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B81C2201/0169

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

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B81C2201/0169by post-annealing

Industries

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Patents Grantslast 30 patents

Information Patent Grant
MEMS structure and manufacturing method thereof
- Patent number 11,505,454
- Issue date Nov 22, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Kang-Che Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for frequency trimming a microelectromechanical resonator
- Patent number 10,947,111
- Issue date Mar 16, 2021
- Georgia Tech Research Corporation
- Benoit Hamelin
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Monocrystalline epitaxially aligned nanostructures and related methods
- Patent number 10,472,229
- Issue date Nov 12, 2019
- Cornell University—Cornell Center for Technology
- Ulrich Wiesner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Trimming method for microresonators and microresonators made thereby
- Patent number 10,148,244
- Issue date Dec 4, 2018
- National Technology & Engineering Solutions of Sandia, LLC
- Michael David Henry
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device and method of manufacturing the same
- Patent number 9,776,854
- Issue date Oct 3, 2017
- Kabushiki Kaisha Toshiba
- Akira Fujimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Substrate for diaphragm-type resonant MEMS devices, diaphragm-type...
- Patent number 9,688,528
- Issue date Jun 27, 2017
- FUJIFILM Corporation
- Takahiro Sano
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of forming microstructure and electronic device having move...
- Patent number 9,604,845
- Issue date Mar 28, 2017
- STMicroelectronics, Inc.
- Ming Fang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Reducing MEMS stiction by introduction of a carbon barrier
- Patent number 9,463,973
- Issue date Oct 11, 2016
- FREESCALE SEMICONDUCTOR, INC.
- Ruben B. Montez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Low temperature ceramic Microelectromechanical structures
- Patent number 8,975,104
- Issue date Mar 10, 2015
- The Royal Institution for the Advancement of Learning/McGill University
- Mourad El-Gamal
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Reducing MEMS stiction by introduction of a carbon barrier
- Patent number 8,895,339
- Issue date Nov 25, 2014
- FREESCALE SEMICONDUCTOR, INC.
- Ruben B. Montez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Low temperature ceramic microelectromechanical structures
- Patent number 8,658,452
- Issue date Feb 25, 2014
- The Royal Institution for the Advancement of Learning / McGill University
- Mourad El-Gamal
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of forming an electromechanical transducer device
- Patent number 8,513,042
- Issue date Aug 20, 2013
- FREESCALE SEMICONDUCTOR, INC.
- Francois Perruchot
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Membrane structure element and method for manufacturing same
- Patent number 8,057,882
- Issue date Nov 15, 2011
- Kobe Steel, Ltd.
- Takayuki Hirano
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Polysilicon deposition and anneal process enabling thick polysilico...
- Patent number 7,754,617
- Issue date Jul 13, 2010
- Analog Devices, Inc.
- Thomas Kieran Nunan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device having three-dimensional construction and meth...
- Patent number 7,541,257
- Issue date Jun 2, 2009
- Denso Corporation
- Eiji Ishikawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Thin-film structure and method for manufacturing the same, and acce...
- Patent number 7,371,600
- Issue date May 13, 2008
- Mitsubishi Denki Kabushiki Kaisha
- Kiyoshi Ishibashi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication of advanced silicon-based MEMS devices
- Patent number 7,160,752
- Issue date Jan 9, 2007
- Dalsa Semiconductor Inc.
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing sensor having membrane structure
- Patent number 6,602,428
- Issue date Aug 5, 2003
- Denso Corporation
- Hiroyuki Wado
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-heater and airflow sensor using the same
- Patent number 6,450,025
- Issue date Sep 17, 2002
- Denso Corporation
- Hiroyuki Wado
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Thin film-planar structure and method for producing the same
- Patent number 6,406,637
- Issue date Jun 18, 2002
- Tokyo Institute of Technology
- Akira Shimokohbe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of controlling stress in a film
- Patent number 6,328,794
- Issue date Dec 11, 2001
- International Business Machines Corporation
- Donald Walter Brouillette
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for fabricating micromechanical components
- Patent number 6,251,699
- Issue date Jun 26, 2001
- Robert Bosch GmbH
- Matthias Fuertsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Reduced deformation of micromechanical devices through thermal stab...
- Patent number 6,204,085
- Issue date Mar 20, 2001
- Texas Instruments Incorporated
- Mark H. Strumpell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of making X-ray mask having reduced stress
- Patent number 5,677,090
- Issue date Oct 14, 1997
- Mitsubishi Denki Kabushiki Kaisha
- Kenji Marumoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS STRUCTURE INCLUDING A BURIED CAVITY WITH ANTISTICTION PROTUBER...
- Publication number 20230348258
- Publication date Nov 2, 2023
- STMicroelectronics S.r.l.
- Mikel AZPEITIA URQUIA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Fabricating a Microfluidic Device
- Publication number 20210300752
- Publication date Sep 30, 2021
- IMEC vzw
- Giuseppe Fiorentino
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STICTION-AIDED FABRICATION OF FLAT NANOMEMBRANES FOR MICROELECTRONI...
- Publication number 20210147220
- Publication date May 20, 2021
- WISYS TECHNOLOGY FOUNDATION, INC.
- Gokul Gopalakrishnan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS STRUCTURE AND MANUFACTURING METHOD THEREOF
- Publication number 20210087056
- Publication date Mar 25, 2021
- Taiwan Semiconductor Manufacturing company Ltd.
- KANG-CHE HUANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20160289060
- Publication date Oct 6, 2016
- Kabushiki Kaisha Toshiba
- Akira FUJIMOTO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SUBSTRATE FOR DIAPHRAGM-TYPE RESONANT MEMS DEVICES, DIAPHRAGM-TYPE...
- Publication number 20160107880
- Publication date Apr 21, 2016
- FUJIFILM CORPORATION
- Takahiro SANO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROSTRUCTURE AND ELECTRONIC DEVICE
- Publication number 20160016792
- Publication date Jan 21, 2016
- STMicroelectronics, Inc.
- Ming Fang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD TO IMPROVE SURFACE ROUGHNESS AND ELIMINATE SHARP CORNERS ON...
- Publication number 20150274517
- Publication date Oct 1, 2015
- InvenSense, Inc.
- Peter SMEYS
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW TEMPERATURE CERAMIC MICROELECTROMECHANICAL STRUCTURES
- Publication number 20150008788
- Publication date Jan 8, 2015
- The Royal Institution for the Advancement of Learning / McGill University
- Mourad El-Gamal
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
REDUCING MEMS STICTION BY INTRODUCTION OF A CARBON BARRIER
- Publication number 20140167188
- Publication date Jun 19, 2014
- Ruben B. Montez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL MEMBRANES AND RELATED STRUCTURES AND METHODS
- Publication number 20130130502
- Publication date May 23, 2013
- SAND 9, INC.
- Andrew Sparks
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MONOCRYSTALLINE EPITAXIALLY ALIGNED NANOSTRUCTURES AND RELATED METHODS
- Publication number 20130052421
- Publication date Feb 28, 2013
- Cornell University- Cornell Center for Technology
- Ulrich Wiesner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Coated Capacitive Sensor
- Publication number 20130032904
- Publication date Feb 7, 2013
- ROBERT BOSCH GmbH
- Ando Feyh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SURFACE ALLOY PROCESS FOR MEMS AND NEMS
- Publication number 20120161573
- Publication date Jun 28, 2012
- STMicroelectronics, Inc.
- Ming Fang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FORMING AN ELECTROMECHANICAL TRANSDUCER DEVICE
- Publication number 20120056308
- Publication date Mar 8, 2012
- COMMISSARIAT A L'ENERGIE ATOMIQUE
- Francois Perruchot
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL MEMBRANES AND RELATED STRUCTURES AND METHODS
- Publication number 20110284995
- Publication date Nov 24, 2011
- Sand9, Inc.
- Jan H. Kuypers
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW TEMPERATURE CERAMIC MICROELECTROMECHANICAL STRUCTURES
- Publication number 20110111545
- Publication date May 12, 2011
- The Royal Institution for the Advancement of Learning / McGill University
- Mourad El-Gamal
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for forming silicon germanium layers at low temperatures, la...
- Publication number 20100032812
- Publication date Feb 11, 2010
- Interuniversitair Microelektronica Centrum (IMEC)
- Sherif Sedky
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Membrane Structure Element and Method for Manufacturing Same
- Publication number 20090176064
- Publication date Jul 9, 2009
- Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.)
- Takayuki Hirano
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Polysilicon Deposition and Anneal Process Enabling Thick Polysilico...
- Publication number 20090042372
- Publication date Feb 12, 2009
- Analog Devices, Inc.
- Thomas Kieran Nunan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor device having three-dimensional construction and meth...
- Publication number 20070066052
- Publication date Mar 22, 2007
- DENSO CORPORATION
- Eiji Ishikawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Fabrication of advanced silicon-based MEMS devices
- Publication number 20060166403
- Publication date Jul 27, 2006
- DALSA Semiconductor Inc.
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor component and micromechanical structure
- Publication number 20050194662
- Publication date Sep 8, 2005
- Infineon Technologies AG
- Gerhard Schmidt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Fabrication of advanced silicon-based MEMS devices
- Publication number 20040157426
- Publication date Aug 12, 2004
- Luc Ouellet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Thin-film structure and method for manufacturing the same, and acce...
- Publication number 20030180981
- Publication date Sep 25, 2003
- Kiyoshi Ishibashi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for producing microchannels having circular cross-sections i...
- Publication number 20020174686
- Publication date Nov 28, 2002
- The Regents of the University of California.
- Peter Krulevitch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of manufacturing sensor having membrane structure
- Publication number 20020070195
- Publication date Jun 13, 2002
- Hiroyuki Wado
- B81 - MICRO-STRUCTURAL TECHNOLOGY

