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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2203/00Basic micro-electromechanical structures

Current Industry

B81B2203/0109Bridges

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Anti-stiction enhancement of ruthenium contact
- Patent number 12,172,888
- Issue date Dec 24, 2024
- Qorvo US, Inc.
- James D. Huffman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone and MEMS accelerometer on a single substrate
- Patent number 12,054,383
- Issue date Aug 6, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a microelectromechanical sensor and microelect...
- Patent number 11,958,740
- Issue date Apr 16, 2024
- Robert Bosch GmbH
- Achim Kronenberger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vibrating element
- Patent number 11,921,283
- Issue date Mar 5, 2024
- Funai Electric Co., Ltd.
- Kenichi Fujita
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric anti-stiction structure for microelectromechanical sy...
- Patent number 11,834,325
- Issue date Dec 5, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Fan Hu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS bridge devices and methods of manufacture thereof
- Patent number 11,834,327
- Issue date Dec 5, 2023
- SOFANT TECHNOLOGIES LTD
- Nakul Haridas
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Detection of force applied by pick-up tool for transferring semicon...
- Patent number 11,756,810
- Issue date Sep 12, 2023
- Meta Platforms Technologies, LLC
- Oscar Torrents Abad
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS phase shifter including a substrate with a coplanar waveguide...
- Patent number 11,742,556
- Issue date Aug 29, 2023
- BEIJING BOE TECHNOLOGY DEVELOPMENT CO., LTD.
- Jingwen Guo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Silicon carbide structure, device, and method
- Patent number 11,649,159
- Issue date May 16, 2023
- Francis J. Kub
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical system package having movable platform
- Patent number 11,643,325
- Issue date May 9, 2023
- PixArt Imaging Inc.
- Chih-Ming Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication of nanochannel with integrated electrodes for DNA seque...
- Patent number 11,542,552
- Issue date Jan 3, 2023
- Seagate Technology LLC
- Kim Yang Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor package having a movable sensor
- Patent number 11,465,901
- Issue date Oct 11, 2022
- PixArt Imaging Inc.
- Chih-Ming Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Hinged microelectromechanical and/or nanoelectromechanical device w...
- Patent number 11,459,227
- Issue date Oct 4, 2022
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Loic Joet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric anti-stiction structure for microelectromechanical sy...
- Patent number 11,365,115
- Issue date Jun 21, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Fan Hu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fence structure to prevent stiction in a MEMS motion sensor
- Patent number 11,261,083
- Issue date Mar 1, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Flexible membrane
- Patent number 11,174,150
- Issue date Nov 16, 2021
- Cirrus Logic, Inc.
- Tsjerk Hans Hoekstra
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Reflective device
- Patent number 11,099,379
- Issue date Aug 24, 2021
- Google LLC
- Nicolas Abele
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical sensor that includes a stress decoupling structure
- Patent number 10,954,120
- Issue date Mar 23, 2021
- Robert Bosch GmbH
- Christoph Schelling
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical circuit switch mirror array crack protection
- Patent number 10,948,688
- Issue date Mar 16, 2021
- Google LLC
- Kevin Y. Yasumura
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor package having a movable sensor
- Patent number 10,858,238
- Issue date Dec 8, 2020
- PixArt Imaging Inc.
- Chih-Ming Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical spring structure
- Patent number 10,836,629
- Issue date Nov 17, 2020
- Robert Bosch GmbH
- Martin Putnik
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS strain gauge sensor and manufacturing method
- Patent number 10,775,248
- Issue date Sep 15, 2020
- Chinese Academy of Sciences Institute of Geology and Geophysics
- Man Wong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS pressure gauge sensor and manufacturing method
- Patent number 10,768,064
- Issue date Sep 8, 2020
- Chinese Academy of Sciences Institute of Geology and Geophysics
- Kevin Chau
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Trench-based microelectromechanical transducer and method for manuf...
- Patent number 10,737,929
- Issue date Aug 11, 2020
- STMicroelectronics S.r.l.
- Mohammad Abbasi Gavarti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication of nanochannel with integrated electrodes for DNA seque...
- Patent number 10,731,210
- Issue date Aug 4, 2020
- Seagate Technology LLC
- Kim Yang Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Silicon carbide microelectromechanical structure, device, and method
- Patent number 10,717,642
- Issue date Jul 21, 2020
- The Government of the United States of America, as represented by the Secreta...
- Francis J. Kub
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
High displacement ultrasonic transducer
- Patent number 10,661,308
- Issue date May 26, 2020
- Kolo Medical, Ltd.
- Xuefeng Zhuang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mechanical component and manufacturing method for a mechanical comp...
- Patent number 10,589,988
- Issue date Mar 17, 2020
- Robert Bosch GmbH
- Wolfgang Heinzelmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Silicon carbide microelectromechanical structure, device, and method
- Patent number 10,589,983
- Issue date Mar 17, 2020
- The Government of the United States of America, as represented by the Secreta...
- Francis J. Kub
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor package having a movable sensor
- Patent number 10,589,982
- Issue date Mar 17, 2020
- PixArt Imaging Inc.
- Chih-Ming Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS DEVICE, MANUFACTURING METHOD THEREOF, AND ELECTRONIC APPARATUS
