Basic micro-electromechanical structures

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Patents Grantslast 30 patents

Information Patent Grant
Microelectromechanical microphone with membrane trench reinforcemen...
- Patent number 12,269,734
- Issue date Apr 8, 2025
- TDK Corporation
- Pirmin Rombach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device for dynamic fluid pinning
- Patent number 12,268,255
- Issue date Apr 8, 2025
- BVW Holding AG
- Michael Milbocker
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bottom electrode via structures for micromachined ultrasonic transd...
- Patent number 12,269,061
- Issue date Apr 8, 2025
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone
- Patent number 12,269,732
- Issue date Apr 8, 2025
- FORTEMEDIA, INC.
- Jien-Ming Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vehicle operator awareness system
- Patent number 12,269,494
- Issue date Apr 8, 2025
- AURORA OPERATIONS, INC.
- Richard Brian Donnelly
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Dielectric protection layer configured to increase performance of m...
- Patent number 12,269,735
- Issue date Apr 8, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wen-Chuan Tai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrical contacts using an array of micromachined flexures
- Patent number 12,272,912
- Issue date Apr 8, 2025
- Atomic Machines, Inc.
- Fabian Goericke
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Three-dimensional stress-sensitive device
- Patent number 12,264,063
- Issue date Apr 1, 2025
- Rosemount Aerospace Inc.
- John C. Christenson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system
- Patent number 12,264,064
- Issue date Apr 1, 2025
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Scott Lyall Cargill
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction bottom cavity surface for micromachined ultrasonic tr...
- Patent number 12,263,506
- Issue date Apr 1, 2025
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromirror arrays
- Patent number 12,259,546
- Issue date Mar 25, 2025
- ASML Netherlands B.V.
- Alexandre Halbach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device having microelectromechanical systems devices...
- Patent number 12,257,602
- Issue date Mar 25, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- I-Hsuan Chiu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacture and assembly of XY flexure mechanism assembly
- Patent number 12,258,263
- Issue date Mar 25, 2025
- The Regents of the University of Michigan
- Shorya Awtar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Low hysteresis and flexible pressure sensitive composite
- Patent number 12,259,287
- Issue date Mar 25, 2025
- National University of Singapore
- Chee Keong Tee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and system for fabricating a MEMS device
- Patent number 12,258,266
- Issue date Mar 25, 2025
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Substrate and microphone unit
- Patent number 12,258,262
- Issue date Mar 25, 2025
- Hosiden Corporation
- Shingo Okano
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS-driven optical package with micro-LED array
- Patent number 12,253,715
- Issue date Mar 18, 2025
- Matthew E. Ward
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component for a sensor device
- Patent number 12,252,394
- Issue date Mar 18, 2025
- Robert Bosch GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS capacitance microphone and manufacturing method thereof
- Patent number 12,250,519
- Issue date Mar 11, 2025
- Qsensing Microelectronics Co., Ltd
- Chien-Hsing Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a sequencing unit for sequencing a biochemical...
- Patent number 12,240,752
- Issue date Mar 4, 2025
- Robert Bosch GmbH
- Franz Laermer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical device having a soft magnetic material elec...
- Patent number 12,240,753
- Issue date Mar 4, 2025
- International Business Machines Corporation
- William J. Gallagher
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS die and MEMS-based sensor
- Patent number 12,240,748
- Issue date Mar 4, 2025
- Knowles Electronics, LLC
- Peter V. Loeppert
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Tiles having multiple cooling cells for MEMS-based cooling
- Patent number 12,240,750
- Issue date Mar 4, 2025
- Frore Systems Inc.
- Suryaprakash Ganti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfluidic passage with protective layer
- Patent number 12,240,239
- Issue date Mar 4, 2025
- Hewlett-Packard Development Company, L.P.
- Juan Carlos Ramos
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Top notch slit profile for MEMS device
- Patent number 12,238,478
- Issue date Feb 25, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system component or a microfluidic component...
- Patent number 12,234,143
- Issue date Feb 25, 2025
- Berkin B.V.
- Wouter Sparreboom
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS speaker and manufacturing method for same
- Patent number 12,238,479
- Issue date Feb 25, 2025
- AAC KAITAI TECHNOLOGIES (WUHAN) CO., LTD
- Shiyang Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device and method for forming the same
- Patent number 12,227,410
- Issue date Feb 18, 2025
- Taiwan Semiconductor Manufacturing Company Ltd.
- Po Chen Yeh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor MEMS structure
- Patent number 12,221,337
- Issue date Feb 11, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yuan-Chih Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Radio frequency micro-electro-mechanical switch and radio frequency...
- Patent number 12,217,925
- Issue date Feb 4, 2025
- BEIJING BOE TECHNOLOGY DEVELOPMENT CO., LTD.
- Yingli Shi
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Vehicle Operator Awareness System
- Publication number 20250115264
- Publication date Apr 10, 2025
- Aurora Operations, Inc.
- Richard Brian Donnelly
- B60 - VEHICLES IN GENERAL
