by etching with a reactive gas

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CPC
C23C16/0236

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

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C23C16/0236by etching with a reactive gas

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Vacuum pump protection against deposition byproduct buildup
- Patent number 12,087,561
- Issue date Sep 10, 2024
- Lam Research Corporation
- John Stephen Drewery
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for transistor pathogen detector
- Patent number 12,031,987
- Issue date Jul 9, 2024
- AKHAN SEMICONDUCTOR, INC.
- Adam Khan
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of manufacturing silicon carbide epitaxial wafer
- Patent number 11,948,794
- Issue date Apr 2, 2024
- Mitsubishi Electric Corporation
- Masashi Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Energy storage devices having coated passive particles
- Patent number 11,887,781
- Issue date Jan 30, 2024
- Forge Nano, Inc.
- David M. King
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Vacuum pump protection against deposition byproduct buildup
- Patent number 11,710,623
- Issue date Jul 25, 2023
- Lam Research Corporation
- John Stephen Drewery
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for etching or deposition
- Patent number 11,624,111
- Issue date Apr 11, 2023
- Entegris, Inc.
- Robert L. Wright
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method, materials and process for native oxide removal and regrowth...
- Patent number 11,598,000
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Ranga Rao Arnepalli
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Information Patent Grant
Formation of pores in atomically thin layers
- Patent number 11,524,898
- Issue date Dec 13, 2022
- Massachusetts Institute of Technology
- Piran Kidambi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Optical element for a motor vehicle
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- Valeo Vision
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- Ryuichi Asako
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Surface processing method and processing system
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- Issue date Jul 12, 2022
- Tokyo Electron Limited
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- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
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- Issue date Jun 28, 2022
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Information Patent Grant
Depositing coatings on and within a housing, apparatus, or tool usi...
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- Issue date Jun 28, 2022
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Information Patent Grant
Fabricating method of semi-polar gallium nitride
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- Issue date Apr 26, 2022
- WAFER WORKS CORPORATION
- Wen-Chung Li
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Information Patent Grant
Energy storage devices having coated passive components
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- Issue date Mar 22, 2022
- FORGE NANO, INC.
- David M. King
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Method of forming boron-based film, and film forming apparatus
- Patent number 11,145,522
- Issue date Oct 12, 2021
- Tokyo Electron Limited
- Yoshimasa Watanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Epitaxy system integrated with high selectivity oxide removal and h...
- Patent number 11,049,719
- Issue date Jun 29, 2021
- Applied Materials, Inc.
- Lara Hawrylchak
- B08 - CLEANING
Information Patent Grant
Vacuum pump protection against deposition byproduct buildup
- Patent number 11,031,215
- Issue date Jun 8, 2021
- Lam Research Corporation
- John Stephen Drewery
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for synthesizing vertically aligned carbon nan...
- Patent number 10,961,123
- Issue date Mar 30, 2021
- The Florida International University Board of Trustees
- Wenzhi Li
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Information Patent Grant
Method for epitaxially coating semiconductor wafers, and semiconduc...
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Information Patent Grant
Single-crystal diamond, method for manufacturing single-crystal dia...
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- Sumitomo Electric Industries, Ltd
- Takuya Nohara
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Information Patent Grant
Processing system and processing method
- Patent number 10,669,626
- Issue date Jun 2, 2020
- Kabushiki Kaisha Toshiba
- Shinya Sato
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Information Patent Grant
Method of manufacturing a moth eye mircostructure, an antireflectiv...
- Patent number 10,634,822
- Issue date Apr 28, 2020
- WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Yong Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for controllable non-volatile metal removal
- Patent number 10,633,743
- Issue date Apr 28, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Tsung-Liang Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for substrate processing using exhaust ports
- Patent number 10,593,545
- Issue date Mar 17, 2020
- EUGENE TECHNOLOGY CO., LTD.
- Il-Kwang Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Energy storage devices having coated passive components
- Patent number 10,569,330
- Issue date Feb 25, 2020
- FORGE NANO, INC.
- David M. King
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Method of preparing for reactor restart for manufacturing epitaxial...
- Patent number 10,550,465
- Issue date Feb 4, 2020
- SK SILTRON CO., LTD.
- Dong-Ho Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lamination transfer films for forming antireflective structures
- Patent number 10,436,946
- Issue date Oct 8, 2019
- 3M Innovative Properties Company
- Michael Benton Free
- B32 - LAYERED PRODUCTS
Information Patent Grant
Apparatus and method for synthesizing vertically aligned carbon nan...
- Patent number 10,336,618
- Issue date Jul 2, 2019
- The Florida International University Board of Trustees
- Wenzhi Li
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and apparatus for forming nitride film
- Patent number 10,304,676
- Issue date May 28, 2019
- Tokyo Electron Limited
- Takahiro Miyahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

