by multiple sources

Industry

CPC
G03F7/7005

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Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

Current Industry

G03F7/7005by multiple sources

Industries

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for exposure of relief precursors
- Patent number 12,124,171
- Issue date Oct 22, 2024
- XSYS PREPRESS N.V.
- Pieter Lenssens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for preparing holographic pattern-expressing organogel using...
- Patent number 12,038,719
- Issue date Jul 16, 2024
- UNIST (ULSAN NATIONAL INSTITUTE OF SCIENCE AND TECHNOLOGY)
- Jiseok Lee
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Radiation system
- Patent number 11,984,236
- Issue date May 14, 2024
- ASML Netherlands B.V.
- Han-Kwang Nienhuys
- G02 - OPTICS
Information Patent Grant
Light source apparatus, optical apparatus, exposure apparatus, devi...
- Patent number 11,934,104
- Issue date Mar 19, 2024
- Nikon Corporation
- Hideki Komatsuda
- G02 - OPTICS
Information Patent Grant
Method and system for nanoscale data recording
- Patent number 11,886,123
- Issue date Jan 30, 2024
- Franklin Mark Schellenberg
- G11 - INFORMATION STORAGE
Information Patent Grant
High uniformity telecentric illuminator
- Patent number 11,868,049
- Issue date Jan 9, 2024
- Innovations In Optics, Inc.
- Thomas J. Brukilacchio
- G02 - OPTICS
Information Patent Grant
Large area self imaging lithography based on broadband light source
- Patent number 11,829,073
- Issue date Nov 28, 2023
- Applied Materials, Inc.
- Arvinder Chadha
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multi charged particle beam adjustment method, multi charged partic...
- Patent number 11,804,360
- Issue date Oct 31, 2023
- NuFlare Technology, Inc.
- Tsubasa Nanao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of forming semiconductor structure
- Patent number 11,764,062
- Issue date Sep 19, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ping-Hao Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Digital masking system, pattern imaging apparatus and digital maski...
- Patent number 11,747,732
- Issue date Sep 5, 2023
- Jabil Inc.
- Scott Klimczak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and exposure method, and device manufacturing me...
- Patent number 11,747,736
- Issue date Sep 5, 2023
- Nikon Corporation
- Yuichi Shibazaki
- G01 - MEASURING TESTING
Information Patent Grant
Light source device, illuminating apparatus, exposing apparatus, an...
- Patent number 11,698,589
- Issue date Jul 11, 2023
- Canon Kabushiki Kaisha
- Noboru Osaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method, substrate processing apparatus, and st...
- Patent number 11,693,319
- Issue date Jul 4, 2023
- Tokyo Electron Limited
- Keiichi Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Gamma ray generator and method of generating gamma ray
- Patent number 11,669,014
- Issue date Jun 6, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- You-Hua Chou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods of preparing structures employing chemistries for biocompat...
- Patent number 11,655,393
- Issue date May 23, 2023
- The Government of the United States of America, as represented by the Secreta...
- David A. Kidwell
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
Photolithography method
- Patent number 11,644,745
- Issue date May 9, 2023
- Samsung Electronics Co., Ltd.
- Yongwook Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure apparatus and exposure method, and device manufacturing me...
- Patent number 11,579,532
- Issue date Feb 14, 2023
- Nikon Corporation
- Yuichi Shibazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for lithographically forming wafer identification marks a...
- Patent number 11,562,968
- Issue date Jan 24, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hu-Wei Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
EUV radiation source, insert for an EUV radiation source and insert...
- Patent number 11,550,225
- Issue date Jan 10, 2023
- Carl Zeiss SMT GmbH
- Iris Pilch
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus and method for processing substrate
- Patent number 11,520,245
- Issue date Dec 6, 2022
- Semes Co., Ltd.
- Oh Jin Kwon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Manufacturing method for structure and manufacturing method for liq...
- Patent number 11,465,418
- Issue date Oct 11, 2022
- Canon Kabushiki Kaisha
- Kenji Tamamori
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Chemistries for biocompatible additive nanolithography
- Patent number 11,459,484
- Issue date Oct 4, 2022
- The Government of the United States of America, as represented by the Secreta...
- David A. Kidwell
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Gamma ray generator and gamma ray lithography system
- Patent number 11,460,779
- Issue date Oct 4, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- You-Hua Chou
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Methods and apparatus for simulating interaction of radiation with...
- Patent number 11,429,763
- Issue date Aug 30, 2022
- ASML Netherlands B.V.
- Remco Dirks
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods and systems for printing large periodic patterns by overlap...
- Patent number 11,422,471
- Issue date Aug 23, 2022
- Eulitha A.G.
- Francis Clube
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for determining a radiation beam intensity pro...
- Patent number 11,353,796
- Issue date Jun 7, 2022
- ASML Netherlands B.V.
- Teis Johan Coenen
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Display device and method of manufacturing the same
- Patent number 11,353,631
- Issue date Jun 7, 2022
- Samsung Display Co., Ltd.
- Ju Hwa Ha
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Light source apparatus, optical apparatus, exposure apparatus, devi...
- Patent number 11,353,795
- Issue date Jun 7, 2022
- Nikon Corporation
- Hideki Komatsuda
- G02 - OPTICS
Information Patent Grant
Tin trap device, extreme ultraviolet light generation apparatus, an...
- Patent number 11,337,292
- Issue date May 17, 2022
- Gigaphoton Inc.
- Gouta Niimi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Light source apparatus, illumination apparatus, exposure apparatus,...
- Patent number 11,320,741
- Issue date May 3, 2022
- Canon Kabushiki Kaisha
- Noboru Osaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHODS OF FORMING BIOACTIVE PATTERNS USING BEAM PEN LITHOGRAPY-CON...
- Publication number 20240385528
- Publication date Nov 21, 2024
- Northwestern University
- Chad A. Mirkin
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Application
EXPOSURE APPARATUS
- Publication number 20240329545
- Publication date Oct 3, 2024
- Ushio Denki Kabushiki Kaisha
- Naoya SOHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIGHTING OPTICAL SYSTEM AND EXPOSURE APPARATUS
- Publication number 20240319610
- Publication date Sep 26, 2024
- Ushio Denki Kabushiki Kaisha
- Osamu OSAWA
- G02 - OPTICS
Information Patent Application
APPARATUS AND METHOD FOR MANUFACTURING DISPLAY DEVICE, AND MASK ASS...
- Publication number 20240324435
- Publication date Sep 26, 2024
- SAMSUNG DISPLAY CO., LTD.
- Jeongkuk Kim
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Application
FLEXOGRAPHIC PRINTING PLATE PRECURSOR AND MANUFACTURING METHOD OF F...
- Publication number 20240316977
- Publication date Sep 26, 2024
- FUJIFILM CORPORATION
- Masato SHIRAKAWA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTIMAL SCANNER MAPS AND FIELD LAYOUTS
- Publication number 20240319579
- Publication date Sep 26, 2024
- International Business Machines Corporation
- Allen Gabor
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CORRECTION METHOD OF MULTI-BEAM EXPOSURE DEVICE
- Publication number 20240302750
- Publication date Sep 12, 2024
- SAMSUNG DISPLAY CO., LTD.
- CHOULWON MIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV LIGHT GENERATION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING...
- Publication number 20240295824
- Publication date Sep 5, 2024
- Gigaphoton Inc.
- Tomoyoshi TOIDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS
- Publication number 20240264541
- Publication date Aug 8, 2024
- CONTEMPORARY AMPEREX TECHNOLOGY CO., LIMITED
- Xiaosong LIU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING
- Publication number 20240248407
- Publication date Jul 25, 2024