Information Patent Application
MEMS ACCELEROMETER WITH HORIZONTAL SENSE FINGERS
- Publication number 20250115472
- Publication date Apr 10, 2025
- Rohm Co., Ltd.
- Andrew Scott HOCKING
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE PACKAGE AND A METHOD OF MANUFACTURING THE SAME
- Publication number 20250115473
- Publication date Apr 10, 2025
- Advanced Semiconductor Engineering, Inc.
- Hsu-Liang HSIAO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS STRUCTURES WITH GAPS
- Publication number 20250109012
- Publication date Apr 3, 2025
- Murata Manufacturing Co., Ltd.
- Mikko PARTANEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRODUCTION METHOD FOR A MICROMECHANICAL SENSOR COMPONENT AND CORRES...
- Publication number 20250109016
- Publication date Apr 3, 2025
- ROBERT BOSCH GmbH
- Richard Fix
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRESSURE VALVE FOR MICROELECTROMECHANICAL SYSTEM DIE
- Publication number 20250109010
- Publication date Apr 3, 2025
- KNOWLES ELECTRONICS, LLC
- Faisal Zaman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL COMPONENT WITH GAP-CONTROL STRUCTURE AND A M...
- Publication number 20250109015
- Publication date Apr 3, 2025
- Murata Manufacturing Co., Ltd.
- Jeanette LINDROOS
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROBE AND METHOD OF FABRICATING ULTRASONIC TRANSDUCER UNIT
- Publication number 20250100869
- Publication date Mar 27, 2025
- Qisda Corporation
- Fu-Sheng Jiang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Controller for sound producing device with dynamic vent function
- Publication number 20250100870
- Publication date Mar 27, 2025
- xMEMS Labs, Inc.
- Ming-Hung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRODES FOR MICROELECTROMECHANICAL SYSTEM MICROPHONES
- Publication number 20250100871
- Publication date Mar 27, 2025
- InvenSense, Inc.
- Joseph Seeger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
AIRFLOW SENSOR AND AIRFLOW SENSOR PACKAGING STRUCTURE
- Publication number 20250100872
- Publication date Mar 27, 2025
- MEMSensing Microsystems (Suzhou, China) Co., Ltd.
- Yanzi MENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEM MEMBRANE
- Publication number 20250106561
- Publication date Mar 27, 2025
- AAC TECHNOLOGIES PTE. LTD
- Yannick Pierre Kervran
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
EXTREMAL MICROSTRUCTURED SURFACES
- Publication number 20250091856
- Publication date Mar 20, 2025
- Lukas Bluecher
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEVICE FOR NANOSCALE THERMAL MEASUREMENTS AND ASSOCIATED METHOD FOR...
- Publication number 20250093212
- Publication date Mar 20, 2025
- Centre National de la Recherche Scientifique
- Olivier BOURGEOIS
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SUBSTRATES COMPRISING NANO-PATTERNING SURFACES AND METHODS OF PREPA...
- Publication number 20250091313
- Publication date Mar 20, 2025
- Illumina, Inc.
- M. Shane Bowen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SANDWICH STRUCTURES FOR MICROELECTROMECHANICAL SYSTEM MICRO-MIRRORS
- Publication number 20250091858
- Publication date Mar 20, 2025
- INFINEON TECHNOLOGIES AG
- Theresa LUTZ
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRESSURE SENSOR AND METHOD FOR MANUFACTURING SAME, AND ELECTRONIC D...
- Publication number 20250085175
- Publication date Mar 13, 2025
- Beijing BOE Technology Development Co., Ltd.
- Kui LIANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL LOUDSPEAKER WITH A LARGE-AREA FORCE FIELD
- Publication number 20250083948
- Publication date Mar 13, 2025
- ROBERT BOSCH GmbH
- Andreas Winden
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE
- Publication number 20250083947
- Publication date Mar 13, 2025
- ROBERT BOSCH GmbH
- Jochen REINMUTH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VARIABLE INDUCTOR AND INDUCTOR MODULE
- Publication number 20250087401
- Publication date Mar 13, 2025
- DB HiTek Co., Ltd.
- Jung Ah KIM
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELECTRICALLY CONNECTED PRECISION MOTION STAGE WITH POSITION SE...
- Publication number 20250083949
- Publication date Mar 13, 2025
- MEMS DRIVE (NANJING) CO., LTD.
- Matthew Ng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR MANUFACTURING MICROELECTROMECHANICAL DEVICES WITH REDUC...
- Publication number 20250083951
- Publication date Mar 13, 2025
- STMicroelectronics International N.V.
- Andrea NOMELLINI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRESSURE SENSOR WITH INTEGRATED FLUID CAVITY
- Publication number 20250085179
- Publication date Mar 13, 2025
- Apple Inc.
- Michael J. GLICKMAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CURVED CANTILEVER DESIGN TO REDUCE STRESS IN MEMS ACTUATOR
- Publication number 20250074763
- Publication date Mar 6, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
- Publication number 20250074766
- Publication date Mar 6, 2025
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Humidity Sensor, Manufacturing Method Therefor and Electronic Device
- Publication number 20250076241
- Publication date Mar 6, 2025
- BOE TECHNOLOGY GROUP CO., LTD.
- Jianxing LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
- Publication number 20250074764
- Publication date Mar 6, 2025
- Beijing BOE Technology Development Co., Ltd.
- Wenbo LI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SOUND TRANSDUCER AND METHOD FOR PRODUCING SAME
- Publication number 20250074762
- Publication date Mar 6, 2025
- USound GmbH
- Andrea Rusconi Clerici Beltrami
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COUPLING DEVICE FOR COUPLING VIBRATION SYSTEMS
- Publication number 20250066185
- Publication date Feb 27, 2025
- NORTHROP GRUMMAN LITEF GMBH
- Jan Daniel RENDE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FOUNDRY-COMPATIBLE THROUGH SILICON VIA PROCESS FOR INTEGRATED MICRO...
- Publication number 20250059023
- Publication date Feb 20, 2025
- Vibrant Microsystems Inc.
- Joseph Doll
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Basic micro-electromechanical structures