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- Publication number 20240347462
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- Ha Kyung YUN
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System and Method for Transistor Pathogen Detector
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- AKHAN Semiconductor, Inc.
- Adam Khan
- B82 - NANO-TECHNOLOGY
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ETCHING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20240234097
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- TOKYO ELECTRON LIMITED
- Atsushi TAKAHASHI
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MANUFACTURING EQUIPMENT FOR LIGHT-EMITTING DEVICE
- Publication number 20240186160
- Publication date Jun 6, 2024
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Shunpei YAMAZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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APPARATUS AND METHOD FOR DEPOSITING CARBON-CONTAINING STRUCTURES
- Publication number 20240150891
- Publication date May 9, 2024
- AIXTRON SE
- Alexandre JOUVRAY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240076777
- Publication date Mar 7, 2024
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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METHOD OF SELECTIVE ETCHING OF DIELECTRIC MATERIALS
- Publication number 20240035196
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- Yi-Chiau HUANG
- B08 - CLEANING
Information Patent Application
VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP
- Publication number 20230317437
- Publication date Oct 5, 2023
- LAM RESEARCH CORPORATION
- John Stephen Drewery
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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FORMATION OF PORES IN ATOMICALLY THIN LAYERS
- Publication number 20230249974
- Publication date Aug 10, 2023
- Massachusetts Institute of Technology
- Piran Kidambi
- C01 - INORGANIC CHEMISTRY
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METHODS OF EPITAXIALLY GROWING BORON-CONTAINING STRUCTURES
- Publication number 20230223257
- Publication date Jul 13, 2023
- Applied Materials, Inc.
- Xuebin LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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METAL-ON-METAL DEPOSITION METHODS FOR FILLING A GAP FEATURE ON A SU...
- Publication number 20230163028
- Publication date May 25, 2023
- ASM IP HOLDING B.V.
- Salvatore Luiso
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ARTICLES HAVING REMOVABLE COATINGS AND RELATED METHODS
- Publication number 20230100791
- Publication date Mar 30, 2023
- Entegris, Inc.
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METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230058808
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- Kokusai Electric Corporation
- Motomu DEGAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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METHOD FOR MANUFACTURING SHALLOW TRENCH ISOLATION STRUCTURE, SHALLO...
- Publication number 20230052736
- Publication date Feb 16, 2023
- CHANGXIN MEMORY TECHNOLOGIES, INC
- MENG-CHENG CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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METHOD AND APPARATUS FOR LOW TEMPERATURE SELECTIVE EPITAXY IN A DEE...
- Publication number 20230036426
- Publication date Feb 2, 2023
- Applied Materials, Inc.
- Abhishek DUBE
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METHOD FOR FORMING TITANIUM NITRIDE FILM AND APPARATUS FOR FORMING...
- Publication number 20230030762
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- TOKYO ELECTRON LIMITED
- Kensuke HIGUCHI
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SUBSTRATE PROCESSING METHOD
- Publication number 20220415650
- Publication date Dec 29, 2022
- ASM IP HOLDING B.V.
- JaeOk Ko
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Energy Storage Devices Having Coated Passive Particles
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- Publication date Dec 22, 2022
- Forge Nano, Inc.
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- B22 - CASTING POWDER METALLURGY
Information Patent Application
INTEGRATED EPITAXY AND PRECLEAN SYSTEM
- Publication number 20220375751
- Publication date Nov 24, 2022
- Applied Materials, Inc.
- Yi-Chiau HUANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Electrode and method for production
- Publication number 20220341035
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- CONDIAS GMBH
- Dirk Mathiak
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METHODS AND SYSTEMS FOR PREPARING COMPOSITE CRYSTALS
- Publication number 20220316093
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- Yu WANG
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SURFACE PROCESSING METHOD AND PROCESSING SYSTEM
- Publication number 20220301882
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- TOKYO ELECTRON LIMITED
- Koichi TAKATSUKI
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Depositing Coatings On and Within A Housing, Apparatus, or Tool Usi...
- Publication number 20220282375
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- Publication number 20220186375
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- AIXTRON SE
- Pascal TILLMANNS
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FABRICATING METHOD OF SEMI-POLAR GALLIUM NITRIDE
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- WAFER WORKS CORPORATION
- Wen-Chung Li
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SILICIDE FILM NUCLEATION
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- Xuebi LI
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METHOD OF MANUFACTURING SILICON CARBIDE EPITAXIAL WAFER
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- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR TRANSISTOR PATHOGEN DETECTOR
- Publication number 20210349091
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- B82 - NANO-TECHNOLOGY
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VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP
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- H01 - BASIC ELECTRIC ELEMENTS

