Avoid or control over-etching

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B81C1/00563

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

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B81C1/00563Avoid or control over-etching

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Patents Grantslast 30 patents

Information Patent Grant
Fence structure to prevent stiction in a MEMS motion sensor
- Patent number 11,261,083
- Issue date Mar 1, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS structure with an etch stop layer buried within inter-dielectr...
- Patent number 10,927,000
- Issue date Feb 23, 2021
- United Microelectronics Corp.
- Li-Che Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of etching microelectronic mechanical system features in a s...
- Patent number 10,784,115
- Issue date Sep 22, 2020
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Feng Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fence structure to prevent stiction in a MEMS motion sensor
- Patent number 10,562,763
- Issue date Feb 18, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of etching microelectronic mechanical system features in a s...
- Patent number 10,395,940
- Issue date Aug 27, 2019
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Feng Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
FENCE STRUCTURE TO PREVENT STICTION IN A MEMS MOTION SENSOR
- Publication number 20200140265
- Publication date May 7, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF ETCHING MICROELECTRONIC MECHANICAL SYSTEM FEATURES IN A S...
- Publication number 20190333773
- Publication date Oct 31, 2019
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Feng Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND DEVICE FOR DETECTING TERMINATION OF ETCHING
- Publication number 20140131707
- Publication date May 15, 2014
- Fuji Electric Co., Ltd.
- Hiroshi Tomizawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY