by ion beam produced by an external ion source

Industry

CPC
C23C14/46

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/46by ion beam produced by an external ion source

Industries

Patents Grantslast 30 patents

Information Patent Grant
Wafer scanning apparatus and method for focused beam processing
- Patent number 11,915,906
- Issue date Feb 27, 2024
- TEL MANUFACTURING AND ENGINEERING OF AMERICA, INC.
- Matthew Gwinn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam deposition target life enhancement
- Patent number 11,901,167
- Issue date Feb 13, 2024
- Plasma-Therm NES LLC
- Sarpangala Hariharakeshava Hegde
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of making thin films
- Patent number 11,885,009
- Issue date Jan 30, 2024
- UChicago Argonne, LLC
- Tomas Polakovic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Oxide superconducting wire
- Patent number 11,756,708
- Issue date Sep 12, 2023
- Fujikura Ltd.
- Masaki Ohsugi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,694,882
- Issue date Jul 4, 2023
- Canon Anelva Corporation
- Yuji Takanami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern enhancement using a gas cluster ion beam
- Patent number 11,694,872
- Issue date Jul 4, 2023
- TEL MANUFACTURING AND ENGINEERING OF AMERICA, INC.
- Kazuya Dobashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Oxide superconducting wire
- Patent number 11,621,105
- Issue date Apr 4, 2023
- Fujikura Ltd.
- Masaki Ohsugi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacture of particulate reference materials
- Patent number 11,594,340
- Issue date Feb 28, 2023
- Battelle Savannah River Alliance, LLC
- Matthew S. Wellons
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Wafer scanning apparatus and method for focused beam processing
- Patent number 11,587,760
- Issue date Feb 21, 2023
- TEL Manufacturing and Engineering of America, Inc.
- Matthew Gwinn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal plating of grids for ion beam sputtering
- Patent number 11,581,164
- Issue date Feb 14, 2023
- Excelitas Technologies Corp.
- Eric Baltz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Protective metal oxy-fluoride coatings
- Patent number 11,572,617
- Issue date Feb 7, 2023
- Applied Materials, Inc.
- David Fenwick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Techniques and apparatus for selective shaping of mask features usi...
- Patent number 11,569,095
- Issue date Jan 31, 2023
- Applied Materials, Inc.
- John Hautala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam sputtering with ion assisted deposition for coatings on ch...
- Patent number 11,566,318
- Issue date Jan 31, 2023
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam sputtering with ion assisted deposition for coatings on ch...
- Patent number 11,566,319
- Issue date Jan 31, 2023
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam sputtering with ion assisted deposition for coatings on ch...
- Patent number 11,566,317
- Issue date Jan 31, 2023
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for depositing a substrate and deposition system having t...
- Patent number 11,535,929
- Issue date Dec 27, 2022
- Samsung Electronics Co., Ltd.
- Jeong-Heon Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern enhancement using a gas cluster ion beam
- Patent number 11,450,506
- Issue date Sep 20, 2022
- TEL MANUFACTURING AND ENGINEERING OF AMERICA, INC.
- Kazuya Dobashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,270,873
- Issue date Mar 8, 2022
- Canon Anelva Corporation
- Yuji Takanami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam etching chamber with etching by-product redistributor
- Patent number 11,239,060
- Issue date Feb 1, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Te-Hsien Hsieh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for fabrication of crystals using laser-accelerat...
- Patent number 11,236,437
- Issue date Feb 1, 2022
- INSTITUT NATIONAL DE LA RECHERCHE SCIENTIFIQUE
- Patrizio Antici
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing reflective mask blank, and method for manu...
- Patent number 11,131,921
- Issue date Sep 28, 2021
- Hoya Corporation
- Tsutomu Shoki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Optical element with high scratch resistance
- Patent number 11,079,514
- Issue date Aug 3, 2021
- Schott AG
- Dirk Apitz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Techniques for selective deposition using angled ions
- Patent number 11,053,580
- Issue date Jul 6, 2021
- Varian Semiconductor Equipment Associates, Inc.
- Kevin Anglin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Techniques and apparatus for selective shaping of mask features usi...
- Patent number 11,043,394
- Issue date Jun 22, 2021
- Applied Materials, Inc.
- John Hautala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Composite material device
- Patent number 10,974,971
- Issue date Apr 13, 2021
- Nanjing University
- Jia Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Planetary gear assembly for sputtering multiple balloon catheter di...
- Patent number 10,758,716
- Issue date Sep 1, 2020
- BIOSENSE WEBSTER (ISRAEL) LTD.
- Assaf Govari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam sample preparation and coating apparatus and methods
- Patent number 10,731,246
- Issue date Aug 4, 2020
- Gatan, Inc.
- John Andrew Hunt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sliding member and method for producing the same
- Patent number 10,669,624
- Issue date Jun 2, 2020
- Toyota Jidosha Kabushiki Kaisha
- Kazuyoshi Manabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Alkali resistant optical coatings for alkali lasers and methods of...
- Patent number 10,570,502
- Issue date Feb 25, 2020
- Lawrence Livermore National Security
- Thomas F. Soules
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion assisted deposition top coat of rare-earth oxide
- Patent number 10,563,297
- Issue date Feb 18, 2020
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
HALOGEN-RESISTANT THERMAL BARRIER COATING FOR PROCESSING CHAMBERS
- Publication number 20240117490
