by ion implantation

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CPC
B81C2201/0166

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

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B81C2201/0166by ion implantation

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Patents Grantslast 30 patents

Information Patent Grant
Modification to rough polysilicon using ion implantation and silicide
- Patent number 11,952,267
- Issue date Apr 9, 2024
- Invensense, Inc.
- Alan Cuthbertson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Modification to rough polysilicon using ion implantation and silicide
- Patent number 11,267,699
- Issue date Mar 8, 2022
- Invensense, Inc.
- Alan Cuthbertson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for frequency trimming a microelectromechanical resonator
- Patent number 10,947,111
- Issue date Mar 16, 2021
- Georgia Tech Research Corporation
- Benoit Hamelin
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Micromechanical structure and method for manufacturing the same
- Patent number 10,710,874
- Issue date Jul 14, 2020
- Infineon Technologies AG
- Tobias Frischmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Ion beam modification of residual stress gradients in thin film pol...
- Patent number 6,929,721
- Issue date Aug 16, 2005
- The Trustees of Boston University
- Thomas G. Bifano
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Accelerometers using silicon on insulator technology
- Patent number 5,780,885
- Issue date Jul 14, 1998
- Commissariat a l'Energie Atomique
- Bernard Diem
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for the production of accelerometers using silicon on insul...
- Patent number 5,576,250
- Issue date Nov 19, 1996
- Commissariat a l'Energie Atomique
- Bernard Diem
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20230382714
- Publication date Nov 30, 2023
- DB HITEK CO., LTD.
- Min Hyun JUNG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PHOTOCURRENT NOISE SUPPRESSION FOR MIRROR ASSEMBLY
- Publication number 20220324698
- Publication date Oct 13, 2022
- Sergio Fabien Almeida Loya
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MODIFICATION TO ROUGH POLYSILICON USING ION IMPLANTATION AND SILICIDE
- Publication number 20220144628
- Publication date May 12, 2022
- InvenSense, Inc.
- Alan Cuthbertson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MODIFICATION TO ROUGH POLYSILICON USING ION IMPLANTATION AND SILICIDE
- Publication number 20200270123
- Publication date Aug 27, 2020
- InvenSense, Inc.
- Alan Cuthbertson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL STRUCTURE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20180002167
- Publication date Jan 4, 2018
- INFINEON TECHNOLOGIES AG
- Tobias Frischmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Ion beam modification of residual stress gradients in thin film pol...
- Publication number 20020155635
- Publication date Oct 24, 2002
- THE TRUSTEES OF BOSTON UNIVERSITY
- Thomas G. Bifano
- B81 - MICRO-STRUCTURAL TECHNOLOGY

by ion implantation

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Modification to rough polysilicon using ion implantation and silicide

Modification to rough polysilicon using ion implantation and silicide

Method for frequency trimming a microelectromechanical resonator

Micromechanical structure and method for manufacturing the same

Ion beam modification of residual stress gradients in thin film pol...

Accelerometers using silicon on insulator technology

Process for the production of accelerometers using silicon on insul...

Patents Applicationslast 30 patents

MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME

PHOTOCURRENT NOISE SUPPRESSION FOR MIRROR ASSEMBLY

MODIFICATION TO ROUGH POLYSILICON USING ION IMPLANTATION AND SILICIDE

MODIFICATION TO ROUGH POLYSILICON USING ION IMPLANTATION AND SILICIDE

MICROMECHANICAL STRUCTURE AND METHOD FOR MANUFACTURING THE SAME

Ion beam modification of residual stress gradients in thin film pol...