by activating reactive gas streams before their introduction into the reaction chamber

Industry

CPC
C23C16/452

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/452by activating reactive gas streams before their introduction into the reaction chamber

Industries

Patents Grantslast 30 patents

Information Patent Grant
Activated gas generation apparatus
- Patent number 11,968,768
- Issue date Apr 23, 2024
- Toshiba Mitsubishi-Electric Industrial Systems Corporation
- Kensuke Watanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Quantum printing nanostructures within carbon nanopores
- Patent number 11,939,671
- Issue date Mar 26, 2024
- Quantum Elements Development Inc.
- Christopher J. Nagel
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Lids and lid assembly kits for atomic layer deposition chambers
- Patent number 11,932,939
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Muhammad M. Rasheed
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Minimizing radical recombination using ALD silicon oxide surface co...
- Patent number 11,920,239
- Issue date Mar 5, 2024
- Lam Research Corporation
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conformal deposition of silicon carbide films
- Patent number 11,894,227
- Issue date Feb 6, 2024
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Enhanced spatial ALD of metals through controlled precursor mixing
- Patent number 11,887,856
- Issue date Jan 30, 2024
- Applied Materials, Inc.
- Kelvin Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for the fabrication of diamond by shockwaves
- Patent number 11,802,053
- Issue date Oct 31, 2023
- Daniel Hodes
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method for producing oriented electrical steel sheet with ultra-low...
- Patent number 11,773,490
- Issue date Oct 3, 2023
- POSCO Co., Ltd
- Sang-Won Lee
- C21 - METALLURGY OF IRON
Information Patent Grant
Substrate processing apparatus and method of processing substrate
- Patent number 11,761,084
- Issue date Sep 19, 2023
- ASM IP Holding B.V.
- Hiroki Arai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Post-discharge plasma coating device for wired substrates
- Patent number 11,756,770
- Issue date Sep 12, 2023
- Luxembourg Institute of Science and Technology (LIST)
- Simon Bulou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Quantum printing apparatus and method of using same
- Patent number 11,746,412
- Issue date Sep 5, 2023
- Quantum Elements Development Inc.
- Christopher J. Nagel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Films of desired composition and film properties
- Patent number 11,732,350
- Issue date Aug 22, 2023
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for supplying improved gas flow to a processin...
- Patent number 11,732,355
- Issue date Aug 22, 2023
- Applied Materials, Inc.
- Vishwas Kumar Pandey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Films of desired composition and film properties
- Patent number 11,708,634
- Issue date Jul 25, 2023
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for supplying improved gas flow to a processin...
- Patent number 11,697,875
- Issue date Jul 11, 2023
- Applied Materials, Inc.
- Vishwas Kumar Pandey
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Films of desired composition and film properties
- Patent number 11,680,314
- Issue date Jun 20, 2023
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Quantum printing nanostructures within carbon nanopores
- Patent number 11,680,317
- Issue date Jun 20, 2023
- Quantum Elements Development Inc.
- Christopher J. Nagel
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Films of desired composition and film properties
- Patent number 11,680,315
- Issue date Jun 20, 2023
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Quantum printing nanostructures within carbon nanopores
- Patent number 11,643,723
- Issue date May 9, 2023
- Quantum Elements Development Inc.
- Christopher J. Nagel
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Process for thin film deposition through controlled formation of va...
- Patent number 11,634,811
- Issue date Apr 25, 2023
- Gelest, Inc.
- Barry C. Arkles
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and method of operating film forming apparatus
- Patent number 11,613,811
- Issue date Mar 28, 2023
- Tokyo Electron Limited
- Jun Ogawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Quantum printing methods
- Patent number 11,535,933
- Issue date Dec 27, 2022
- Quantum Elements Development Inc.
- Christopher J. Nagel
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Film formation apparatus and film formation method
- Patent number 11,505,866
- Issue date Nov 22, 2022
- SHIBAURA MECHATRONICS CORPORATION
- Daisuke Ono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas supply apparatus
- Patent number 11,453,945
- Issue date Sep 27, 2022
- Toshiba Mitsubishi-Electric Industrial Systems Corporation
- Shinichi Nishimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Quantum printing apparatus and method of using same
- Patent number 11,447,860
- Issue date Sep 20, 2022
- Quantum Elements Development Inc.
- Christopher J. Nagel
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and apparatus for generating highly repetitive pulsed plasmas
- Patent number 11,427,913
- Issue date Aug 30, 2022
- PlasmaNano Corporation
- Jaeyoung Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fixed and portable coating apparatuses and methods
- Patent number 11,421,317
- Issue date Aug 23, 2022
- University of Houston System
- Seamus Curran
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electronic devices comprising silicon carbide materials
- Patent number 11,424,118
- Issue date Aug 23, 2022
- Micron Technology, Inc.
- Santanu Sarkar
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Atomic layer deposition chamber with funnel-shaped gas dispersion c...
- Patent number 11,384,432
- Issue date Jul 12, 2022
- Applied Materials, Inc.
- Muhammad M. Rasheed
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for depositing chalcogenide thin films
- Patent number 11,377,735
- Issue date Jul 5, 2022
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Remy Gassilloud
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS
- Publication number 20240145234
- Publication date May 2, 2024