- Publication number 20250019224
- Publication date Jan 16, 2025
- BOE TECHNOLOGY GROUP CO., LTD.
- Jianxing LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND ELECTRONIC DEVICE
- Publication number 20250019227
- Publication date Jan 16, 2025
- Beijing BOE Technology Development Co., Ltd.
- Yingli SHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROSTATICALLY-EXCITED HERMETIC MULTI-CELL MICROELECTROMECHANICA...
- Publication number 20250019223
- Publication date Jan 16, 2025
- Kaunas University of Technology
- Darius VIRZONIS
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STRAIN SENSOR SWITCH FOR TIMING BASED SENSING
- Publication number 20240400375
- Publication date Dec 5, 2024
- Carnegie Mellon University
- Regan Kubicek
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Switch, Preparation Method thereof, and Electronic Apparatus
- Publication number 20240359973
- Publication date Oct 31, 2024
- Beijing BOE Technology Development Co., Ltd.
- Yingli SHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTI-LEVEL MEMS PROCESS
- Publication number 20240351864
- Publication date Oct 24, 2024
- InvenSense, Inc.
- Roberto Martini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELEMENT, OPTICAL SCANNING DEVICE, AND DISTANCE MEASURING DEVICE
- Publication number 20240317577
- Publication date Sep 26, 2024
- Mitsubishi Electric Corporation
- Yusuke SHIRAYANAGI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SWITCH DEVICE AND ELECTRONIC APPARATUS
- Publication number 20240279050
- Publication date Aug 22, 2024
- BOE TECHNOLOGY GROUP CO., LTD.
- Zibo CAO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE, METHOD FOR MANUFACTURING MEMS DEVICE AND ELECTRONIC DE...
- Publication number 20240262678
- Publication date Aug 8, 2024
- Beijing BOE Technology Development Co., Ltd.
- Jingwen GUO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEMS AND METHODS FOR WAFER DIE ASSEMBLY BONDING
- Publication number 20240253974
- Publication date Aug 1, 2024
- Rosemount Aerospace Inc.
- Roger Backman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
RADIO FREQUENCY MICRO-ELECTRO-MECHANICAL SWITCH AND RADIO FREQUENCY...
- Publication number 20240186095
- Publication date Jun 6, 2024
- Beijing BOE Technology Development Co., Ltd.
- Yingli SHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SWITCH AND MANUFACTURE METHOD
- Publication number 20240166496
- Publication date May 23, 2024
- Beijing BOE Technology Development Co., Ltd.
- Yingli SHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS AND APPARATUS FOR MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) D...
- Publication number 20240067519
- Publication date Feb 29, 2024
- TEXAS INSTRUMENTS INCORPORATED
- John Wesley Hamlin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SOUND TRANSDUCER
- Publication number 20240048899
- Publication date Feb 8, 2024
- Fraunhofer-Gesellschaft zur foerderung der Angewandten Forschung e.V.
- Malte Florian NIEKIEL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ACOUSTIC RESONATOR SPRINGY ANCHOR BASED ON OFFSET ACOUSTIC RE...
- Publication number 20240002216
- Publication date Jan 4, 2024
- TEXAS INSTRUMENTS INCORPORATED
- Hakhamanesh MANSOORZARE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE AND MEMS ACCELEROMETER ON A SINGLE SUBSTRATE
- Publication number 20230382716
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC ANTI-STICTION STRUCTURE FOR MICROELECTROMECHANICAL SY...
- Publication number 20230373780
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Fan Hu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPACT MICROELECTROMECHANICAL ANGULAR RATE SENSOR
- Publication number 20230322548
- Publication date Oct 12, 2023
- STMicroelectronics S.r.l.
- Luca Giuseppe FALORNI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
A SCANNING MEMS MIRROR DEVICE
- Publication number 20230257255
- Publication date Aug 17, 2023
- Hendrikus Wilhelmus Leonardus Antonius Maria VAN LIEROP
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MIRROR AND MEMS MIRROR ARRAY SYSTEM
- Publication number 20230159323
- Publication date May 25, 2023
- Rohm Co., Ltd.
- Takashi Naiki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL DEVICE
- Publication number 20230152572
- Publication date May 18, 2023
- ROBERT BOSCH GmbH
- Frank Schatz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAPILLARY BRIDGE ENHANCED FLUID GRIP DEVICE
- Publication number 20230112010
- Publication date Apr 13, 2023
- BVW HOLDING AG
- Michael Milbocker
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS PRESSURE SENSOR BUILT USING THE BEOL METAL LAYERS OF A SOLID-S...
- Publication number 20230050748
- Publication date Feb 16, 2023
- Nanusens SL
- Josep Montanyà Silvestre
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM PACKAGE HAVING MOVABLE PLATFORM
- Publication number 20230002214
- Publication date Jan 5, 2023
- PIXART IMAGING INC.
- Chih-Ming SUN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEMS AND PREPARATION METHOD THEREOF
- Publication number 20220324699
- Publication date Oct 13, 2022
- Huawei Technologies Co., Ltd
- Fengpei Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC ANTI-STICTION STRUCTURE FOR MICROELECTROMECHANICAL SY...
- Publication number 20220306452
- Publication date Sep 29, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Fan Hu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS PHASE SHIFTER
- Publication number 20220302566
- Publication date Sep 22, 2022
- Beijing BOE Technology Development Co., Ltd.
- Jingwen GUO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE AND MEMS ACCELEROMETER ON A SINGLE SUBSTRATE
- Publication number 20220289556
- Publication date Sep 15, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CASCADABLE MEMS LOGIC DEVICE BASED ON MODES ACTIVATION
- Publication number 20220069824
- Publication date Mar 3, 2022
- King Abdullah University of Science and Technology
- Sherif Adekunle TELLA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING A MICROELECTROMECHANICAL SENSOR AND MICROELECT...
- Publication number 20220033256
- Publication date Feb 3, 2022
- ROBERT BOSCH GmbH
- Achim Kronenberger
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Anti-stiction enhancement of ruthenium contact

