by lasers

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CPC
G03F7/70025

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Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

Current Industry

G03F7/70025by lasers

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Exposure device and method
- Patent number 12,366,807
- Issue date Jul 22, 2025
- Chun-Jung Chiu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for correcting photomask and method thereof
- Patent number 12,366,799
- Issue date Jul 22, 2025
- Semes Co., Ltd.
- Hyo Won Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Maintenance of modules for light sources used in semiconductor phot...
- Patent number 12,360,466
- Issue date Jul 15, 2025
- Cymer, LLC
- Russell Allen Burdt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Gas laser apparatus and electronic device manufacturing method
- Patent number 12,355,204
- Issue date Jul 8, 2025
- Gigaphoton Inc.
- Keisuke Ishida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber device, gas laser device, and electronic device manufacturi...
- Patent number 12,347,995
- Issue date Jul 1, 2025
- Gigaphoton Inc.
- Junichi Fujimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for regulating and controlling incident angle of...
- Patent number 12,346,030
- Issue date Jul 1, 2025
- Tsinghua University
- Leijie Wang
- G01 - MEASURING TESTING
Information Patent Grant
Systems for cell control
- Patent number 12,344,855
- Issue date Jul 1, 2025
- CELLINO BIOTECH, INC.
- Stan Wang
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
Conduit system, radiation source, lithographic apparatus, and metho...
- Patent number 12,341,314
- Issue date Jun 24, 2025
- Cymer, LLC
- Edward Siqi Luo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas laser apparatus, laser beam emitting method of gas laser appara...
- Patent number 12,341,313
- Issue date Jun 24, 2025
- Gigaphoton Inc.
- Daisuke Tei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metrology for improving DUV laser alignment
- Patent number 12,332,569
- Issue date Jun 17, 2025
- Cymer, LLC
- Zhong Quan Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber device, and electronic device manufacturing method
- Patent number 12,327,975
- Issue date Jun 10, 2025
- Gigaphoton Inc.
- Junichi Fujimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for and methods of combining multiple laser beams
- Patent number 12,298,670
- Issue date May 13, 2025
- Cymer, LLC
- Rabin Paudel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser device and electronic device manufacturing method
- Patent number 12,300,962
- Issue date May 13, 2025
- Gigaphoton Inc.
- Takahito Kumazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for controlling extreme ultraviolet light
- Patent number 12,282,262
- Issue date Apr 22, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ssu-Yu Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Gas purge systems for a laser source
- Patent number 12,253,806
- Issue date Mar 18, 2025
- Cymer, LLC
- Gamaralalage G Padmabandu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for removing particles from pellicle and photomask
- Patent number 12,242,182
- Issue date Mar 4, 2025
- Taiwan Semiconductor Manufacturing Company Ltd.
- Tzu Han Liu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for performing lithography process, light source, and EUV li...
- Patent number 12,235,594
- Issue date Feb 25, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chi Yang
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Line narrowing module, gas laser apparatus, and method for manufact...
- Patent number 12,224,549
- Issue date Feb 11, 2025
- Gigaphoton Inc.
- Junichi Maekawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Target supply system, extreme ultraviolet light generation apparatu...
- Patent number 12,207,382
- Issue date Jan 21, 2025
- Gigaphoton Inc.
- Nozomu Oue
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Exposure system and method for manufacturing electronic devices
- Patent number 12,197,132
- Issue date Jan 14, 2025
- Gigaphoton Inc.
- Koichi Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light source generation apparatus, light source generating method,...
- Patent number 12,191,621
- Issue date Jan 7, 2025
- National Tsing Hua University
- Andrew Hing Cheong Kung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning interference lithographic system
- Patent number 12,189,300
- Issue date Jan 7, 2025
- Tsinghua University; Beijing U-Precision Tech Co., Ltd.
- Leijie Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Series of stacked confocal pulse stretchers for speckle reduction
- Patent number 12,166,327
- Issue date Dec 10, 2024
- Cymer, LLC
- Eric Anders Mason
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
High voltage pulse generation device, gas laser apparatus, and elec...
- Patent number 12,166,329
- Issue date Dec 10, 2024
- National University Corporation Nagaoka University of Technology
- Weihua Jiang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Line narrowing gas laser device and electronic device manufacturing...
- Patent number 12,155,168
- Issue date Nov 26, 2024
- Gigaphoton Inc.
- Yusuke Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-component kernels for vector optical image simulation
- Patent number 12,153,349
- Issue date Nov 26, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kenneth Lik Kin Ho
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mitigating long-term energy decay of laser devices
- Patent number 12,147,166
- Issue date Nov 19, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Ping Yen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radiation system for controlling bursts of pulses of radiation
- Patent number 12,130,558
- Issue date Oct 29, 2024
- Cymer, LLC
- Yingbo Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Line narrowing device, electronic device manufacturing method
- Patent number 12,111,577
- Issue date Oct 8, 2024
- Gigaphoton Inc.
- Takahito Kumazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure method, exposure system, and method for manufacturing elec...
- Patent number 12,105,425
- Issue date Oct 1, 2024
- Gigaphoton Inc.
- Koichi Fujii
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR AND METHODS OF COMBINING MULTIPLE LASER BEAMS
- Publication number 20250237961
- Publication date Jul 24, 2025
- CYMER, LLC
- Rabin Paudel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS, COMPUTER PROGRAMS AND APPARATUSES FOR TREATING AN OPTICAL...
- Publication number 20250237960
- Publication date Jul 24, 2025
- Carl Zeiss SMS Ltd.
- Sergey Oshemkov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR LASER LITHOGRAPHIC FABRICATION OF SURFACE...
- Publication number 20250237964
- Publication date Jul 24, 2025
- David John McGee
- G02 - OPTICS
Information Patent Application
LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20250233382
- Publication date Jul 17, 2025
- Gigaphoton Inc.
- Takamitsu KOMAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTORESIST COMPOSITIONS AND METHODS OF MANUFACTURING INTEGRATED CI...
- Publication number 20250231481
- Publication date Jul 17, 2025
- Samsung Electronics Co., Ltd.
- Yonghoon Moon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PASSIVE DUST TRAP, ILLUMINATION SYSTEM, AND LITHOGRAPHY SYSTEM
- Publication number 20250216803
- Publication date Jul 3, 2025
- CYMER, LLC
- Sean Marcus Buczek
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV LIGHT SOURCE, EUV LITHOGRAPHY APPARATUS, AND METHOD FOR GENERAT...
- Publication number 20250208513
- Publication date Jun 26, 2025
- Samsung Electronics Co., Ltd.
- Kyungwan YOO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PAINTING METHOD
- Publication number 20250208515
- Publication date Jun 26, 2025
- ASUSTEK COMPUTER INC.
- Guo-Lin YANG
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20250208516
- Publication date Jun 26, 2025
- Gigaphoton Inc.
- Yousuke FUJIMAKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
WAVELENGTH CONVERSION SYSTEM, SOLID-STATE LASER SYSTEM, AND ELECTRO...
- Publication number 20250208480
- Publication date Jun 26, 2025
