Bulk micromachining techniques not provided for in B81C1/00507

Industry

CPC
B81C1/00515

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00515Bulk micromachining techniques not provided for in B81C1/00507

Industries

Patents Grantslast 30 patents

Information Patent Grant
Structure forming method and device
- Patent number 11,679,976
- Issue date Jun 20, 2023
- Seiko Epson Corporation
- Shogo Inaba
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS devices and methods of forming same
- Patent number 11,180,365
- Issue date Nov 23, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kai-Chih Liang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS devices and methods of forming same
- Patent number 10,457,550
- Issue date Oct 29, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kai-Chih Liang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Ultra-high charge density electrets and method of making same
- Patent number 10,424,441
- Issue date Sep 24, 2019
- Honeywell International Inc.
- Steven Tin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS devices and methods of forming same
- Patent number 10,099,919
- Issue date Oct 16, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kai-Chih Liang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrical tuning of resonant scanning
- Patent number 9,869,858
- Issue date Jan 16, 2018
- Apple Inc.
- Yuval Gerson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for fabrication of a micromechanical and/or nanomechanical...
- Patent number 9,527,729
- Issue date Dec 27, 2016
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Eric Ollier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor processing by magnetic field guided etching
- Patent number 9,281,206
- Issue date Mar 8, 2016
- The Regents of the University of California
- Sungho Jin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method for a micromechanical component and a correspo...
- Patent number 9,178,018
- Issue date Nov 3, 2015
- Robert Bosch GmbH
- Christoph Schelling
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing microfluidic chip, microfluidic chip, and a...
- Patent number 8,652,419
- Issue date Feb 18, 2014
- Fujikura Ltd.
- Satoshi Yamamoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Direct patterning of silicon by photoelectrochemical etching
- Patent number 7,433,811
- Issue date Oct 7, 2008
- The Regents of the University of California
- Jun Gao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for manufacturing a micromechanical device
- Patent number 6,355,181
- Issue date Mar 12, 2002
- Surface Technology Systems plc
- Andrew Duncan McQuarrie
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
STRUCTURE FORMING METHOD AND DEVICE
- Publication number 20200247666
- Publication date Aug 6, 2020
- SEIKO EPSON CORPORATION
- Shogo INABA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Devices and Methods of Forming Same
- Publication number 20200062588
- Publication date Feb 27, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kai-Chih Liang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Devices and Methods of Forming Same
- Publication number 20190047851
- Publication date Feb 14, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kai-Chih Liang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ULTRA-HIGH CHARGE DENSITY ELECTRETS AND METHOD OF MAKING SAME
- Publication number 20190013151
- Publication date Jan 10, 2019
- HONEYWELL INTERNATIONAL INC.
- Steven Tin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Electrical tuning of resonant scanning
- Publication number 20170153445
- Publication date Jun 1, 2017
- Apple Inc.
- Yuval Gerson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICES AND METHODS OF FORMING SAME
- Publication number 20170066647
- Publication date Mar 9, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kai-Chih Liang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR FABRICATION OF A MICROMECHANICAL AND/OR NANOMECHANICAL...
- Publication number 20150274516
- Publication date Oct 1, 2015
- COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE. ALT.
- Eric OLLIER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A MICROMECHANICAL COMPONENT
- Publication number 20150151962
- Publication date Jun 4, 2015
- ROBERT BOSCH GmbH
- Thomas Mayer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR PROCESSING BY MAGNETIC FIELD GUIDED ETCHING
- Publication number 20140256078
- Publication date Sep 11, 2014
- The Regents of the University of California
- Sungho Jin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND APPARATUS FOR LASER-BEAM PROCESSING AND METHOD FOR MANUF...
- Publication number 20140245608
- Publication date Sep 4, 2014
- Canon Kabushiki Kaisha
- Hiroyuki Morimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD FOR A MICROMECHANICAL COMPONENT AND A CORRESPO...
- Publication number 20140159209
- Publication date Jun 12, 2014
- ROBERT BOSCH GmbH
- Christoph SCHELLING
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING MICROFLUIDIC CHIP, MICROFLUIDIC CHIP, AND A...
- Publication number 20130140976
- Publication date Jun 6, 2013
- FUJIKURA LTD.
- Satoshi YAMAMOTO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Direct patterning of silicon by photoelectrochemical etching
- Publication number 20050009374
- Publication date Jan 13, 2005
- The Regents of the University of California.
- Jun Gao
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Bulk micromachining techniques not provided for in B81C1/00507

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Structure forming method and device

MEMS devices and methods of forming same

MEMS devices and methods of forming same

Ultra-high charge density electrets and method of making same

MEMS devices and methods of forming same

Electrical tuning of resonant scanning

Process for fabrication of a micromechanical and/or nanomechanical...

Semiconductor processing by magnetic field guided etching

Manufacturing method for a micromechanical component and a correspo...

Method of manufacturing microfluidic chip, microfluidic chip, and a...

Direct patterning of silicon by photoelectrochemical etching

Method and apparatus for manufacturing a micromechanical device

Patents Applicationslast 30 patents

STRUCTURE FORMING METHOD AND DEVICE

MEMS Devices and Methods of Forming Same

MEMS Devices and Methods of Forming Same

ULTRA-HIGH CHARGE DENSITY ELECTRETS AND METHOD OF MAKING SAME

Electrical tuning of resonant scanning

MEMS DEVICES AND METHODS OF FORMING SAME

PROCESS FOR FABRICATION OF A MICROMECHANICAL AND/OR NANOMECHANICAL...

METHOD FOR MANUFACTURING A MICROMECHANICAL COMPONENT

SEMICONDUCTOR PROCESSING BY MAGNETIC FIELD GUIDED ETCHING

METHOD AND APPARATUS FOR LASER-BEAM PROCESSING AND METHOD FOR MANUF...

MANUFACTURING METHOD FOR A MICROMECHANICAL COMPONENT AND A CORRESPO...

METHOD OF MANUFACTURING MICROFLUIDIC CHIP, MICROFLUIDIC CHIP, AND A...

Direct patterning of silicon by photoelectrochemical etching