by post-annealing

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

MEMS structure and manufacturing method thereof

Method for frequency trimming a microelectromechanical resonator

Monocrystalline epitaxially aligned nanostructures and related methods

Trimming method for microresonators and microresonators made thereby

Device and method of manufacturing the same

Substrate for diaphragm-type resonant MEMS devices, diaphragm-type...

Methods of forming microstructure and electronic device having move...

Reducing MEMS stiction by introduction of a carbon barrier

Low temperature ceramic Microelectromechanical structures

Reducing MEMS stiction by introduction of a carbon barrier

Low temperature ceramic microelectromechanical structures

Method of forming an electromechanical transducer device

Membrane structure element and method for manufacturing same

Polysilicon deposition and anneal process enabling thick polysilico...

Semiconductor device having three-dimensional construction and meth...

Thin-film structure and method for manufacturing the same, and acce...

Fabrication of advanced silicon-based MEMS devices

Method of manufacturing sensor having membrane structure

Micro-heater and airflow sensor using the same

Thin film-planar structure and method for producing the same

Method of controlling stress in a film

Method for fabricating micromechanical components

Reduced deformation of micromechanical devices through thermal stab...

Method of making X-ray mask having reduced stress

Patents Applicationslast 30 patents

MEMS STRUCTURE INCLUDING A BURIED CAVITY WITH ANTISTICTION PROTUBER...

Method for Fabricating a Microfluidic Device

STICTION-AIDED FABRICATION OF FLAT NANOMEMBRANES FOR MICROELECTRONI...

MEMS STRUCTURE AND MANUFACTURING METHOD THEREOF

DEVICE AND METHOD OF MANUFACTURING THE SAME

SUBSTRATE FOR DIAPHRAGM-TYPE RESONANT MEMS DEVICES, DIAPHRAGM-TYPE...

MICROSTRUCTURE AND ELECTRONIC DEVICE

METHOD TO IMPROVE SURFACE ROUGHNESS AND ELIMINATE SHARP CORNERS ON...

LOW TEMPERATURE CERAMIC MICROELECTROMECHANICAL STRUCTURES

REDUCING MEMS STICTION BY INTRODUCTION OF A CARBON BARRIER

MICROMECHANICAL MEMBRANES AND RELATED STRUCTURES AND METHODS

MONOCRYSTALLINE EPITAXIALLY ALIGNED NANOSTRUCTURES AND RELATED METHODS

Coated Capacitive Sensor

SURFACE ALLOY PROCESS FOR MEMS AND NEMS

METHOD OF FORMING AN ELECTROMECHANICAL TRANSDUCER DEVICE

MICROMECHANICAL MEMBRANES AND RELATED STRUCTURES AND METHODS

LOW TEMPERATURE CERAMIC MICROELECTROMECHANICAL STRUCTURES

Method for forming silicon germanium layers at low temperatures, la...

Membrane Structure Element and Method for Manufacturing Same

Polysilicon Deposition and Anneal Process Enabling Thick Polysilico...

Semiconductor device having three-dimensional construction and meth...

Fabrication of advanced silicon-based MEMS devices

Semiconductor component and micromechanical structure

Fabrication of advanced silicon-based MEMS devices

Thin-film structure and method for manufacturing the same, and acce...

Method for producing microchannels having circular cross-sections i...

Method of manufacturing sensor having membrane structure