- Gigaphoton Inc.
- Takayuki OSANAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING PATTERNS AND METHOD OF MANUFACTURING INTEGRATED C...
- Publication number 20250201577
- Publication date Jun 19, 2025
- Samsung Electronics Co., Ltd.
- Jiyeon YI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER PROCESSING SYSTEM AND LASER PROCESSING METHOD
- Publication number 20250199416
- Publication date Jun 19, 2025
- Gigaphoton Inc.
- Akira SUWA
- G02 - OPTICS
Information Patent Application
GAS PURGE SYSTEMS FOR A LASER SOURCE
- Publication number 20250189905
- Publication date Jun 12, 2025
- CYMER, LLC
- Gamaralalage G Padmabandu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20250183611
- Publication date Jun 5, 2025
- Gigaphoton Inc.
- Keita KOUZAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20250180933
- Publication date Jun 5, 2025
- Gigaphoton Inc.
- Seiji NOGIWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER SYSTEM AND METHOD FOR PROVIDING A PULSED LASER BEAM INTENDED...
- Publication number 20250174956
- Publication date May 29, 2025
- TRUMPF LASER GMBH
- Jonathan Brons
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLYMER, CHEMICALLY AMPLIFIED RESIST COMPOSITION, AND PATTERN FORMI...
- Publication number 20250172875
- Publication date May 29, 2025
- Shin-Etsu Chemical Co., Ltd.
- Masahiro Fukushima
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
RESIST COMPOSITION AND PATTERN FORMING PROCESS
- Publication number 20250164878
- Publication date May 22, 2025
- Shin-Etsu Chemical Co., Ltd.
- Jun Hatakeyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITIVE RESIST COMPOSITION AND PATTERN FORMING PROCESS
- Publication number 20250164882
- Publication date May 22, 2025
- Shin-Etsu Chemical Co., Ltd.
- Jun Hatakeyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RESIST COMPOSITION AND PATTERN FORMING PROCESS
- Publication number 20250155800
- Publication date May 15, 2025
- Shin-Etsu Chemical Co., Ltd.
- Jun Hatakeyama
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
PROFILE DISPLAY DEVICE, LASER DEVICE, AND ELECTRONIC DEVICE MANUFAC...
- Publication number 20250155819
- Publication date May 15, 2025
- Gigaphoton Inc.
- Yutaka IGARASHI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
RESIST COMPOSITION AND PATTERN FORMING PROCESS
- Publication number 20250155801
- Publication date May 15, 2025
- Shin-Etsu Chemical Co., Ltd.
- Jun Hatakeyama
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
APPARATUS FOR AND METHOD OF CONDITIONING LASER ELECTRODES
- Publication number 20250155821
- Publication date May 15, 2025
- CYMER, LLC
- Yuda Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PHOTORESIST COMPOSITIONS AND METHODS OF FORMING PATTE...
- Publication number 20250155799
- Publication date May 15, 2025
- Samsung SDI Co., Ltd.
- Soobin LIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTORESIST COMPOSITION AND METHOD OF MANUFACTURING INTEGRATED CIRC...
- Publication number 20250149336
- Publication date May 8, 2025
- Samsung Electronics Co., Ltd.
- Yonghoon MOON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20250141172
- Publication date May 1, 2025
- Gigaphoton Inc.
- Yoichi SASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRIC COMPONENT BOX AND EXTREME ULTRAVIOLET LIGHT GENERATION APP...
- Publication number 20250138438
- Publication date May 1, 2025
- Gigaphoton Inc.
- Ken YAMADA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF FORMING PATTERNS, SEMICONDUCTOR MEMORY DEVICE, AND METHOD...
- Publication number 20250140558
- Publication date May 1, 2025
- Samsung Electronics Co., Ltd.
- Yeongsup SOHN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VARIABLE-APPEARANCE LASER MARKING OVER PRINTED LAYERS
- Publication number 20250130502
- Publication date Apr 24, 2025
- THALES DIS FRANCE SAS
- Nina LARINA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ONIUM SALT TYPE MONOMER, POLYMER, CHEMICALLY AMPLIFIED RESIST COMPO...
- Publication number 20250123566
- Publication date Apr 17, 2025
- Shin-Etsu Chemical Co., Ltd.
- Masahiro Fukushima
- C07 - ORGANIC CHEMISTRY

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Exposure device and method

Apparatus for correcting photomask and method thereof

Maintenance of modules for light sources used in semiconductor phot...

Gas laser apparatus and electronic device manufacturing method

Chamber device, gas laser device, and electronic device manufacturi...

Device and method for regulating and controlling incident angle of...

Systems for cell control

Conduit system, radiation source, lithographic apparatus, and metho...

Gas laser apparatus, laser beam emitting method of gas laser appara...

Metrology for improving DUV laser alignment

Chamber device, and electronic device manufacturing method

Apparatus for and methods of combining multiple laser beams

Laser device and electronic device manufacturing method

Method for controlling extreme ultraviolet light

Gas purge systems for a laser source

Method for removing particles from pellicle and photomask

Method for performing lithography process, light source, and EUV li...

Line narrowing module, gas laser apparatus, and method for manufact...

Target supply system, extreme ultraviolet light generation apparatu...

Exposure system and method for manufacturing electronic devices

Light source generation apparatus, light source generating method,...

Scanning interference lithographic system

Series of stacked confocal pulse stretchers for speckle reduction

High voltage pulse generation device, gas laser apparatus, and elec...

Line narrowing gas laser device and electronic device manufacturing...

Multi-component kernels for vector optical image simulation

Mitigating long-term energy decay of laser devices

Radiation system for controlling bursts of pulses of radiation

Line narrowing device, electronic device manufacturing method

Exposure method, exposure system, and method for manufacturing elec...

Patents Applicationslast 30 patents

APPARATUS FOR AND METHODS OF COMBINING MULTIPLE LASER BEAMS

METHODS, COMPUTER PROGRAMS AND APPARATUSES FOR TREATING AN OPTICAL...

METHOD AND APPARATUS FOR LASER LITHOGRAPHIC FABRICATION OF SURFACE...

LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

PHOTORESIST COMPOSITIONS AND METHODS OF MANUFACTURING INTEGRATED CI...

PASSIVE DUST TRAP, ILLUMINATION SYSTEM, AND LITHOGRAPHY SYSTEM

EUV LIGHT SOURCE, EUV LITHOGRAPHY APPARATUS, AND METHOD FOR GENERAT...

PAINTING METHOD

LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

WAVELENGTH CONVERSION SYSTEM, SOLID-STATE LASER SYSTEM, AND ELECTRO...

METHOD OF FORMING PATTERNS AND METHOD OF MANUFACTURING INTEGRATED C...

LASER PROCESSING SYSTEM AND LASER PROCESSING METHOD

GAS PURGE SYSTEMS FOR A LASER SOURCE

LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

LASER SYSTEM AND METHOD FOR PROVIDING A PULSED LASER BEAM INTENDED...

POLYMER, CHEMICALLY AMPLIFIED RESIST COMPOSITION, AND PATTERN FORMI...

RESIST COMPOSITION AND PATTERN FORMING PROCESS

POSITIVE RESIST COMPOSITION AND PATTERN FORMING PROCESS

RESIST COMPOSITION AND PATTERN FORMING PROCESS

PROFILE DISPLAY DEVICE, LASER DEVICE, AND ELECTRONIC DEVICE MANUFAC...

RESIST COMPOSITION AND PATTERN FORMING PROCESS

APPARATUS FOR AND METHOD OF CONDITIONING LASER ELECTRODES

SEMICONDUCTOR PHOTORESIST COMPOSITIONS AND METHODS OF FORMING PATTE...

PHOTORESIST COMPOSITION AND METHOD OF MANUFACTURING INTEGRATED CIRC...

LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

ELECTRIC COMPONENT BOX AND EXTREME ULTRAVIOLET LIGHT GENERATION APP...

METHOD OF FORMING PATTERNS, SEMICONDUCTOR MEMORY DEVICE, AND METHOD...

VARIABLE-APPEARANCE LASER MARKING OVER PRINTED LAYERS

ONIUM SALT TYPE MONOMER, POLYMER, CHEMICALLY AMPLIFIED RESIST COMPO...