by activating reactive gas streams before their introduction into the reaction chamber

Industry

CPC
C23C16/452

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/452by activating reactive gas streams before their introduction into the reaction chamber

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Flow control features of CVD chambers
- Patent number 12,146,219
- Issue date Nov 19, 2024
- Applied Materials, Inc.
- Kien N. Chuc
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Information Patent Grant
Semiconductor fabrication system embedded with effective baking module
- Patent number 12,033,863
- Issue date Jul 9, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Han-Yu Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming electronic devices comprising silicon carbide ma...
- Patent number 12,027,363
- Issue date Jul 2, 2024
- Micron Technology, Inc.
- Santanu Sarkar
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Activated gas generation apparatus
- Patent number 12,004,285
- Issue date Jun 4, 2024
- Toshiba Mitsubishi-Electric Industrial Systems Corporation
- Kensuke Watanabe
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Information Patent Grant
Apparatus for depositing thin films using hydrogen peroxide
- Patent number 11,987,881
- Issue date May 21, 2024
- ASM IP Holding B.V.
- Leonard Rodriguez
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Information Patent Grant
Quantum printing methods
- Patent number 11,981,994
- Issue date May 14, 2024
- Quantum Elements Development Inc.
- Christopher J. Nagel
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Activated gas generation apparatus
- Patent number 11,968,768
- Issue date Apr 23, 2024
- Toshiba Mitsubishi-Electric Industrial Systems Corporation
- Kensuke Watanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Quantum printing nanostructures within carbon nanopores
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- Issue date Mar 26, 2024
- Quantum Elements Development Inc.
- Christopher J. Nagel
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Lids and lid assembly kits for atomic layer deposition chambers
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- Issue date Mar 19, 2024
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- Muhammad M. Rasheed
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Information Patent Grant
Minimizing radical recombination using ALD silicon oxide surface co...
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- Issue date Mar 5, 2024
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- Bhadri N. Varadarajan
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Information Patent Grant
Conformal deposition of silicon carbide films
- Patent number 11,894,227
- Issue date Feb 6, 2024
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Enhanced spatial ALD of metals through controlled precursor mixing
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- Issue date Jan 30, 2024
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- Kelvin Chan
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Information Patent Grant
Method and apparatus for the fabrication of diamond by shockwaves
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- Issue date Oct 31, 2023
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- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method for producing oriented electrical steel sheet with ultra-low...
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- Issue date Oct 3, 2023
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- Sang-Won Lee
- C21 - METALLURGY OF IRON
Information Patent Grant
Substrate processing apparatus and method of processing substrate
- Patent number 11,761,084
- Issue date Sep 19, 2023
- ASM IP Holding B.V.
- Hiroki Arai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Post-discharge plasma coating device for wired substrates
- Patent number 11,756,770
- Issue date Sep 12, 2023
- Luxembourg Institute of Science and Technology (LIST)
- Simon Bulou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Quantum printing apparatus and method of using same
- Patent number 11,746,412
- Issue date Sep 5, 2023
- Quantum Elements Development Inc.
- Christopher J. Nagel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Films of desired composition and film properties
- Patent number 11,732,350
- Issue date Aug 22, 2023
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for supplying improved gas flow to a processin...
- Patent number 11,732,355
- Issue date Aug 22, 2023
- Applied Materials, Inc.
- Vishwas Kumar Pandey
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Information Patent Grant
Films of desired composition and film properties
- Patent number 11,708,634
- Issue date Jul 25, 2023
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for supplying improved gas flow to a processin...
- Patent number 11,697,875
- Issue date Jul 11, 2023
- Applied Materials, Inc.
- Vishwas Kumar Pandey
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Films of desired composition and film properties
- Patent number 11,680,314
- Issue date Jun 20, 2023
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Quantum printing nanostructures within carbon nanopores
- Patent number 11,680,317
- Issue date Jun 20, 2023
- Quantum Elements Development Inc.
- Christopher J. Nagel
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Films of desired composition and film properties
- Patent number 11,680,315
- Issue date Jun 20, 2023
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Quantum printing nanostructures within carbon nanopores
- Patent number 11,643,723
- Issue date May 9, 2023
- Quantum Elements Development Inc.
- Christopher J. Nagel
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Process for thin film deposition through controlled formation of va...
- Patent number 11,634,811
- Issue date Apr 25, 2023
- Gelest, Inc.
- Barry C. Arkles
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and method of operating film forming apparatus
- Patent number 11,613,811
- Issue date Mar 28, 2023
- Tokyo Electron Limited
- Jun Ogawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Quantum printing methods
- Patent number 11,535,933
- Issue date Dec 27, 2022
- Quantum Elements Development Inc.
- Christopher J. Nagel
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Film formation apparatus and film formation method
- Patent number 11,505,866
- Issue date Nov 22, 2022
- SHIBAURA MECHATRONICS CORPORATION
- Daisuke Ono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas supply apparatus
- Patent number 11,453,945
- Issue date Sep 27, 2022
- Toshiba Mitsubishi-Electric Industrial Systems Corporation
- Shinichi Nishimura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR
- Publication number 20240384406
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Information Patent Application
SEMICONDUCTOR FABRICATION SYSTEM EMBEDDED WITH EFFECTIVE BAKING MODULE
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Information Patent Application
ELECTRONIC DEVICES COMPRISING SILICON CARBIDE MATERIALS
- Publication number 20240332002
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Information Patent Application
GAS SUPPLY DEVICE
- Publication number 20240316517
- Publication date Sep 26, 2024
- TOYOKO KAGAKU CO., LTD.
- Shuhei MARUYA
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METHOD OF FORMING FILM, METHOD OF MANUFACTURING SEMICONDUCTOR DEVIC...
- Publication number 20240240308
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- Kokusai Electric Corporation
- Yuki TAIRA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER PROCESSING APPARATUS
- Publication number 20240234177
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- Samsung Electronics Co., Ltd.
- Hun Yong PARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MINIMIZING RADICAL RECOMBINATION USING ALD SILICON OXIDE SURFACE CO...
- Publication number 20240218509
- Publication date Jul 4, 2024
- LAM RESEARCH CORPORATION
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Apparatus for the fabrication of diamond by shockwaves
- Publication number 20240208826
- Publication date Jun 27, 2024
- Daniel Hodes
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Information Patent Application
CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS
- Publication number 20240145234
- Publication date May 2, 2024
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
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LARGE CAPACITY DEPOSITION SYSTEM
- Publication number 20240026543
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- Ascentool, Inc.
- George Xinsheng Guo
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METHOD AND APPARATUS FOR SUPPLYING IMPROVED GAS FLOW TO A PROCESSIN...
- Publication number 20230407471
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- Applied Materials, Inc.
- Vishwas Kumar PANDEY
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR
- Publication number 20230399742
- Publication date Dec 14, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sou-Chuan CHIANG
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QUANTUM PRINTING NANOSTRUCTURES WITHIN CARBON NANOPORES
- Publication number 20230366083
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- Quantum Elements Development Inc.
- Christopher J. Nagel
- B82 - NANO-TECHNOLOGY
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RAW MATERIAL GASIFICATION DEVICE, FILM COATING DEVICE, FILM COATING...
- Publication number 20230349041
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- Jiangsu Favored Nanotechnology Co., Ltd.
- Jian ZONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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QUANTUM PRINTING METHODS
- Publication number 20230279542
- Publication date Sep 7, 2023
- Quantum Elements Development Inc.
- Christopher J. Nagel
- B82 - NANO-TECHNOLOGY
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ROLL-TO-ROLL VAPOR DEPOSITION APPARATUS AND METHOD
- Publication number 20230212746
- Publication date Jul 6, 2023
- 3M Innovative Properties Company
- Cedric Bedoya
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CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS USING HETEROGENEOUS P...
- Publication number 20230203646
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- LAM RESEARCH CORPORATION
- Matthew Scott WEIMER
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Quantum Printing Apparatus and Method of Using Same
- Publication number 20230074549
- Publication date Mar 9, 2023
- Quantum Elements Development Inc.
- Christopher J. Nagel
- B82 - NANO-TECHNOLOGY
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Method and apparatus for the fabrication of diamond by shockwaves
- Publication number 20220396488
- Publication date Dec 15, 2022
- Daniel Hodes
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IN-SITU DRY CLEAN OF TUBE FURNACE
- Publication number 20220356570
- Publication date Nov 10, 2022
- Taiwan Semiconductor Manufacturing Co., LTD
- Eddy Lay
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RAW MATERIAL SUPPLY APPARATUS AND RAW MATERIAL SUPPLY METHOD
- Publication number 20220341038
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- TOKYO ELECTRON LIMITED
- Tsuneyuki OKABE
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QUANTUM PRINTING NANOSTRUCTURES WITHIN CARBON NANOPORES
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QUANTUM PRINTING NANOSTRUCTURES WITHIN CARBON NANOPORES
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- Quantum Elements Development Inc.
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RPCVD Apparatus and Methods for Forming a Film
- Publication number 20220316063
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- Joshua David Brown
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- Santanu Sarkar
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PLASMA IN A SUBSTRATE PROCESSING APPARATUS
- Publication number 20220259726
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- Picosun Oy
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- Publication number 20220220609
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FILMS OF DESIRED COMPOSITION AND FILM PROPERTIES
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FILMS OF DESIRED COMPOSITION AND FILM PROPERTIES
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by activating reactive gas streams before their introduction into the reaction chamber

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Flow control features of CVD chambers

Semiconductor fabrication system embedded with effective baking module

Methods of forming electronic devices comprising silicon carbide ma...

Activated gas generation apparatus

Apparatus for depositing thin films using hydrogen peroxide

Quantum printing methods

Activated gas generation apparatus

Quantum printing nanostructures within carbon nanopores

Lids and lid assembly kits for atomic layer deposition chambers

Minimizing radical recombination using ALD silicon oxide surface co...

Conformal deposition of silicon carbide films

Enhanced spatial ALD of metals through controlled precursor mixing

Method and apparatus for the fabrication of diamond by shockwaves

Method for producing oriented electrical steel sheet with ultra-low...

Substrate processing apparatus and method of processing substrate

Post-discharge plasma coating device for wired substrates

Quantum printing apparatus and method of using same

Films of desired composition and film properties

Method and apparatus for supplying improved gas flow to a processin...

Films of desired composition and film properties

Method and apparatus for supplying improved gas flow to a processin...

Films of desired composition and film properties

Quantum printing nanostructures within carbon nanopores

Films of desired composition and film properties

Quantum printing nanostructures within carbon nanopores

Process for thin film deposition through controlled formation of va...

Film forming apparatus and method of operating film forming apparatus

Quantum printing methods

Film formation apparatus and film formation method

Gas supply apparatus

Patents Applicationslast 30 patents

SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR

SEMICONDUCTOR FABRICATION SYSTEM EMBEDDED WITH EFFECTIVE BAKING MODULE

ELECTRONIC DEVICES COMPRISING SILICON CARBIDE MATERIALS

GAS SUPPLY DEVICE

METHOD OF FORMING FILM, METHOD OF MANUFACTURING SEMICONDUCTOR DEVIC...

WAFER PROCESSING APPARATUS

MINIMIZING RADICAL RECOMBINATION USING ALD SILICON OXIDE SURFACE CO...

Method and Apparatus for the fabrication of diamond by shockwaves

CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS

LARGE CAPACITY DEPOSITION SYSTEM

METHOD AND APPARATUS FOR SUPPLYING IMPROVED GAS FLOW TO A PROCESSIN...

SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR

QUANTUM PRINTING NANOSTRUCTURES WITHIN CARBON NANOPORES

RAW MATERIAL GASIFICATION DEVICE, FILM COATING DEVICE, FILM COATING...

QUANTUM PRINTING METHODS

ROLL-TO-ROLL VAPOR DEPOSITION APPARATUS AND METHOD

CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS USING HETEROGENEOUS P...

Quantum Printing Apparatus and Method of Using Same

Method and apparatus for the fabrication of diamond by shockwaves

IN-SITU DRY CLEAN OF TUBE FURNACE

RAW MATERIAL SUPPLY APPARATUS AND RAW MATERIAL SUPPLY METHOD

QUANTUM PRINTING NANOSTRUCTURES WITHIN CARBON NANOPORES

QUANTUM PRINTING NANOSTRUCTURES WITHIN CARBON NANOPORES

RPCVD Apparatus and Methods for Forming a Film

METHODS OF FORMING ELECTRONIC DEVICES COMPRISING SILICON CARBIDE MA...

PLASMA IN A SUBSTRATE PROCESSING APPARATUS

FILMS OF DESIRED COMPOSITION AND FILM PROPERTIES

FILMS OF DESIRED COMPOSITION AND FILM PROPERTIES

FILMS OF DESIRED COMPOSITION AND FILM PROPERTIES

FILMS OF DESIRED COMPOSITION AND FILM PROPERTIES