Basic micro-electromechanical structures

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS

B81B2203/00Basic micro-electromechanical structures

B81B2203/01Suspended structures B81B2203/0109Bridges B81B2203/0118Cantilevers B81B2203/0127Diaphragms B81B2203/0136Comb structures B81B2203/0145Flexible holders B81B2203/0154Torsion bars B81B2203/0163Spring holders B81B2203/0172Flexible holders not provided for in B81B2203/0154 - B81B2203/0163 B81B2203/0181See-saws B81B2203/019characterized by their profile B81B2203/03Static structures B81B2203/0307Anchors B81B2203/0315Cavities B81B2203/0323Grooves B81B2203/033Trenches B81B2203/0338Channels B81B2203/0346Grooves not provided for in B81B2203/033 - B81B2203/0338 B81B2203/0353Holes B81B2203/0361Tips, pillars B81B2203/0369characterized by their profile B81B2203/0376rounded profile B81B2203/0384sloped profile B81B2203/0392profiles not provided for in B81B2203/0376 - B81B2203/0384 B81B2203/04Electrodes B81B2203/05Type of movement B81B2203/051Translation according to an axis parallel to the substrate B81B2203/053Translation according to an axis perpendicular to the substrate B81B2203/055Translation in a plane parallel to the substrate B81B2203/056Rotation in a plane parallel to the substrate B81B2203/058Rotation out of a plane parallel to the substrate B81B2203/06Devices comprising elements which are movable in relation to each other