by etching with a reactive gas

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Vacuum pump protection against deposition byproduct buildup

System and method for transistor pathogen detector

Method of manufacturing silicon carbide epitaxial wafer

Energy storage devices having coated passive particles

Vacuum pump protection against deposition byproduct buildup

Method for etching or deposition

Method, materials and process for native oxide removal and regrowth...

Formation of pores in atomically thin layers

Optical element for a motor vehicle

Substrate processing method and substrate processing system

Surface processing method and processing system

Film forming method and film forming apparatus

Depositing coatings on and within a housing, apparatus, or tool usi...

Fabricating method of semi-polar gallium nitride

Energy storage devices having coated passive components

Method of forming boron-based film, and film forming apparatus

Epitaxy system integrated with high selectivity oxide removal and h...

Vacuum pump protection against deposition byproduct buildup

Apparatus and method for synthesizing vertically aligned carbon nan...

Method for epitaxially coating semiconductor wafers, and semiconduc...

Single-crystal diamond, method for manufacturing single-crystal dia...

Processing system and processing method

Method of manufacturing a moth eye mircostructure, an antireflectiv...

System and method for controllable non-volatile metal removal

Method for substrate processing using exhaust ports

Energy storage devices having coated passive components

Method of preparing for reactor restart for manufacturing epitaxial...

Lamination transfer films for forming antireflective structures

Apparatus and method for synthesizing vertically aligned carbon nan...

Method and apparatus for forming nitride film

Patents Applicationslast 30 patents

METHOD FOR FORMING AN INSULATING LAYER PATTERN, PRECURSORS USED IN...

System and Method for Transistor Pathogen Detector

ETCHING METHOD AND PLASMA PROCESSING APPARATUS

MANUFACTURING EQUIPMENT FOR LIGHT-EMITTING DEVICE

APPARATUS AND METHOD FOR DEPOSITING CARBON-CONTAINING STRUCTURES

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

METHOD OF SELECTIVE ETCHING OF DIELECTRIC MATERIALS

VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP

FORMATION OF PORES IN ATOMICALLY THIN LAYERS

METHODS OF EPITAXIALLY GROWING BORON-CONTAINING STRUCTURES

METAL-ON-METAL DEPOSITION METHODS FOR FILLING A GAP FEATURE ON A SU...

ARTICLES HAVING REMOVABLE COATINGS AND RELATED METHODS

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD FOR MANUFACTURING SHALLOW TRENCH ISOLATION STRUCTURE, SHALLO...

METHOD AND APPARATUS FOR LOW TEMPERATURE SELECTIVE EPITAXY IN A DEE...

METHOD FOR FORMING TITANIUM NITRIDE FILM AND APPARATUS FOR FORMING...

SUBSTRATE PROCESSING METHOD

Energy Storage Devices Having Coated Passive Particles

INTEGRATED EPITAXY AND PRECLEAN SYSTEM

Electrode and method for production

METHODS AND SYSTEMS FOR PREPARING COMPOSITE CRYSTALS

SURFACE PROCESSING METHOD AND PROCESSING SYSTEM

Depositing Coatings On and Within A Housing, Apparatus, or Tool Usi...

METHOD FOR RECORDING A STATE OF A CVD REACTOR UNDER PRODUCTION COND...

FABRICATING METHOD OF SEMI-POLAR GALLIUM NITRIDE

SILICIDE FILM NUCLEATION

METHOD OF MANUFACTURING SILICON CARBIDE EPITAXIAL WAFER

SYSTEM AND METHOD FOR TRANSISTOR PATHOGEN DETECTOR

VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP

APPARATUS AND METHOD FOR ETCHING ONE SIDE OF A SEMICONDUCTOR LAYER...