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B81C1/00571

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00571Avoid or control under-cutting

Industries

Patents Grantslast 30 patents

Information Patent Grant
Sidewall stopper for MEMS device
- Patent number 11,203,522
- Issue date Dec 21, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shih-Wei Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS structure and method of fabricating the same
- Patent number 10,773,953
- Issue date Sep 15, 2020
- United Microelectronics Corp.
- Meng-Jia Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sidewall stopper for MEMS device
- Patent number 10,766,763
- Issue date Sep 8, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shih-Wei Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing high aspect ratio structure and method of m...
- Patent number 10,573,424
- Issue date Feb 25, 2020
- Konica Minolta, Inc.
- Mitsuru Yokoyama
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Field emission devices and methods of making thereof
- Patent number 10,504,772
- Issue date Dec 10, 2019
- Infineon Technologies AG
- Alfons Dehe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS isolation structures
- Patent number 10,435,291
- Issue date Oct 8, 2019
- DigitalOptics Corporation MEMS
- Ankur Jain
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Inertial sensor and method of manufacturing the same
- Patent number 9,919,917
- Issue date Mar 20, 2018
- SAMSUNG ELECTRO-MECHANICS CO., LTD.
- Jong Woon Kim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vacuum-cavity-insulated flow sensors
- Patent number 9,880,036
- Issue date Jan 30, 2018
- Posifa
- Xiang Zheng Tu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS isolation structures
- Patent number 9,783,413
- Issue date Oct 10, 2017
- DigitalOptics Corporation MEMS
- Ankur Jain
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone structure and method of manufacturing the same
- Patent number 9,681,234
- Issue date Jun 13, 2017
- Shanghai IC R&D Center Co., Ltd.
- Chao Yuan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of making a semiconductor device package with dummy gate
- Patent number 9,502,334
- Issue date Nov 22, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hsueh-An Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS isolation structures
- Patent number 9,352,962
- Issue date May 31, 2016
- DigitalOptics Corporation MEMS
- Ankur Jain
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Material quality, suspended material structures on lattice-mismatch...
- Patent number 9,330,907
- Issue date May 3, 2016
- The Board of Trustees of the Leland Stanford Junior University
- Robert Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical-system device with guard ring and method f...
- Patent number 9,302,907
- Issue date Apr 5, 2016
- Pixart Imaging Incorporation
- Hsin Hui Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of making a semiconductor device package
- Patent number 9,240,348
- Issue date Jan 19, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hsueh-An Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical-system device with guard ring and method f...
- Patent number 9,018,718
- Issue date Apr 28, 2015
- Pixart Imaging Incorporation
- Hsin Hui Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Etching technique for creation of thermally-isolated microstructures
- Patent number 8,969,203
- Issue date Mar 3, 2015
- Sensortechnics GmbH
- Leslie M. Landsberger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrical routing
- Patent number 8,922,870
- Issue date Dec 30, 2014
- DigitalOptics Corporation MEMS
- Ankur Jain
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Guard trench
- Patent number 8,884,381
- Issue date Nov 11, 2014
- DigitalOptics Corporation MEMS
- Ankur Jain
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wafer level packaging of micro-electro-mechanical systems (MEMS) an...
- Patent number 8,836,116
- Issue date Sep 16, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsueh-An Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microstructure device with an improved anchor
- Patent number 8,704,317
- Issue date Apr 22, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chung-Hsien Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing MEMS structures, and MEMS structure
- Patent number 8,563,344
- Issue date Oct 22, 2013
- Robert Bosch GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microstructure with an enhanced anchor
- Patent number 8,551,798
- Issue date Oct 8, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chung-Hsien Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrical routing
- Patent number 8,547,627
- Issue date Oct 1, 2013
- DigitalOptics Corporation MEMS
- Ankur Jain
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wet metal-etching method and apparatus for MEMS device fabrication
- Patent number 8,425,718
- Issue date Apr 23, 2013
- University of Electronic Science and Technology of China
- Yadong Jiang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of forming an undercut microstructure
- Patent number 8,377,320
- Issue date Feb 19, 2013
- National Taipei University of Technology
- Tzyy-Jiann Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microstructure device with an improved anchor
- Patent number 8,343,789
- Issue date Jan 1, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chung-Hsien Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Etching technique for creation of thermally-isolated microstructures
- Patent number 7,951,721
- Issue date May 31, 2011
- Leslie M. Landsberger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing a wiring board
- Patent number 7,900,350
- Issue date Mar 8, 2011
- Omron Corporation
- Taku Masai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Layer system comprising a silicon layer and a passivation layer, me...
- Patent number 7,872,333
- Issue date Jan 18, 2011
- Robert Bosch GmbH
- Franz Laermer
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICES AND FABRICATION METH...
