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G03F7/70025

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Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

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G03F7/70025by lasers

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Series of stacked confocal pulse stretchers for speckle reduction
- Patent number 12,166,327
- Issue date Dec 10, 2024
- Cymer, LLC
- Eric Anders Mason
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
High voltage pulse generation device, gas laser apparatus, and elec...
- Patent number 12,166,329
- Issue date Dec 10, 2024
- National University Corporation Nagaoka University of Technology
- Weihua Jiang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Line narrowing gas laser device and electronic device manufacturing...
- Patent number 12,155,168
- Issue date Nov 26, 2024
- Gigaphoton Inc.
- Yusuke Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-component kernels for vector optical image simulation
- Patent number 12,153,349
- Issue date Nov 26, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kenneth Lik Kin Ho
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mitigating long-term energy decay of laser devices
- Patent number 12,147,166
- Issue date Nov 19, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Ping Yen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radiation system for controlling bursts of pulses of radiation
- Patent number 12,130,558
- Issue date Oct 29, 2024
- Cymer, LLC
- Yingbo Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Line narrowing device, electronic device manufacturing method
- Patent number 12,111,577
- Issue date Oct 8, 2024
- Gigaphoton Inc.
- Takahito Kumazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure method, exposure system, and method for manufacturing elec...
- Patent number 12,105,425
- Issue date Oct 1, 2024
- Gigaphoton Inc.
- Koichi Fujii
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Particle image velocimetry of extreme ultraviolet lithography systems
- Patent number 12,085,585
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- En Hao Lai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for omnidirectional real time detection of photol...
- Patent number 12,078,933
- Issue date Sep 3, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tai-Yu Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Laser system for target metrology and alteration in an EUV light so...
- Patent number 12,078,934
- Issue date Sep 3, 2024
- ASML Netherlands B.V.
- Robert Jay Rafac
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Narrowed-line gas laser apparatus and method for manufacturing elec...
- Patent number 12,068,572
- Issue date Aug 20, 2024
- Gigaphoton Inc.
- Yosuke Fujimaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask processing apparatus and substrate processing apparatus
- Patent number 12,055,857
- Issue date Aug 6, 2024
- SEMES CO., LTD.
- Tae Hee Kim
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pulse width expansion apparatus and electronic device manufacturing...
- Patent number 12,038,567
- Issue date Jul 16, 2024
- Gigaphoton Inc.
- Hirotaka Miyamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image forming apparatus
- Patent number 12,032,319
- Issue date Jul 9, 2024
- Canon Kabushiki Kaisha
- Yoji Misao
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Burst statistics data aggregation filter
- Patent number 12,007,696
- Issue date Jun 11, 2024
- Cymer, LLC
- Matthew Minakais
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas monitoring system
- Patent number 11,988,966
- Issue date May 21, 2024
- Cymer, LLC
- Andrei Dorobantu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser apparatus and electronic device manufacturing method
- Patent number 11,978,997
- Issue date May 7, 2024
- Gigaphoton Inc.
- Hirotaka Miyamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Radiation source apparatus and method for using the same
- Patent number 11,948,702
- Issue date Apr 2, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wei-Chung Tu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Laser chamber and electronic device manufacturing method
- Patent number 11,947,263
- Issue date Apr 2, 2024
- Gigaphoton Inc.
- Makoto Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Energy correction module for an optical source apparatus
- Patent number 11,947,268
- Issue date Apr 2, 2024
- Cymer, LLC
- Yingbo Zhao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Controlling porosity of an interference lithography process by fine...
- Patent number 11,914,304
- Issue date Feb 27, 2024
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Shailesh N. Joshi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Optical system in particular for microlithography
- Patent number 11,906,753
- Issue date Feb 20, 2024
- Carl Zeiss SMT GmbH
- Johannes Kraus
- G02 - OPTICS
Information Patent Grant
Positive resist composition and patterning process
- Patent number 11,860,540
- Issue date Jan 2, 2024
- Shin-Etsu Chemical Co., Ltd.
- Jun Hatakeyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure device and method
- Patent number 11,860,545
- Issue date Jan 2, 2024
- Chun-Jung Chiu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radiation source for lithography process
- Patent number 11,829,082
- Issue date Nov 28, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shang-Ying Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for removing particles from pellicle and photomask
- Patent number 11,822,231
- Issue date Nov 21, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Tzu Han Liu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radiation source supply system for lithographic tools
- Patent number 11,809,084
- Issue date Nov 7, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chi-Hung Liao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of compensating wavelength error induced by repetition rate...
- Patent number 11,803,126
- Issue date Oct 31, 2023
- Cymer, LLC
- Kuo-Tai Teng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Writing data generating method, multi charged particle beam writing...
- Patent number 11,774,860
- Issue date Oct 3, 2023
- NuFlare Technology, Inc.
- Kenichi Yasui
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LASER SYSTEM FOR TARGET METROLOGY AND ALTERATION IN AN EUV LIGHT SO...
- Publication number 20240419083
- Publication date Dec 19, 2024
- ASML NETHERLANDS B.V.
- Robert Jay Rafac
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LINE NARROWING LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING ME...
- Publication number 20240413600
- Publication date Dec 12, 2024
- Gigaphoton Inc.
- Shigeto KISHIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI HEAD SCANNING LITHOGRAPHIC LASER WRITER
- Publication number 20240411231
- Publication date Dec 12, 2024
- Mycronic AB
- Andrzej Karawajczyk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20240396284
- Publication date Nov 28, 2024
- Gigaphoton Inc.
- Takeshi UEYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MITIGATING LONG-TERM ENERGY DECAY OF LASER DEVICES
- Publication number 20240385542
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Ping YEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AND METHOD FOR OMNIDIRECTIONAL REAL TIME DETECTION OF PHOTOL...
- Publication number 20240369937
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tai-Yu CHEN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PARTICLE IMAGE VELOCIMETRY OF EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEMS
- Publication number 20240361350
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- En Hao LAI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Apparatus and method for laser interference structuring of substrat...
- Publication number 20240337950
- Publication date Oct 10, 2024
- FUSION BIONIC GMBH
- Tim KUNZE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20240339797
- Publication date Oct 10, 2024
- Gigaphoton Inc.
- Yoichi SASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHIP PREPARATION METHOD AND SYSTEM, AND CHIP
- Publication number 20240334843
- Publication date Oct 3, 2024
- TENCENT TECHNOLOGY (SHENZHEN) COMPANY LIMITED
- Jingjing HU
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
ELECTRONIC DEVICE MANUFACTURING METHOD, LASER DEVICE, AND WAVELENGT...
- Publication number 20240322521
- Publication date Sep 26, 2024
- Gigaphoton Inc.
- Koichi FUJII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SULFONIUM SALT, RESIST COMPOSITION AND PATTERN FORMING PROCESS
- Publication number 20240302740
- Publication date Sep 12, 2024
- Shin-Etsu Chemical Co., Ltd.
- Tatsuya Yamahira
- C07 - ORGANIC CHEMISTRY
Information Patent Application
EUV LIGHT GENERATION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING...
- Publication number 20240295824
- Publication date Sep 5, 2024
- Gigaphoton Inc.
- Tomoyoshi TOIDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LASER SYSTEM, PULSE LASER LIGHT GENERATING METHOD, AND ELECTRONIC D...
- Publication number 20240291220
- Publication date Aug 29, 2024
- Gigaphoton Inc.
- Seiji NOGIWA
- G02 - OPTICS
Information Patent Application
OPTICAL PULSE STRETCHER, LASER APPARATUS, AND ELECTRONIC DEVICE MAN...
- Publication number 20240291219
- Publication date Aug 29, 2024
- Gigaphoton Inc.
- Yuki TAMARU
- G02 - OPTICS
Information Patent Application
GAS CONTROL APPARATUS FOR GAS DISCHARGE STAGE
- Publication number 20240291226
- Publication date Aug 29, 2024
- CYMER, LLC
- Siyu Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PULSED POWER SYSTEMS WITH CONTROLLED REACTOR RESET
- Publication number 20240283210
- Publication date Aug 22, 2024
- CYMER, LLC
- Paul Christopher Melcher
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING INTERFERENCE LITHOGRAPHIC SYSTEM
- Publication number 20240264534
- Publication date Aug 8, 2024
- TSINGHUA UNIVERSITY
- Leijie WANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PULSE STRETCHER AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20240258757
- Publication date Aug 1, 2024
- Gigaphoton Inc.
- Yousuke FUJIMAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRONIC MODULE FOR A MAGNETIC SWITCHING NETWORK TO PRODUCE A PUL...
- Publication number 20240222927
- Publication date Jul 4, 2024
- CYMER, LLC
- Paul Christopher Melcher
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPORT FOR LITHOGRAPHIC PRINTING PLATE, LITHOGRAPHIC PRINTING PLAT...
- Publication number 20240217253
- Publication date Jul 4, 2024
- FUJIFILM CORPORATION
- Atsushi MATSUURA
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
ON-PRESS DEVELOPMENT TYPE LITHOGRAPHIC PRINTING PLATE PRECURSOR AND...
- Publication number 20240208200
- Publication date Jun 27, 2024
- FUJIFILM CORPORATION
- Shumpei WATANABE
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
PHOTORESIST FORMULATIONS 3D MICROPRINTING TECHNIQUES
- Publication number 20240201585
- Publication date Jun 20, 2024
- Fondazione Istituto Italiano Di Tecnologia
- Marco Carlotti
- B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information Patent Application
METROLOGY TOOL CALIBRATION METHOD AND ASSOCIATED METROLOGY TOOL
- Publication number 20240184215
- Publication date Jun 6, 2024
- ASML NETHERLANDS B.V.
- Jin LIAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20240186760
- Publication date Jun 6, 2024
- Gigaphoton Inc.
- Takayuki YABU
- G02 - OPTICS
Information Patent Application
LASER SYSTEM
- Publication number 20240170905
- Publication date May 23, 2024
- ASML NETHERLANDS B.V.
- Herman Philip GODFRIED
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAINTENANCE OF MODULES FOR LIGHT SOURCES USED IN SEMICONDUCTOR PHOT...
- Publication number 20240152063
- Publication date May 9, 2024
- CYMER, LLC
- Russell Allen Burdt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20240136787
- Publication date Apr 25, 2024
- Gigaphoton Inc.
- Yousuke FUJIMAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPOSURE DEVICE AND METHOD
- Publication number 20240126177
- Publication date Apr 18, 2024
- Chun-Jung Chiu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ULTRAVIOLET LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20240128701
- Publication date Apr 18, 2024
- Gigaphoton Inc.
- Atsushi FUCHIMUKAI
- H01 - BASIC ELECTRIC ELEMENTS