- Publication date Apr 11, 2024
- Applied Materials, Inc.
- Amir H. TAVAKOLI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REFLECTIVE MASK BLANK, REFLECTIVE MASK, REFLECTIVE MASK MANUFACTURI...
- Publication number 20240069428
- Publication date Feb 29, 2024
- HOYA CORPORATION
- Yohei IKEBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REFLECTION TYPE MASK BLANK AND PRODUCTION METHOD THEREFOR, AND REFL...
- Publication number 20240053671
- Publication date Feb 15, 2024
- AGC Inc.
- Ryusuke OISHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TANTALA-RING-RESONATOR-BASED PHOTONIC DEVICE AND FREQUENCY-COMB GEN...
- Publication number 20240004262
- Publication date Jan 4, 2024
- The Regents of the University of Colorado, a body corporate
- Su-Peng Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION BEAM ETCHING CHAMBER WITH ETCHING BY-PRODUCT REDISTRIBUTOR
- Publication number 20230369024
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Te-Hsien Hsieh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Wafer Scanning Apparatus and Method for Focused Beam Processing
- Publication number 20230187168
- Publication date Jun 15, 2023
- TEL Manufacturing and Engineering of America, Inc.
- Matthew Gwinn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CH...
- Publication number 20230167540
- Publication date Jun 1, 2023
- Applied Materials, Inc.
- Jennifer Y. Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROTECTIVE METAL OXY-FLUORIDE COATINGS
- Publication number 20230141782
- Publication date May 11, 2023
- Applied Materials, Inc.
- David Fenwick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURE OF PARTICULATE REFERENCE MATERIALS
- Publication number 20230110739
- Publication date Apr 13, 2023
- BATTELLE SAVANNAH RIVER ALLIANCE, LLC
- MATTHEW S. WELLONS
- B22 - CASTING POWDER METALLURGY
Information Patent Application
SYSTEM AND METHOD FOR ION-ASSISTED DEPOSITION OF OPTICAL COATINGS
- Publication number 20220316045
- Publication date Oct 6, 2022
- Guorong Vera Zhuang
- G02 - OPTICS
Information Patent Application
Pattern Enhancement Using a Gas Cluster Ion Beam
- Publication number 20220277924
- Publication date Sep 1, 2022
- TEL Manufacturing and Engineering of America, Inc.
- Kazuya Dobashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OXIDE SUPERCONDUCTING WIRE
- Publication number 20220148763
- Publication date May 12, 2022
- FUJIKURA LTD.
- Masaki Ohsugi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION BEAM ETCHING CHAMBER WITH ETCHING BY-PRODUCT REDISTRIBUTOR
- Publication number 20220148856
- Publication date May 12, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Te-Hsien Hsieh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OXIDE SUPERCONDUCTING WIRE
- Publication number 20220148762
- Publication date May 12, 2022
- FUJIKURA LTD.
- Masaki Ohsugi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220139686
- Publication date May 5, 2022
- Canon ANELVA Corporation
- Yuji TAKANAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SINGLE BEAM PLASMA SOURCE
- Publication number 20220013324
- Publication date Jan 13, 2022
- Board of Trustees of Michigan State University
- Qi Hua FAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Manufacture of Particulate Reference Materials
- Publication number 20210358646
- Publication date Nov 18, 2021
- Savannah River Nuclear Solutions, LLC
- Matthew S. Wellons
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
Wafer Scanning Apparatus and Method for Focused Beam Processing
- Publication number 20210335642
- Publication date Oct 28, 2021
- TEL Manufacturing and Engineering of America, Inc.
- Matthew Gwinn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
3D IDENTIFICATION FILTER
- Publication number 20210255377
- Publication date Aug 19, 2021
- Zhe LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE WITH WATER-AND-OIL REPELLENT LAYER, VAPOR DEPOSITION MATE...
- Publication number 20210230735
- Publication date Jul 29, 2021
- AGC Inc.
- Maemi IWAHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR FORMING A PLASMA RESISTANT COATING, COMPON...
- Publication number 20210172049
- Publication date Jun 10, 2021
- Advanced Micro-Fabrication Equipment Inc. China
- Jiao DUAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR DEPOSITING A SUBSTRATE AND DEPOSITION SYSTEM HAVING T...
- Publication number 20210102285
- Publication date Apr 8, 2021
- Samsung Electronics Co., Ltd.
- Jeong-Heon PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM SPUTTERING APPARATUS AND METHOD
- Publication number 20210104380
- Publication date Apr 8, 2021
- Institute Of Geological And Nuclear Sciences Limited
- Richard John Futter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLANETARY GEAR ASSEMBLY FOR SPUTTERING MULTIPLE BALLOON CATHETER DI...
- Publication number 20200391015
- Publication date Dec 17, 2020
- BIOSENSE WEBSTER (ISRAEL) LTD.
- Assaf Govari
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND TECHNIQUES FOR MODIFYING ELECTRONIC PROPERTIES OF MATTER
- Publication number 20200392003
- Publication date Dec 17, 2020
- CONTINUUM ENERGY TECHNOLOGIES, LLC
- Christopher J. Nagel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200343080
- Publication date Oct 29, 2020
- Canon ANELVA Corporation
- Yuji TAKANAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MAKING THIN FILMS
- Publication number 20200255936
- Publication date Aug 13, 2020
- UChicago Argonne, LLC
- Tomas Polakovic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIRECTED PLASMA NANOSYNTHESIS (DPNS) METHODS, USES AND SYSTEMS
- Publication number 20200197566
- Publication date Jun 25, 2020
- THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
- Jean Paul ALLAIN
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
Metal Plating of Grids for Ion Beam Sputtering
- Publication number 20200051783
- Publication date Feb 13, 2020
- Research Electro-Optics Inc.
- Eric Baltz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OXIDE SUPERCONDUCTING WIRE
- Publication number 20190172612
- Publication date Jun 6, 2019
- FUJIKURA LTD.
- Masaki Ohsugi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

by ion beam produced by an external ion source

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Wafer scanning apparatus and method for focused beam processing

Ion beam deposition target life enhancement

Method of making thin films

Oxide superconducting wire

Substrate processing apparatus and substrate processing method

Pattern enhancement using a gas cluster ion beam

Oxide superconducting wire

Manufacture of particulate reference materials

Wafer scanning apparatus and method for focused beam processing

Metal plating of grids for ion beam sputtering

Protective metal oxy-fluoride coatings

Techniques and apparatus for selective shaping of mask features usi...

Ion beam sputtering with ion assisted deposition for coatings on ch...

Ion beam sputtering with ion assisted deposition for coatings on ch...

Ion beam sputtering with ion assisted deposition for coatings on ch...

Apparatus for depositing a substrate and deposition system having t...

Pattern enhancement using a gas cluster ion beam

Substrate processing apparatus and substrate processing method

Ion beam etching chamber with etching by-product redistributor

Method and system for fabrication of crystals using laser-accelerat...

Method for manufacturing reflective mask blank, and method for manu...

Optical element with high scratch resistance

Techniques for selective deposition using angled ions

Techniques and apparatus for selective shaping of mask features usi...

Composite material device

Planetary gear assembly for sputtering multiple balloon catheter di...

Ion beam sample preparation and coating apparatus and methods

Sliding member and method for producing the same

Alkali resistant optical coatings for alkali lasers and methods of...

Ion assisted deposition top coat of rare-earth oxide

Patents Applicationslast 30 patents

HALOGEN-RESISTANT THERMAL BARRIER COATING FOR PROCESSING CHAMBERS

REFLECTIVE MASK BLANK, REFLECTIVE MASK, REFLECTIVE MASK MANUFACTURI...

REFLECTION TYPE MASK BLANK AND PRODUCTION METHOD THEREFOR, AND REFL...

TANTALA-RING-RESONATOR-BASED PHOTONIC DEVICE AND FREQUENCY-COMB GEN...

ION BEAM ETCHING CHAMBER WITH ETCHING BY-PRODUCT REDISTRIBUTOR

Wafer Scanning Apparatus and Method for Focused Beam Processing

ION BEAM SPUTTERING WITH ION ASSISTED DEPOSITION FOR COATINGS ON CH...

PROTECTIVE METAL OXY-FLUORIDE COATINGS

MANUFACTURE OF PARTICULATE REFERENCE MATERIALS

SYSTEM AND METHOD FOR ION-ASSISTED DEPOSITION OF OPTICAL COATINGS

Pattern Enhancement Using a Gas Cluster Ion Beam

OXIDE SUPERCONDUCTING WIRE

ION BEAM ETCHING CHAMBER WITH ETCHING BY-PRODUCT REDISTRIBUTOR

OXIDE SUPERCONDUCTING WIRE

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SINGLE BEAM PLASMA SOURCE

Manufacture of Particulate Reference Materials

Wafer Scanning Apparatus and Method for Focused Beam Processing

3D IDENTIFICATION FILTER

SUBSTRATE WITH WATER-AND-OIL REPELLENT LAYER, VAPOR DEPOSITION MATE...

METHOD AND APPARATUS FOR FORMING A PLASMA RESISTANT COATING, COMPON...

APPARATUS FOR DEPOSITING A SUBSTRATE AND DEPOSITION SYSTEM HAVING T...

ION BEAM SPUTTERING APPARATUS AND METHOD

PLANETARY GEAR ASSEMBLY FOR SPUTTERING MULTIPLE BALLOON CATHETER DI...

SYSTEMS AND TECHNIQUES FOR MODIFYING ELECTRONIC PROPERTIES OF MATTER

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

METHOD OF MAKING THIN FILMS

DIRECTED PLASMA NANOSYNTHESIS (DPNS) METHODS, USES AND SYSTEMS

Metal Plating of Grids for Ion Beam Sputtering

OXIDE SUPERCONDUCTING WIRE