- Publication number 20230294980
- Publication date Sep 21, 2023
- Vanguard International Semiconductor Corporation
- RAKESH CHAND
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING A BONDING PAD FOR A MICROMECHANICAL SENSOR ELE...
- Publication number 20230219808
- Publication date Jul 13, 2023
- ROBERT BOSCH GmbH
- Andreas Prinzen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SIDEWALL STOPPER FOR MEMS DEVICE
- Publication number 20200369512
- Publication date Nov 26, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Shih-Wei Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SIDEWALL STOPPER FOR MEMS DEVICE
- Publication number 20200369511
- Publication date Nov 26, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Shih-Wei Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ISOLATION STRUCTURES
- Publication number 20200055728
- Publication date Feb 20, 2020
- DIGITALOPTICS CORPORATION MEMS
- Ankur JAIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS isolation structures
- Publication number 20180029879
- Publication date Feb 1, 2018
- DIGITALOPTICS CORPORATION MEMS
- Ankur JAIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MAKING A SEMICONDUCTOR DEVICE PACKAGE
- Publication number 20140363968
- Publication date Dec 11, 2014
- Hsueh-An YANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Electrical Routing
- Publication number 20140036342
- Publication date Feb 6, 2014
- DigitalOptics Corporation MEMS
- Ankur Jain
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Microstructure Device with an Improved Anchor
- Publication number 20130126989
- Publication date May 23, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chung-Hsien Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for producing MEMS structures, and MEMS structure
- Publication number 20120133002
- Publication date May 31, 2012
- Jochen REINMUTH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRICAL ROUTING
- Publication number 20120119611
- Publication date May 17, 2012
- Tessera MEMS Technologies, Inc.
- Ankur Jain
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ISOLATION STRUCTURES
- Publication number 20120119324
- Publication date May 17, 2012
- Tessera MEMS Technologies, Inc.
- Ankur Jain
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
GUARD TRENCH
- Publication number 20120119325
- Publication date May 17, 2012
- Tessera MEMS Technologies, Inc.
- Ankur Jain
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
WAFER LEVEL PACKAGING OF MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) AN...
- Publication number 20120098122
- Publication date Apr 26, 2012
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsueh-An YANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROSTRUCTURE WITH AN ENHANCED ANCHOR
- Publication number 20120068276
- Publication date Mar 22, 2012
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chung-Hsien Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROSTRUCTURE DEVICE WITH AN IMPROVED ANCHOR
- Publication number 20120043626
- Publication date Feb 23, 2012
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chung-Hsien Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ETCHING TECHNIQUE FOR CREATION OF THERMALLY-ISOLATED MICROSTRUCTURES
- Publication number 20110314435
- Publication date Dec 22, 2011
- Leslie M. Landsberger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FORMING AN UNDERCUT MICROSTRUCTURE
- Publication number 20110250397
- Publication date Oct 13, 2011
- NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY
- Tzyy-Jiann WANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Wet metal-etching method and apparatus used for MEMS
- Publication number 20110223771
- Publication date Sep 15, 2011
- University of Electronic Science and Technology of China
- Yadong Jiang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL-SYSTEM DEVICE WITH GUARD RING AND METHOD F...
- Publication number 20100213568
- Publication date Aug 26, 2010
- PixArt Imaging Incorporation, R.O.C.
- Hsin Hui Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of Manufacturing a Semiconductor Microstructure
- Publication number 20090061578
- Publication date Mar 5, 2009
- Siew-Seong Tan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEM AND METHOD FOR OBTAINING ANISOTROPIC ETCHING OF PATTERNED SU...
- Publication number 20080245674
- Publication date Oct 9, 2008
- Robert J. von Gutfeld
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Etching Technique For Creation of Thermally-Isolated Microstructures
- Publication number 20080179713
- Publication date Jul 31, 2008
- Leslie M. Landsberger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HIGH ASPECT RATIO VIA ETCH
- Publication number 20080050919
- Publication date Feb 28, 2008
- Interuniversitair Microelektronica Centrum (IMEC)
- Joke Van Aelst
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF DEEP ETCHING
- Publication number 20080023441
- Publication date Jan 31, 2008
- Te-Keng Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS structure and method of fabricating the same
- Publication number 20080007814
- Publication date Jan 10, 2008
- SAMSUNG ELECTRONICS CO., LTD.
- Young-tack Hong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS FOR MINIMIZING MASK UNDERCUTS AND NOTCHES FOR PLASMA PROCES...
- Publication number 20070281489
- Publication date Dec 6, 2007
- Tamarak Pandhumsoporn
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Silicon substrate comprising positive etching profiles with a defin...
- Publication number 20060219654
- Publication date Oct 5, 2006
- Karola Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of manufacturing a wiring board, a wiring board, a circuit e...
- Publication number 20060209520
- Publication date Sep 21, 2006
- Omron Corporation
- Taku Masai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Layer system comprising a silicon layer and a passivation layer, me...
- Publication number 20060108576
- Publication date May 25, 2006
- Franz Laermer
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Avoid or control under-cutting

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Sidewall stopper for MEMS device

MEMS structure and method of fabricating the same

Sidewall stopper for MEMS device

Method of manufacturing high aspect ratio structure and method of m...

Field emission devices and methods of making thereof

MEMS isolation structures

Inertial sensor and method of manufacturing the same

Vacuum-cavity-insulated flow sensors

MEMS isolation structures

MEMS microphone structure and method of manufacturing the same

Method of making a semiconductor device package with dummy gate

MEMS isolation structures

Material quality, suspended material structures on lattice-mismatch...

Micro-electro-mechanical-system device with guard ring and method f...

Method of making a semiconductor device package

Micro-electro-mechanical-system device with guard ring and method f...

Etching technique for creation of thermally-isolated microstructures

Electrical routing

Guard trench

Wafer level packaging of micro-electro-mechanical systems (MEMS) an...

Microstructure device with an improved anchor

Method for producing MEMS structures, and MEMS structure

Microstructure with an enhanced anchor

Electrical routing

Wet metal-etching method and apparatus for MEMS device fabrication

Method of forming an undercut microstructure

Microstructure device with an improved anchor

Etching technique for creation of thermally-isolated microstructures

Method of manufacturing a wiring board

Layer system comprising a silicon layer and a passivation layer, me...

Patents Applicationslast 30 patents

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICES AND FABRICATION METH...

METHOD FOR PRODUCING A BONDING PAD FOR A MICROMECHANICAL SENSOR ELE...

SIDEWALL STOPPER FOR MEMS DEVICE

SIDEWALL STOPPER FOR MEMS DEVICE

MEMS ISOLATION STRUCTURES

MEMS isolation structures

METHOD OF MAKING A SEMICONDUCTOR DEVICE PACKAGE

Electrical Routing

Microstructure Device with an Improved Anchor

Method for producing MEMS structures, and MEMS structure

ELECTRICAL ROUTING

MEMS ISOLATION STRUCTURES

GUARD TRENCH

WAFER LEVEL PACKAGING OF MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) AN...

MICROSTRUCTURE WITH AN ENHANCED ANCHOR

MICROSTRUCTURE DEVICE WITH AN IMPROVED ANCHOR

ETCHING TECHNIQUE FOR CREATION OF THERMALLY-ISOLATED MICROSTRUCTURES

METHOD OF FORMING AN UNDERCUT MICROSTRUCTURE

Wet metal-etching method and apparatus used for MEMS

MICRO-ELECTRO-MECHANICAL-SYSTEM DEVICE WITH GUARD RING AND METHOD F...

Method of Manufacturing a Semiconductor Microstructure

SYSTEM AND METHOD FOR OBTAINING ANISOTROPIC ETCHING OF PATTERNED SU...

Etching Technique For Creation of Thermally-Isolated Microstructures

HIGH ASPECT RATIO VIA ETCH

METHOD OF DEEP ETCHING

MEMS structure and method of fabricating the same

METHODS FOR MINIMIZING MASK UNDERCUTS AND NOTCHES FOR PLASMA PROCES...

Silicon substrate comprising positive etching profiles with a defin...

Method of manufacturing a wiring board, a wiring board, a circuit e...

Layer system comprising a silicon layer and a passivation layer, me...