Raul Martin Wong Gutierrez
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrically excited gas discharge laser for generating high-repeti...
Patent number
7,672,354
Issue date
Mar 2, 2010
LTB-Lasertechnik Berlin GmbH
Matthias Scholz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High pulse repetition rate gas discharge laser
Patent number
7,633,989
Issue date
Dec 15, 2009
Cymer, Inc.
Walter D. Gillespie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pre-ionizer for pulsed gas-discharge laser
Patent number
7,545,842
Issue date
Jun 9, 2009
Coherent, Inc.
Christian J. Shackleton
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thermal-expansion tolerant, preionizer electrode for a gas discharg...
Patent number
7,542,502
Issue date
Jun 2, 2009
Cymer, Inc.
Thomas D. Steiger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas discharge laser chamber improvements
Patent number
7,522,650
Issue date
Apr 21, 2009
Cymer, Inc.
William N. Partlo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High power diode utilizing secondary emission
Patent number
7,429,761
Issue date
Sep 30, 2008
The United States of America as represented by the Secretary of the Navy
Moshe Friedman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrodes for fluorine gas discharge lasers
Patent number
7,339,973
Issue date
Mar 4, 2008
Cymer, Inc.
Richard G. Morton
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas laser oscillator
Patent number
7,154,925
Issue date
Dec 26, 2006
Fanuc Ltd
Akira Egawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pre-ionizer for RF-energized gas laser
Patent number
6,963,596
Issue date
Nov 8, 2005
Coherent, Inc.
Christian J. Shackleton
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas laser apparatus emitting ultraviolet radiation
Patent number
6,847,670
Issue date
Jan 25, 2005
Ushio Denki Kabushiki Kaisya
Koji Kakizaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Corona preionization assembly for a gas laser
Patent number
6,757,315
Issue date
Jun 29, 2004
Lambda Physik AG
Igor Bragin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas discharge laser with means for removing gas impurities
Patent number
6,735,233
Issue date
May 11, 2004
Lambda Physik AG
Rustem Osmanow
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device for self-initiated UV pre-ionization of a repetitively pulse...
Patent number
6,671,302
Issue date
Dec 30, 2003
Lambda Physik AG
Vladimir Mikhailovich Borisov
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
CHAMBER FOR GAS LASER DEVICE, GAS LASER DEVICE, AND ELECTRONIC DEVI...
Publication number
20240405496
Publication date
Dec 5, 2024
Gigaphoton Inc.
Yoichi SASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHAMBER OF GAS LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING...
Publication number
20240405497
Publication date
Dec 5, 2024
Gigaphoton Inc.
Yoichi SASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CAPACITOR COOLING STRUCTURE AND LASER APPARATUS
Publication number
20200136336
Publication date
Apr 30, 2020
Gigaphoton Inc.
Hisakazu KATSUUMI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER OSCILLATOR
Publication number
20180034229
Publication date
Feb 1, 2018
Via Mechanics, Ltd.
Nobuyoshi OHTANI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS LASER OSCILLATOR HAVING AUXILIARY ELECTRODES
Publication number
20170098918
Publication date
Apr 6, 2017
FANUC CORPORATION
Masahiro Honda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PRELIMINARY IONIZATION DISCHARGE DEVICE AND LASER APPARATUS
Publication number
20160172817
Publication date
Jun 16, 2016
GIGAPHOTON INC.
Kouji KAKIZAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS LASER OSCILLATOR CAPABLE OF ESTIMATING SEALABILITY OF GAS CONTA...
Publication number
20150372441
Publication date
Dec 24, 2015
FANUC CORPORATION
Masahiro Honda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS LASER OSCILLATOR CONTROLLING ADJUSTED LEVEL OF LASER POWER SUPPLY
Publication number
20150244138
Publication date
Aug 27, 2015
FANUC CORPORATION
Masahiro Honda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Slab Gas Laser with Pre-Ionizing Cell
Publication number
20150155677
Publication date
Jun 4, 2015
Epilog Corporation
Roberto Julio RamÍrez Zárate
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GYROLASER WITH OPTIMIZED IGNITION
Publication number
20140340687
Publication date
Nov 20, 2014
Selvin DAVID
G01 - MEASURING TESTING
Information
Patent Application
SINGLE-CAVITY DUAL-ELECTRODE DISCHARGE CAVITY AND EXCIMER LASER
Publication number
20140023101
Publication date
Jan 23, 2014
ACADEMY OF OPTO-ELECTRONICS, CHINESE ACADEMY OF SCIENCES
Yu Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PRE-IRRADIATION IN GAS DISCHARGE LASING DEVICES USING MULTIPLE PRE-...
Publication number
20140003459
Publication date
Jan 2, 2014
IPG MICROSYSTEMS LLC
Jeffrey P. Sercel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRODES FOR GENERATING A STABLE DISCHARGE IN GAS LASER SYSTEMS
Publication number
20100239748
Publication date
Sep 23, 2010
COHERENT, INC.
Igor BRAGIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROMAGNETICALLY PUMPED ALKALI METAL VAPOR CELL SYSTEM
Publication number
20100232460
Publication date
Sep 16, 2010
ALLIANT TECHSYSTEMS INC.
John S. Canham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS-DISCHARGE LASER
Publication number
20100098128
Publication date
Apr 22, 2010
Vladimir Vasilyevich Atezhev
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
High pulse repetition rate gas discharge laser
Publication number
20100054295
Publication date
Mar 4, 2010
Cymer, Inc.
Walter D. Gillespie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Pre-ionizer for pulsed gas-discharge laser
Publication number
20090067467
Publication date
Mar 12, 2009
Raul Martin Wong Gutierrez
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electrically Excited Gas Discharge Laser for Generating High-Repeti...
Publication number
20080279247
Publication date
Nov 13, 2008
LTB-Lasertechnik Berlin GmbH
Matthias Scholz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electrodes for generating a stable discharge in gas laser systems
Publication number
20080205474
Publication date
Aug 28, 2008
Igor Bragin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Laser device for exposure device
Publication number
20080095209
Publication date
Apr 24, 2008
KOMATSU LTD.,
Osamu Wakabayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Pre-ionizer for pulsed gas-discharge laser
Publication number
20080069170
Publication date
Mar 20, 2008
Christian J. Shackleton
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Operating a Vacuum Plasma Process System
Publication number
20080041830
Publication date
Feb 21, 2008
HUETTINGER Elektronik GmbH + Co. KG
Thomas Kirchmeier
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
TRIGGERED SPARK GAP
Publication number
20070297479
Publication date
Dec 27, 2007
Bio-Rad Laboratories
Timothy Swinney
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Thermal-expansion tolerant, preionizer electrode for a gas discharg...
Publication number
20070091972
Publication date
Apr 26, 2007
Cymer, Inc.
Thomas D. Steiger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Acoustic shock-wave damping in pulsed gas-laser discharge
Publication number
20070002918
Publication date
Jan 4, 2007
Norbert Niemoeller
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
High pulse repetition rate gas discharge laser
Publication number
20060291517
Publication date
Dec 28, 2006
Cymer, Inc.
Walter D. Gillespie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Alumina tube
Publication number
20060222035
Publication date
Oct 5, 2006
NGK Insulators, Ltd.
Mitsuru Ohta
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Gas discharge laser chamber improvements
Publication number
20050226301
Publication date
Oct 13, 2005
William N. Partlo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
High power diode utilizing secondary emission
Publication number
20050199982
Publication date
Sep 15, 2005
Moshe Friedman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Pre-ionizer for RF-energized gas laser
Publication number
20050163183
Publication date
Jul 28, 2005
Christian J. Shackleton
H01 - BASIC ELECTRIC ELEMENTS