Basic micro-electromechanical structures

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor device comprising different types of microelectromech...
- Patent number 12,304,807
- Issue date May 20, 2025
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Hsiang-Fu Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator device
- Patent number 12,304,806
- Issue date May 20, 2025
- Hamamatsu Photonics K.K.
- Sadaharu Takimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Signal processing circuit for triple-membrane MEMS device
- Patent number 12,304,808
- Issue date May 20, 2025
- Infineon Technologies AG
- Marc Fueldner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anchor and cavity configuration for MEMS-based cooling systems
- Patent number 12,308,302
- Issue date May 20, 2025
- Frore Systems Inc.
- Vikram Mukundan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system fluid control
- Patent number 12,304,804
- Issue date May 20, 2025
- WATER STUFF & SUN GMBH
- Johan Bejhed
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor structure and formation thereof
- Patent number 12,297,104
- Issue date May 13, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Kai-Lan Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing a combined microelectromechanical device...
- Patent number 12,297,099
- Issue date May 13, 2025
- STMicroelectronics S.r.l.
- Federico Vercesi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electronic acoustic devices, MEMS microphones, and equalization met...
- Patent number 12,297,100
- Issue date May 13, 2025
- Skyworks Solutions, Inc.
- Humberto Campanella-Pineda
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device
- Patent number 12,298,132
- Issue date May 13, 2025
- Hamamatsu Photonics K.K.
- Tomofumi Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS transducer
- Patent number 12,297,096
- Issue date May 13, 2025
- Soundskrit Inc.
- Stephane Leahy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Membrane support for dual backplate transducers
- Patent number 12,297,102
- Issue date May 13, 2025
- Infineon Technologies AG
- Wolfgang Klein
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor structure including scribe line structures and method...
- Patent number 12,297,105
- Issue date May 13, 2025
- Taiwan Semiconductor Manufacturing Company Ltd.
- Wei-Cheng Shen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Batch fabrication of MEMS scanning mirror
- Patent number 12,298,492
- Issue date May 13, 2025
- The Texas A&M University System
- Jun Zou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS display device with an etch-stop-layer
- Patent number 12,298,493
- Issue date May 13, 2025
- IGNITE, Inc.
- Fusao Ishii
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical systems device
- Patent number 12,294,832
- Issue date May 6, 2025
- DENSO CORPORATION
- Yuki Ohara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Artificial intelligence-based analog sensors and wearable devices i...
- Patent number 12,291,446
- Issue date May 6, 2025
- Nutech Ventures
- Fadi Alsaleem
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual diaphragm dielectric sensor
- Patent number 12,291,445
- Issue date May 6, 2025
- Knowles Electronics, LLC
- Peter V. Loeppert
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive micromachined ultrasonic transducer with contoured elect...
- Patent number 12,285,780
- Issue date Apr 29, 2025
- The Board of Trustees of the Leland Stanford Junior University
- Bo Ma
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Constant charge or capacitance for capacitive micro-electrical-mech...
- Patent number 12,286,342
- Issue date Apr 29, 2025
- Invensense, Inc.
- Joseph Seeger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vibrating-type gyroscope element and angular velocity sensor compri...
- Patent number 12,287,202
- Issue date Apr 29, 2025
- Sumitomo Precision Products Co., Ltd.
- Ryohei Uchino
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Photoacoustic gas sensors with improved signal-to-noise ratio
- Patent number 12,287,280
- Issue date Apr 29, 2025
- Invensense, Inc.
- Jeremy Parker
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical system switch and communication device
- Patent number 12,288,649
- Issue date Apr 29, 2025
- BEIJING BOE TECHNOLOGY DEVELOPMENT CO., LTD.
- Yingli Shi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing a micro-fluid probe
- Patent number 12,286,344
- Issue date Apr 29, 2025
- CYTOSURGE AG
- Edin Sarajlic
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone
- Patent number 12,281,007
- Issue date Apr 22, 2025
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Zhengyu Shi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Transducer component, manufacturing method thereof, and transducer
- Patent number 12,281,006
- Issue date Apr 22, 2025
- BOE Technology Group Co., Ltd.
- Yongchun Tao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Resonant sensor using MEMS resonator, and detection method by reson...
- Patent number 12,275,634
- Issue date Apr 15, 2025
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Kunihiko Nakamura
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical microphone with membrane trench reinforcemen...
- Patent number 12,269,734
- Issue date Apr 8, 2025
- TDK Corporation
- Pirmin Rombach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device for dynamic fluid pinning
- Patent number 12,268,255
- Issue date Apr 8, 2025
- BVW Holding AG
- Michael Milbocker
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bottom electrode via structures for micromachined ultrasonic transd...
- Patent number 12,269,061
- Issue date Apr 8, 2025
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vehicle operator awareness system
- Patent number 12,269,494
- Issue date Apr 8, 2025
- AURORA OPERATIONS, INC.
- Richard Brian Donnelly
- B60 - VEHICLES IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
METHODS OF FABRICATING MICRO ELECTRO-MECHANICAL SYSTEMS STRUCTURES
- Publication number 20250162860
- Publication date May 22, 2025
- The University of British Columbia
- Chang Ge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELEMENT
- Publication number 20250145450
- Publication date May 8, 2025
- Nisshinbo Micro Devices Inc.
- Yoshimitsu Kuromaru
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME
- Publication number 20250145454
- Publication date May 8, 2025
- Taiwan Semiconductor Manufacturing company Ltd.
- PO CHEN YEH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
- Publication number 20250145456
- Publication date May 8, 2025
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL DEVICE WITH MOVABLE MASS AND STOPPING STRUCT...
- Publication number 20250145451
- Publication date May 8, 2025
- STMicroelectronics International N.V.
- Gabriele GATTERE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELEMENT
- Publication number 20250145449
- Publication date May 8, 2025
- Nisshinbo Micro Devices Inc.
- Takao Fukutome
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF
- Publication number 20250145452
- Publication date May 8, 2025
- Vanguard International Semiconductor Corporation
- RAKESH CHAND
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL DEVICE HAVING CONTACT PADS THAT ARE PROTEC...
- Publication number 20250145453
- Publication date May 8, 2025
- STMicroelectronics International N.V.
- Lorenzo CORSO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR MODULE AND MANUFACTURING METHOD OF THE SAME
- Publication number 20250146965
- Publication date May 8, 2025
- ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Seungeon MOON
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRONIC DEVICE
- Publication number 20250142966
- Publication date May 1, 2025
- AUO Corporation
- Wei Ting Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMB STRUCTURE FOR MEMS ACCELEROMETER
- Publication number 20250138044
- Publication date May 1, 2025
- Matti LIUKKU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SWITCH AND ELECTRONIC DEVICE
- Publication number 20250136434
- Publication date May 1, 2025
- Beijing BOE Technology Development Co., Ltd.
- Yingli SHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STRETCHABLE ELECTRICAL INTERCONNECT, FLEXIBLE ELECTRONIC SYSTEM, AN...
- Publication number 20250136435
- Publication date May 1, 2025
- THE HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Hongyu YU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VIBRATING-TYPE GYROSCOPE ELEMENT AND ANGULAR VELOCITY SENSOR INCLUD...
- Publication number 20250137786
- Publication date May 1, 2025
- SUMITOMO PRECISION PRODUCTS CO., LTD.
- Ryohei UCHINO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR FABRICATING MICROMECHANICAL ARM ARRAY IN MICRO-ELECTROME...
- Publication number 20250132695
- Publication date Apr 24, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shih-Yu Liao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Ultrasonic sensor and manufacturing method thereof
- Publication number 20250128288
- Publication date Apr 24, 2025
- Qisda Corporation
- Fu-Sheng Jiang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR SENSOR STATE DETECTION, ENVIRONMENTAL SENSOR SYSTEM AND...
- Publication number 20250128934
- Publication date Apr 24, 2025
- ROBERT BOSCH GmbH
- Paul Fehling
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC ANTI-STICTION STRUCTURE FOR MICROELECTROMECHANICAL SY...
- Publication number 20250122071
- Publication date Apr 17, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Fan Hu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROSCALE FLEXIBLE STRAIN SENSOR
- Publication number 20250122073
- Publication date Apr 17, 2025
- Carnegie Mellon University
- Jay Reddy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH ENHANCED MEMBRANE STRUCTURE AND METHOD OF FORMING...
- Publication number 20250126415
- Publication date Apr 17, 2025
- Taiwan Semiconductor Manufacturing company Ltd.
- CHUN-WEN CHENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DIFFERENTIAL DIRECTIONAL ACOUSTIC SENSOR DEVICE
- Publication number 20250122072
- Publication date Apr 17, 2025
- Soundskrit Inc.
- Benjamin Evans
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Vehicle Operator Awareness System
- Publication number 20250115264
- Publication date Apr 10, 2025
- Aurora Operations, Inc.
- Richard Brian Donnelly
- B60 - VEHICLES IN GENERAL
Information Patent Application
MEMS ACCELEROMETER WITH HORIZONTAL SENSE FINGERS
- Publication number 20250115472
- Publication date Apr 10, 2025
- Rohm Co., Ltd.
- Andrew Scott HOCKING
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE PACKAGE AND A METHOD OF MANUFACTURING THE SAME
- Publication number 20250115473
- Publication date Apr 10, 2025
- Advanced Semiconductor Engineering, Inc.
- Hsu-Liang HSIAO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS STRUCTURES WITH GAPS
- Publication number 20250109012
- Publication date Apr 3, 2025
- Murata Manufacturing Co., Ltd.
- Mikko PARTANEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRODUCTION METHOD FOR A MICROMECHANICAL SENSOR COMPONENT AND CORRES...
- Publication number 20250109016
- Publication date Apr 3, 2025
- ROBERT BOSCH GmbH
- Richard Fix
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRESSURE VALVE FOR MICROELECTROMECHANICAL SYSTEM DIE
- Publication number 20250109010
- Publication date Apr 3, 2025
- KNOWLES ELECTRONICS, LLC
- Faisal Zaman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL COMPONENT WITH GAP-CONTROL STRUCTURE AND A M...
- Publication number 20250109015
- Publication date Apr 3, 2025
- Murata Manufacturing Co., Ltd.
- Jeanette LINDROOS
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROBE AND METHOD OF FABRICATING ULTRASONIC TRANSDUCER UNIT
- Publication number 20250100869
- Publication date Mar 27, 2025
- Qisda Corporation
- Fu-Sheng Jiang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Controller for sound producing device with dynamic vent function
- Publication number 20250100870
- Publication date Mar 27, 2025
- xMEMS Labs, Inc.
- Ming-Hung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Basic micro-electromechanical structures

Industry

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Patents Grantslast 30 patents

Semiconductor device comprising different types of microelectromech...

Actuator device

Signal processing circuit for triple-membrane MEMS device

Anchor and cavity configuration for MEMS-based cooling systems

Micro-electro-mechanical system fluid control

Semiconductor structure and formation thereof

Process for manufacturing a combined microelectromechanical device...

Electronic acoustic devices, MEMS microphones, and equalization met...

Optical device

MEMS transducer

Membrane support for dual backplate transducers

Semiconductor structure including scribe line structures and method...

Batch fabrication of MEMS scanning mirror

MEMS display device with an etch-stop-layer

Microelectromechanical systems device

Artificial intelligence-based analog sensors and wearable devices i...

Dual diaphragm dielectric sensor

Capacitive micromachined ultrasonic transducer with contoured elect...

Constant charge or capacitance for capacitive micro-electrical-mech...

Vibrating-type gyroscope element and angular velocity sensor compri...

Photoacoustic gas sensors with improved signal-to-noise ratio

Micro-electromechanical system switch and communication device

Method of manufacturing a micro-fluid probe

MEMS microphone

Transducer component, manufacturing method thereof, and transducer

Resonant sensor using MEMS resonator, and detection method by reson...

Microelectromechanical microphone with membrane trench reinforcemen...

Device for dynamic fluid pinning

Bottom electrode via structures for micromachined ultrasonic transd...

Vehicle operator awareness system

Patents Applicationslast 30 patents

METHODS OF FABRICATING MICRO ELECTRO-MECHANICAL SYSTEMS STRUCTURES

MEMS ELEMENT

SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME

METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE

MICROELECTROMECHANICAL DEVICE WITH MOVABLE MASS AND STOPPING STRUCT...

MEMS ELEMENT

MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF

MICRO-ELECTRO-MECHANICAL DEVICE HAVING CONTACT PADS THAT ARE PROTEC...

SENSOR MODULE AND MANUFACTURING METHOD OF THE SAME

ELECTRONIC DEVICE

COMB STRUCTURE FOR MEMS ACCELEROMETER

MEMS SWITCH AND ELECTRONIC DEVICE

STRETCHABLE ELECTRICAL INTERCONNECT, FLEXIBLE ELECTRONIC SYSTEM, AN...

VIBRATING-TYPE GYROSCOPE ELEMENT AND ANGULAR VELOCITY SENSOR INCLUD...

METHOD FOR FABRICATING MICROMECHANICAL ARM ARRAY IN MICRO-ELECTROME...

Ultrasonic sensor and manufacturing method thereof

METHOD FOR SENSOR STATE DETECTION, ENVIRONMENTAL SENSOR SYSTEM AND...

PIEZOELECTRIC ANTI-STICTION STRUCTURE FOR MICROELECTROMECHANICAL SY...

MICROSCALE FLEXIBLE STRAIN SENSOR

MEMS DEVICE WITH ENHANCED MEMBRANE STRUCTURE AND METHOD OF FORMING...

DIFFERENTIAL DIRECTIONAL ACOUSTIC SENSOR DEVICE

Vehicle Operator Awareness System

MEMS ACCELEROMETER WITH HORIZONTAL SENSE FINGERS

SEMICONDUCTOR DEVICE PACKAGE AND A METHOD OF MANUFACTURING THE SAME

MEMS STRUCTURES WITH GAPS

PRODUCTION METHOD FOR A MICROMECHANICAL SENSOR COMPONENT AND CORRES...

PRESSURE VALVE FOR MICROELECTROMECHANICAL SYSTEM DIE

MICROELECTROMECHANICAL COMPONENT WITH GAP-CONTROL STRUCTURE AND A M...

PROBE AND METHOD OF FABRICATING ULTRASONIC TRANSDUCER UNIT

Controller for sound producing device with dynamic vent function