by etching with a reactive gas

Industry

CPC
C23C16/0236

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/0236by etching with a reactive gas

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing silicon carbide epitaxial wafer
- Patent number 11,948,794
- Issue date Apr 2, 2024
- Mitsubishi Electric Corporation
- Masashi Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Energy storage devices having coated passive particles
- Patent number 11,887,781
- Issue date Jan 30, 2024
- Forge Nano, Inc.
- David M. King
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Vacuum pump protection against deposition byproduct buildup
- Patent number 11,710,623
- Issue date Jul 25, 2023
- Lam Research Corporation
- John Stephen Drewery
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for etching or deposition
- Patent number 11,624,111
- Issue date Apr 11, 2023
- Entegris, Inc.
- Robert L. Wright
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method, materials and process for native oxide removal and regrowth...
- Patent number 11,598,000
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Ranga Rao Arnepalli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Formation of pores in atomically thin layers
- Patent number 11,524,898
- Issue date Dec 13, 2022
- Massachusetts Institute of Technology
- Piran Kidambi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Optical element for a motor vehicle
- Patent number 11,466,835
- Issue date Oct 11, 2022
- Valeo Vision
- Damien Revol
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Substrate processing method and substrate processing system
- Patent number 11,456,184
- Issue date Sep 27, 2022
- Tokyo Electron Limited
- Ryuichi Asako
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Surface processing method and processing system
- Patent number 11,387,112
- Issue date Jul 12, 2022
- Tokyo Electron Limited
- Koichi Takatsuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 11,373,876
- Issue date Jun 28, 2022
- Tokyo Electron Limited
- Satoshi Takagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Depositing coatings on and within a housing, apparatus, or tool usi...
- Patent number 11,371,145
- Issue date Jun 28, 2022
- Halliburton Energy Services, Inc.
- James M. Price
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fabricating method of semi-polar gallium nitride
- Patent number 11,313,038
- Issue date Apr 26, 2022
- WAFER WORKS CORPORATION
- Wen-Chung Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Energy storage devices having coated passive components
- Patent number 11,278,957
- Issue date Mar 22, 2022
- FORGE NANO, INC.
- David M. King
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Method of forming boron-based film, and film forming apparatus
- Patent number 11,145,522
- Issue date Oct 12, 2021
- Tokyo Electron Limited
- Yoshimasa Watanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Epitaxy system integrated with high selectivity oxide removal and h...
- Patent number 11,049,719
- Issue date Jun 29, 2021
- Applied Materials, Inc.
- Lara Hawrylchak
- B08 - CLEANING
Information Patent Grant
Vacuum pump protection against deposition byproduct buildup
- Patent number 11,031,215
- Issue date Jun 8, 2021
- Lam Research Corporation
- John Stephen Drewery
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for synthesizing vertically aligned carbon nan...
- Patent number 10,961,123
- Issue date Mar 30, 2021
- The Florida International University Board of Trustees
- Wenzhi Li
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for epitaxially coating semiconductor wafers, and semiconduc...
- Patent number 10,961,638
- Issue date Mar 30, 2021
- Siltronic AG
- Christian Hager
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Single-crystal diamond, method for manufacturing single-crystal dia...
- Patent number 10,737,943
- Issue date Aug 11, 2020
- Sumitomo Electric Industries, Ltd
- Takuya Nohara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing system and processing method
- Patent number 10,669,626
- Issue date Jun 2, 2020
- Kabushiki Kaisha Toshiba
- Shinya Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing a moth eye mircostructure, an antireflectiv...
- Patent number 10,634,822
- Issue date Apr 28, 2020
- WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Yong Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for controllable non-volatile metal removal
- Patent number 10,633,743
- Issue date Apr 28, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Tsung-Liang Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for substrate processing using exhaust ports
- Patent number 10,593,545
- Issue date Mar 17, 2020
- EUGENE TECHNOLOGY CO., LTD.
- Il-Kwang Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Energy storage devices having coated passive components
- Patent number 10,569,330
- Issue date Feb 25, 2020
- FORGE NANO, INC.
- David M. King
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Method of preparing for reactor restart for manufacturing epitaxial...
- Patent number 10,550,465
- Issue date Feb 4, 2020
- SK SILTRON CO., LTD.
- Dong-Ho Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lamination transfer films for forming antireflective structures
- Patent number 10,436,946
- Issue date Oct 8, 2019
- 3M Innovative Properties Company
- Michael Benton Free
- B32 - LAYERED PRODUCTS
Information Patent Grant
Apparatus and method for synthesizing vertically aligned carbon nan...
- Patent number 10,336,618
- Issue date Jul 2, 2019
- The Florida International University Board of Trustees
- Wenzhi Li
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and apparatus for forming nitride film
- Patent number 10,304,676
- Issue date May 28, 2019
- Tokyo Electron Limited
- Takahiro Miyahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wear resistant vapor deposited coating, method of coating depositio...
- Patent number 10,287,670
- Issue date May 14, 2019
- G & H TECHNOLOGIES, LLC
- Vladimir Gorokhovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of producing a silicon carbide single-crystal substrate by e...
- Patent number 10,096,470
- Issue date Oct 9, 2018
- Fuji Electric Co., Ltd.
- Yasuyuki Kawada
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240076777
- Publication date Mar 7, 2024
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF SELECTIVE ETCHING OF DIELECTRIC MATERIALS
- Publication number 20240035196
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- Yi-Chiau HUANG
- B08 - CLEANING
Information Patent Application
VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP
- Publication number 20230317437
- Publication date Oct 5, 2023
- LAM RESEARCH CORPORATION
- John Stephen Drewery
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FORMATION OF PORES IN ATOMICALLY THIN LAYERS
- Publication number 20230249974
- Publication date Aug 10, 2023
- Massachusetts Institute of Technology
- Piran Kidambi
- C01 - INORGANIC CHEMISTRY
Information Patent Application
METHODS OF EPITAXIALLY GROWING BORON-CONTAINING STRUCTURES
- Publication number 20230223257
- Publication date Jul 13, 2023
- Applied Materials, Inc.
- Xuebin LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL-ON-METAL DEPOSITION METHODS FOR FILLING A GAP FEATURE ON A SU...
- Publication number 20230163028
- Publication date May 25, 2023
- ASM IP HOLDING B.V.
- Salvatore Luiso
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ARTICLES HAVING REMOVABLE COATINGS AND RELATED METHODS
- Publication number 20230100791
- Publication date Mar 30, 2023
- Entegris, Inc.
- Carlo Waldfried
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230058808
- Publication date Feb 23, 2023
- Kokusai Electric Corporation
- Motomu DEGAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SHALLOW TRENCH ISOLATION STRUCTURE, SHALLO...
- Publication number 20230052736
- Publication date Feb 16, 2023
- CHANGXIN MEMORY TECHNOLOGIES, INC
- MENG-CHENG CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING TITANIUM NITRIDE FILM AND APPARATUS FOR FORMING...
- Publication number 20230030762
- Publication date Feb 2, 2023
- TOKYO ELECTRON LIMITED
- Kensuke HIGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR LOW TEMPERATURE SELECTIVE EPITAXY IN A DEE...
- Publication number 20230036426
- Publication date Feb 2, 2023
- Applied Materials, Inc.
- Abhishek DUBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20220415650
- Publication date Dec 29, 2022
- ASM IP HOLDING B.V.
- JaeOk Ko
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Energy Storage Devices Having Coated Passive Particles
- Publication number 20220402027
- Publication date Dec 22, 2022
- Forge Nano, Inc.
- David M. KING
- B22 - CASTING POWDER METALLURGY
Information Patent Application
INTEGRATED EPITAXY AND PRECLEAN SYSTEM
- Publication number 20220375751
- Publication date Nov 24, 2022
- Applied Materials, Inc.
- Yi-Chiau HUANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electrode and method for production
- Publication number 20220341035
- Publication date Oct 27, 2022
- CONDIAS GMBH
- Dirk Mathiak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR PREPARING COMPOSITE CRYSTALS
- Publication number 20220316093
- Publication date Oct 6, 2022
- MEISHAN BOYA ADVANCED MATERIALS CO., LTD.
- Yu WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SURFACE PROCESSING METHOD AND PROCESSING SYSTEM
- Publication number 20220301882
- Publication date Sep 22, 2022
- TOKYO ELECTRON LIMITED
- Koichi TAKATSUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Depositing Coatings On and Within A Housing, Apparatus, or Tool Usi...
- Publication number 20220282375
- Publication date Sep 8, 2022
- Halliburton Energy Services, Inc.
- James M. PRICE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR RECORDING A STATE OF A CVD REACTOR UNDER PRODUCTION COND...
- Publication number 20220186375
- Publication date Jun 16, 2022
- AIXTRON SE
- Pascal TILLMANNS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FABRICATING METHOD OF SEMI-POLAR GALLIUM NITRIDE
- Publication number 20220056580
- Publication date Feb 24, 2022
- WAFER WORKS CORPORATION
- Wen-Chung Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICIDE FILM NUCLEATION
- Publication number 20220033970
- Publication date Feb 3, 2022
- Applied Materials, Inc.
- Xuebi LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SILICON CARBIDE EPITAXIAL WAFER
- Publication number 20220028688
- Publication date Jan 27, 2022
- Mitsubishi Electric Corporation
- Masashi SAKAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR TRANSISTOR PATHOGEN DETECTOR
- Publication number 20210349091
- Publication date Nov 11, 2021
- Adam Khan
- B82 - NANO-TECHNOLOGY
Information Patent Application
VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP
- Publication number 20210257195
- Publication date Aug 19, 2021
- LAM RESEARCH CORPORATION
- John Stephen DREWERY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR ETCHING ONE SIDE OF A SEMICONDUCTOR LAYER...
- Publication number 20210246546
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- NexWafe GmbH
- Stefan REBER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ETCHING OR DEPOSITION
- Publication number 20210222292
- Publication date Jul 22, 2021
- Entegris, Inc.
- Robert L. WRIGHT
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SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20210125837
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- TOKYO ELECTRON LIMITED
- Ryuichi ASAKO
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ENERGY STORAGE DEVICES HAVING COATED PASSIVE COMPONENTS
- Publication number 20210023616
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- Forge Nano, Inc.
- David M. KING
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Information Patent Application
Depositing Coatings On and Within A Housing, Apparatus, or Tool Usi...
- Publication number 20200291519
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- Halliburton Energy Services, Inc.
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SURFACE PROCESSING METHOD AND PROCESSING SYSTEM
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- Koichi TAKATSUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

by etching with a reactive gas

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of manufacturing silicon carbide epitaxial wafer

Energy storage devices having coated passive particles

Vacuum pump protection against deposition byproduct buildup

Method for etching or deposition

Method, materials and process for native oxide removal and regrowth...

Formation of pores in atomically thin layers

Optical element for a motor vehicle

Substrate processing method and substrate processing system

Surface processing method and processing system

Film forming method and film forming apparatus

Depositing coatings on and within a housing, apparatus, or tool usi...

Fabricating method of semi-polar gallium nitride

Energy storage devices having coated passive components

Method of forming boron-based film, and film forming apparatus

Epitaxy system integrated with high selectivity oxide removal and h...

Vacuum pump protection against deposition byproduct buildup

Apparatus and method for synthesizing vertically aligned carbon nan...

Method for epitaxially coating semiconductor wafers, and semiconduc...

Single-crystal diamond, method for manufacturing single-crystal dia...

Processing system and processing method

Method of manufacturing a moth eye mircostructure, an antireflectiv...

System and method for controllable non-volatile metal removal

Method for substrate processing using exhaust ports

Energy storage devices having coated passive components

Method of preparing for reactor restart for manufacturing epitaxial...

Lamination transfer films for forming antireflective structures

Apparatus and method for synthesizing vertically aligned carbon nan...

Method and apparatus for forming nitride film

Wear resistant vapor deposited coating, method of coating depositio...

Method of producing a silicon carbide single-crystal substrate by e...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

METHOD OF SELECTIVE ETCHING OF DIELECTRIC MATERIALS

VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP

FORMATION OF PORES IN ATOMICALLY THIN LAYERS

METHODS OF EPITAXIALLY GROWING BORON-CONTAINING STRUCTURES

METAL-ON-METAL DEPOSITION METHODS FOR FILLING A GAP FEATURE ON A SU...

ARTICLES HAVING REMOVABLE COATINGS AND RELATED METHODS

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD FOR MANUFACTURING SHALLOW TRENCH ISOLATION STRUCTURE, SHALLO...

METHOD FOR FORMING TITANIUM NITRIDE FILM AND APPARATUS FOR FORMING...

METHOD AND APPARATUS FOR LOW TEMPERATURE SELECTIVE EPITAXY IN A DEE...

SUBSTRATE PROCESSING METHOD

Energy Storage Devices Having Coated Passive Particles

INTEGRATED EPITAXY AND PRECLEAN SYSTEM

Electrode and method for production

METHODS AND SYSTEMS FOR PREPARING COMPOSITE CRYSTALS

SURFACE PROCESSING METHOD AND PROCESSING SYSTEM

Depositing Coatings On and Within A Housing, Apparatus, or Tool Usi...

METHOD FOR RECORDING A STATE OF A CVD REACTOR UNDER PRODUCTION COND...

FABRICATING METHOD OF SEMI-POLAR GALLIUM NITRIDE

SILICIDE FILM NUCLEATION

METHOD OF MANUFACTURING SILICON CARBIDE EPITAXIAL WAFER

SYSTEM AND METHOD FOR TRANSISTOR PATHOGEN DETECTOR

VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP

APPARATUS AND METHOD FOR ETCHING ONE SIDE OF A SEMICONDUCTOR LAYER...

METHOD FOR ETCHING OR DEPOSITION

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM

ENERGY STORAGE DEVICES HAVING COATED PASSIVE COMPONENTS

Depositing Coatings On and Within A Housing, Apparatus, or Tool Usi...

SURFACE PROCESSING METHOD AND PROCESSING SYSTEM