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHODS AND APPARATUS TO REDUCE EXTREME ULTRAVIOLET LIGHT FOR PHOTO...
- Publication number 20240241446
- Publication date Jul 18, 2024
- Intel Corporation
- Marvin Paik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM FOR EXPOSURE OF ULTRA-VIOLET LIGHT TO A PHOTORESIST DEVELOPE...
- Publication number 20240210835
- Publication date Jun 27, 2024
- Intel Corporation
- Joseph Bloxham
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIGHT SOURCE APPARATUS, OPTICAL APPARATUS, EXPOSURE APPARATUS, DEVI...
- Publication number 20240176248
- Publication date May 30, 2024
- Nikon Corporation
- Hideki KOMATSUDA
- G02 - OPTICS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240077807
- Publication date Mar 7, 2024
- SCREEN Holdings Co., Ltd.
- Jun KOMORI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR IMPROVED EXPOSURE OF RELIEF PRECURSORS
- Publication number 20240061341
- Publication date Feb 22, 2024
- XSYS GERMANY GMBH
- Maximilian THATE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Semiconductor Featuring Ridged Architecture
- Publication number 20240014262
- Publication date Jan 11, 2024
- Walter A. Tormasi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE EXPOSURE APPARATUS, METHOD OF MAKING AND USING THE SAME
- Publication number 20230418164
- Publication date Dec 28, 2023
- Merritt Conner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AND METHOD FOR MULTIPLE STEP DIRECTIONAL PATTERNING
- Publication number 20230386834
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Kai YANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
REFLECTIVE MASK BLANK FOR EUV LITHOGRAPHY AND SUBSTRATE WITH CONDUC...
- Publication number 20230350284
- Publication date Nov 2, 2023
- AGC Inc.
- Yusuke Ono
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND EXPOSURE METHOD, AND DEVICE MANUFACTURING ME...
- Publication number 20230143407
- Publication date May 11, 2023
- Nikon Corporation
- Yuichi Shibazaki
- G01 - MEASURING TESTING
Information Patent Application
CONTROL METHOD OF WRITING APPARATUS AND WRITING APPARATUS
- Publication number 20230111566
- Publication date Apr 13, 2023
- NuFlare Technology, Inc.
- Eita FUJISAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND MANUFACTURING METHOD FOR S...
- Publication number 20230101647
- Publication date Mar 30, 2023
- Canon Kabushiki Kaisha
- Rika Hoshino
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC SYSTEM PROVIDED WITH A DEFLECTION APPARATUS FOR CHANGI...
- Publication number 20230063156
- Publication date Mar 2, 2023
- ASML Holding N.V.
- Ronald Peter ALBRIGHT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Reduced Spatial/Temporal Overlaps to Increase Temporal Overlaps to...
- Publication number 20230011739
- Publication date Jan 12, 2023
- Nigel D Browning
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS FOR AND METHODS OF COMBINING MULTIPLE LASER BEAMS
- Publication number 20230004091
- Publication date Jan 5, 2023
- CYMER, LLC
- Rabin Paudel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM ADJUSTMENT METHOD, MULTI CHARGED PARTIC...
- Publication number 20230005711
- Publication date Jan 5, 2023
- NuFlare Technology, Inc.
- Tsubasa NANAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods of Preparing Structures Employing Chemistries for Biocompat...
- Publication number 20220389273
- Publication date Dec 8, 2022
- The Government of the United States of America, as represented by the Secreta...
- David A. Kidwell
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
EXPOSURE SYSTEM, LASER CONTROL PARAMETER PRODUCTION METHOD, AND ELE...
- Publication number 20220373893
- Publication date Nov 24, 2022
- Gigaphoton Inc.
- Koichi FUJII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAMMA RAY GENERATOR AND METHOD OF GENERATING GAMMA RAY
- Publication number 20220357663
- Publication date Nov 10, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- You-Hua Chou
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
APPARATUS AND METHOD FOR EXPOSURE OF RELIEF PRECURSORS
- Publication number 20220276568
- Publication date Sep 1, 2022
- XEIKON PREPRESS N.V.
- Pieter LENSSENS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

by multiple sources

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Apparatus and method for exposure of relief precursors

Method for preparing holographic pattern-expressing organogel using...

Radiation system

Light source apparatus, optical apparatus, exposure apparatus, devi...

Method and system for nanoscale data recording

High uniformity telecentric illuminator

Large area self imaging lithography based on broadband light source

Multi charged particle beam adjustment method, multi charged partic...

Method of forming semiconductor structure

Digital masking system, pattern imaging apparatus and digital maski...

Exposure apparatus and exposure method, and device manufacturing me...

Light source device, illuminating apparatus, exposing apparatus, an...

Substrate processing method, substrate processing apparatus, and st...

Gamma ray generator and method of generating gamma ray

Methods of preparing structures employing chemistries for biocompat...

Photolithography method

Exposure apparatus and exposure method, and device manufacturing me...

Apparatus for lithographically forming wafer identification marks a...

EUV radiation source, insert for an EUV radiation source and insert...

Apparatus and method for processing substrate

Manufacturing method for structure and manufacturing method for liq...

Chemistries for biocompatible additive nanolithography

Gamma ray generator and gamma ray lithography system

Methods and apparatus for simulating interaction of radiation with...

Methods and systems for printing large periodic patterns by overlap...

Method and apparatus for determining a radiation beam intensity pro...

Display device and method of manufacturing the same

Light source apparatus, optical apparatus, exposure apparatus, devi...

Tin trap device, extreme ultraviolet light generation apparatus, an...

Light source apparatus, illumination apparatus, exposure apparatus,...

Patents Applicationslast 30 patents

METHODS OF FORMING BIOACTIVE PATTERNS USING BEAM PEN LITHOGRAPY-CON...

EXPOSURE APPARATUS

LIGHTING OPTICAL SYSTEM AND EXPOSURE APPARATUS

APPARATUS AND METHOD FOR MANUFACTURING DISPLAY DEVICE, AND MASK ASS...

FLEXOGRAPHIC PRINTING PLATE PRECURSOR AND MANUFACTURING METHOD OF F...

OPTIMAL SCANNER MAPS AND FIELD LAYOUTS

CORRECTION METHOD OF MULTI-BEAM EXPOSURE DEVICE

EUV LIGHT GENERATION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING...

EXPOSURE APPARATUS

METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING

METHODS AND APPARATUS TO REDUCE EXTREME ULTRAVIOLET LIGHT FOR PHOTO...

SYSTEM FOR EXPOSURE OF ULTRA-VIOLET LIGHT TO A PHOTORESIST DEVELOPE...

LIGHT SOURCE APPARATUS, OPTICAL APPARATUS, EXPOSURE APPARATUS, DEVI...

SUBSTRATE PROCESSING APPARATUS

APPARATUS AND METHOD FOR IMPROVED EXPOSURE OF RELIEF PRECURSORS

Semiconductor Featuring Ridged Architecture

EDGE EXPOSURE APPARATUS, METHOD OF MAKING AND USING THE SAME

SYSTEM AND METHOD FOR MULTIPLE STEP DIRECTIONAL PATTERNING

REFLECTIVE MASK BLANK FOR EUV LITHOGRAPHY AND SUBSTRATE WITH CONDUC...

EXPOSURE APPARATUS AND EXPOSURE METHOD, AND DEVICE MANUFACTURING ME...

CONTROL METHOD OF WRITING APPARATUS AND WRITING APPARATUS

EXPOSURE APPARATUS, EXPOSURE METHOD, AND MANUFACTURING METHOD FOR S...

LITHOGRAPHIC SYSTEM PROVIDED WITH A DEFLECTION APPARATUS FOR CHANGI...

Reduced Spatial/Temporal Overlaps to Increase Temporal Overlaps to...

APPARATUS FOR AND METHODS OF COMBINING MULTIPLE LASER BEAMS

MULTI CHARGED PARTICLE BEAM ADJUSTMENT METHOD, MULTI CHARGED PARTIC...

Methods of Preparing Structures Employing Chemistries for Biocompat...

EXPOSURE SYSTEM, LASER CONTROL PARAMETER PRODUCTION METHOD, AND ELE...

GAMMA RAY GENERATOR AND METHOD OF GENERATING GAMMA RAY

APPARATUS AND METHOD FOR EXPOSURE OF RELIEF PRECURSORS