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by metalloorganic chemical vapour deposition [MOCVD]
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CPC
H01L39/2441
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Parent Industries
H
ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L39/00
Devices using superconductivity Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof
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H01L39/2441
by metalloorganic chemical vapour deposition [MOCVD]
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