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B81C1/00785
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Parent Industries
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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C1/00
Manufacture or treatment of devices or systems in or on a substrate
Current Industry
B81C1/00785
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Patents Grants
last 30 patents
Information
Patent Grant
Methods for fabricating pressure sensors with non-silicon diaphragms
Patent number
11,624,668
Issue date
Apr 11, 2023
ZHEJIANG DUNAN ARTIFICIAL ENVIRONMENT CO., LTD.
Tom Kwa
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Selective wafer removal process for wafer bonding applications
Patent number
11,167,983
Issue date
Nov 9, 2021
Texas Instruments Incorporated
John Charles Ehmke
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electro-mechanical system structure and method for forming th...
Patent number
10,457,546
Issue date
Oct 29, 2019
United Microelectronics Corp.
Yuan-Sheng Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods for fabricating pressure sensors with non-silicon diaphragms
Patent number
10,378,985
Issue date
Aug 13, 2019
DunAn Sensing, LLC
Tom Kwa
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for providing a low-k spacer
Patent number
10,224,414
Issue date
Mar 5, 2019
Lam Research Corporation
Straford A. Wild
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Pressure sensor with support structure for non-silicon diaphragm
Patent number
9,804,046
Issue date
Oct 31, 2017
DunAn Sensing, LLC
Tom Kwa
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
SELECTIVE WAFER REMOVAL PROCESS FOR WAFER BONDING APPLICATIONS
Publication number
20200223690
Publication date
Jul 16, 2020
TEXAS INSTRUMENTS INCORPORATED
John Charles EHMKE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHODS FOR FABRICATING PRESSURE SENSORS WITH NON-SILICON DIAPHRAGMS
Publication number
20190310153
Publication date
Oct 10, 2019
DunAn Sensing, LLC
TOM KWA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHODS FOR FABRICATING PRESSURE SENSORS WITH NON-SILICON DIAPHRAGMS
Publication number
20170113927
Publication date
Apr 27, 2017
DunAn Sensing, LLC
Tom Kwa
B81 - MICRO-STRUCTURAL TECHNOLOGY