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LARGE CAPACITY DEPOSITION SYSTEM
- Publication number 20240026543
- Publication date Jan 25, 2024
- Ascentool, Inc.
- George Xinsheng Guo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR SUPPLYING IMPROVED GAS FLOW TO A PROCESSIN...
- Publication number 20230407471
- Publication date Dec 21, 2023
- Applied Materials, Inc.
- Vishwas Kumar PANDEY
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR
- Publication number 20230399742
- Publication date Dec 14, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sou-Chuan CHIANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
QUANTUM PRINTING NANOSTRUCTURES WITHIN CARBON NANOPORES
- Publication number 20230366083
- Publication date Nov 16, 2023
- Quantum Elements Development Inc.
- Christopher J. Nagel
- B82 - NANO-TECHNOLOGY
Information Patent Application
RAW MATERIAL GASIFICATION DEVICE, FILM COATING DEVICE, FILM COATING...
- Publication number 20230349041
- Publication date Nov 2, 2023
- Jiangsu Favored Nanotechnology Co., Ltd.
- Jian ZONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
QUANTUM PRINTING METHODS
- Publication number 20230279542
- Publication date Sep 7, 2023
- Quantum Elements Development Inc.
- Christopher J. Nagel
- B82 - NANO-TECHNOLOGY
Information Patent Application
ROLL-TO-ROLL VAPOR DEPOSITION APPARATUS AND METHOD
- Publication number 20230212746
- Publication date Jul 6, 2023
- 3M Innovative Properties Company
- Cedric Bedoya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS USING HETEROGENEOUS P...
- Publication number 20230203646
- Publication date Jun 29, 2023
- LAM RESEARCH CORPORATION
- Matthew Scott WEIMER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Quantum Printing Apparatus and Method of Using Same
- Publication number 20230074549
- Publication date Mar 9, 2023
- Quantum Elements Development Inc.
- Christopher J. Nagel
- B82 - NANO-TECHNOLOGY
Information Patent Application
Method and apparatus for the fabrication of diamond by shockwaves
- Publication number 20220396488
- Publication date Dec 15, 2022
- Daniel Hodes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-SITU DRY CLEAN OF TUBE FURNACE
- Publication number 20220356570
- Publication date Nov 10, 2022
- Taiwan Semiconductor Manufacturing Co., LTD
- Eddy Lay
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RAW MATERIAL SUPPLY APPARATUS AND RAW MATERIAL SUPPLY METHOD
- Publication number 20220341038
- Publication date Oct 27, 2022
- TOKYO ELECTRON LIMITED
- Tsuneyuki OKABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
QUANTUM PRINTING NANOSTRUCTURES WITHIN CARBON NANOPORES
- Publication number 20220325408
- Publication date Oct 13, 2022
- Quantum Elements Development Inc.
- Christopher J. Nagel
- B82 - NANO-TECHNOLOGY
Information Patent Application
QUANTUM PRINTING NANOSTRUCTURES WITHIN CARBON NANOPORES
- Publication number 20220325407
- Publication date Oct 13, 2022
- Quantum Elements Development Inc.
- Christopher J. Nagel
- B82 - NANO-TECHNOLOGY
Information Patent Application
RPCVD Apparatus and Methods for Forming a Film
- Publication number 20220316063
- Publication date Oct 6, 2022
- Gallium Enterprises Pty Ltd
- Joshua David Brown
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF FORMING ELECTRONIC DEVICES COMPRISING SILICON CARBIDE MA...
- Publication number 20220262628
- Publication date Aug 18, 2022
- Micron Technology, Inc.
- Santanu Sarkar
- H01 - BASIC ELECTRIC ELEMENTS
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PLASMA IN A SUBSTRATE PROCESSING APPARATUS
- Publication number 20220259726
- Publication date Aug 18, 2022
- Picosun Oy
- Niklas HOLM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILMS OF DESIRED COMPOSITION AND FILM PROPERTIES
- Publication number 20220220609
- Publication date Jul 14, 2022
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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FILMS OF DESIRED COMPOSITION AND FILM PROPERTIES
- Publication number 20220220608
- Publication date Jul 14, 2022
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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FILMS OF DESIRED COMPOSITION AND FILM PROPERTIES
- Publication number 20220220611
- Publication date Jul 14, 2022
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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FILMS OF DESIRED COMPOSITION AND FILM PROPERTIES
- Publication number 20220220610
- Publication date Jul 14, 2022
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MINIMIZING RADICAL RECOMBINATION USING ALD SILICON OXIDE SURFACE CO...
- Publication number 20220145459
- Publication date May 12, 2022
- LAM RESEARCH CORPORATION
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS
- Publication number 20220148875
- Publication date May 12, 2022
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Semiconductor Fabrication System Embedded with Effective Baking Module
- Publication number 20220130693
- Publication date Apr 28, 2022
- Taiwan Semiconductor Manufacturing Co., LTD
- Han-Yu Lin
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PROCESS FOR THIN FILM DEPOSITION THROUGH CONTROLLED FORMATION OF VA...
- Publication number 20220119940
- Publication date Apr 21, 2022
- Gelest, Inc.
- Barry C. ARKLES
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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FILMS OF DESIRED COMPOSITION AND FILM PROPERTIES
- Publication number 20220098727
- Publication date Mar 31, 2022
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- H01 - BASIC ELECTRIC ELEMENTS
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20220002873
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- Kokusai Electric Corporation
- Kazuki NONOMURA
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ACTIVATED GAS GENERATION APPARATUS
- Publication number 20220007487
- Publication date Jan 6, 2022
- TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
- Kensuke WATANABE
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System and Method for Thermally Cracking Ammonia
- Publication number 20210395883
- Publication date Dec 23, 2021
- TOKYO ELECTRON LIMITED
- Anthony Dip
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by activating reactive gas streams before their introduction into the reaction chamber

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Activated gas generation apparatus

Quantum printing nanostructures within carbon nanopores

Lids and lid assembly kits for atomic layer deposition chambers

Minimizing radical recombination using ALD silicon oxide surface co...

Conformal deposition of silicon carbide films

Enhanced spatial ALD of metals through controlled precursor mixing

Method and apparatus for the fabrication of diamond by shockwaves

Method for producing oriented electrical steel sheet with ultra-low...

Substrate processing apparatus and method of processing substrate

Post-discharge plasma coating device for wired substrates

Quantum printing apparatus and method of using same

Films of desired composition and film properties

Method and apparatus for supplying improved gas flow to a processin...

Films of desired composition and film properties

Method and apparatus for supplying improved gas flow to a processin...

Films of desired composition and film properties

Quantum printing nanostructures within carbon nanopores

Films of desired composition and film properties

Quantum printing nanostructures within carbon nanopores

Process for thin film deposition through controlled formation of va...

Film forming apparatus and method of operating film forming apparatus

Quantum printing methods

Film formation apparatus and film formation method

Gas supply apparatus

Quantum printing apparatus and method of using same

Method and apparatus for generating highly repetitive pulsed plasmas

Fixed and portable coating apparatuses and methods

Electronic devices comprising silicon carbide materials

Atomic layer deposition chamber with funnel-shaped gas dispersion c...

Apparatus for depositing chalcogenide thin films

Patents Applicationslast 30 patents

CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS

LARGE CAPACITY DEPOSITION SYSTEM

METHOD AND APPARATUS FOR SUPPLYING IMPROVED GAS FLOW TO A PROCESSIN...

SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR

QUANTUM PRINTING NANOSTRUCTURES WITHIN CARBON NANOPORES

RAW MATERIAL GASIFICATION DEVICE, FILM COATING DEVICE, FILM COATING...

QUANTUM PRINTING METHODS

ROLL-TO-ROLL VAPOR DEPOSITION APPARATUS AND METHOD

CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS USING HETEROGENEOUS P...

Quantum Printing Apparatus and Method of Using Same

Method and apparatus for the fabrication of diamond by shockwaves

IN-SITU DRY CLEAN OF TUBE FURNACE

RAW MATERIAL SUPPLY APPARATUS AND RAW MATERIAL SUPPLY METHOD

QUANTUM PRINTING NANOSTRUCTURES WITHIN CARBON NANOPORES

QUANTUM PRINTING NANOSTRUCTURES WITHIN CARBON NANOPORES

RPCVD Apparatus and Methods for Forming a Film

METHODS OF FORMING ELECTRONIC DEVICES COMPRISING SILICON CARBIDE MA...

PLASMA IN A SUBSTRATE PROCESSING APPARATUS

FILMS OF DESIRED COMPOSITION AND FILM PROPERTIES

FILMS OF DESIRED COMPOSITION AND FILM PROPERTIES

FILMS OF DESIRED COMPOSITION AND FILM PROPERTIES

FILMS OF DESIRED COMPOSITION AND FILM PROPERTIES

MINIMIZING RADICAL RECOMBINATION USING ALD SILICON OXIDE SURFACE CO...

CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS

Semiconductor Fabrication System Embedded with Effective Baking Module

PROCESS FOR THIN FILM DEPOSITION THROUGH CONTROLLED FORMATION OF VA...

FILMS OF DESIRED COMPOSITION AND FILM PROPERTIES

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

ACTIVATED GAS GENERATION APPARATUS

System and Method for Thermally Cracking Ammonia