MEMS microphone and MEMS accelerometer on a single substrate

Method for producing a microelectromechanical sensor and microelect...

Vibrating element

Piezoelectric anti-stiction structure for microelectromechanical sy...

MEMS bridge devices and methods of manufacture thereof

Detection of force applied by pick-up tool for transferring semicon...

MEMS phase shifter including a substrate with a coplanar waveguide...

Silicon carbide structure, device, and method

Micro-electromechanical system package having movable platform

Fabrication of nanochannel with integrated electrodes for DNA seque...

Sensor package having a movable sensor

Hinged microelectromechanical and/or nanoelectromechanical device w...

Piezoelectric anti-stiction structure for microelectromechanical sy...

Fence structure to prevent stiction in a MEMS motion sensor

Flexible membrane

Reflective device

Micromechanical sensor that includes a stress decoupling structure

Optical circuit switch mirror array crack protection

Sensor package having a movable sensor

Micromechanical spring structure

MEMS strain gauge sensor and manufacturing method

MEMS pressure gauge sensor and manufacturing method

Trench-based microelectromechanical transducer and method for manuf...

Fabrication of nanochannel with integrated electrodes for DNA seque...

Silicon carbide microelectromechanical structure, device, and method

High displacement ultrasonic transducer

Mechanical component and manufacturing method for a mechanical comp...

Silicon carbide microelectromechanical structure, device, and method

Sensor package having a movable sensor

Patents Applicationslast 30 patents

MEMS DEVICE, MANUFACTURING METHOD THEREOF, AND ELECTRONIC APPARATUS

MEMS DEVICE AND ELECTRONIC DEVICE

ELECTROSTATICALLY-EXCITED HERMETIC MULTI-CELL MICROELECTROMECHANICA...

STRAIN SENSOR SWITCH FOR TIMING BASED SENSING

MEMS Switch, Preparation Method thereof, and Electronic Apparatus

MULTI-LEVEL MEMS PROCESS

MEMS ELEMENT, OPTICAL SCANNING DEVICE, AND DISTANCE MEASURING DEVICE

MEMS SWITCH DEVICE AND ELECTRONIC APPARATUS

MEMS DEVICE, METHOD FOR MANUFACTURING MEMS DEVICE AND ELECTRONIC DE...

SYSTEMS AND METHODS FOR WAFER DIE ASSEMBLY BONDING

RADIO FREQUENCY MICRO-ELECTRO-MECHANICAL SWITCH AND RADIO FREQUENCY...

MEMS SWITCH AND MANUFACTURE METHOD

METHODS AND APPARATUS FOR MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) D...

MEMS SOUND TRANSDUCER

MICRO-ACOUSTIC RESONATOR SPRINGY ANCHOR BASED ON OFFSET ACOUSTIC RE...

MEMS MICROPHONE AND MEMS ACCELEROMETER ON A SINGLE SUBSTRATE

PIEZOELECTRIC ANTI-STICTION STRUCTURE FOR MICROELECTROMECHANICAL SY...

COMPACT MICROELECTROMECHANICAL ANGULAR RATE SENSOR

A SCANNING MEMS MIRROR DEVICE

MEMS MIRROR AND MEMS MIRROR ARRAY SYSTEM

MICROMECHANICAL DEVICE

CAPILLARY BRIDGE ENHANCED FLUID GRIP DEVICE

MEMS PRESSURE SENSOR BUILT USING THE BEOL METAL LAYERS OF A SOLID-S...

MICRO-ELECTROMECHANICAL SYSTEM PACKAGE HAVING MOVABLE PLATFORM

MICRO-ELECTRO-MECHANICAL SYSTEMS AND PREPARATION METHOD THEREOF

PIEZOELECTRIC ANTI-STICTION STRUCTURE FOR MICROELECTROMECHANICAL SY...

MEMS PHASE SHIFTER

MEMS MICROPHONE AND MEMS ACCELEROMETER ON A SINGLE SUBSTRATE

CASCADABLE MEMS LOGIC DEVICE BASED ON MODES ACTIVATION

METHOD FOR PRODUCING A MICROELECTROMECHANICAL SENSOR AND MICROELECT...