Basic micro-electromechanical structures

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor MEMS structure
- Patent number 12,221,337
- Issue date Feb 11, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yuan-Chih Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Radio frequency micro-electro-mechanical switch and radio frequency...
- Patent number 12,217,925
- Issue date Feb 4, 2025
- BEIJING BOE TECHNOLOGY DEVELOPMENT CO., LTD.
- Yingli Shi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrostatic device, electrostatic device intermediate body and pr...
- Patent number 12,215,019
- Issue date Feb 4, 2025
- The University of Tokyo
- Hiroshi Toshiyoshi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Phase shifter in which at least some of first sub-electrodes are sh...
- Patent number 12,218,395
- Issue date Feb 4, 2025
- BOE Technology Group Co., Ltd.
- Jingwen Guo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing package structure
- Patent number 12,215,018
- Issue date Feb 4, 2025
- Winbond Electronics Corp.
- Jin-Neng Wu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with damping fluid vertically sandwiched between moving...
- Patent number 12,215,020
- Issue date Feb 4, 2025
- Mirrorcle Technologies, Inc.
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with enhanced membrane structure and method of forming...
- Patent number 12,219,320
- Issue date Feb 4, 2025
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optoelectronic component comprising, on a single substrate, an opti...
- Patent number 12,219,878
- Issue date Feb 4, 2025
- Thales
- François Duport
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric anti-stiction structure for microelectromechanical sy...
- Patent number 12,215,016
- Issue date Feb 4, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Fan Hu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for fabricating microfluidic devices
- Patent number 12,208,385
- Issue date Jan 28, 2025
- The Charles Draper Laboratory, Inc.
- Ashley Lynne Beckwith
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
CMUT-on-CMOS ultrasonic transducer by bonding active wafers and man...
- Patent number 12,208,416
- Issue date Jan 28, 2025
- Zhejiang Xiansheng Technology Co., Ltd.
- Feng Yin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS and method of manufacturing the same
- Patent number 12,209,010
- Issue date Jan 28, 2025
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Shanshan Gu-Stoppel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS structure
- Patent number 12,212,926
- Issue date Jan 28, 2025
- FORTEMEDIA, INC.
- Wen-Shan Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device built using the BEOL metal layers of a solid state semi...
- Patent number 12,209,009
- Issue date Jan 28, 2025
- Nanusens SL
- Josep Montanyà Silvestre
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Arched membrane structure for MEMS device
- Patent number 12,209,013
- Issue date Jan 28, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jhao-Yi Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS structure
- Patent number 12,207,052
- Issue date Jan 21, 2025
- FORTEMEDIA, INC.
- Chun-Kai Mao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Signal processing method and device of mems microphone and mems mic...
- Patent number 12,207,061
- Issue date Jan 21, 2025
- GOERTEK INC.
- Dingyun Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical systems (MEMS) switch and related methods
- Patent number 12,202,723
- Issue date Jan 21, 2025
- Analog Devices International Unlimited Company
- Padraig Fitzgerald
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS devices with support structures and associated production methods
- Patent number 12,195,325
- Issue date Jan 14, 2025
- Infineon Technologies AG
- Florian Brandl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical transducer with reduced size
- Patent number 12,195,329
- Issue date Jan 14, 2025
- Sonion Nederland B.V.
- Adrianus Maria Lafort
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication of MEMS device with automated dispensing of damping flu...
- Patent number 12,195,326
- Issue date Jan 14, 2025
- Mirrocle Technologies Inc.
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sound producing cell
- Patent number 12,192,722
- Issue date Jan 7, 2025
- xMEMS Labs, Inc.
- Chiung C. Lo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone
- Patent number 12,187,597
- Issue date Jan 7, 2025
- AAC KAITAI TECHNOLOGIES (WUHAN) CO., LTD
- Kaijie Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor with integrated heater
- Patent number 12,180,067
- Issue date Dec 31, 2024
- Invensense, Inc.
- Pei-Wen Yen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device and method for manufacturing same
- Patent number 12,180,063
- Issue date Dec 31, 2024
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Curved cantilever design to reduce stress in MEMS actuator
- Patent number 12,180,064
- Issue date Dec 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system and process of making it
- Patent number 12,180,065
- Issue date Dec 31, 2024
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Euan James Boyd
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and system for fabricating a MEMS device
- Patent number 12,180,069
- Issue date Dec 31, 2024
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical arm array in micro-electromechanical system (MEMS)...
- Patent number 12,176,829
- Issue date Dec 24, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shih-Yu Liao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sound producing package structure including sound producing membran...
- Patent number 12,172,887
- Issue date Dec 24, 2024
- xMEMS Labs, Inc.
- Chiung C. Lo
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
ACOUSTIC MODULE WITH A CENTERED SOUND PORT
- Publication number 20250051155
- Publication date Feb 13, 2025
- Soundskrit Inc.
- Anton Schirg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING FINE STRUCTURES IN THE VOLUME OF A SUBSTRATE C...
- Publication number 20250050329
- Publication date Feb 13, 2025
- SCHOTT AG
- Andreas Ortner
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PROTECTIVE COATING FOR COPPER SURFACE IN SENSOR
- Publication number 20250042723
- Publication date Feb 6, 2025
- TEXAS INSTRUMENTS INCORPORATED
- Jeffrey S. Solas
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MIRROR UNIT AND OPTICAL MODULE
- Publication number 20250044074
- Publication date Feb 6, 2025
- HAMAMATSU PHOTONICS K. K.
- Tomofumi Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VIBRATION DETECTOR, WEARABLE DEVICE, AND PIPING INSPECTION APPARATUS
- Publication number 20250048038
- Publication date Feb 6, 2025
- Masayuki FUJISHIMA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL DEVICE WITH RECOVERY FROM STICTION CONDITIONS
- Publication number 20250042718
- Publication date Feb 6, 2025
- STMicroelectronics International N.V.
- Manuel RIANI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-DEVICE STRUCTURES WITH ETCH HOLES
- Publication number 20250042717
- Publication date Feb 6, 2025
- X-CELEPRINT LIMITED
- António José Marques Trindade
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS COMPONENT WITH A MEMBRANE SPRING AND METHOD FOR PRODUCING A ME...
- Publication number 20250042721
- Publication date Feb 6, 2025
- ROBERT BOSCH GmbH
- Stefan Pinter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO SYSTEM AND MANUFACTURING METHOD
- Publication number 20250042725
- Publication date Feb 6, 2025
- AUDIO PIXELS LTD.
- Dmitri LURIE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS AND NEMS STRUCTURES
- Publication number 20250042727
- Publication date Feb 6, 2025
- Obsidian Sensors, Inc.
- John HONG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS microphone
- Publication number 20250042722
- Publication date Feb 6, 2025
- AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
- Zhuanzhuan Zhao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ENCLOSED CAVITY STRUCTURES
- Publication number 20250042719
- Publication date Feb 6, 2025
- X-CELEPRINT LIMITED
- Ronald S. Cok
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ACOUSTIC ELEMENT
- Publication number 20250039611
- Publication date Jan 30, 2025
- Murata Manufacturing Co., Ltd.
- Ryosuke NIWA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANCHOR STRUCTURE
- Publication number 20250033951
- Publication date Jan 30, 2025
- Bishnu Prasanna Gogoi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL INERTIAL SENSOR, AND METHOD FOR OPERATING A MICROME...
- Publication number 20250033952
- Publication date Jan 30, 2025
- ROBERT BOSCH GmbH
- Daniel Baumgaertner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTI-DIRECTIONAL ACOUSTIC SENSOR DEVICES
- Publication number 20250033953
- Publication date Jan 30, 2025
- Soundskrit Inc.
- Sahil Gupta
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE
- Publication number 20250026632
- Publication date Jan 23, 2025
- Rohm Co., Ltd.
- Martin Wilfried HELLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Dual-Layer Micro-ribbon MEMS Light Modulator
- Publication number 20250026633
- Publication date Jan 23, 2025
- SILICON LIGHT MACHINES CORPORATION
- Olav Solgaard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL DEVICE, MICROELECTROMECHANICAL MICROPHONE AN...
- Publication number 20250030987
- Publication date Jan 23, 2025
- ROBERT BOSCH GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Array Structures for Gyroscopes with High Resonant Frequencies
- Publication number 20250026629
- Publication date Jan 23, 2025
- NXP USA, Inc.
- Jun Tang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROCHEMISTRY MICROSCOPY BIPOLAR REFERENCE ELECTRODE ASSEMBLY
- Publication number 20250027899
- Publication date Jan 23, 2025
- PROTOCHIPS, INC.
- Katherine Marusak Stephens
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELEMENT AND PIEZOELECTRIC ACOUSTIC DEVICE
- Publication number 20250026631
- Publication date Jan 23, 2025
- Murata Manufacturing Co., Ltd.
- Hiroshi MATSUBARA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FOUNDRY-COMPATIBLE PROCESS FOR INTEGRATED MICRO-SPEAKER AND MICROPHONE
- Publication number 20250030998
- Publication date Jan 23, 2025
- Vibrant Microsystems Inc.
- Joseph Doll
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE, MANUFACTURING METHOD THEREOF, AND ELECTRONIC APPARATUS
- Publication number 20250019224
- Publication date Jan 16, 2025
- BOE TECHNOLOGY GROUP CO., LTD.
- Jianxing LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND METHOD FOR PRODUCING MEMS DEVICE
- Publication number 20250019226
- Publication date Jan 16, 2025
- Rohm Co., Ltd.
- Toma FUJITA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL DEVICE AND MICROELECTROMECHANICAL LOUDSPEAKER
- Publication number 20250019228
- Publication date Jan 16, 2025
- ROBERT BOSCH GmbH
- Maximilian Sommer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE
- Publication number 20250019225
- Publication date Jan 16, 2025
- Rohm Co., Ltd.
- Daisuke Nishinohara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND ELECTRONIC DEVICE
- Publication number 20250019227
- Publication date Jan 16, 2025
- Beijing BOE Technology Development Co., Ltd.
- Yingli SHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TRIPLE-MEMBRANE MEMS DEVICE
- Publication number 20250024203
- Publication date Jan 16, 2025
- INFINEON TECHNOLOGIES AG
- Marc Fueldner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROSTATICALLY-EXCITED HERMETIC MULTI-CELL MICROELECTROMECHANICA...
- Publication number 20250019223
- Publication date Jan 16, 2025
- Kaunas University of Technology
- Darius VIRZONIS
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Basic micro-electromechanical structures

Industry

Parent Industries

Current Industry

Sub Industries

Patents Grantslast 30 patents

Semiconductor MEMS structure

Radio frequency micro-electro-mechanical switch and radio frequency...

Electrostatic device, electrostatic device intermediate body and pr...

Phase shifter in which at least some of first sub-electrodes are sh...

Method for manufacturing package structure

MEMS device with damping fluid vertically sandwiched between moving...

MEMS device with enhanced membrane structure and method of forming...

Optoelectronic component comprising, on a single substrate, an opti...

Piezoelectric anti-stiction structure for microelectromechanical sy...

Systems and methods for fabricating microfluidic devices

CMUT-on-CMOS ultrasonic transducer by bonding active wafers and man...

MEMS and method of manufacturing the same

MEMS structure

MEMS device built using the BEOL metal layers of a solid state semi...

Arched membrane structure for MEMS device

MEMS structure

Signal processing method and device of mems microphone and mems mic...

Microelectromechanical systems (MEMS) switch and related methods

MEMS devices with support structures and associated production methods

Micro-electromechanical transducer with reduced size

Fabrication of MEMS device with automated dispensing of damping flu...

Sound producing cell

MEMS microphone

Sensor with integrated heater

Optical device and method for manufacturing same

Curved cantilever design to reduce stress in MEMS actuator

Microelectromechanical system and process of making it

Method and system for fabricating a MEMS device

Micromechanical arm array in micro-electromechanical system (MEMS)...

Sound producing package structure including sound producing membran...

Patents Applicationslast 30 patents

ACOUSTIC MODULE WITH A CENTERED SOUND PORT

METHOD FOR PRODUCING FINE STRUCTURES IN THE VOLUME OF A SUBSTRATE C...

PROTECTIVE COATING FOR COPPER SURFACE IN SENSOR

MIRROR UNIT AND OPTICAL MODULE

VIBRATION DETECTOR, WEARABLE DEVICE, AND PIPING INSPECTION APPARATUS

MICROELECTROMECHANICAL DEVICE WITH RECOVERY FROM STICTION CONDITIONS

MICRO-DEVICE STRUCTURES WITH ETCH HOLES

MEMS COMPONENT WITH A MEMBRANE SPRING AND METHOD FOR PRODUCING A ME...

MICRO SYSTEM AND MANUFACTURING METHOD

MEMS AND NEMS STRUCTURES

MEMS microphone

ENCLOSED CAVITY STRUCTURES

MEMS ACOUSTIC ELEMENT

ANCHOR STRUCTURE

MICROMECHANICAL INERTIAL SENSOR, AND METHOD FOR OPERATING A MICROME...

MULTI-DIRECTIONAL ACOUSTIC SENSOR DEVICES

MEMS DEVICE

Dual-Layer Micro-ribbon MEMS Light Modulator

MICROELECTROMECHANICAL DEVICE, MICROELECTROMECHANICAL MICROPHONE AN...

MEMS Array Structures for Gyroscopes with High Resonant Frequencies

ELECTROCHEMISTRY MICROSCOPY BIPOLAR REFERENCE ELECTRODE ASSEMBLY

MEMS ELEMENT AND PIEZOELECTRIC ACOUSTIC DEVICE

FOUNDRY-COMPATIBLE PROCESS FOR INTEGRATED MICRO-SPEAKER AND MICROPHONE

MEMS DEVICE, MANUFACTURING METHOD THEREOF, AND ELECTRONIC APPARATUS

MEMS DEVICE AND METHOD FOR PRODUCING MEMS DEVICE

MICROELECTROMECHANICAL DEVICE AND MICROELECTROMECHANICAL LOUDSPEAKER

MEMS DEVICE

MEMS DEVICE AND ELECTRONIC DEVICE

TRIPLE-MEMBRANE MEMS DEVICE

ELECTROSTATICALLY-EXCITED HERMETIC MULTI-CELL MICROELECTROMECHANICA...