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ELECTRICITY
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Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/31116
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last 30 patents
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Patent Grant
Semiconductor devices and methods of manufacturing thereof
Patent number
11,967,533
Issue date
Apr 23, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Shu-Uei Jang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Localized heating in laser annealing process
Patent number
11,967,647
Issue date
Apr 23, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Blandine Duriez
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated circuit structure and manufacturing method thereof
Patent number
11,967,526
Issue date
Apr 23, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Te-Chih Hsiung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for fabricating layer structure having target topological pr...
Patent number
11,961,741
Issue date
Apr 16, 2024
ASM IP Holding B.V.
Eiichiro Shiba
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,961,746
Issue date
Apr 16, 2024
Tokyo Electron Limited
Sho Kumakura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor devices and methods of manufacture
Patent number
11,955,370
Issue date
Apr 9, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Bo-Cyuan Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method, method for manufacturing semiconducor...
Patent number
11,955,316
Issue date
Apr 9, 2024
Tokyo Electron Limited
Takayuki Katsunuma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Conductive element for semiconductor devices
Patent number
11,955,380
Issue date
Apr 9, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Kuo-Chiang Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of etching and apparatus for plasma processing
Patent number
11,955,342
Issue date
Apr 9, 2024
Tokyo Electron Limited
Masanori Hosoya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selective deposition of barrier layer
Patent number
11,948,834
Issue date
Apr 2, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Hsin-Yen Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Combined RF generator and RF solid-state matching network
Patent number
11,948,775
Issue date
Apr 2, 2024
ASM AMERICA, INC.
Imran Ahmed Bhutta
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method, air-gap dielectric layer, and dynamic random-access...
Patent number
11,948,805
Issue date
Apr 2, 2024
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Xin Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cooling device, substrate treatment device, cooling method, and sub...
Patent number
11,948,812
Issue date
Apr 2, 2024
Shibaura Mechatronics Corporation
Kensuke Demura
B08 - CLEANING
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Patent Grant
Optical integrated circuit structure including edge coupling protec...
Patent number
11,940,659
Issue date
Mar 26, 2024
Taiwan Semiconductor Manufacturing Company Limited
Chen-Hao Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for preparing semiconductor device structure with isolation...
Patent number
11,942,331
Issue date
Mar 26, 2024
NANYA TECHNOLOGY CORPORATION
Ching-Cheng Chuang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming semiconductor device with helmet structure betwe...
Patent number
11,942,476
Issue date
Mar 26, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Kuo-Cheng Ching
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selective deposition of a protective layer to reduce interconnect s...
Patent number
11,942,364
Issue date
Mar 26, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Hsi-Wen Tien
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Low thermal budget dielectric for semiconductor devices
Patent number
11,942,358
Issue date
Mar 26, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Mrunal Abhijith Khaderbad
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Three-dimensional memory devices and fabrication methods thereof
Patent number
11,943,923
Issue date
Mar 26, 2024
Yangtze Memory Technologies Co., Ltd.
Li Hong Xiao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Conductive contact having barrier layers with different depths
Patent number
11,929,328
Issue date
Mar 12, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chia-Yang Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor patterning and resulting structures
Patent number
11,929,254
Issue date
Mar 12, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chun-Ming Lung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for fabricating hydrogen treated surface of semiconductor de...
Patent number
11,929,410
Issue date
Mar 12, 2024
SK Hynix Inc.
Jin Woong Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for conditioning a processing reactor
Patent number
11,926,892
Issue date
Mar 12, 2024
GlobalWafers Co., Ltd.
Gang Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus and semiconductor device manufacturing...
Patent number
11,929,239
Issue date
Mar 12, 2024
Samsung Electronics Co., Ltd.
Sejin Oh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming fin field effect transistor (FinFET) device stru...
Patent number
11,923,359
Issue date
Mar 5, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chung-Shu Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metal-insulator-metal structure and methods of fabrication thereof
Patent number
11,923,405
Issue date
Mar 5, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chih-Fan Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
FinFET structure with fin top hard mask and method of forming the same
Patent number
11,923,457
Issue date
Mar 5, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Che-Yu Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Capping layer for a hafnium oxide-based ferroelectric material
Patent number
11,923,189
Issue date
Mar 5, 2024
Lam Research Corporation
Hyungsuk Alexander Yoon
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Dynamically adjusted purge timing in wet atomic layer etching
Patent number
11,915,941
Issue date
Feb 27, 2024
Tokyo Electron Limited
Jacques Faguet
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of depositing a pre-etch protective layer
Patent number
11,915,940
Issue date
Feb 27, 2024
Applied Materials, Inc.
Zhi Gang Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF MEASURING OVERLAY OFFSET AND METHOD OF MANUFACTURING SEMI...
Publication number
20240136234
Publication date
Apr 25, 2024
Samsung Electronics Co., Ltd.
Mingyoo CHOI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VERTICAL SEMICONDUCTOR COMPONENT ON THE BASIS OF GALLIUM NITRIDE...
Publication number
20240136407
Publication date
Apr 25, 2024
ROBERT BOSCH GmbH
Kevin Dannecker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LOW-STRESS PASSIVATION LAYER
Publication number
20240136291
Publication date
Apr 25, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Hsiang-Ku SHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MODIFYING PATTERNED FEATURES USING A DIRECTIONAL ETCH
Publication number
20240136197
Publication date
Apr 25, 2024
Applied Materials, Inc.
Tassie Andersen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS
Publication number
20240136198
Publication date
Apr 25, 2024
TOKYO ELECTRON LIMITED
Rui KANEMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR PRODUCING AN INDIVIDUALIZATION ZONE OF AN INTEGRATED CIR...
Publication number
20240128119
Publication date
Apr 18, 2024
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Stefan LANDIS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DRY ETCHING WITH ETCH BYPRODUCT SELF-CLEANING
Publication number
20240128091
Publication date
Apr 18, 2024
Applied Materials, Inc.
Zhonghua Yao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FABRICATING A CAPACITOR
Publication number
20240128311
Publication date
Apr 18, 2024
STMicroelectronics (Tours) SAS
Mohamed Boufnichel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FABRICATING LAYER STRUCTURE HAVING TARGET TOPOLOGICAL PR...
Publication number
20240128090
Publication date
Apr 18, 2024
ASM IP HOLDING B.V.
Eiichiro Shiba
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FORMING NANOSHEET TRANSISTOR USING SACRIFICIAL SPACER AND INNER SPA...
Publication number
20240120408
Publication date
Apr 11, 2024
TESSERA LLC
Kangguo Cheng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ADVANCED ETCHING TECHNOLOGIES FOR STRAIGHT, TALL AND UNIFORM FINS A...
Publication number
20240120206
Publication date
Apr 11, 2024
Intel Corporation
Muralidhar S. AMBATI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICROELECTRONIC DEVICES INCLUDING HIGH ASPECT RATIO FEATURES
Publication number
20240120237
Publication date
Apr 11, 2024
Lodestar Licensing Group LLC
Ken Tokashiki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20240120187
Publication date
Apr 11, 2024
TOKYO ELECTRON LIMITED
Hironari SASAGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CARBON REPLENISHMENT OF SILICON-CONTAINING MATERIAL
Publication number
20240120193
Publication date
Apr 11, 2024
Applied Materials, Inc.
Shankar Venkataraman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FABRICATING SPACER
Publication number
20240120208
Publication date
Apr 11, 2024
United Microelectronics Corp.
ZIHAO HUA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR ETCHING A HIGH ASPECT RATIO STRUCTURE
Publication number
20240120209
Publication date
Apr 11, 2024
LAM RESEARCH CORPORATION
Nikhil Dole
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VARIABLE SELECTIVE ETCHING TECHNOLOGY FOR THICK SOI DEVICES
Publication number
20240112914
Publication date
Apr 4, 2024
University of Electronic Science and Technology of China
Bo ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
In-Situ Adsorbate Formation for Dielectric Etch
Publication number
20240112888
Publication date
Apr 4, 2024
TOKYO ELECTRON LIMITED
Du Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND PLASMA PROCESSING SYSTEM
Publication number
20240112922
Publication date
Apr 4, 2024
TOKYO ELECTRON LIMITED
Ryo MATSUBARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SQUARE ETCH PROFILES IN HETEROGENOUS MATERIALS OF INTEGRATED CIRCUI...
Publication number
20240113194
Publication date
Apr 4, 2024
Intel Corporation
Mekha George
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
Publication number
20240113199
Publication date
Apr 4, 2024
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY , LTD.
Jia-Chuan YOU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor Structure Cutting Process and Structures Formed Thereby
Publication number
20240113113
Publication date
Apr 4, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Chih-Chang Hung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD TO IMPROVE PROFILE CONTROL DURING SELECTIVE ETCHING OF SILIC...
Publication number
20240112920
Publication date
Apr 4, 2024
American Air Liquide, Inc.
Xiangyu GUO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
In-Situ Adsorbate Formation for Plasma Etch Process
Publication number
20240112887
Publication date
Apr 4, 2024
TOKYO ELECTRON LIMITED
Du Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HYDROGEN PEROXIDE PLASMA ETCH OF ASHABLE HARD MASK
Publication number
20240112921
Publication date
Apr 4, 2024
RASIRC, Inc.
Jeffrey J. Spiegelman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD WITH METAL HARD MASK
Publication number
20240112923
Publication date
Apr 4, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Yu ZHANG
B08 - CLEANING
Information
Patent Application
FINFET STRUCTURE WITH FIN TOP HARD MASK AND METHOD OF FORMING THE SAME
Publication number
20240105850
Publication date
Mar 28, 2024
Taiwan Semiconductor Manufacturing Co., LTD
Che-Yu Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELECTIVE ETCHES FOR REDUCING CONE FORMATION IN SHALLOW TRENCH ISOL...
Publication number
20240105501
Publication date
Mar 28, 2024
TEXAS INSTRUMENTS INCORPORATED
Karen Hildegard Ralston Kirmse
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICES AND METHODS OF FABRICATION THEREOF
Publication number
20240105787
Publication date
Mar 28, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Cheng-Wei CHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20240105448
Publication date
Mar 28, 2024
Kokusai Electric Corporation
Motomu DEGAI
H01 - BASIC ELECTRIC ELEMENTS