Industry

Parent Industries

Current Industry

Sub Industries

Patents Grantslast 30 patents

Microelectromechanical microphone with membrane trench reinforcemen...

Device for dynamic fluid pinning

Bottom electrode via structures for micromachined ultrasonic transd...

MEMS microphone

Vehicle operator awareness system

Dielectric protection layer configured to increase performance of m...

Electrical contacts using an array of micromachined flexures

Three-dimensional stress-sensitive device

Microelectromechanical system

Anti-stiction bottom cavity surface for micromachined ultrasonic tr...

Micromirror arrays

Semiconductor device having microelectromechanical systems devices...

Method of manufacture and assembly of XY flexure mechanism assembly

Low hysteresis and flexible pressure sensitive composite

Method and system for fabricating a MEMS device

Substrate and microphone unit

MEMS-driven optical package with micro-LED array

Micromechanical component for a sensor device

MEMS capacitance microphone and manufacturing method thereof

Method for producing a sequencing unit for sequencing a biochemical...

Micro-electromechanical device having a soft magnetic material elec...

MEMS die and MEMS-based sensor

Tiles having multiple cooling cells for MEMS-based cooling

Microfluidic passage with protective layer

Top notch slit profile for MEMS device

Microelectromechanical system component or a microfluidic component...

MEMS speaker and manufacturing method for same

Semiconductor device and method for forming the same

Semiconductor MEMS structure

Radio frequency micro-electro-mechanical switch and radio frequency...

Patents Applicationslast 30 patents

Vehicle Operator Awareness System

MEMS ACCELEROMETER WITH HORIZONTAL SENSE FINGERS

SEMICONDUCTOR DEVICE PACKAGE AND A METHOD OF MANUFACTURING THE SAME

MEMS STRUCTURES WITH GAPS

PRODUCTION METHOD FOR A MICROMECHANICAL SENSOR COMPONENT AND CORRES...

PRESSURE VALVE FOR MICROELECTROMECHANICAL SYSTEM DIE

MICROELECTROMECHANICAL COMPONENT WITH GAP-CONTROL STRUCTURE AND A M...

PROBE AND METHOD OF FABRICATING ULTRASONIC TRANSDUCER UNIT

Controller for sound producing device with dynamic vent function

ELECTRODES FOR MICROELECTROMECHANICAL SYSTEM MICROPHONES

AIRFLOW SENSOR AND AIRFLOW SENSOR PACKAGING STRUCTURE

MICROELECTROMECHANICAL SYSTEM MEMBRANE

EXTREMAL MICROSTRUCTURED SURFACES

DEVICE FOR NANOSCALE THERMAL MEASUREMENTS AND ASSOCIATED METHOD FOR...

SUBSTRATES COMPRISING NANO-PATTERNING SURFACES AND METHODS OF PREPA...

SANDWICH STRUCTURES FOR MICROELECTROMECHANICAL SYSTEM MICRO-MIRRORS

PRESSURE SENSOR AND METHOD FOR MANUFACTURING SAME, AND ELECTRONIC D...

MICROELECTROMECHANICAL LOUDSPEAKER WITH A LARGE-AREA FORCE FIELD

MEMS MICROPHONE

VARIABLE INDUCTOR AND INDUCTOR MODULE

MEMS ELECTRICALLY CONNECTED PRECISION MOTION STAGE WITH POSITION SE...

PROCESS FOR MANUFACTURING MICROELECTROMECHANICAL DEVICES WITH REDUC...

PRESSURE SENSOR WITH INTEGRATED FLUID CAVITY

CURVED CANTILEVER DESIGN TO REDUCE STRESS IN MEMS ACTUATOR

METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE

Humidity Sensor, Manufacturing Method Therefor and Electronic Device

MICRO-ELECTRO-MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF

MEMS SOUND TRANSDUCER AND METHOD FOR PRODUCING SAME

COUPLING DEVICE FOR COUPLING VIBRATION SYSTEMS

FOUNDRY-COMPATIBLE THROUGH SILICON VIA PROCESS FOR INTEGRATED MICRO...