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Series of stacked confocal pulse stretchers for speckle reduction

High voltage pulse generation device, gas laser apparatus, and elec...

Line narrowing gas laser device and electronic device manufacturing...

Multi-component kernels for vector optical image simulation

Mitigating long-term energy decay of laser devices

Radiation system for controlling bursts of pulses of radiation

Line narrowing device, electronic device manufacturing method

Exposure method, exposure system, and method for manufacturing elec...

Particle image velocimetry of extreme ultraviolet lithography systems

System and method for omnidirectional real time detection of photol...

Laser system for target metrology and alteration in an EUV light so...

Narrowed-line gas laser apparatus and method for manufacturing elec...

Mask processing apparatus and substrate processing apparatus

Pulse width expansion apparatus and electronic device manufacturing...

Image forming apparatus

Burst statistics data aggregation filter

Gas monitoring system

Laser apparatus and electronic device manufacturing method

Radiation source apparatus and method for using the same

Laser chamber and electronic device manufacturing method

Energy correction module for an optical source apparatus

Controlling porosity of an interference lithography process by fine...

Optical system in particular for microlithography

Positive resist composition and patterning process

Exposure device and method

Radiation source for lithography process

Method for removing particles from pellicle and photomask

Radiation source supply system for lithographic tools

Method of compensating wavelength error induced by repetition rate...

Writing data generating method, multi charged particle beam writing...

Patents Applicationslast 30 patents

LASER SYSTEM FOR TARGET METROLOGY AND ALTERATION IN AN EUV LIGHT SO...

LINE NARROWING LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING ME...

MULTI HEAD SCANNING LITHOGRAPHIC LASER WRITER

GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

MITIGATING LONG-TERM ENERGY DECAY OF LASER DEVICES

SYSTEM AND METHOD FOR OMNIDIRECTIONAL REAL TIME DETECTION OF PHOTOL...

PARTICLE IMAGE VELOCIMETRY OF EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEMS

Apparatus and method for laser interference structuring of substrat...

GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

CHIP PREPARATION METHOD AND SYSTEM, AND CHIP

ELECTRONIC DEVICE MANUFACTURING METHOD, LASER DEVICE, AND WAVELENGT...

SULFONIUM SALT, RESIST COMPOSITION AND PATTERN FORMING PROCESS

EUV LIGHT GENERATION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING...

LASER SYSTEM, PULSE LASER LIGHT GENERATING METHOD, AND ELECTRONIC D...

OPTICAL PULSE STRETCHER, LASER APPARATUS, AND ELECTRONIC DEVICE MAN...

GAS CONTROL APPARATUS FOR GAS DISCHARGE STAGE

PULSED POWER SYSTEMS WITH CONTROLLED REACTOR RESET

SCANNING INTERFERENCE LITHOGRAPHIC SYSTEM

PULSE STRETCHER AND ELECTRONIC DEVICE MANUFACTURING METHOD

ELECTRONIC MODULE FOR A MAGNETIC SWITCHING NETWORK TO PRODUCE A PUL...

SUPPORT FOR LITHOGRAPHIC PRINTING PLATE, LITHOGRAPHIC PRINTING PLAT...

ON-PRESS DEVELOPMENT TYPE LITHOGRAPHIC PRINTING PLATE PRECURSOR AND...

PHOTORESIST FORMULATIONS 3D MICROPRINTING TECHNIQUES

METROLOGY TOOL CALIBRATION METHOD AND ASSOCIATED METROLOGY TOOL

LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

LASER SYSTEM

MAINTENANCE OF MODULES FOR LIGHT SOURCES USED IN SEMICONDUCTOR PHOT...

GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

EXPOSURE DEVICE AND METHOD

ULTRAVIOLET LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD