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G03F7/70025
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Patents Grants
last 30 patents
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Patent Grant
Radiation source apparatus and method for using the same
Patent number
11,948,702
Issue date
Apr 2, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Wei-Chung Tu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Laser chamber and electronic device manufacturing method
Patent number
11,947,263
Issue date
Apr 2, 2024
Gigaphoton Inc.
Makoto Tanaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Energy correction module for an optical source apparatus
Patent number
11,947,268
Issue date
Apr 2, 2024
Cymer, LLC
Yingbo Zhao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Controlling porosity of an interference lithography process by fine...
Patent number
11,914,304
Issue date
Feb 27, 2024
Toyota Motor Engineering & Manufacturing North America, Inc.
Shailesh N. Joshi
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Optical system in particular for microlithography
Patent number
11,906,753
Issue date
Feb 20, 2024
Carl Zeiss SMT GmbH
Johannes Kraus
G02 - OPTICS
Information
Patent Grant
Positive resist composition and patterning process
Patent number
11,860,540
Issue date
Jan 2, 2024
Shin-Etsu Chemical Co., Ltd.
Jun Hatakeyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure device and method
Patent number
11,860,545
Issue date
Jan 2, 2024
Chun-Jung Chiu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiation source for lithography process
Patent number
11,829,082
Issue date
Nov 28, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Shang-Ying Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for removing particles from pellicle and photomask
Patent number
11,822,231
Issue date
Nov 21, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Tzu Han Liu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiation source supply system for lithographic tools
Patent number
11,809,084
Issue date
Nov 7, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chi-Hung Liao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of compensating wavelength error induced by repetition rate...
Patent number
11,803,126
Issue date
Oct 31, 2023
Cymer, LLC
Kuo-Tai Teng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Writing data generating method, multi charged particle beam writing...
Patent number
11,774,860
Issue date
Oct 3, 2023
NuFlare Technology, Inc.
Kenichi Yasui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of in situ modulation of structural material properties and/...
Patent number
11,774,467
Issue date
Oct 3, 2023
Microfabrica Inc.
Onnik Yaglioglu
G01 - MEASURING TESTING
Information
Patent Grant
Lithography system bandwidth control
Patent number
11,769,982
Issue date
Sep 26, 2023
Cymer, LLC
Tanuj Aggarwal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-component kernels for vector optical image simulation
Patent number
11,754,930
Issue date
Sep 12, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Kenneth Lik Kin Ho
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mitigating long-term energy decay of laser devices
Patent number
11,720,035
Issue date
Aug 8, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chih-Ping Yen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Light source, EUV lithography system, and method for performing cir...
Patent number
11,703,769
Issue date
Jul 18, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chi Yang
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Radiation source apparatus and method for using the same
Patent number
11,694,820
Issue date
Jul 4, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Wei-Chung Tu
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Reducing speckle in an excimer light source
Patent number
11,686,951
Issue date
Jun 27, 2023
Cymer, LLC
Wilhelmus Patrick Elisabeth Maria op 't Root
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle image velocimetry of extreme ultraviolet lithography systems
Patent number
11,680,958
Issue date
Jun 20, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
En Hao Lai
G01 - MEASURING TESTING
Information
Patent Grant
Method for forming semiconductor structure
Patent number
11,656,553
Issue date
May 23, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Li-Yen Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for the exposure of plate-shaped workpieces with high thr...
Patent number
11,656,556
Issue date
May 23, 2023
Laser Imaging Systems GmbH
Steffen Ruecker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Laser containment structure for a laser printhead
Patent number
11,648,789
Issue date
May 16, 2023
Zebra Technologies Corporation
Richard Mark Clayton
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Laser processing method and laser processing system
Patent number
11,604,416
Issue date
Mar 14, 2023
Gigaphoton Inc.
Koji Kakizaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reticle transfer device and exposure system
Patent number
11,599,029
Issue date
Mar 7, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC.
Zicheng Liu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Positive resist composition and patterning process
Patent number
11,586,110
Issue date
Feb 21, 2023
Shin-Etsu Chemical Co., Ltd.
Jun Hatakeyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Laser chamber apparatus, gas laser apparatus, and method for manufa...
Patent number
11,588,291
Issue date
Feb 21, 2023
Gigaphoton Inc.
Takuya Ishii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Single current source with local fine tuning for multi beam laser i...
Patent number
11,567,412
Issue date
Jan 31, 2023
Xerox Corporation
Franciscus Gerardus Johannes Claassen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Extreme ultraviolet light generation system and electronic device m...
Patent number
11,553,583
Issue date
Jan 10, 2023
Gigaphoton Inc.
Takayuki Yabu
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
System and method for optical-path coupling of light for in-situ ph...
Patent number
11,543,757
Issue date
Jan 3, 2023
KLA Corporation
Shannon Hill
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
Publication number
20240136787
Publication date
Apr 25, 2024
Gigaphoton Inc.
Yousuke FUJIMAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXPOSURE DEVICE AND METHOD
Publication number
20240126177
Publication date
Apr 18, 2024
Chun-Jung Chiu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ULTRAVIOLET LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
Publication number
20240128701
Publication date
Apr 18, 2024
Gigaphoton Inc.
Atsushi FUCHIMUKAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BYPASS APPARATUS, LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTUR...
Publication number
20240128702
Publication date
Apr 18, 2024
Gigaphoton Inc.
Shinichi MATSUMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS LASER AMPLIFIER, GAS LASER APPARATUS, EUV LIGHT GENERATION APPA...
Publication number
20240128705
Publication date
Apr 18, 2024
Mitsubishi Electric Corporation
Tatsuya YAMAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROL METHOD OF DISCHARGE-EXCITATION TYPE LASER DEVICE, DISCHARGE...
Publication number
20240128706
Publication date
Apr 18, 2024
Gigaphoton Inc.
Keisuke ISHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAVELENGTH CONTROL METHOD, LASER APPARATUS, AND METHOD FOR MANUFACT...
Publication number
20240111219
Publication date
Apr 4, 2024
Gigaphoton Inc.
Shigeto KISHIMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TABLE - TOP ULTRA SUPERCONTINUUM AND HIGHER HARMONIC GENERATION SOU...
Publication number
20240097393
Publication date
Mar 21, 2024
Robert R. Alfano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER DEVICE, LASER OSCILLATION METHOD, AND ELECTRONIC DEVICE MANUF...
Publication number
20240079844
Publication date
Mar 7, 2024
Gigaphoton Inc.
Takashi SHIGA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER DEVICE, LASER CONTROL METHOD, AND ELECTRONIC DEVICE MANUFACTU...
Publication number
20240072510
Publication date
Feb 29, 2024
Gigaphoton Inc.
Takashi SHIGA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPTIMIZATION OF LITHOGRAPHIC PROCESS BASED ON BANDWIDTH AND SPECKLE
Publication number
20240045341
Publication date
Feb 8, 2024
ASML NETHERLANDS B.V.
Willard Earl CONLEY
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PULSED POWER CIRCUITS USING HYBRID NON-LINEAR MAGNETIC MATERIALS AN...
Publication number
20240039234
Publication date
Feb 1, 2024
CYMER, LLC
Yuda Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LINE NARROWING MODULE, GAS LASER DEVICE, AND ELECTRONIC DEVICE MANU...
Publication number
20240039236
Publication date
Feb 1, 2024
Gigaphoton Inc.
Hitoshi OHGA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR REMOVING PARTICLES FROM PELLICLE AND PHOTOMASK
Publication number
20240036463
Publication date
Feb 1, 2024
Taiwan Semiconductor Manufacturing company Ltd.
TZU HAN LIU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF COMPENSATING WAVELENGTH ERROR INDUCED BY REPETITION RATE...
Publication number
20240036475
Publication date
Feb 1, 2024
CYMER, LLC
Kuo-Tai Teng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEBRIS MITIGATION DEVICE AND LIGHT SOURCE APPARATUS INCLUDING THE SAME
Publication number
20230418170
Publication date
Dec 28, 2023
Ushio Denki Kabushiki Kaisha
Noritaka Ashizawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF IN SITU MODULATION OF STRUCTURAL MATERIAL PROPERTIES AND/...
Publication number
20230408546
Publication date
Dec 21, 2023
Microfabrica Inc.
Onnik Yaglioglu
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
MITIGATING LONG-TERM ENERGY DECAY OF LASER DEVICES
Publication number
20230400787
Publication date
Dec 14, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Ping YEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
GAS LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
Publication number
20230396033
Publication date
Dec 7, 2023
Gigaphoton Inc.
Keisuke ISHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHAMBER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD
Publication number
20230387641
Publication date
Nov 30, 2023
Gigaphoton Inc.
Junichi FUJIMOTO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CHAMBER DEVICE, GAS LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURI...
Publication number
20230387642
Publication date
Nov 30, 2023
Gigaphoton Inc.
Junichi FUJIMOTO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ULTRAVIOLET LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
Publication number
20230378713
Publication date
Nov 23, 2023
Gigaphoton Inc.
Yuki TAMARU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR DETECTING DEBRIS IN A PHOTOLITHOGRAPHY SYSTEM
Publication number
20230375944
Publication date
Nov 23, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Shang-Chieh CHIEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MULTI-COMPONENT KERNELS FOR VECTOR OPTICAL IMAGE SIMULATION
Publication number
20230367228
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Kenneth Lik Kin HO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SILICON-CONTAINING COMPOSITION AND METHOD FOR MANUFACTURING SEMICON...
Publication number
20230340266
Publication date
Oct 26, 2023
JSR Corporation
Tomoaki SEKO
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
Publication number
20230333477
Publication date
Oct 19, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Ching-Yu CHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR PERFORMING LITHOGRAPHY PROCESS, LIGHT SOURCE, AND EUV LI...
Publication number
20230324813
Publication date
Oct 12, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chi YANG
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EUV LITHOGRAPHY APPARATUS AND OPERATING METHOD FOR MITIGATING CONTA...
Publication number
20230324814
Publication date
Oct 12, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
I-Hsiung HUANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CONTROL METHOD OF LASER SYSTEM, LASER SYSTEM, AND ELECTRONIC DEVICE...
Publication number
20230318252
Publication date
Oct 5, 2023
Gigaphoton Inc.
Takeshi ASAYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPTICAL SYSTEM, IN PARTICULAR FOR MICROLITHOGRAPHY, AND METHOD FOR...
Publication number
20230314959
Publication date
Oct 5, 2023
Carl Zeiss SMT GMBH
Conrad Wolke
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY